CN101140245A - Substrate holding device for appearance checking - Google Patents
Substrate holding device for appearance checking Download PDFInfo
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- CN101140245A CN101140245A CNA2007101492022A CN200710149202A CN101140245A CN 101140245 A CN101140245 A CN 101140245A CN A2007101492022 A CNA2007101492022 A CN A2007101492022A CN 200710149202 A CN200710149202 A CN 200710149202A CN 101140245 A CN101140245 A CN 101140245A
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- base plate
- objective table
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/36—Embedding or analogous mounting of samples
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
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- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
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- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
The present invention relates to a substrate holding device of an appearance inspection device which places the substrate (2) on the frame-shaped objective table (3) to do the checking of the substrate. In the substrate holding device a supporting pin (25) for supporting the substrate and a supporting rod (24) for fixing the supporting pin (25) are arranged independent from the lattice strip (17) and fixed pin (17a) which are arranged at the objective table (3), the supporting rod (24) is connected with a conveyor belt of one pair of conveyer and is caused to advance and retreat relative to the substrate. In macrographic examination the supporting rod and the supporting pin is kept hiding in the retreating position of the frame-shaped part (3b) of the objective table, and in microscopic examination the supporting rod and the supporting pin support the defect (K) of the substrate from the back side or at the vicinity. According to the invention the vibrating of the substrate in the microscopic examination can be restrained while the macrographic examination is not prohibited.
Description
Technical field
For example the present invention relates to the glass substrate of LCD (LCD) usefulness or semiconductor substrate etc. various substrates, be preferably the base plate keeping device of the appearance inspection device that large substrate checks.
The application advocates right of priority 2006-244154 number for the Japanese patent application of application on September 8th, 2006, and quotes its content at this.
Background technology
In the past, in the field of for example LCD (LCD) and these flat-panel monitors of plasma scope (PDP), in the manufacturing process of flat-panel monitor, make glass substrate, carried out defect inspection.As defect detecting method, have: the macro check of defective such as foreign matter such as dirt on the visual examination substrate or scar; With the micro of taking the picture after amplifying by microscope and utilizing monitor etc. to observe.
Carrying out these when checking, selectively using falling to penetrating illumination and, observe to the substrate surface irradiating illumination light that should observe to zero defect and defective are arranged from the transillumination of the back side illuminaton illumination light of substrate.
In addition, maximization such as glass substrate in the last few years and occurred surpassing the substrate of the sort of big molded dimension of 2m on one side is so because this large substrate is slim less rigid.When checking this substrate,, on each lattice bar, plant pin parts from the back support substrate for the substrate horizontal support is set up bar-shaped lattice bar at the peristome of the substrate holder of four frame shapes of mounting substrate with predetermined space.
At this moment, if the quantity of lattice bar more at most the lattice bar can when the viewed in transmittance substrate, become obstacle, therefore required minimal radical only is installed.And, remove the device that shakes though in appearance inspection device, be equipped with, even adopt this structure, the influence that also can't suppress the motor that possesses owing to appearance inspection device and other surrounding devices etc. makes large substrate microvibration or deflection.
Under the situation of macroscopic observation substrate, because visualization, so even substrate produces microvibration, the harmful effect that brings to observation also seldom.But under the situation of carrying out microscopic observation, owing on monitor screen, amplify to observe substrate, so, thereby exist and bring the shortcoming of obstruction to observation even small vibration also can be discerned.
In order to improve this problem, the base plate keeping device described in TOHKEMY 2000-7146 communique and the TOHKEMY 2004-281907 communique has for example been proposed.In the base plate keeping device of the described appearance inspection device of TOHKEMY 2000-7146 communique, the high tabular transparent plate of rigidity that the peristome bottom of the substrate holder that will use the mounting substrate is sealed is fixed, at upright a plurality of pins, the supporting substrate thus established of the upper surface of transparent plate.
