CN101057077A - Piezoelectric pump and stirling refrigerator - Google Patents
Piezoelectric pump and stirling refrigerator Download PDFInfo
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- CN101057077A CN101057077A CNA2005800391131A CN200580039113A CN101057077A CN 101057077 A CN101057077 A CN 101057077A CN A2005800391131 A CNA2005800391131 A CN A2005800391131A CN 200580039113 A CN200580039113 A CN 200580039113A CN 101057077 A CN101057077 A CN 101057077A
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- inner space
- export department
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- 239000011347 resin Substances 0.000 claims abstract description 15
- 229920005989 resin Polymers 0.000 claims abstract description 15
- 239000011148 porous material Substances 0.000 claims description 5
- 229910052755 nonmetal Inorganic materials 0.000 claims description 4
- 238000006664 bond formation reaction Methods 0.000 claims description 2
- 238000003466 welding Methods 0.000 abstract description 20
- 229910052751 metal Inorganic materials 0.000 abstract description 2
- 239000002184 metal Substances 0.000 abstract description 2
- 238000000638 solvent extraction Methods 0.000 abstract 1
- 238000005057 refrigeration Methods 0.000 description 20
- 239000006200 vaporizer Substances 0.000 description 19
- 238000007906 compression Methods 0.000 description 17
- 230000006835 compression Effects 0.000 description 15
- 239000003795 chemical substances by application Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 9
- 239000012530 fluid Substances 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 238000001816 cooling Methods 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 230000033001 locomotion Effects 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 238000005755 formation reaction Methods 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 239000003507 refrigerant Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000005764 inhibitory process Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 230000000306 recurrent effect Effects 0.000 description 2
- YZSCPLGKKMSBMV-UHFFFAOYSA-N 5-fluoro-4-(8-fluoro-4-propan-2-yl-2,3-dihydro-1,4-benzoxazin-6-yl)-N-[5-(1-methylpiperidin-4-yl)pyridin-2-yl]pyrimidin-2-amine Chemical compound FC=1C(=NC(=NC=1)NC1=NC=C(C=C1)C1CCN(CC1)C)C1=CC2=C(OCCN2C(C)C)C(=C1)F YZSCPLGKKMSBMV-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
- F04B43/09—Pumps having electric drive
- F04B43/095—Piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2210/00—Working fluid
- F05B2210/10—Kind or type
- F05B2210/11—Kind or type liquid, i.e. incompressible
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2260/00—Function
- F05B2260/60—Fluid transfer
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2280/00—Materials; Properties thereof
- F05B2280/60—Properties or characteristics given to material by treatment or manufacturing
- F05B2280/6015—Resin
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2253/00—Other material characteristics; Treatment of material
- F05C2253/20—Resin
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Reciprocating Pumps (AREA)
- Details Of Reciprocating Pumps (AREA)
- Devices That Are Associated With Refrigeration Equipment (AREA)
Abstract
The piezoelectric pump (6) comprises a casing (32) formed by welding a plurality of metal members to each other, a piezoelectric element (36) partitioning a space in the casing (32) into an operating space (34) and a back pressure space (35), and resin internal parts (33A, 33B) installed between the casing (32) and the piezoelectric element (36) and holding the piezoelectric element (36). The internal parts (33A, 33B) are formed of an easy-to-machine and easy-to-mold resin. The internal part (33A) specifies the outer periphery of the operating space (34) and the internal part (33B) specifies the outer periphery of the back pressure space (35). Since a recessed part is formed between the internal parts (33A, 33B) by facing the internal parts (33A, 33B) each other, the piezoelectric element (36) can be holdingly stored in the recessed part.
Description
Technical field
The present invention relates to a kind of piezoelectric pump and stirling refrigerator (StirlingRefrigerator/Freezer), particularly relate to the stirling refrigerator that can under the negative/positive pressure state, make fluid high-effective ground circuit piezoelectric pump and have this piezoelectric pump.
Background technique
As the pump that makes medium circulation, use piezoelectric pump for a long time, this piezoelectric pump uses the piezoelectric element of quartz or lithium niobate etc.
