CN101472666B - Method and apparatus for removal of fluorine from gas stream - Google Patents
Method and apparatus for removal of fluorine from gas stream Download PDFInfo
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- CN101472666B CN101472666B CN2007800225785A CN200780022578A CN101472666B CN 101472666 B CN101472666 B CN 101472666B CN 2007800225785 A CN2007800225785 A CN 2007800225785A CN 200780022578 A CN200780022578 A CN 200780022578A CN 101472666 B CN101472666 B CN 101472666B
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- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B01D53/34—Chemical or biological purification of waste gases
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- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
- B01D53/70—Organic halogen compounds
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
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- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/063—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating electric heating
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J7/00—Arrangement of devices for supplying chemicals to fire
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01D2251/40—Alkaline earth metal or magnesium compounds
- B01D2251/404—Alkaline earth metal or magnesium compounds of calcium
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B01D2258/00—Sources of waste gases
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
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- F23G2204/00—Supplementary heating arrangements
- F23G2204/20—Supplementary heating arrangements using electric energy
- F23G2204/201—Plasma
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G2209/00—Specific waste
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- F23G2209/142—Halogen gases, e.g. silane
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J2215/00—Preventing emissions
- F23J2215/30—Halogen; Compounds thereof
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J2219/00—Treatment devices
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Abstract
A method for the removal of a fluorinated gas from a gas stream (1) comprising the steps of : conveying the gas stream (1) containing the fluorinated gas to a combustion region (2), decomposing the fluorinated gas in the combustion region (2), entraining a calcium salt (4) capable of reacting with the fluorinated gas decomposition products into the gas stream to react with the fluorinated gas decomposition products to form calcium fluoride and then removing (10) the calcium fluoride salt from the gas stream.
Description
The present invention relates to defluorination from air-flow, and be particularly useful for defluorination in the fluoro-gas that process tool used from semiconductor or flat panel industry discharges.
CF
4, C
2F
6, NF
3, SF
6And molecular fluorine (F
2) be often used as the etchant precursor gases in semiconductor and the flat panel industry in order to be excited the source of fluorine class for the method for dielectric layer etch and chamber clean and so on provides.
As a rule, be excited the fluorine class, form or form with undesired deposit reaction and form the volatile fluorides that easily pumps in chamber upstream such as the atomic fluorine original position.But usually, the gas utilization ratio in these steps is low, the air-flow of therefore from instrument, discharging have residual quantity fluoridize precursor gases or a series of other gaseous state is fluoridized byproduct of reaction.
Because their toxicity and/or high global warming up trend must therefrom be removed fluorinated gas and the fluorination reaction accessory substance of (reduction of discharging) any not usefulness before the chamber exhaust-gas mixture is discharged in the atmosphere.At present, usually as in the equipment of inner burner (inwardly fired burners), electric heating burner, naked light burner or plasma emission reduction device (plasma abatement devices) and so on, reduce discharging (abatement) by combustion technology.In these equipment, pass into reaction zone from the waste gas of processing chamber, wherein existing is enough to realize that fluorinated gas is to the energy and the reactive species that are respectively heat and fuel/oxidant gas form of the conversion of hydrofluoric acid (HF).
In order to reach strict emissions object, must from air-flow, remove subsequently hydrofluoric acid, this realizes with wet scrubber usually.These need a large amount of water to dissolve HF, and it is subsequently by reacting with calcium fluoride precipitate (CaF with calcium salt
2) form from water, remove.By sedimentation and " caking ", sediment separate out from water is so that water can re-use or pass into sewerage.The dry reaction bed that also can pass by the waste gas that makes spontaneous combustion to destroy equipment calcium salt is removed hydrofluoric acid, consequently can not further react this common poor efficiency owing to forming the calcirm-fluoride layer on the bed surface.
In the objective of the invention is to address these problems some as herein described.