And, in the described base plate keeping device of TOHKEMY 2004-281907 communique, on a plurality of lattice bars of the peristome that is set up in parallel and is set up in substrate holder, at the bar-shaped vibration absorption component of linearly configuration, supporting substrate thus between the adjacent lattice bar and between the frame shape portion of lattice bar and substrate holder.
But, in the described base plate keeping device of TOHKEMY 2000-7146 communique, when in macro check, substrate surface being fallen to penetrating illumination or carries out transillumination when observing from substrate back, not only on substrate, and on transparent plate, also can make illumination light reflection or diffuse reflection, bring the unfavorable condition of obstruction for the inspection of substrate so exist.And, in the described base plate keeping device of TOHKEMY 2004-281907 communique, in order to suppress vibration, except being set, the lattice bar that pin is supported also is provided with vibration absorption component, so can produce the shortcoming that the scope of the transmitted light in the blocking macro check increases.
And owing to require in the macro check the anti-turnback of substrate to be checked substrate back on specification, so have when the inspection of the back side of substrate, lattice bar and vibration absorption component hinder the shortcoming of visual examination.
Summary of the invention
The present invention In view of the foregoing, its purpose is to provide a kind of base plate keeping device that suppresses the vibration of substrate in the micro and can not hinder the transillumination inspection and the back side to check.
For the base plate keeping device of appearance inspection device of the present invention, described appearance inspection device on the objective table of frame shape, carries out the inspection of substrate with substrate-placing, and this base plate keeping device has: the objective table on the frame of the back side circumference of maintenance substrate; The support component at the back side of supporting substrate in the peristome of objective table; And the advance and retreat unit, it makes support component selectively obtain the Support Position of supporting substrate and the retreating position of keeping out of the way from substrate.
According to the present invention, because support component is kept out of the way out from substrate when the macro check substrate, thereby can not hinder observation, and owing to when carrying out micro, come supporting substrate with support component, so can suppressed that substrate vibrates because of the influence of on every side equipment etc. or the state of deflection under amplify observation.
And, can also form, the advance and retreat unit has: the holding member that keeps support component; And the action component that holding member is moved with respect to substrate, by action component holding member is advanced and retreat with respect to substrate.
When macroscopic observation, by support component and holding member are left in the frame shape portion that substrate overlaps objective table, integrally observe thereby can not cover substrate, when microscopic observation, holding member is transported on the substrate, thereby can use the supporting units support substrate by action component.
And preferably this base plate keeping device also has: amplify inspection portion, it moves with respect to substrate in order to amplify the regional area of observing substrate when micro; And control module, its make the support component that is provided in the opposition side that amplifies inspection portion across substrate with amplify inspection portion mobilely move to the position corresponding in linkage with amplifying inspection portion.
When micro, be transported to regional area on the substrate if will amplify inspection portion, then can read its coordinate by control module, make in linkage support component move to substrate on the position faced of regional area on, from the rear side supporting substrate.
And support component also can be to be used to make the haunt actuator of action of the pin parts of supporting substrate.Can make under the state in the pin parts submerge actuator support component not with interference such as objective table move, can supporting substrate under the pin parts state outstanding from actuator.
In addition, in the base plate keeping device of appearance inspection device of the present invention, the advance and retreat unit also can be arranged on the lattice bar that is set up in peristome, make support component with respect to the lattice bar in the Support Position with keep out of the way the rotating mechanism that rotates between the retreating position at the back side of lattice bar.
At this moment,, become simpler structure, can suppress vibration and the deflection of support component the supporting zone and the peripheral region thereof of substrate though limited the supporting zone of support component to substrate.
And, support component be arranged on the substrate defective locations or near the position of defective from the back support substrate.
By by support component at defective locations place supporting substrate, thereby can under the state that has suppressed vibration and deflection reliably, carry out micro, by at position supporting substrate near defective, thereby both can suppress near the vibration of the substrate the defective etc., therefore transmitted light that can objection can carry out inspection clearer and more definite and that precision is high again.
And, the advance and retreat unit further be arranged in the holding member that can in peristome, move, make support component with respect to holding member in the Support Position with the mechanism that haunts that haunts between the retreating position below keeping out of the way.
