JP2007281285A - Substrate transport apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate transport apparatus which facilitates the positioning of a substrate while enabling stable substrate transport. <P>SOLUTION: The substrate transport apparatus is equipped with a substrate floating support portion 5 that floats and transports the substrate 2, a slit shape gap portion 5e consisting a move passage formed along the transport direction of the substrate 2 in the transport way of the substrate floating support portion 5, at least one suction portion 9 which is arranged on a straight line of the transport direction passing along the approximate center of gravity of the substrate 2 and carries out vacuum holding of the lower surface of the substrate 2 floated by the substrate floating support portion 5, and a transport portion 7 movably provided along the slit shape gap portion 5e supporting the suction portion 9 and composing the move passage. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a substrate transfer device such as a liquid crystal glass substrate.

  2. Description of the Related Art Conventionally, in a substrate transfer device for a glass substrate (hereinafter referred to as a substrate) for a flat panel display (FPD), a roller transfer unit that extends in the substrate transfer direction and slidably mounts a substrate disposed above. Alternatively, there is an apparatus that includes an air levitation stage that levitates the substrate and a transport unit that moves while holding one side (end) of the substrate (see, for example, Patent Document 1 and Patent Document 2).

  In this type of substrate transfer device, for example, a plurality of air discharge holes are formed in an air levitation stage, and pressure air is discharged from the air discharge holes toward the lower surface of the substrate to lift and lift the substrate. The substrate that has been levitated by continuous ejection is supported. Since the floating substrate is in a non-contact state with the air floating stage, it is supported with almost no resistance. On the other hand, the transport unit is equipped with a gripping mechanism that grips an end portion along the transport direction of the substrate, and a holding mechanism that sandwiches the front end portion of the floating substrate with a sandwiching portion in which both ends are bent in an L shape. ing. The substrate lifted by the holding mechanism is held, and the transfer unit moves on the track extending in the transfer direction, so that the substrate on the air levitation stage can be transferred. At this time, since the substrate is in a non-contact state with respect to the air levitation stage and is supported in a state where there is almost no resistance, the substrate held in a uniaxial state on the end side can be driven by the movement of the transport unit. it can.

Further, in Patent Document 1, a substrate carried on a roller transport unit of a substrate transport device is aligned (positioned) at a predetermined position by a positioning mechanism including a positioning pin that can be moved horizontally, for example. In this substrate positioning, a positioning pin is brought into contact with the end of the loaded substrate, the positioning pin is brought into contact with the substrate and moved horizontally, and the substrate is guided to a predetermined position. Adjust the installation position in the orthogonal direction.
JP 2000-9661 A JP 2000-72251 A

  However, in the substrate transport apparatus described above, the substrate is lifted so that there is almost no resistance between the substrate and the air levitation stage, while the end side of the substrate far from the center of gravity of the substrate is Since the substrate is transported in a state, there has been a problem that the rotational moment resulting from the weight and transport speed of the substrate acts on the holding mechanism during transportation, and the substrate is displaced during transportation or when stopped.

  In addition, if the substrate positioned at the stage when it is carried into the air levitation stage is displaced during transportation or stoppage, it must be returned to the carrying-in position and repositioned, resulting in an increase in tact time. It was. Furthermore, the conventional positioning mechanism has a problem that the configuration of the substrate transport apparatus is complicated because a plurality of positioning pins that contact each end of the substrate are used and a driving mechanism is required for each positioning pin. Further, since the positioning pins are provided in advance at positions where they can come into contact with the respective end portions of the rectangular substrate, there is a problem that it may be difficult to flexibly cope with various substrate sizes. It was.

  On the other hand, in recent years, for example, with the increase in size of liquid crystal display devices, the size of glass substrates used therefor has also increased. Since this enlarged substrate is heavier than a conventional substrate, a larger rotational moment acts on the holding mechanism during transportation. For this reason, the substrate is likely to be displaced during conveyance. One possible countermeasure is to slow down the substrate transport speed and reduce the rotational moment acting on the holding mechanism. In this case, however, it takes time to transport the substrate, which reduces productivity. The problem arises. Although it is conceivable to increase the holding force of the substrate, in this case, there is a risk of damaging the substrate having a resist or pattern on the upper surface. Moreover, in the substrate transport apparatus that holds the edge of the glass substrate and forcibly transports the transport section is provided along the outside of the air levitation stage, the width of the substrate transport apparatus is increased. In particular, a mother glass substrate for producing a flat display panel (FPD) tends to be enlarged, and recently, a glass substrate exceeding 2000 mm has appeared. In proportion to the size of the glass substrate, the size of the substrate transfer device is also increased, and a special truck is required when the transfer device is transported, resulting in a problem that the transport time and transport route are restricted.