In a first aspect of the present invention, the method of removing fluorinated gas from air-flow is provided, comprise the following steps: that the air-flow that will contain fluorinated gas is transported to the combustion zone, in the combustion zone, decompose fluorinated gas, the calcium salt that enables to react with the fluorinated gas catabolite is entrained in the air-flow and forms calcirm-fluoride to react with the fluorinated gas catabolite, then removes from air-flow and fluoridizes calcium salt.
This provides the novel fluorinated gas of removing from air-flow, such as molecular fluorine (F
2) and perfluorinated gas (Nitrogen trifluoride (NF for example
3), carbon tetrafluoride (CF
4), perfluoroethane (C
2F
6), ocratation (SiF
4) and sulfur hexafluoride (SF
6)) method.The method advantageously to reduce in order removing from the air-flow that leaves the combustion zone and to fluoridize decomposition (reduction of discharging) product and to the demand of the dried bed bioreactor of the multistage water treating method of costliness or poor efficiency.
The combustion zone is preferably, but is not limited to, such as the combustion zone to the kind equipment of inner burner, electric heating burner, naked light burner, DC plasma and microwave plasma reactor.This class device that has been widely used in the destruction (reduction of discharging) of fluorinated gas can advantageously be equipped with calcium fluoride entrainment device, allows thus the user to need not large extra Capital expenditure and just can save energy.
Calcium salt can be before the air-flow that contains fluorinated gas enters the combustion zone; In the time of in the combustion zone; Or be entrained to wherein when having left the combustion zone.Calcium salt is entrained in the air-flow, because existing heat condition has strengthened the reaction between calcium salt and the fluorinated gas catabolite in inside, combustion zone or near the outlet of combustion zone.
Calcium salt can the known many methods of operation technique personnel, are entrained in the air-flow that contains fluorinated gas such as air blown powder technology, atomisation technology, simple spray technique and vaporization technology.
Also can use carrier gas to entrain calcium salt in the air-flow, comprise air, nitrogen, hydrogen, oxygen, methane, butane.The use of reduction or oxidation carrier gas can advantageously improve the reaction between calcium salt and the fluorinated decomposition products.
Calcium salt or its catabolite must react to form calcirm-fluoride with the fluorinated decomposition products that forms in the combustion zone, preferably do not produce the unacceptable additional gaseous accessory substance of the significant quantity that requires further expensive washing technology, such as acid or NOx.The example of suitable calcium salt comprises for example CaO (lime), CaCO
3, Ca (OH)
2(white lime) and organic calcium salt such as Ca (CH
3CH
2CO
2)
2.H
2O.Calcirm-fluoride can be removed from air-flow by filter, cyclone separator and electrostatic precipitator one or a combination set of subsequently.Be conducive to atomize or the device of simple spray technique in, preferably use calcium acetate, Ca (CH
3CH
2CO
2)
2.H
2O because it easily forms the dense aqueous solution, make thus the amount maximization of calcium and supply on restriction in this device the water yield and guarantee to fluoridize calcium salt maintenance substantially dry by what form with the reaction of fluorinated gas catabolite.
Can be undertaken or from air-flow, remove calcirm-fluoride by the wash mill away from combustion apparatus by near the equipment original position the combustion apparatus, the calcirm-fluoride from several combustion apparatus is removed in this permission in the centralization zone, make thus the particle contamination risk minimization in ultra-clean semiconductor machining zone.
By example preferred feature of the present invention is described referring now to accompanying drawing, wherein:
Fig. 1 has shown the first schematic diagram of removing fluorinated gas from air-flow.
Fig. 2 has shown an embodiment of the schematic diagram shown in Fig. 1.
Fig. 3 has shown another embodiment of the schematic diagram shown in Fig. 1.
Fig. 4 has shown the second schematic diagram of removing fluorinated gas from air-flow.
Fig. 5 has shown the 3rd schematic diagram of removing fluorinated gas from air-flow.
The accompanying drawing not to scale (NTS).
Like in the different accompanying drawings represents with same reference numbers hereinafter.