Base plate keeping device according to appearance inspection device of the present invention, because support component is kept out of the way out from substrate when macro check, so can not hinder the inspection substrate, and owing to when micro, use the supporting units support substrate, so can suppress the vibration of substrate and deflection etc. to carry out detailed inspection.
Description of drawings
Fig. 1 is the major part key diagram of the appearance inspection device of first embodiment of the present invention.
Fig. 2 is the vertical view of the objective table of appearance inspection device.
Fig. 3 is the rear view of the objective table of appearance inspection device.
Fig. 4 is the longitudinal diagram along the A-A line of objective table shown in Figure 2.
Fig. 5 is the figure same with Fig. 4 that makes under the outstanding state of supporting pin.
Fig. 6 is the partial enlarged drawing of supporting pin shown in Figure 5.
Fig. 7 is the major part vertical view of objective table of the appearance inspection device of second embodiment.
Fig. 8 is the sectional view along the B-B line among Fig. 7.
Fig. 9 A, Fig. 9 B are the figure of variation of the supporting pin of expression second embodiment.
Embodiment
Below, the embodiment that present invention will be described in detail with reference to the accompanying.
Use Fig. 1 to Fig. 6 that the appearance inspection device of first embodiment of the invention is described.
Fig. 1 is the major part key diagram of the appearance inspection device of first embodiment of the present invention, Fig. 2 is the vertical view of objective table, Fig. 3 is a rear view, Fig. 4 is the longitudinal diagram along the A-A line of objective table shown in Figure 2, Fig. 5 is the figure same with Fig. 4 that makes under the outstanding state of supporting pin, and Fig. 6 is the partial enlarged drawing of Fig. 5.
Appearance inspection device 1 shown in Figure 1 is following device: have the apparatus main body 1a that is arranged on the floor, the thin bases 2 such as mother glass substrate that will use when Production Example such as LCD (LCD) or plasma scope (PDP) are positioned on the objective table (stage) 3 and to it and carry out visual examination.It is tabular that substrate 2 for example forms the above large-scale quadrilateral of 2m * 2m.As shown in Figure 2, objective table 3 forms the quadrilateral frame shape with area peristome 16 slightly littler than the area of substrate 2, is provided at predetermined intervals the vacuum suction hole 3a of the back side circumference that is useful on absorption maintenance substrate 2 at the circumference of its peristome 16.
In Fig. 1, objective table 3 is installed on the rotating drive mechanism 4, is supported for and can rotates, so that the turning axle that can obtain with motor 5 is state and the horizontality that lift at the center.Objective table 3 is supported to and can be rotated by the reversing shaft 6 that is arranged on the rotating drive mechanism 4, thereby can observe the surface and the back side of substrate 2.On the position of facing with the objective table 3 that is retained as the state of lifting, be equipped with and amplify inspection unit 8.Amplifying inspection unit 8 is made of following part: on microscope digital camera is installed and the amplification inspection portion 9 that constitutes; And the two-dimentional travel mechanism 10 that constitutes by linear motor etc., described linear motor amplifies the mutually orthogonal track segment that inspection portion 9 moves and constitutes by making on X-direction and Y direction.
And, first lighting unit 12 is installed on the top of apparatus main body 1a, this first lighting unit 12 can fall to penetrating illumination to the substrate 2 of mounting on the objective table 3 that is retained as the state of lifting.Rear side at apparatus main body 1a is equipped with second lighting unit 13, and this second lighting unit 13 is used for the substrate 2 of mounting on the objective table 3 that is retained as the state of lifting carried out transillumination.
In Fig. 2, on objective table 3, be provided with many group codes that each bight to the substrate 2 of institute's mounting positions and calibrate and put parts 15.And, on the peristome 16 in the frame that is arranged at objective table 3, bar-shaped lattice bar 17 (with reference to Fig. 4) is installed between the inwall of facing of peristome 16.Lattice bar 17 is to be used to suppress to be positioned in substrate 2 on the objective table 3 because of the parts of himself weight deflection, it installs required minimal quantity (among the figure being 2) with predetermined space, so that can not become obstacle in the viewed in transmittance of substrate 2 and when making substrate 2 counter-rotatings observe the back sides as far as possible.