Fig. 6 is the sectional view of the existing example of piezoelectric pump of expression.With reference to Fig. 6, piezoelectric pump 106 has working space 134 and back pressure space 135 in housing 132 and this housing 132 as shown in Figure 6.Here, working space 134 separates by piezoelectric element 136 with back pressure space 135.In addition, on the housing of working space 134 sides, be provided with entrance part 137 that attracts medium and the export department 138 that discharges this medium.On the housing of back pressure space 135 sides, be provided with the back pressure hole 135A of the pressure that is used to adjust back pressure space 135.In addition, in entrance part 137 and export department 138, be respectively arranged with and make medium not produce the one-way valve 139,140 of adverse current.
When above-mentioned piezoelectric pump 106 is worked, electrical signal is imposed on piezoelectric element 136.Thus, the direction of the dotted arrow of piezoelectric element 136 in Fig. 6 is carried out oscillating movement.In addition, at this moment, the end of piezoelectric element 136 is fixed on the housing 132, carries out oscillating movement while piezoelectric element 136 is deformed into convex shape.Consequently, the change of the volume of working space 134, the pressure in the working space 134 is corresponding to the deformation state change of piezoelectric element 136, suction/discharge medium.
Here, by the distortion of above-mentioned piezoelectric element 136, the volume in back pressure space 135 also changes, consequently, when the pressure oscillation in back pressure space 135, produce the rightabout power of moving direction with piezoelectric element 136, as a result, reduced the working efficiency of piezoelectric pump 106.Relative therewith, for the pressure that makes back pressure space 135 and the deformation state of piezoelectric element 136 irrespectively keep necessarily, 135 sides are provided with back pressure hole 135A in the back pressure space of housing 132.
In addition, as will be, have for example to be documented in the spy and to open technology in the 2003-50073 communique (prior art example 1) etc. based on contrary Stirling circuit heat exchange be used to the to freeze example in storehouse.
In prior art example 1, a kind of Sterling refrigerating system is disclosed, it is characterized in that, comprise high-temperature portion with the outside usefulness that sheds based on the heat of compression against Stirling circuit working gas; Absorb the low-temp. portion of using based on the heat of swelling of contrary Stirling circuit working gas from the outside; And the low temperature side circulation loop that constitutes by the closed-loop path, this closed-loop path is to constitute the mode of thermal siphon, to link together with low temperature side condenser and a plurality of low temperature side vaporizer of low-temp. portion thermal, this system encloses the low temperature heat energy fed sheet of a media of transporting low temperature portion low temperature heat energy in the low temperature side circulation loop.Here, the heat of high-temperature portion sheds by high temperature side heat exchange circulation (radiation system).High temperature side heat exchange circulation comprises high temperature side vaporizer and the high temperature side condenser that connects by pipe arrangement, according to thermosiphon principle carry, heat sheds.
In addition, in registration No. 2505727 communique of model utility (prior art example 2), disclose a kind of piezoelectric pump, this piezoelectric pump comprises: housing, be arranged on the piezoelectric vibrator of enclosure interior and be arranged in the one-sided pump chamber of piezoelectric vibrator suction with, discharge the one-way valve of usefulness.In this piezoelectric pump, pump chamber is communicated with the anti-pump chamber that relative piezoelectric vibrator is positioned at above-mentioned pump chamber opposition side.
Patent documentation 1: the spy opens the 2003-50073 communique.
Patent documentation 2: No. 2505727 communique of registration model utility.
But, in above-mentioned piezoelectric pump, exist following problem.
In piezoelectric pump shown in Figure 6, use with the opposed a plurality of parts of the mode that forms the space in inside to constitute housing.Here, the sealing between a plurality of parts waits realization with O shape ring generally speaking.In such structure, because working medium can leak at leisure, so medium-term and long-term use of closed system that is lower than barometric pressure or is higher than atmospheric state (in present specification, being called negative pressure state or barotropic state) in the loop internal pressure is impossible.Such problem can not be solved by the piezoelectric pump of prior art example 2.