Fig. 1 schematically illustrates and remove the device that fluorinated gas is used from air-flow.This device comprises the path 1 that is transported to combustion zone 2 for the air-flow that contains fluorinated gas that will be for example pumps from semiconductor or flat-panel monitor process tool by the vacuum pumping system (not shown).Combustion zone 2 can be for example to the combustion zone of inner burner, electric heating burner, naked light burner, DC plasma and microwave plasma reactor, at this fluorinated gas is transformed (reductions of discharging) one-tenth HF.Combustion zone 2 also comprises be used to making calcium salt, and for example one of calcium oxide, white lime, calcium carbonate and calcium acetate are entrained to the entrance 4 in the air-flow in combustion zone 2.Calcium salt according to its concrete composition, can by means commonly known in the art, be entrained in the air-flow in combustion zone 2 with solution, powder or steam form such as air blown powder method, atomisation method and gasification.Calcium salt can directly be entrained in the air-flow in the combustion zone, or at first is entrained in the additional carrier gas stream, subsequently it is fed in the air-flow in the combustion zone 2 via entrance 4.Calcium salt or its catabolite form calcirm-fluoride with the HF reaction in the combustion zone.
The air-flow that is rich in calcirm-fluoride that combustion zone 2 will be left in path 6 is transported to calcirm-fluoride eliminating equipment 10, removes calcirm-fluoride at this from air-flow, and consumption is left eliminating equipment 10 except the air-flow of calcirm-fluoride via path 12.Eliminating equipment 10 can be, for example, and cyclone separator, filter and electrostatic precipitator or its combination.
For heat extraction from the air-flow that leaves combustion zone 2 and guarantee that calcirm-fluoride remains in the air and therefore prevent from being gathered on the apparatus surface of eliminating equipment 10 upstreams, can via entrance 8 to the path the optional flowing gas of 6 supplies, such as air, oxygen or nitrogen.
Fig. 2 has shown the preferred embodiment of the abatement section of schematic apparatus shown in Figure 1.This device comprises one or more entrances 14 that contain the discharge air-flow of fluorinated gas for reception.The discharge air-flow that contains fluorinated gas 1 is transported to nozzle 16 along the path, therefrom will discharge air-flow and inject combustion zone 2.In the illustrated embodiment, shown two entrances 14, it is used for, and two pumping systems of two processing chambers receive two strands of discharge air-flows that contain fluorinated gas from for example being connected to.Perhaps, can be with from the discharge air-flow " shunting " of a chamber and be transported to each entrance 14.Preferred embodiment comprises four entrances 14.
Each nozzle 16 is located in the separately boring 18 that forms in the ceramic top plate 20, and this top board delimited the upper surface (as shown) of combustion zone 2.Combustion zone 2 is in the boundary of the exit surface of the burner element with holes 22 described in EP-A-0 694 735.Mineralization pressure airspace 24 between burner and cylindrical outer casing 3.With burning gases such as natural gas or hydrocarbon, introduce space 24 so that in use with the mixture of air via one or more inlet nozzle (not shown)s, the mixture of burning gases and air burns under the exit surface of burner element 22 is in situation without visible flame.
Discharge the reduction of discharging of specific fluorinated gas contained in the air-flow for the Optimizing Combustion condition with realization, preferably before the discharge air-flow enters combustion zone 2, supply additional fuel gas and/or oxygen so that the rich fuel (enrich) of this discharge air-flow.Therefore, this device comprise with similarly be used for described in EP 0 802 370 A2 in the combustion zone 2 upstreams with oxygen introduce discharge air-flow be positioned at the instrument of the spray gun 28 of nozzle 16 by essentially concentric ground.Additional fuel gas can add in the discharge air-flow in any position that makes things convenient for of upstream, combustion zone by any suitable instrument (not shown).But because flammable, oxygen and fuel gas should not be in before it injects the combustion zone discharges the obvious duration of air-flow stop, therefore enters 0.7 to the 3 times pipe diameter place of spray gun 28 openings before effluent injects the position of combustion zone of nozzle 16 to the end.The relative scale of fuel gas and/or oxidant can be with the type change of discharging the fluoride that exists in the air-flow.