  In addition, when the substrate is held by both-axis transfer units so that no rotational moment is applied, a holding mechanism and a drive mechanism for the transfer unit must be provided on both sides of the air levitation stage. However, there arises a problem that the size is further increased as compared with uniaxial conveyance. Further, when two drive mechanisms are provided, it is necessary to synchronize each drive mechanism with high accuracy. When the synchronization is shifted, rolling of the substrate to be transported occurs and the substrate cannot be transported. There was a problem.

  In view of the above circumstances, an object of the present invention is to provide a substrate transfer apparatus that enables stable substrate transfer and can easily position a substrate.

  In order to achieve the above object, the present invention provides the following means.

  The substrate transfer apparatus according to the present invention includes a substrate floating support portion that floats and supports a substrate, and a slit-shaped gap that forms a movement path formed along the transfer direction of the substrate in the transfer path of the substrate floating support portion. Supporting the at least one suction portion and the suction portion, which are disposed on a straight line in the transport direction passing through the substantially center of gravity of the substrate and sucking and holding the lower surface of the substrate lifted by the substrate floating support portion, And a transport unit provided so as to be movable along a slit-like gap that forms the movement path. In addition, the transport unit includes an X table that moves in a direction orthogonal to the transport direction, and a rotary table that rotates on the X table about an axis perpendicular to the lower surface of the substrate. The adsorbing portion is disposed in the space.

  In the substrate transport apparatus according to the present invention, the substrate can be sucked and held by the suction portion on the straight line in the transport direction passing through the approximate center of gravity of the substrate. Further, by providing the suction unit on the rotary table and providing the rotary table on the X table, the substrate can be moved in the transport direction and the direction orthogonal to the transport direction on the substrate floating support unit, and rotated. Is possible.

  According to the substrate transport apparatus of the present invention, the substrate can be transported without applying a rotational moment by sucking and holding the substrate on a straight line in the transport direction passing through the approximate center of gravity of the substrate. Therefore, the substrate can be stably conveyed without being displaced from the conveyance unit. In addition, an X table that moves in a direction orthogonal to the transport direction is provided in the transport unit, and a rotary table is provided on the X table, so that the substrate held by suction by the suction unit is orthogonal to the transport direction and the transport direction. Can be moved in the direction of rotation and can be rotated. Thereby, the board | substrate carried in on the board | substrate floating support part can be positioned by the conveyance part provided with an adsorption | suction part. For this reason, it is not necessary to separately provide a positioning mechanism such as a positioning pin in the substrate transport apparatus, the configuration can be simplified, and the cost of the substrate transport apparatus can be reduced.

  Hereinafter, the substrate transfer apparatus 1 according to the first embodiment of the present invention will be described with reference to FIGS.

  As shown in FIG. 1, the first embodiment of the present invention relates to a substrate inspection apparatus A for performing an appearance inspection of a glass substrate 2 (hereinafter referred to as a substrate) used in an FPD. The substrate inspection apparatus A includes a substrate transfer device 1 that transfers a substrate 2 and an inspection unit 3 that performs detailed observation of the substrate 2 transferred by the substrate transfer device 1.

  As shown in FIGS. 1 to 2, the substrate transfer apparatus 1 includes a base 4 formed in a rectangular frame shape, an air levitation stage (substrate levitation support portion) 5 provided on the upper surface of the base 4, and an air It is composed of three positioning sensors 6 provided along the two sides of the substrate 2 in the substrate carry-in area of the levitation stage 5 and a transport unit 7 provided so as to be movable along the transport direction Y.

  As shown in FIG. 1, the air levitation stage 5 includes a plurality of levitation blocks (levitation support plates) 5a having lengths from one end side 4d to the other end side 4e perpendicular to the transport direction Y of the base 4. It is formed by. The plurality of floating blocks 5a are formed in a rectangular plate shape, the longitudinal direction thereof is the conveyance direction Y, and they are arranged in parallel at a constant interval in the orthogonal direction X of the conveyance direction Y. The gap between the adjacent floating blocks 5a is separated from the gap portion 5e. Has been. Among these gaps 5 e, the gap 5 e located at the approximate center of the conveyance path is used as a slit-like gap that constitutes the movement path of the conveyance unit 7. At this time, each floating block 5a is arrange | positioned so that the upper surface 5b may form the same horizontal surface. Further, a plurality of air discharge holes 5c for discharging air are dispersedly arranged on the surface of each floating block 5a. The air chamber of each levitation block 5a is connected to a pressure air discharge means (not shown) such as a compressor via a pipe (not shown), for example, and air with a constant pressure is supplied from the air discharge hole 5c to the air levitation stage. 5 can be discharged toward the upper surface 5b side. Thus, the substrate 2 carried onto the air levitation stage 5 is in a state where the pressure air is discharged from the lower surface 2a side of the substrate 2 and is levitated on the air levitation stage 5 by the air layer between the substrate 2 and the levitation block 5a. Supported by