And, on each lattice bar 17, plant with substrate 2 be supported for level a plurality of (among the figure being 4) fixed pin 17a ..., can suppress the deflection of substrate 2 thus.
The following describes substrate holding mechanism 11.
The back side at objective table shown in Figure 33, the frame shape 3b of portion on four limits that form objective table 3 ... in for example with the lattice bar 17 of objective table 3 roughly on a pair of frame shape 3b of portion, the 3b of quadrature, as making holding member (hereinafter referred to as support bar) 24 move to the mobile unit in the precalculated position of peristome, be equipped with band conveyor 20,20 with clipping peristome 16 almost parallels.Arranged outside at band conveyor 20,20 has tabular guard block 18,18.Each band conveyor 20 is being arranged at the travelling belt 22 that is wound with ring-type between the pair of sprocket 21a at its two ends, the 21b.Sprocket wheel 21a, the 21a of two band conveyors 20,20 of facing are coupled together by axle 23, are connected with motor M1 as drive source at an end of axle 23.
And, on two travelling belts 22,22, be connected with support bar 24, make travelling belt 22,22 carry out turning motion by motor M1, thus, support bar 24 carries out straight line along guide rail 3c, 3c and moves.On support bar 24 along with objective table 3 roughly the direction of quadrature 1 or a plurality of (among the figure being 3) support component (hereinafter referred to as supporting pin) 25 are installed.The a pair of travelling belt 22,22 of turning motion enters in the peristome 16 support bar 24 by means of passing through positive and negative driving motor M1, retreats into the frame shape 3b of portion.
And supporting pin 25 for example has cylinder etc. as actuator, as shown in Figure 5 and Figure 6, can haunt with respect to outer shell 25a as the piston rod 25b of pin parts.Piston rod 25b is positioned in the substrate 2 on the objective table 3 from back support under the state of having given prominence to preset distance from outer shell 25a, can suppress the vibration and the deflection of substrate 2.
Under the state in piston rod 25b is contained in outer shell 25a, supporting pin 25 can not produce with lattice bar 17 and objective table 3 with support bar 24 with interfering and moves.
And support bar 24 and supporting pin 25 can move and haunt by control module 26.Control module 26 is electrically connected with motor M1 and two-dimentional travel mechanism 10, this control module 26 can make amplification inspection portion 9 move to defective locations, and support bar 24 and moving of this amplification inspection portion 9 are moved in linkage from the position that the inspection line that amplifies inspection portion 9 departs from a little.
When carrying out macro check by 1 pair of substrate of appearance inspection device 2, support bar 24 is kept out of the way the back side of the frame shape 3b of portion of objective table 3.When carrying out micro, support bar 24 enters in the peristome 16, by near supporting pin 25 supporting substrate 2 position of the defective K that should check on the substrate 2.
And in the substrate holding mechanism 11 of present embodiment, band conveyor 20,20 and support bar 24 and motor M1 etc. constitute the advance and retreat unit.
The substrate holding mechanism 11 of the appearance inspection device 1 of present embodiment possesses said structure, the following describes its effect.