Behind injection zone 2, the Exhaust Gas mixture of rich fuel lights to form the flame that extends to chamber 2 from nozzle 16, and it realizes the reduction of discharging of fluorinated gas by following general formula:
Fluorinated gas+fuel+oxygen → HF+CO/CO
2And H
2O (1)
This device also comprises the one or more calcium fluoride entrainment device 30 that are positioned at ceramic top plate 20, and preferred atomisation equipment is although other entrainment device also is suitable.Calcirm-fluoride is entrained in the air-flow in the combustion zone via entrance 4 by any the said equipment.Set the position of entrainment device 30 and corresponding entrance 4 thereof so that the calcirm-fluoride of carrying secretly can not suppress to extend to from nozzle 16 flame in zone 2 with discharging fully mixing of air-flow in combustion zone 2.After the zone was entrained in the air-flow in 2, the hydrofluoric acid that calcium salt or its catabolite produce by following general formula and reduction of discharging by fluorinated gas reacted and forms calcirm-fluoride:
HF+ calcium salt → CaF
2(2)
Air-flow and calcirm-fluoride leave emission reduction device via outlet 32 subsequently and are transported in one of the said equipment 10 to remove calcirm-fluoride from air-flow.
Fig. 3 has shown the further preferred embodiment of the abatement section of schematic apparatus shown in Figure 1.This device be included in the structure and purposes on the one or more burner noz(zle)s 34 that similarly are connected to described in the EP-A-0 819 887 on the combustion zone 2.Each burner noz(zle) 34 has the entrance 36 and the waste gas that contain the Exhaust Gas of fluorinated gas for reception and enters the outlet 38 of combustion zone 2 through this.Although Fig. 3 has shown the single burner noz(zle) 34 that is used for receiving the Exhaust Gas that contains fluorinated gas, this device can comprise any suitable quantity, for example 4,6 or the more nozzle 34 that receives effluent from list or the Alternative instrument.In preferred embodiments, this device comprises four nozzles 34.
As shown in Figure 3, each nozzle 34 is installed in the first annular pressurized chamber 40, this chamber has for the first admixture of gas that receives fuel and oxidant, the entrance 42 of the mixture of methane and air to be provided for the burning gases of 2 interior formation combustion flames in the combustion zone for example, and burning gases leave a plurality of outlets 46 that pressurized chamber 40 enters combustion chamber 2 through this.As shown in Figure 3, burner noz(zle) 34 be installed in the first pressurized chamber 40 so that nozzle 34 substantially coaxial by separately outlet 46 and the first combustion gas mixt sent into combustion chamber 2 around the burner noz(zle) 34.
Also as shown in Figure 3, the first pressurized chamber 40 is positioned at the second annular pressurized chamber 48 tops, this second annular pressurized chamber has for the second pilot gas mixture that receives fuel and oxidant, and for example another mixture of methane and air is with the entrance 50 at combustion chamber 2 interior formation pilot flames.As shown in Figure 3, the second pressurized chamber 48 comprises the second aperture 52 that centers on from the first aperture 46 of the first pressurized chamber 40.The second aperture 52 allows pilot gas mixture to enter combustion chamber 2 and enters the pilot flame of burning gases of combustion zone 2 with at combustion chamber 2 interior formation combustion flames to be formed for lighting via aperture 46.
Leave first combustible gas mixture in aperture 46 and lighted by the pilot flame that is formed by the second pilot gas mixture of leaving aperture 52, thereby form the combustion flame that extends in the combustion zone 2 that centers on one heart the discharge air flow path that leaves nozzle 34.The discharge air-flow of carrying by nozzle 34 enters combustion zone 2 to the combustion flame center via outlet 38, thereby reduces fluorinated gas according to above-listed general formula (1).
Fig. 4 schematically illustrates for the second device of removing fluorinated gas from air-flow.This device is similar to device shown in Figure 1 substantially, but the entrance 4 that is used for making calcium salt be entrained to air-flow is arranged in path 1 so that calcium salt was entrained to the air-flow that contains fluorinated gas before being transported to combustion chamber 2.