  The positioning sensor 6 detects edge position information of the two sides of the substrate 2 carried into the substrate carry-in area of the air levitation stage 5, and the substrate 2 is set at the reference position indicated by the broken line in FIG. Two are arranged on the adjacent long side of the substrate 2 and one is arranged on the short side. As the positioning sensor 6, for example, a line sensor is used, and the position is adjusted so that the center of the line sensor coincides with the edge portion of the substrate 2 set as the reference position. That is, using the centers of these three positioning sensors 6 as a reference position, the edge position information of the substrate 2 is obtained from the outputs of the three positioning sensors 6, and the displacement amount and rotational displacement amount of the substrate 2 in the XY directions are obtained. it can.

  As shown in FIGS. 2 to 3, the transport unit 7 is movable on a frame unit 4 f that is constructed along the transport direction Y between the one end side 4 d and the other end side 4 e of the base 4. Is provided. The frame portion 4f is disposed at a position overlapping the gap portion 5e serving as a movement path located at the center of the air levitation stage 5. The transport unit 7 is supported by, for example, two first track portions 7a laid on the frame portion 4f along the transport direction Y, and a slider unit (not shown) that slides on the first track portion 7a. A rectangular plate-shaped transfer table 7b, a linear motor 7c provided in parallel with the first track portion 7a on the frame portion 4f between the first track portions 7a, and driving the transfer table 7b in the transfer direction Y; The table 7b is composed of two second track portions 7d extending in the direction X orthogonal to the transport direction Y on the central upper surface in the longitudinal direction, and one suction unit 8 that slides on the second track portion 7d. Yes.

  As shown in FIG. 3, the suction unit 8 includes an X table 8a, a sliding block 8c that is fixed to the tip of the protruding portion 8b of the X table 8a and allows the X table 8a to slide on the second track portion 7d, For example, two retracting cylinders 8e such as a vertical actuator fixed perpendicularly to the upper surface 8d of the table 8a, a flat motor stage 8f, and a rectangular shape protruding vertically from four ends of the upper surface 8g of the motor stage 8f A rod-shaped column portion 8h, a rectangular plate-shaped upper plate portion 8i supported while being connected to the tips of the four column portions 8h, and a disk-shaped rotary table provided on the upper surface 8j side of the upper plate portion 8i. 8k and a suction part (first suction part) 9 provided on the upper surface 8l of the rotary table 8k.

  The X table 8a, the motor stage 8f, the upper plate portion 8i, and the rotary table 8k are each provided with an opening 8m at the center position. A shaft 8p extending vertically from a rotary motor 8n disposed on the lower surface side of the X table 8a is inserted into the opening 8m, and is connected to the first suction portion 9 via a coupling 8q. . Accordingly, the first suction portion 9 can be rotated around the axis O1 of the shaft 8p by driving the rotary motor 8n. Further, the lower surface of the upper plate portion 8i is supported by the retracting cylinder 8e, whereby the rotary motor 8n, the motor stage 8f, the column portion 8h, the upper plate portion 8i, the rotary table 8k, and the first suction portion 9 are arranged. It can be moved up and down. Furthermore, the first suction part 9 is mainly composed of a bottomed cylindrical part 9b and a suction pad 9c attached to the opening at the upper end of the bottomed cylindrical part 9b so as to be able to swing, such as a compressor. The suction pad 9c is attracted to the back surface of the substrate 2 by the suction operation of the suction means. When the suction pad 9c starts to be sucked on the back surface of the substrate 2, the suction pad 9c is drawn into the bottomed cylindrical portion 9b by the negative pressure at this time, and is set to the floating reference position of the substrate 2. Here, as shown in FIG. 1, the suction unit 8 is arranged on a straight line S in the transport direction Y passing through the approximate center of gravity Z of the substrate 2 levitated by the air levitation stage 5, and the adsorption pad 9 c is arranged in the air levitation stage 5. Is disposed at a position overlapping the gap portion 5e constituting the moving passage located at the center of the. Further, the upper surface of the suction pad 9 c is substantially at the same position as the flying height of the substrate 2 with respect to the upper surface 5 b of the air levitation stage 5. Further, the suction unit 8 is provided with driving means such as a linear motor so as to be movable on the second track portion 7d. Here, the movement amount of the first suction unit 9 in the transport direction Y and the orthogonal direction X is about ± 10 mm, preferably about ± 5 to 3 mm, more preferably about ± 3 to 1 mm. . Further, since the transfer table 7b is movable on the first track portion 7a in the transfer direction Y, the first suction unit 9 is moved in the transfer direction Y while holding the substrate 2 by suction.