At first, in appearance inspection device 1, the substrate 2 that should check is positioned on the objective table 3 under the horizontality, with piling up the location that parts 15 carry out substrate 2, adsorbs this substrate 2 of maintenance with vacuum suction hole 3a.Formerly carry out as shown in Figure 3, support bar 24 being kept out of the way from peristome 16, and being moved it the back side of the frame shape 3b of portion of objective table 3 under the situation of macro check of substrate 2.Make objective table 3 rotate to be the predetermined angular that is suitable for visualization by rotating drive mechanism 4, it is remained the state of lifting, by falling to penetrating the surface that illumination comes visualization substrate 2 from first lighting unit 12.Under the situation of viewed in transmittance substrate 2, objective table 3 is remained the state of lifting, utilize second lighting unit 13 to carry out visualization from the rear side irradiating illumination light of substrate 2.Under the situation of carrying out this viewed in transmittance, also can by rotating drive mechanism 4 make objective table 3 rotate into the angle of approximate vertical, for example 85 the degree～90 the degree, hold it in the state of lifting, utilize second lighting unit 13 to carry out visualization from the rear side irradiating illumination light of substrate 2.When carrying out macroscopic observation, the amplification inspection portion 9 of amplifying inspection unit 8 and two-dimentional travel mechanism 10 are kept out of the way from substrate 2 get final product by the operator is visual.
And, under the situation at the back side of observing substrate 2, make the reversing shaft 6 anti-turnbacks of objective table 3 around rotating drive mechanism 4, get final product lifting to observe under the state equally with above-mentioned situation.
Then, when the defective K that is checked out by macro check is carried out microscopic observation, make by two-dimentional travel mechanism 10 and to amplify inspection portion 9 and on X-direction and Y direction, move, it is transported to the position that the defective K with substrate 2 faces with respect to the objective table 3 that is held in the state of lifting.Meanwhile, read the coordinate position that amplifies inspection portion 9 with control module 26, the motor M1 of driving substrate maintaining body 11 in linkage that moves with amplifying inspection portion 9 moves in the peristome 16 support bar 24.
For example suppose that defective K such as cut or foreign matter are positioned on the position shown in Figure 2, be arranged on defective K when top when amplifying inspection portion 9, by control module 26 make support bar 24 move to the overlapping inspection line of the coordinate position that amplifies inspection portion 9 on or from checking that the position that line departs from a little stops it.Ought make then piston rod 25b be installed on each supporting pin 25 on the support bar 24 ... in when outstanding, piston rod 25b around defective K from back support substrate 2.
Herein, because supporting pin 25 is fixed on the precalculated position of support bar 24, so piston rod 25b may not one be positioned defective K near, if contact point that can supporting pin 25 is microvibration and deflection that benchmark suppresses substrate 2 around in the scope of radius amm, then is arranged on supporting pin 25 on the support bar 24 and is provided with the interval of distance 2amm and gets final product.The size of radius a is to be determined by the size of substrate 2 and plate thickness etc.
Thus, can suppress under the state of vibration and deflection defective K reliably, take enlarged image, can on monitor screen, observe defective K by amplifying inspection portion 9.Particularly under the situation of carrying out viewed in transmittance, aspect the irradiation transmitted light, preferably at the position of departing from supporting pin 25 supporting substrates 2 from defective K.And, under the situation that falls to penetrating observation, also can make supporting pin 25 be positioned at defective K under, but owing to utilize supporting pin 25 supporting substrates 2 can prevent reflected light in the position of departing from, so preferred from supporting pin 25 from defective K.
And, when the position of the defective K that carries out microscopic observation be positioned at lattice bar 17 position overlapped or near the situation it under, also can be with to amplify moving of inspection portion 9 irrelevant, support bar 24 is not moved on its coordinate position and remains on and keep out of the way state.And, also can replace being installed in a plurality of lattice bars 17 on the peristome 16 of objective table 3 by support bar 24, each support bar 24 is arranged on guide rail 3c, the 3c movably, can utilize linear motor that each support bar 24 is moved control individually.
As mentioned above, according to the appearance inspection device 1 of present embodiment, in macro check because support bar 24 and supporting pin 25 are in the state at the back side of the frame shape 3b of portion that keeps out of the way objective table 3, so can not hinder fall to penetrating with transillumination under observation.And in micro, near the defective K that supports the substrate 2 that observe,, can carry out high-precision observation/inspection so can suppress the microvibration and the deflection of substrate 2.
Variation as the substrate holding mechanism 11 of the appearance inspection device 1 of first embodiment, also 1 support component (supporting pin 25) can be set on holding member (support bar 24), supporting pin 25 be adapted to and can slide along support bar 24 by drive sources such as linear motors.