In the use of the device that in Fig. 4, schematically shows, contain discharge air-flow 1 conveying along the path of fluorinated gas, wherein use any aforementioned device to entrain calcium salt in the air-flow via entrance 4.The air-flow that will contain fluorinated gas and calcirm-fluoride is transported to combustion zone 2, reduces fluorinated gas to form HF, itself and calcium salt or its catabolite reaction formation calcirm-fluoride at this.The air-flow that then will contain calcirm-fluoride 2 is transported to one of above-mentioned calcirm-fluoride eliminating equipment 10 along path 6 from the combustion zone, removes calcirm-fluoride at this from air-flow, and this air-flow leaves the calcirm-fluoride eliminating equipment via path 12 subsequently.
Can choose wantonly carrier gas, for example air, oxygen and nitrogen add to along remaining in the air until it arrives calcirm-fluoride eliminating equipment 10 to help calcirm-fluoride in the air-flow of path 6 conveyings via entrance 8.
Fig. 5 schematically illustrates for the 3rd device of removing fluorinated gas from air-flow.This device is similar to the device shown in Fig. 1 and 4 substantially, but is arranged in path 6 so that calcium salt is entrained to the air-flow that leaves combustion chamber 2 for the entrance 4 that entrains calcium salt into air-flow.
In the use of the device that schematically shows in Fig. 3, the air-flow that contains fluorinated gas 1 is transported to combustion zone 2 along the path, reduces fluorinated gas at this.From combustion zone 2, export the air-flow that contains the fluorinated gas catabolite via path 6, at this calcium salt is entrained in the air-flow via entrance 4, so that calcium salt or its catabolite and the reaction of fluorinated gas catabolite form calcirm-fluoride.The air-flow that then will contain calcirm-fluoride further 6 is transported to calcirm-fluoride eliminating equipment 10 along the path, removes calcirm-fluoride at this from air-flow, and this air-flow leaves the calcirm-fluoride eliminating equipment via path 12 subsequently.
Can choose wantonly carrier gas, for example air, oxygen and nitrogen add to along remaining in the air until it arrives calcirm-fluoride eliminating equipment 10 to help calcirm-fluoride in the air-flow of path 6 conveyings via the entrance 8 in entrance 4 downstreams.Carrier gas also can be added with calcirm-fluoride via entrance 4.
Claims (14)
1. from air-flow, remove the method for fluorinated gas, comprise the following steps: that the air-flow that will contain fluorinated gas is transported to the combustion zone, in the combustion zone, decompose fluorinated gas, wherein the method is further comprising the steps of: enable to be entrained in the air-flow to form the calcirm-fluoride of doing with the reaction of fluorinated gas catabolite with the calcium salt of fluorinated gas catabolite reaction, then remove the dried calcium salt of fluoridizing from air-flow, wherein calcium salt is CaO, CaCO
3, Ca (OH)
2, lime, white lime and Ca (CH
3CH
2CO
2)
2.H
2One of O or its mixture.
2. according to claim 1 method, wherein fluorinated gas is molecular fluorine (F
2) and one of perfluorinated gas or its mixture.
3. according to claim 2 method, wherein perfluorinated gas is Nitrogen trifluoride (NF
3), carbon tetrafluoride (CF
4), perfluoroethane (C
2F
6), ocratation (SiF
4), sulfur hexafluoride (SF
6) one of or its mixture.
4. according to each method of aforementioned claim, wherein entrain calcium salt in the air-flow in the downstream, combustion zone.
5. according to claim 1 method wherein entrains calcium salt in the air-flow in inside, combustion zone.
6. according to claim 1 method wherein entrains calcium salt in the air-flow in the upstream, combustion zone.
7. according to claim 1 method wherein blows powder technology by air and entrains calcium salt in the air-flow.
8. according to claim 1 method wherein entrains calcium salt in the air-flow by simple spray technique.
9. according to claim 1 method wherein entrains calcium salt in the air-flow by the atomisation technology.
10. according to claim 1 method, wherein the combustion zone is the combustion zone to inner burner.
11. method according to claim 1, wherein the combustion zone is the combustion zone of electric heating burner.