  On the other hand, as shown in FIGS. 1 to 2, the inspection unit 3 includes two columns 3 a and both columns vertically projecting from the upper surfaces 4 g of both side portions 4 b and 4 c along the transport direction Y of the base 4. 3a is connected to the horizontal member 3b, and is connected to the horizontal member 3b and is movable along the horizontal member 3b. And a microscope unit 3d. The microscope unit 3d includes a support member 3f supported on the upper surface 3e of the horizontal member 3b and suspended from the base 4 side, and a microscope head 3g attached to the tip of the suspended support member 3f. Here, since the support member 3f is movable along the horizontal member 3b, the microscope head 3g is movable in the orthogonal direction X of the transport direction Y. The microscope head 3g is attached to the support member 3f so that the optical axis O2 of the objective lens is arranged in the vertical direction, and the microscope head 3g is irradiated with light toward the substrate 2 positioned below. An epi-illumination unit (not shown) and a CCD camera 3h are attached. The CCD camera 3h is for capturing an image acquired by the objective lens of the microscope head 3g.

  Next, a method for transporting the substrate 2 in the substrate inspection apparatus 1 having the above configuration and a method for inspecting the substrate 2 transported by the substrate transport apparatus 1 by the substrate inspection apparatus A will be described.

  As shown in FIG. 1, first, the substrate 2 is carried into the air levitation stage 5 using, for example, a transfer robot, and the substrate 2 is floated by discharging pressurized air from the air discharge holes 5c. Here, the substrate 2 is loaded by the transfer robot so that the approximate center of gravity Z of the substrate 2 is located above the first suction unit 9. At this stage, the directionality of the substrate 2 is not determined, and the substrate 2 is shifted from the reference position for obtaining the origin coordinates by about 1 to 2 mm in the orthogonal direction X of the transport direction Y. Next, the retracting cylinder 8e of the suction unit 8 shown in FIG. 3 is driven to bring the suction pad 9c of the first suction portion 9 into contact with the lower surface 2a of the substrate 2 that has floated. At this time, the suction pad 9c abuts on the lower surface 2a of the substrate 2 and swings its neck so as to be parallel to the substrate 2. In this state, suction operation is performed by a suction means (not shown) to start suction to the substrate 2. . By this suction, the suction pad 9c is drawn into the bottomed cylindrical portion 9b and positioned horizontally at the substrate flying height, and sucks and holds the lower surface 2a (hereinafter referred to as the center of gravity position Z) immediately below the substantial center of gravity Z of the substrate 2.

  Next, each positioning sensor 6 obtains a displacement amount and a rotational displacement amount of the substrate 2 in the X and Y directions, and based on this positional displacement information, the rotation motor 8n of the adsorption unit 8 is driven to rotate the first adsorption unit 9, The position of the substrate 2 in the rotational direction θ is aligned so that the side end portion 2b of the substrate 2 is along the transport direction Y, and the position in the X direction is moved on the second track portion 7d in the orthogonal direction X of the transport direction Y. Alignment is performed, and the transport table 7b is moved along the transport direction Y on the first track portion 7a to perform alignment in the Y direction. In this way, the transport unit 7 and the X table 8a are moved in the transport direction and the direction orthogonal to the transport direction based on the positional deviation information of the substrate 2 detected by each positioning sensor 6, and the rotary table 8k is rotated. Thus, the edge of the substrate 2 carried onto the air levitation stage 5 is aligned with the center of each positioning sensor 6, and the substrate 2 is positioned at the reference position.

  Next, while the substrate 2 is held by the first suction unit 9, the transport unit 7 is moved in the transport direction Y, and the substrate 2 is transported to the inspection unit 3. For example, when the position coordinates of a defect occurring on the substrate 2 are confirmed in advance by macro inspection or the like, the position coordinate data of the defect is orthogonal to the optical axis O2 of the microscope head 3g, and in the transport direction Y. The substrate 2 is transported so that the designated defect is positioned on an orthogonal straight line. At the same time, the microscope head 3g is moved along the horizontal member 3b of the gate-type support column 3c, and is adjusted to a position where the defect of the substrate 2 located below can be observed. At this stage, light is irradiated from the epi-illumination unit toward the surface 2d of the substrate 2, the microscope head 3g is focused on the surface 2d, and an image of the defect is acquired by the microscope head 3g. An image acquired by the microscope 3 head 3g is picked up by the CCD camera 3h and displayed on a display unit (not shown) such as a monitor. An observer observes this image, and the detailed observation of the substrate 2 is performed. Here, when the substrate 2 is transported toward the inspection unit 3, the first suction unit 9 holds the gravity center position Z of the substrate 2 by suction, so that no rotation moment acts on the first suction unit 9. Then, the origin coordinates of the substrate 2 positioned at the reference position before the transport are transported without any deviation.