If adopt this structure, then supporting pin 25 can be at the length direction of band conveyor 20,20 with the length direction of the support bar 24 of its quadrature, be to move on the X-Y direction.And, by control module 26 can make supporting pin 25 move to the coordinate position corresponding with defective K near.Thus, can utilize supporting pin 25 visual field of taking with amplification inspection portion 9 that comprises the defective K on the substrate 2 to be supported on every side from the rear side of substrate 2.
In addition, if with setting coordinate on the position that the stop position that makes supporting pin 25 departs from slightly from the coordinate of the defective K of substrate 2, then owing to can not interdict transmitted light when under transillumination, carrying out micro, amplify and observe so can carry out better transmission.And, by a plurality of support bars 24 are arranged on the peristome 16 of objective table 3 movably, thereby particularly when the back side of visualization substrate 2, can carry out visualization to the whole back side of substrate 2 by support bar is just departed from.
Other embodiments of the present invention are described then, to using same label and omit its explanation with same or same material, the parts of above-mentioned embodiment.
Fig. 7 and Fig. 8 represent the substrate holding mechanism of the appearance inspection device of second embodiment of the present invention, and Fig. 7 is the vertical view of objective table, and Fig. 8 is the longitudinal diagram along the B-B line of Fig. 7.
In the present embodiment, as substrate holding mechanism 11, support bar 24 and supporting pin 25 in first embodiment are not set.In the substrate holding mechanism 11 of the appearance inspection device 1 of present embodiment, base portion 27 and guide member 28 are the back side that L word shape roughly is arranged on lattice bar 17, are the opposition side of substrate 2.Particularly continuous tabular by guide member 28 being formed on the length direction of lattice bar 17, thus guarantee rigidity, prevent that lattice bar 17 is subjected to conducting oneself with dignity and the load of substrate 2 and deflection.
And base portion 27 is provided with can be with respect to the holding member 30 of substrate 2 advance and retreat.30 lattice bars 17 of holding member are provided with 1 or a plurality of (among the figure being 8), and substrate maintaining part 30 has the fulcrum 31 that is installed on the base portion 27 and can for example rotate the roughly support components (hereinafter referred to as supporting pin) 32 of 90 degree around fulcrum 31.Supporting pin 32 constitutes by the arm 33 that rotatably is connected with fulcrum 31 with pin parts 34 that the front end of arm 33 roughly is provided with orthogonally.
Therefore, supporting pin 32 can selectively obtain as upper/lower positions: shown in solid line among Fig. 8 like that from the sagging retreating position in the below to being roughly parallel to guide member 28 that substrate 2 is kept out of the way; And shown in double dot dash line be roughly parallel to substrate 2 and with the back side butt of substrate 2 and the Support Position that supports.Supporting pin 32 obtains retreating position in macro check, obtain the Support Position in micro.And a plurality of supporting pins 32 that are arranged on each lattice bar 17 constitute, and by not shown advance and retreat unit such as motor each fulcrum 31 are rotated integratedly in each side of lattice bar 17 and advance and retreat.In addition, also can utilize the advance and retreat unit that each holding member 30 is rotated separately.
And, though holding member 30 is provided in both sides (with reference to Fig. 7) with respect to lattice bar 17, also can only be configured in a side.And then, as shown in Figure 7, on a pair of frame shape 3b of portion, the 3b on the limit that the formation of objective table 3 is faced, also be equipped with holding member 30 with appropriate intervals.
In the present embodiment, because by each supporting pin 32 be arranged on the fixed pin 17a on each lattice bar 17 and can distinguish microvibration and the deflection that suppresses substrate 2 in the scope of radius amm around, if set each supporting pin 32 and fixed pin 17a so show greatly apart from the interval of 2amm, just can be corresponding with the microscopic observation of defective K on the optional position that is positioned at substrate 2.