In addition, the piezoelectric element heat resistance that is used for piezoelectric pump is low, so, in order to improve sealing by welding with above-mentioned a plurality of part bonding situation together under, how could make this welding heat be difficult to pass to piezoelectric element and just become problem.Be delivered to heat on the piezoelectric element by reduction, the performance of this piezoelectric element improves, its result, and the cycle efficiency of fluid will be improved.
Summary of the invention
The present invention proposes in view of the above problems, the purpose of this invention is to provide a kind of fluid high-effective ground circuit piezoelectric pump and stirling refrigerator of making under the negative/positive pressure state.
Piezoelectric pump of the present invention comprises: with the housing of a plurality of metallic part bonding formation; With the separated by spaces in the housing is the piezoelectric element of the 1st and the 2nd inner space; And be arranged between housing and the piezoelectric element, and keep the nonmetal system the 1st and the 2nd inner member of piezoelectric element.
Constitute a plurality of metallic parts of housing, preferably be bonded together by welding.Because these parts are bonded together by welding, so can improve the durability that working medium is leaked.Consequently, can provide a kind of piezoelectric pump that in the closed system that is below or above atmospheric pressure operated, can use for a long time.In addition,, housing and piezoelectric element are isolated, can suppress the transmission of welding heat to piezoelectric element by nonmetal system inner member is set between metallic housing and piezoelectric element.
Here, preferably, the 1st and the 2nd inner member is formed from a resin, and the 1st and the 2nd inner member defines the periphery of the 1st and the 2nd inner space respectively, and the mode with the clamping piezoelectric element between the 1st and the 2nd inner member keeps this piezoelectric element.
Because use the resin of easy moulding, and keep piezoelectric element with simple structure, so, can make piezoelectric pump with low cost.
Above-mentioned piezoelectric pump, in one aspect in, also comprise: be formed on the 1st inner member and from the suction pipe of outside towards as the working medium of the 1st inner space of the working space entrance part by wherein; Be formed on the 1st inner member and from the 1st inner space towards the working medium of the discharge tube of the outside export department by wherein; Be arranged on the 1st one-way valve between entrance part and the 1st inner space; Be arranged on the 2nd one-way valve between export department and the 1st inner space; And a plurality of O shape rings that respectively gap between the gap between the 1st and the 2nd inner space and the piezoelectric element and entrance part and export department and the housing sealed.Preferably, a plurality of slot parts that the 1st and the 2nd one-way valve that the 1st and the 2nd one-way valve is set respectively is provided with portion and a plurality of O shape rings are set respectively are set on the 1st inner member here.
In this programme, by recess or groove are set on resin system inner member, can form simply one-way valve and O shape ring is set platform or groove be set.
, preferably, also comprise the interconnecting part that is communicated with as the 2nd inner space in back pressure space and entrance part or export department here, interconnecting part is made of the hole or the groove that are formed on the 1st and the 2nd inner member.
By forming interconnecting part, the pressure of working space (the 1st inner space) with back pressure space (the 2nd inner space) can be kept about equally.In addition, by on the inner member that constitutes at resin groove or hole being set, need just can not form interconnecting part simply in the outer installment connecting tube of housing.Consequently, can form the piezoelectric pump that makes fluid high-effective ground circuit compactness with low cost.
Further, preferably, the junction of a plurality of metallic parts in above-mentioned interconnecting part and the housing is communicated with.Thus, the leak test hole of interconnecting part as housing can be utilized.