  Therefore, according to the substrate transport apparatus 1 having the above configuration, the center of gravity Z of the substrate 2 can be sucked and held by the suction portion (first suction portion) 9, and the suction portion 9 can be transported in the transport direction Y and the transport direction. The substrate 2 can be moved in the direction X orthogonal to the direction Y and can be rotated around the axis O1 in the direction perpendicular to the lower surface 2a of the substrate 2, so that the substrate 2 on the air levitation stage 5 can be easily aligned. This can be done flexibly and can flexibly correspond to the size of the substrate 2. Further, since the substrate 2 can be transported and the substrate 2 can be positioned by one suction portion 9, there is no need to separately provide a conventional positioning mechanism including, for example, a positioning pin in the substrate transport apparatus 1. 1 can be reduced.

  Further, according to the substrate transport apparatus 1 having the above-described configuration, the center of gravity Z of the substrate 2 is sucked and held by the suction portion 9, so that a rotational moment does not act on the transport portion 7 during transport, and a stable substrate 2 conveyance can be performed.

  Furthermore, by providing the transport unit 7 inside the air levitation stage 5, the width dimension orthogonal to the transport direction Y of the apparatus can be reduced as compared with the conventional case where the transport unit is provided outside the air levitation stage 5. The apparatus can be reduced in size and can be easily transported without using a special truck.

  In addition, this invention is not limited to said 1st Embodiment, In the range which does not deviate from the meaning, it can change suitably. For example, although the board | substrate conveyance apparatus 1 shall be provided in the board | substrate inspection apparatus A, it is not limited to this, You may be used as a board | substrate conveyance apparatus in a manufacturing line. Moreover, although it was set as the structure which discharges pressure air as a substrate floating means of the air floating stage (substrate floating support part) 5 which floats the board | substrate 2, for example, the board | substrate 2 may be levitated by an ultrasonic wave etc., The substrate floating means of the substrate floating support portion to which the present invention is applied is not particularly limited. Furthermore, although the conveyance part 7 shall be provided on the frame part 4f of the base 4, and shall be moved on the 1st track | orbit part 7a, if the adsorption | suction part 9 is enabled to move along the conveyance direction Y, Since it is good, the configuration and drive mechanism of the transport unit 7 are not particularly limited. Further, the suction unit 8 is provided on the transport table 7b, and is movable in the direction X orthogonal to the transport direction Y on the second track portion 7d formed on the transport table 7b, but is not limited thereto. Instead, the suction unit 9 only needs to be movable in the transport direction Y and the direction X orthogonal to the transport direction Y, and to be rotatable around the vertical axis O1.

  Moreover, in said 1st Embodiment, light is irradiated toward the surface 2d of the conveyed board | substrate 2 from the epi-illumination part not shown of the microscope part 3d, and the detailed observation of the board | substrate 2 is performed with the microscope head 3g. However, the present invention is not limited to this. That is, for example, as shown in FIGS. 4 to 5, a line illumination unit 10 in which an opening 5 f is formed in the air levitation stage 5 and, for example, LEDs are linearly arranged below the opening 5 f of the air levitation stage 5. Further, a transmission illumination unit including a condenser lens may be provided, and light may be irradiated from the back side to the substrate 2 conveyed on the opening 5f, and detailed observation may be performed by transmission illumination transmitted through the substrate 2.

  Next, the substrate transfer apparatus 1 according to the second embodiment of the present invention will be described with reference to FIGS.