12. method according to claim 1, wherein the combustion zone is the combustion zone of naked light burner.
13. method according to claim 1, wherein the combustion zone is the combustion zone of plasma reactor.
14. method is according to claim 1 wherein removed from air-flow by one of filter, cyclone separator and electrostatic precipitator and is fluoridized calcium salt.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB0611968.9 | 2006-06-16 | ||
| GBGB0611968.9A GB0611968D0 (en) | 2006-06-16 | 2006-06-16 | Method and apparatus for the removal of fluorine from a gas system |
| PCT/GB2007/050285 WO2007144665A1 (en) | 2006-06-16 | 2007-05-23 | Method and apparatus for the removal of fluorine from a gas stream |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101472666A CN101472666A (en) | 2009-07-01 |
| CN101472666B true CN101472666B (en) | 2013-10-23 |
Family
ID=36775780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007800225785A Expired - Fee Related CN101472666B (en) | 2006-06-16 | 2007-05-23 | Method and apparatus for removal of fluorine from gas stream |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US20100290966A1 (en) |
| EP (1) | EP2029259B1 (en) |
| JP (1) | JP5347183B2 (en) |
| KR (2) | KR20140040862A (en) |
| CN (1) | CN101472666B (en) |
| GB (1) | GB0611968D0 (en) |
| MX (1) | MX2008015641A (en) |
| SG (1) | SG174807A1 (en) |
| TW (1) | TWI434729B (en) |
| WO (1) | WO2007144665A1 (en) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0706544D0 (en) * | 2007-04-04 | 2007-05-09 | Boc Group Plc | Combustive destruction of noxious substances |
| GB0806730D0 (en) * | 2008-04-14 | 2008-05-14 | Edwards Ltd | Detection of halogens |
| FR2935703B1 (en) | 2008-09-11 | 2010-09-03 | Arkema France | PROCESS FOR THE PREPARATION OF FLUORINATED COMPOUNDS |
| FR2940968B1 (en) * | 2009-01-13 | 2012-12-14 | Arkema France | PROCESS FOR THE PREPARATION OF OLEFINIC FLUORIN COMPOUNDS |
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- 2007-05-23 WO PCT/GB2007/050285 patent/WO2007144665A1/en active Application Filing
- 2007-05-23 SG SG2011065869A patent/SG174807A1/en unknown
- 2007-05-23 KR KR1020147004454A patent/KR20140040862A/en active IP Right Grant
- 2007-05-23 CN CN2007800225785A patent/CN101472666B/en not_active Expired - Fee Related
- 2007-05-23 KR KR1020087030345A patent/KR20090030262A/en active IP Right Grant
- 2007-05-23 EP EP07733706.1A patent/EP2029259B1/en not_active Not-in-force
- 2007-05-23 JP JP2009514914A patent/JP5347183B2/en not_active Expired - Fee Related
- 2007-05-23 MX MX2008015641A patent/MX2008015641A/en not_active Application Discontinuation
- 2007-05-30 TW TW096119219A patent/TWI434729B/en not_active IP Right Cessation
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| US20030194367A1 (en) * | 2002-04-10 | 2003-10-16 | Dunwoody Steven A. | Halocarbon abatement system for a glass manufacturing facility |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2029259B1 (en) | 2014-05-14 |
| US20100290966A1 (en) | 2010-11-18 |
| EP2029259A1 (en) | 2009-03-04 |
| KR20140040862A (en) | 2014-04-03 |
| SG174807A1 (en) | 2011-10-28 |
| KR20090030262A (en) | 2009-03-24 |
| CN101472666A (en) | 2009-07-01 |
| WO2007144665A1 (en) | 2007-12-21 |
| JP5347183B2 (en) | 2013-11-20 |
| TWI434729B (en) | 2014-04-21 |
| GB0611968D0 (en) | 2006-07-26 |
| TW200806383A (en) | 2008-02-01 |
| JP2009540126A (en) | 2009-11-19 |
| MX2008015641A (en) | 2009-01-09 |
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