Above-mentioned piezoelectric pump on the other hand, also comprises: be formed on the 1st inner member and from the 1st suction pipe of outside towards as the working medium of the 1st inner space of working space the 1st entrance part by wherein; Be formed on the 2nd inner member and from the 2nd suction pipe of outside towards as the working medium of the 2nd inner space of working space the 2nd entrance part by wherein; Be formed on the 1st inner member and from the 1st inner space towards the working medium of the 1st discharge tube of outside the 1st export department by wherein; Be formed on the 2nd inner member and from the 2nd inner space towards the working medium of the 2nd discharge tube of outside the 2nd export department by wherein; Be separately positioned on the 1st and the 2nd one-way valve between the 1st and the 2nd entrance part and the 1st and the 2nd inner space; Be separately positioned on the 3rd and the 4th one-way valve between the 1st and the 2nd export department and the 1st and the 2nd inner space; And a plurality of O shape rings that respectively gap between the gap between the 1st and the 2nd inner space and the piezoelectric element and the 1st and the 2nd entrance part and the 1st and the 2nd export department and the housing sealed.Preferably, on the 1st and the 2nd inner member, a plurality of slot parts that the 1st to the 4th one-way valve that the 1st to the 4th one-way valve is set respectively is provided with portion and a plurality of O shape rings are set respectively are set here.
In this programme, the both sides of piezoelectric element can be used as working space.In addition, by on the inner member that constitutes at resin recess or groove are set, can form simply one-way valve and O shape ring be set platform or groove be set.Consequently, can provide with low cost and make fluid high-effective ground circuit piezoelectric pump.
Preferably, the intercommunicating pore that the 1st or the 2nd entrance part or the 1st or the 2nd export department are communicated with the junction of metallic parts is set.
The leak test hole that this through hole can be used as housing utilizes.
Above-mentioned piezoelectric pump in another aspect, also comprises, be formed on the 1st inner member and from the suction pipe of outside towards as the working medium of the 1st inner space of working space the 1st entrance part by wherein; Be formed on the 2nd inner member and from the 1st entrance part towards the working medium of the 2nd inner space the 2nd entrance part by wherein; Be formed on the 1st inner member and from the 1st inner space towards the working medium of the discharge tube of outside the 1st export department by wherein; Be formed on the 2nd inner member and from the 2nd inner space towards the working medium of the 1st export department the 2nd export department by wherein; Constitute by the hole or the groove that are formed on the 1st and the 2nd inner member, with the 1st interconnecting part of the 1st and the 2nd entrance part connection; Constitute by the hole or the groove that are formed on the 1st and the 2nd inner member, with the 2nd interconnecting part of the 1st and the 2nd export department connection; Be separately positioned on the 1st and the 2nd one-way valve between the 1st and the 2nd entrance part and the 1st and the 2nd inner space; Be separately positioned on the 3rd and the 4th one-way valve between the 1st and the 2nd export department and the 1st and the 2nd inner space; And a plurality of O shape rings that respectively gap between the gap between the 1st and the 2nd inner space and the piezoelectric element and the 1st and the 2nd entrance part and the 1st and the 2nd export department and the housing sealed.Preferably, on the 1st and the 2nd inner member, a plurality of slot parts that the 1st to the 4th one-way valve that the 1st to the 4th one-way valve is set respectively is provided with portion and a plurality of O shape rings are set respectively are set here.
In this programme, the both sides of piezoelectric element can be used as working space.In addition, need just can not form the 1st and the 2nd interconnecting part simply in the outer installment connecting tube of housing.Further, by on the inner member that constitutes at resin recess or groove are set, can form simply one-way valve and O shape ring be set platform or groove be set.Consequently, can provide a kind of piezoelectric pump that makes fluid high-effective ground circuit compact structure with low cost.
One of the 1st and the 2nd interconnecting part is communicated with here, with the junction of metallic parts in the housing.Thus, the leak test hole of interconnecting part as housing can be utilized.
In addition, also can be on the mating face of the 1st inner member and the 2nd inner member, other O shapes rings that the 1st interconnecting part or the 2nd interconnecting part are sealed further are set.Thus, can guarantee seal as the 1st and the 2nd interconnecting part of working medium path.
In addition, constitute a plurality of metallic parts of housing, also can be respectively arranged with lip part, be welded together each other, form housing by terminal part with lip part.Thus, can make welding position and piezoelectric element away from, thereby, can further improve heat is imported in inhibition into to piezoelectric element effect.
In stirling refrigerator of the present invention, above-mentioned piezoelectric pump is arranged in the working medium circulation loop of high temperature side.