  The second embodiment of the present invention is similar to the first embodiment shown in FIGS. 1 to 3, for example, a substrate inspection for performing an appearance inspection of a glass substrate 2 (hereinafter referred to as a substrate) used in a liquid crystal display device or the like. The apparatus B relates to the apparatus B, and includes a substrate transfer apparatus 1 and an inspection unit 3. In the description of the present embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIGS. 6 to 8, the suction unit 8 extends forward and backward along the transport direction Y around the axis O <b> 1 of the shaft 8 p instead of the rotary table 8 k shown in the first embodiment. A rectangular plate-shaped rotary table 8r is provided. The upper surface 8l of the turntable 8r is provided with a suction portion (first suction portion) 11 that is rotatably connected to the shaft 8p. The adsorption part 11 (first adsorption part) has the same configuration as the adsorption part (first adsorption part) 9 shown in the first embodiment. Further, on the upper surface 8l of the turntable 8r, auxiliary suction portions (secondary) are provided on the front and rear on the straight line S in the transport direction Y passing through the approximate center of gravity Z of the substrate 2 with the first suction portion 11 therebetween. ) 12 is provided. The second suction portion 12 includes a rectangular plate-shaped holding member 12a that is provided so as to project perpendicularly to the upper surface of the turntable 8r, and two suction pads 12b that are fixed to the side surface of the holding member 12a. The two suction pads 12b fixed to the holding member 12a are arranged side by side and attached so that the upper end surface of the suction pad 12b is positioned above the upper end surface of the holding member 12a. Further, the horizontal position of the upper end surface of each suction pad 12b and the upper end surface of the suction pad 11a of the first suction unit 11 are the same position. Here, the suction pad 12b provided in the second suction part 12 is, for example, hollow inside, and, for example, a vacuum suction means is connected to the hollow part, so that the upper end surface of the suction pad 12b is at the time of vacuum suction. It acts as a suction cup.

  Next, a method for transporting the substrate 2 using the substrate transport apparatus 1 having the above configuration will be described.

  Similar to the first embodiment, as shown in FIGS. 6 to 8, the substrate 2 is carried onto the air levitation stage 5 by the transfer robot so that the approximate center of gravity Z of the substrate 2 is positioned above the suction unit 11. The retracting cylinder 8e is driven so that the suction pad 11a of the first suction part 11 is brought into contact with the lower surface 2a of the substrate 2 carried into and floated on the air levitation stage 5, and suction is performed in the same manner as in the first embodiment. The substrate 2 is sucked and held by the pad 11a. At this stage, the suction pads 12 b of the second suction part 12 positioned in front of and behind the first suction part 11 are not sucked by the substrate 2. Next, each positioning sensor 6 obtains a displacement amount and a rotational displacement amount of the substrate 2 in the X and Y directions, and based on this positional displacement information, drives the rotation motor 8n of the adsorption unit 8 to rotate the first adsorption unit 11, The position of the substrate 2 in the rotational direction θ is aligned so that the side end portion 2b of the substrate 2 is along the transport direction Y, and the position in the X direction is moved forward and backward in the orthogonal direction X of the transport direction Y on the second track portion 7d. Alignment is performed, and the conveyance table 7b is moved back and forth along the conveyance direction Y on the first track portion 7a to perform alignment in the Y direction. At this time, the second suction unit 12 is driven by movement of the first suction unit 11 in the Y direction and the X direction. Next, after the positioning of the substrate 2 with respect to the reference position is completed, each suction pad 12b attached to the holding member 12a of the second suction unit 12 is sucked to the lower surface 2a of the substrate 2, and the substrate 2 is securely sucked and held. In a state where the substrate 2 is securely held, the transport unit 7 is driven on the first track portion 7 a to transport the substrate 2 toward the inspection unit 3. The transported substrate 2 is subjected to detailed observation by the microscope unit 3d.

  Therefore, according to the substrate transport apparatus 1 having the above-described configuration, the gravity center position Z of the substrate 2 can be sucked and held by the suction portion (first suction portion) 11, and the substrate floating support portion (air floating stage) 5 can be held. The substrate 2 carried in can be easily positioned. Further, the front and rear in the transport direction Y of the substrate 2 positioned by the suction portion (second suction portion) 12 can be sucked and held, and the suction portion 11 and the suction portion 12 can set the center of gravity Z of the substrate 2. By arranging on the straight line S in the transport direction Y that passes through, the substrate 2 can be transported stably without applying a rotational moment.

  In addition, this invention is not limited to said 2nd Embodiment, In the range which does not deviate from the meaning, it can change suitably. For example, although the 2nd adsorption | suction part 12 shall be provided in the front and back along the conveyance direction Y of the 1st adsorption | suction part 11, it may be provided in either one. Moreover, although the 2nd adsorption | suction part 12 was set as the structure provided with the two rectangular suction pads 12b in the one holding member 12a, the quantity and shape of the holding member 12a and the suction pad 12b are not limited. Furthermore, although the 1st adsorption | suction part 11 and the 2nd adsorption | suction part 12 shall be formed on the one rotary table 8r, it is located in the front and back of the conveyance direction Y of the 1st adsorption | suction part 11. The second suction portion 12 that is to be separated from the first suction portion 11 may be provided. Further, the first suction unit 11 and the second suction unit 12 are both moved up and down by driving the retracting cylinder 8e, but the first suction unit 11 and the second suction unit 12 are retracted respectively. A cylinder may be provided and moved up and down individually.