The substrate holding mechanism 11 of the appearance inspection device 1 of present embodiment has said structure, shown in the solid line of Fig. 8, in macro check, make each supporting pin 32 that is arranged on the holding member 30 on each lattice bar 17 and the frame shape 3b of portion keep out of the way the visualization of carrying out the substrate 2 on the objective table 3 under the state at the back side of lattice bar 17 and the frame shape 3b of portion.Therefore, each holding member 30 can not hinder fall to penetrating or the transillumination state under observation.
In addition, in micro, as shown in Figure 7, make each holding member 30 rotation that is installed near the lattice bar 17 that is positioned at the defective K that should observe on the substrate 2 via fulcrum 21, and supporting pin 32 remained on the Support Position, thus near the defective K of supporting substrate 2.Thus, owing near the defective K of the substrate 2 that carries out microscopic observation, can not produce microvibration and deflection, so can observe accurately/check.
And in the above-described first embodiment, the band conveyor 20,20 that also can replace making support bar 24 advance and retreat to move makes support bar 24 advance and retreat mobile with other the linear-motion actuator of actuator, for example linear motor etc. or ball-screw etc.
In addition, in second embodiment, on supporting pin 32,1 pin parts 34 has been installed and can supporting substrate, but also can have been increased the length of arm 33 and set a plurality of pin parts 34 (with reference to Fig. 9 A) with appropriate intervals at arm 33.And, though that piston rod 25b and pin parts 34 form is bar-shaped, also can form the roughly T word shape (with reference to Fig. 9 B) that leading section is provided with tabular or bar-shaped head, can enlarge the vibration suppression scope for substrate 2 this moment.
And rigidity is higher because the circumference of substrate 2 is supported on the objective table 3, so can on the frame shape 3b of portion holding member 30 be set.
And in the present invention, the quantity of the supporting pin 25,32 of supporting substrate 2 can certainly wait according to the intensity of the substrate of being determined by the physical dimension and the plate thickness of substrate 22 and be set at suitable quantity.
More than, the preferred embodiments of the present invention have been described, but have the invention is not restricted to these embodiment.In the scope that does not break away from purport of the present invention, can carry out adding, omit, replacing and other changes of structure.The present invention is not subjected to the qualification of above-mentioned explanation, and only the scope by appended claim limits.
Claims (7)
1. the base plate keeping device of an appearance inspection device, this appearance inspection device on the objective table of frame shape, carries out the inspection of substrate with substrate-placing, it is characterized in that,
This base plate keeping device has: the objective table on the frame of the back side circumference of maintenance substrate; The support component at the back side of supporting substrate in the peristome of objective table; And the advance and retreat unit, it makes support component selectively obtain the Support Position of supporting substrate and the retreating position of keeping out of the way from substrate.
2. the base plate keeping device of appearance inspection device according to claim 1 is characterized in that,
The advance and retreat unit has: the holding member that keeps support component; And the action component that holding member is moved with respect to substrate, by action component holding member is advanced and retreat with respect to substrate.
3. the base plate keeping device of appearance inspection device according to claim 1 and 2 is characterized in that,
This base plate keeping device also has: amplify inspection portion, it moves with respect to substrate in order to amplify the regional area of observing substrate when micro; And control module, its make the support component that is provided in the opposition side that amplifies inspection portion across substrate with amplify inspection portion mobilely move to the position corresponding in linkage with amplifying inspection portion.
4. the base plate keeping device of appearance inspection device according to claim 1 is characterized in that,
Support component is to be used to make the haunt actuator of action of the pin parts of supporting substrate.
5. the base plate keeping device of appearance inspection device according to claim 1 is characterized in that,
The advance and retreat unit is arranged on the lattice bar that is set up in peristome, make support component with respect to the lattice bar in the Support Position with keep out of the way the rotating mechanism that rotates between the retreating position of rear side of lattice bar.
6. the base plate keeping device of appearance inspection device according to claim 1 is characterized in that,
The advance and retreat unit be arranged on the holding member that can in peristome, move, make support component with respect to holding member in the Support Position with the mechanism that haunts that haunts between the retreating position below keeping out of the way.