According to the present invention, even can provide a kind of closed system in negative/positive pressure medium-term and long-term the use, the piezoelectric pump that slowly leaks can not take place yet.
Description of drawings
Fig. 1 is an example of the piping diagram of stirling refrigerator.
Fig. 2 is the sectional view of the piezoelectric pump of embodiment of the present invention 1.
Fig. 3 is the sectional view of the piezoelectric pump of embodiment of the present invention 2.
Fig. 4 is the sectional view of the piezoelectric pump of embodiment of the present invention 3.
Fig. 5 is an example of the sectional view of the Stirling cycle refrigerator in the expression stirling refrigerator.
Fig. 6 is the sectional view of existing piezoelectric pump.
Description of reference numerals
The 1-stirling refrigerator, the 2-radiating part, 2A～2F-manages (high temperature side circulation loop), the 3-endothermic section, 3A, 3B-manages (low temperature side circulation loop), 4-Stirling cycle refrigerator, 5-high temperature side vaporizer, the 6-recycle pump, 7-high temperature side condenser, 8-fan, the 9-dewfall prevents pipe, 10-low temperature side condenser, 11-low temperature side vaporizer, 12-fan, the 13-pressure cylinder, the 14-piston, 15-displacer (displacer), 16-regenerator, the 17-working space, the 17A-compression volume, 17B-expansion space, 18, the 19-heat exchanger, the 18A-pipeline, the inner yoke of 20-, the movable magnet of 21-, the outside yoke of 22-, the 23-linear motor, the 24-piston spring, 25-displacer spring, 26-displacer rod, 27-back pressure space, the 28-leaf spring, 29-balancer weight, 30, the 32-housing, 33A, the 33B-inner member, 34,34A, the 34B-working space, 35-back pressure space, 36-piezoelectric element, 37,37A, the 37B-entrance part, 38,38A, 38B-export department, 39,39A, 39B, 40,40A, the 40B-one-way valve, 41,41A, the 41B-inlet duct, 42,42A, the 42B-outer pipe, 43-O shape ring, 44-interconnecting part, 44A-leak test hole, the 44B-interconnecting part that enters the mouth, 44C-exports interconnecting part, 45-power supply terminal, 46-lip part.
Embodiment
Below, the mode of execution to based on piezoelectric pump of the present invention and stirling refrigerator describes with Fig. 1 to Fig. 5.
In addition, in present specification, so-called " refrigeration storehouse " is meant and comprises whole notion that " refrigerated warehouse ", " freezer " reach " freezing-cooling storeroom ".
In addition, in present specification, though will be to describing as the stirling refrigerator that has a Stirling engine carrying equipment of Stirling cycle refrigerator,, the Stirling engine carrying equipment of piezoelectric pump of the present invention is set, is not limited to stirling refrigerator.Stirling engine for example also can be used as generator and uses.
(explanation of stirling refrigerator)
Fig. 1 is an example that the piezoelectric pump of embodiment of the present invention 1～3 described later is arranged on the piping diagram of the stirling refrigerator in the high temperature side working medium circulation loop.
Stirling refrigerator 1 comprises as shown in Figure 1: the Stirling cycle refrigerator 4 (Stirling engine) with radiating part 2 and endothermic section 3; The 1st high temperature side circulation loop (the 1st circulation loop) that comprises the high temperature side vaporizer 5, high temperature side condenser 7 and pipe 2A, the 2B that are installed in radiating part 2; Comprise high temperature side vaporizer 5, recycle pump 6, dewfall and prevent to manage 9 and the 2nd high temperature side circulation loop (the 2nd circulation loop) of pipe 2C, 2D, 2E, 2F; And the low temperature side circulation loop that comprises the low temperature side condenser 10, low temperature side vaporizer 11 and pipe 3A, the 3B that are installed in endothermic section 3.The 1st high temperature side circulation loop carries out the cooling of the radiating part 2 of Stirling cycle refrigerator 4, and the 2nd high temperature side circulation loop supplies thermal energy to dewfall and prevents to manage 9.In addition, the low temperature side circulation loop heat exchange between the endothermic section 3 of air in the storehouse and Stirling cycle refrigerator 4 of freezing.