  Next, a substrate transfer apparatus 1 according to a third embodiment of the present invention will be described with reference to FIGS.

  The third embodiment of the present invention is similar to the first embodiment shown in FIGS. 1 to 3, for example, a substrate inspection for performing an appearance inspection of a glass substrate 2 (hereinafter referred to as a substrate) used in a liquid crystal display device or the like. The apparatus C relates to the apparatus C, and includes a substrate transfer apparatus 1 and an inspection unit 3. In the description of this embodiment, the same components as those in the first embodiment and the second embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIGS. 9 to 11, an adsorption unit (first adsorption unit) 13 and an auxiliary adsorption unit (second adsorption unit) 14 are provided on the conveyance table 7 b of the conveyance unit 7. Yes. The adsorption part (first adsorption part) 13 has the same configuration as the adsorption part (first adsorption part) 9 shown in the first embodiment. On the other hand, the second suction unit 14 is provided on the front and the rear in the transport direction with the suction unit 8 provided substantially at the center of the transport table 7b interposed therebetween. The second suction unit 14 includes a rectangular plate-like plate member 15b supported on a transport table 7b via an elevating mechanism, for example, a suction-retracting cylinder 15a, and a rectangular plate-like shape protruding from the upper surface of the plate member 15b. The holding member 14a and a plurality of rectangular suction pads 14b attached to the side surface of the holding member 14a. Here, the suction avoidance cylinder 15a is provided in the vicinity of the end 7c on the transport direction Y side of the transport table 7b and the side of the first suction unit 13, and the second suction unit 14 can be moved up and down. Yes. Here, the suction pad 14b provided in the second suction portion 14 is hollow, for example, and the vacuum suction means is connected to the hollow portion so that the upper end surface of the suction pad 14b is at the time of vacuum suction. It acts as a suction cup.

  Next, a method for transporting the substrate 2 using the substrate transport apparatus 1 having the above configuration will be described.

  As shown in the first embodiment, the substrate 2 is carried onto the air levitation stage 5 by the transfer robot so that the approximate center of gravity Z of the substrate 2 is positioned above the first suction unit 13. The retracting cylinder 8e is driven so that the suction pad 13a of the first suction portion 13 is brought into contact with the lower surface 2a of the substrate 2 carried into and floated on the air levitation stage 5, and suction is performed in the same manner as in the first embodiment. The substrate 2 is sucked and held by the pad 13a. At this stage, the suction pads 14 b of the second suction part 14 positioned in front of and behind the first suction part 13 are not sucked by the substrate 2. Next, each positioning sensor 6 obtains a displacement amount and a rotational displacement amount of the substrate 2 in the X and Y directions, and based on this displacement information, drives the rotation motor 8n of the adsorption unit 8 to rotate the first adsorption unit 13, The position of the substrate 2 in the rotational direction θ is aligned so that the side end portion 2b of the substrate 2 is along the transport direction Y, and the position in the X direction is moved forward and backward in the orthogonal direction X of the transport direction Y on the second track portion 7d. Alignment is performed, and the conveyance table 7b is moved back and forth along the conveyance direction Y on the first track portion 7a to perform alignment in the Y direction. During this positioning operation, the second suction portion 14 drives the suction retracting cylinder 15 to move the holding member 14a downward to retract. When the positioning of the substrate 2 is completed by the first suction unit 13, the suction retracting cylinder 15a is driven, the holding member 14a is moved upward, and each suction pad 14b attached to the holding member 14a is attached to the substrate 2 It is brought into contact with and adsorbed to the lower surface 2a. Thereby, the second suction unit 14 holds the substrate 2 by suction. When the substrate 2 is sucked and held by the first suction unit 13 and the second suction unit 14, the transport unit 7 is driven to transport the substrate 2 toward the inspection unit 3. The transported substrate 2 is subjected to detailed observation by the microscope unit 3d.

  Therefore, according to the substrate transport apparatus 1 having the above-described configuration, the substrate 2 carried into the air levitation stage 5 by including the suction portion (first suction portion) 13 that sucks and holds the gravity center position Z of the substrate 2. Can be positioned and can be transported without generating a rotational moment during transport. Further, the suction part (second suction part) 14 is arranged on the front side and the rear side in the transport direction Y with respect to the suction part 13, so that the substrate 2 can be reliably held, and the substrate 2 is transported during transport. It can prevent shifting.