7. the base plate keeping device of appearance inspection device according to claim 1 is characterized in that,
Support component be arranged on the substrate defective locations or near the position of defective from the back support substrate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006244154 | 2006-09-08 | ||
| JP2006244154A JP2008064666A (en) | 2006-09-08 | 2006-09-08 | Substrate holding mechanism of visual inspection system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101140245A true CN101140245A (en) | 2008-03-12 |
Family
ID=39192283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101492022A Pending CN101140245A (en) | 2006-09-08 | 2007-09-06 | Substrate holding device for appearance checking |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2008064666A (en) |
| KR (1) | KR20080023142A (en) |
| CN (1) | CN101140245A (en) |
| TW (1) | TW200822147A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102016697A (en) * | 2008-04-30 | 2011-04-13 | 泰拉半导体株式会社 | Holder stage |
| CN102364332A (en) * | 2011-06-10 | 2012-02-29 | 乐金化学(南京)信息电子材料有限公司 | Polarizing plate movement detection apparatus and method thereof |
| CN106918934A (en) * | 2017-03-27 | 2017-07-04 | 武汉华星光电技术有限公司 | Substrate macro -graph machine |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011141127A (en) * | 2010-01-05 | 2011-07-21 | Avanstrate Taiwan Inc | Visual inspection method and visual inspection device for defect part of glass plate |
| CN107064171A (en) * | 2017-01-26 | 2017-08-18 | 江苏东旭亿泰智能装备有限公司 | Check the inspection method of assembly, macro -graph system and correlation |
| US11688618B2 (en) | 2020-12-10 | 2023-06-27 | Applied Materials, Inc. | Method and apparatus for continuous substrate cassette loading |
| US11945660B2 (en) | 2021-08-09 | 2024-04-02 | Applied Materials, Inc. | Linear sorter using vacuum belt |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH036971A (en) * | 1989-06-02 | 1991-01-14 | Fuji Photo Film Co Ltd | Converter lens built-in type video camera |
| JP3636235B2 (en) * | 1996-01-08 | 2005-04-06 | オリンパス株式会社 | Board holder |
| JPH1194755A (en) * | 1997-09-24 | 1999-04-09 | Olympus Optical Co Ltd | Vibration preventive mechanism for substrate |
| JP2003270155A (en) * | 2002-03-15 | 2003-09-25 | Olympus Optical Co Ltd | Substrate holding device and inspection device |
| JP4243837B2 (en) * | 2003-03-14 | 2009-03-25 | 株式会社日立ハイテクノロジーズ | Transparent substrate surface inspection method and inspection apparatus |
-
2006
- 2006-09-08 JP JP2006244154A patent/JP2008064666A/en active Pending
-
2007
- 2007-09-05 TW TW096133050A patent/TW200822147A/en unknown
- 2007-09-05 KR KR1020070089794A patent/KR20080023142A/en not_active Application Discontinuation
- 2007-09-06 CN CNA2007101492022A patent/CN101140245A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102016697A (en) * | 2008-04-30 | 2011-04-13 | 泰拉半导体株式会社 | Holder stage |
| CN102016697B (en) * | 2008-04-30 | 2013-07-03 | 泰拉半导体株式会社 | Holder stage |
| CN102364332A (en) * | 2011-06-10 | 2012-02-29 | 乐金化学(南京)信息电子材料有限公司 | Polarizing plate movement detection apparatus and method thereof |
| CN102364332B (en) * | 2011-06-10 | 2014-07-30 | 乐金化学(南京)信息电子材料有限公司 | Polarizing plate movement detection apparatus and method thereof |
| CN106918934A (en) * | 2017-03-27 | 2017-07-04 | 武汉华星光电技术有限公司 | Substrate macro -graph machine |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20080023142A (en) | 2008-03-12 |
| TW200822147A (en) | 2008-05-16 |
| JP2008064666A (en) | 2008-03-21 |
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