Enclosing in the 1st and the 2nd high temperature side circulation loop has water (H2O) etc. as refrigeration agent.The refrigeration agent of evaporation arrives high temperature side condenser 7 (dotted arrows among Fig. 1) by pipe 2A (high temperature side conduit) in high temperature side vaporizer 5.Refrigeration agent is by carrying out heat exchange and condensation with extraneous gas in high temperature side condenser 7.In order to promote this heat exchange, near high temperature side condenser 7, be provided with the fan 8 that produces air-flow.Through condensed refrigerant, turn back in the high temperature side vaporizer 5 via pipe 2B (high temperature side recurrent canal).In the 1st high temperature side circulation loop, in order to utilize natural circulation like this, be delivered in the heat that radiating part 2 produces, and high temperature side condenser 7 be configured in the more top of high temperature side vaporizer 5 based on the evaporation and the condensation of refrigeration agent.In addition, in order to adjust the boiling point of refrigeration agent, and adjust the intrasystem pressure of circulation loop (substantial vacuum that reduces pressure state).
On the other hand, in the bottom of high temperature side vaporizer 5, be connected with pipe 2C.Liquid phase refrigerant is from high temperature side vaporizer 5 intake channel 2C.Refrigeration agent among the intake channel 2C is through pipe 2D, and arrival is arranged in the recycle pump 6 of Stirling cycle refrigerator 4 belows.The refrigeration agent of discharging from recycle pump 6 is sent to dewfall by pipe 2E and prevents to manage in 9.Here, dewfall prevents to manage the refrigeration agents that flow in 9 and remains than higher temperature by the heat of giving from the radiating part 2 of Stirling cycle refrigerator 4.Thereby, by dewfall being prevented from manage 9 fronts that are configured in the refrigeration storehouse, can suppress the dewfall that a portion etc. locates.Dewfall prevents to manage the refrigeration agent that flows in 9 and returns in the high temperature side vaporizer 5 by pipe 2F.In such a manner, in the 2nd high temperature side circulation loop, carry out pump circulation by recycle pump 6.
In the low temperature side circulation loop, enclosing has carbon dioxide or hydrocarbon etc. as refrigeration agent.Condensed refrigerant in low temperature side condenser 10 arrives in the low temperature side vaporizer 11 by pipe 3A (low temperature side conduit).In low temperature side vaporizer 11, carry out heat exchange by the evaporation of refrigeration agent.In order to promote this heat exchange, near low temperature side vaporizer 11, be provided with the fan 12 that produces air-flow.Carry out after the heat exchange, the refrigeration agent of gasification turns back in the low temperature side condenser 10 via pipe 3B (low temperature side recurrent canal).In the low temperature side circulation loop, in order to utilize natural circulation like this, be delivered in the low temperature heat energy that endothermic section 3 produces based on the evaporation and the condensation of refrigeration agent, low temperature side vaporizer 11 is configured in the more below of low temperature side condenser 10.In addition, in order to adjust the boiling point of refrigeration agent, adjust the intrasystem pressure of circulation loop (substantial vacuum that reduces pressure state).
During Stirling cycle refrigerator 4 work, the heat that produces at the radiating part 2 of this refrigerating machine 4 carries out heat exchange through high temperature side condenser 7 and air.On the other hand, the air of low temperature heat energy in low temperature side vaporizer 11 and refrigeration storehouse that produces in the endothermic section 3 of Stirling cycle refrigerator 4 carries out heat exchange.Be transported to once more near the low temperature side vaporizer 11 from the air-flow that warms of refrigeration in the storehouse, and cooled off repeatedly.
(mode of execution 1)
Fig. 2 is the sectional view of the piezoelectric pump of expression mode of execution 1.