  In addition, this invention is not limited to said 3rd Embodiment, In the range which does not deviate from the meaning, it can change suitably. For example, the suction part (first suction part) 13 and the suction part (second suction part) 14 are formed on one transport table 7b, but the front of the suction part 13 in the transport direction Y. The suction part 14 located behind and on the rear side may be provided on a transport table different from the suction part 13.

1 is a perspective view of an appearance inspection apparatus using a substrate inspection apparatus according to a first embodiment of the present invention. It is a perspective view which shows the conveyance part and inspection part of the external appearance inspection apparatus shown in FIG. It is a perspective view showing the 1st adsorption part concerning a 1st embodiment of the present invention. It is a figure which shows the modification of an external appearance inspection apparatus provided with the board | substrate inspection apparatus of this invention. It is a figure which shows the transmitted illumination part of the external appearance inspection apparatus shown in FIG. It is a perspective view of the external appearance inspection apparatus B using the board | substrate inspection apparatus 1 which concerns on 2nd Embodiment of this invention. It is a perspective view which shows the conveyance part and inspection part of the external appearance inspection apparatus shown in FIG. It is a perspective view which shows the 1st adsorption | suction part and 2nd adsorption | suction part which concern on 2nd Embodiment of this invention. It is a perspective view of the external appearance inspection apparatus C using the board | substrate inspection apparatus 1 which concerns on 3rd Embodiment of this invention. It is a perspective view which shows the conveyance part and test | inspection part of the external appearance inspection apparatus shown in FIG. It is a perspective view showing the 1st adsorption part and the 2nd adsorption part concerning a 3rd embodiment of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate conveyance apparatus 2 Substrate 2a Lower surface 3 of substrate 3 Inspection part 4 Base 5 Air levitation stage (substrate levitation support part)
5a Levitation block (support plate)
7 Transport part 7a First track part 7b Transport table 7d Second track part 8 Suction unit 9 Suction part (first suction part)
11 Adsorption part (first adsorption part)
12 Adsorption part (second adsorption part)
13 Adsorption part (first adsorption part)
14 Adsorption part (second adsorption part)
O1 Axis O2 Image center axis A Substrate inspection device B Substrate inspection device C Substrate inspection device S Straight line X in conveyance direction Y direction in conveyance direction Z perpendicular to conveyance direction Z Center of gravity θ Rotation direction

Claims (8)

A substrate levitation support unit for levitating and supporting the substrate;
A slit-like gap that forms a movement path formed along the conveyance direction of the substrate in the conveyance path of the substrate floating support portion;
At least one adsorbing portion that is arranged on a straight line in the transport direction passing through the approximate center of gravity of the substrate and adsorbs and holds the lower surface of the substrate that is levitated by the substrate levitating support portion;
A substrate transfer apparatus, comprising: a transfer unit that supports the suction unit and is movable along a slit-like gap that forms the movement path.   The substrate transport apparatus according to claim 1, wherein the suction unit is disposed at a substantially center of gravity of the substrate in the transport unit.   The substrate transport apparatus according to claim 1, wherein the transport unit includes a plurality of the suction units disposed on a straight line in the transport direction that passes through a substantially center of gravity of the substrate.   The transport unit includes an X table that moves in a direction orthogonal to the transport direction, and a rotary table that rotates about an axis perpendicular to the lower surface of the substrate on the X table. The substrate transfer apparatus according to claim 1, wherein a suction portion is disposed.   5. The substrate transfer apparatus according to claim 4, wherein the turntable is formed in a rectangular plate shape extending along the transfer direction, and a plurality of the suction units are arranged on the turntable.   The transport unit includes a transport table movably provided on a track portion laid along a slit-shaped gap that constitutes the moving path, and a transport table provided substantially in the transport table with respect to the transport direction. An X table that moves in an orthogonal direction, a rotary table that is provided on the X table and rotates about an axis that is orthogonal to the lower surface of the substrate, and the transport table in the front-rear direction of the transport direction across the X table The substrate transport apparatus according to claim 1, further comprising a holding member provided on the rotary table and on each holding member.   The holding member moves downward during the positioning operation of the substrate by the suction portion of the rotary table and retracts, and moves upward after the positioning is finished, and is moved by the suction portion provided on the holding member. The substrate transfer apparatus according to claim 6, wherein the substrate is adsorbed. The transport unit is based on positional deviation information of the substrate detected by at least three positioning sensors that detect edge positions of at least two adjacent sides of the substrate disposed on the transport path of the substrate floating support unit. 7. The substrate is positioned at a reference position by moving the transport unit and the X table in the transport direction and a direction orthogonal to the transport direction, and rotating the rotary table. The board | substrate conveyance apparatus in any one of.

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