The piezoelectric pump 6 of present embodiment comprises as shown in Figure 2: with the housing 32 of a plurality of metallic parts weldings formation; With the separated by spaces in the housing 32 is the piezoelectric element 36 in working space 34 (the 1st inner space) and back pressure space 35 (the 2nd inner space); And be arranged between housing 32 and the piezoelectric element 36 nonmetal system inner member 33A, 33B (the 1st and the 2nd inner member) that piezoelectric element 36 is kept.
In the example of Fig. 2, be provided with: be formed on that inner member 33A goes up and from the inlet duct 41 (suction pipe) of housing 32 outsides towards the working medium of working space 34 entrance part 37 by wherein; Be formed on that inner member 33A goes up and from working space 34 towards the working medium of the outer pipe 42 (discharge tube) of the housing 32 outsides export department 38 by wherein; Be arranged on the one-way valve 39 (the 1st one-way valve) between entrance part 37 and the working space 34; Be arranged on the one-way valve 40 (the 2nd one-way valve) between export department 38 and the working space 34; And a plurality of O shapes rings 43 in gap between difference seal operation space 34 and back pressure space 35 and the piezoelectric element 36 and the gap between entrance part 37 and export department 38 and housing 32 internal surfaces., the slot part that platform (the 1st and the 2nd one-way valve is provided with portion) is set and each O shape ring 43 is installed of one- way valve 39,40 is set here respectively, is provided with by on inner member 33A, 33B, processing in advance.
Actual when making piezoelectric pump 6 work, by power supply terminal 45 electrical signal is imposed on piezoelectric element 36, make piezoelectric element 36 carry out oscillating movement along the left and right directions among Fig. 2.
In above-mentioned structure, be bonded together in the welding mode by a plurality of parts that will constitute housing 32, can improve the durability that working medium is leaked.Consequently, can provide a kind of piezoelectric pump that in the closed system of negative/positive pressure state, can use for a long time 6.In addition, by resin system inner member 33A, 33B are set between metallic housing 32 and piezoelectric element 36, housing 32 and piezoelectric element 36 are isolated, the welding heat in the time of can suppressing the added metal parts passes to piezoelectric element 36.Thereby, can improve the working efficiency of piezoelectric element 36, consequently, improved the cycle efficiency of working medium.
In addition, as inner member 33A, 33B, use be the resin parts of easy moulding, and keep piezoelectric element 36 with above-mentioned simple structure, so, can make piezoelectric pump 6 with low cost.
In addition, what one- way valve 39,40 and a plurality of O shape ring 43 was set respectively is provided with platform or groove, can the formation simply by recess or groove are set on resin system inner member 33A, 33B.
Further, by forming interconnecting part 44, the pressure of working space 34 (the 1st inner space) with back pressure space 35 (the 2nd inner space) can be kept about equally.Consequently, under the negative/positive pressure state, improved the cycle efficiency of working medium.Here, interconnecting part 44, owing to be on resin system inner member 33A, 33B, groove or hole to be set, so, need just can not form simply in the outer installment connecting tube of housing.Consequently, can realize the compact structure of piezoelectric pump 6 with low cost.In addition, owing to interconnecting part 44 is communicated with the welding position of a plurality of metallic parts, so interconnecting part 44 can be used as the leak test hole (intercommunicating pore) of housing and uses.
The a plurality of metallic parts that constitute housing 32 have lip part 46 respectively, are welded together each other by the terminal part with lip part 46, and form housing 32.By lip part 46 is set, can make welding position and piezoelectric element 36 further away from each other, thereby, can further improve heat is imported in inhibition into to piezoelectric element 36 effect.
(mode of execution 2)
Fig. 3 is the sectional view of the piezoelectric pump of expression mode of execution 2.
The piezoelectric pump 6 of present embodiment is the variation of the piezoelectric pump 6 of mode of execution 1, it is characterized in that, the both sides of piezoelectric pump 36 are used as pump chamber (working space 34A, 34B).
Piezoelectric pump 6 is provided with as shown in Figure 3: be formed on that inner member 33A (the 1st inner member) goes up and from the inlet duct 41A (the 1st suction pipe) of housing 32 outsides towards the working medium of working space 34A (the 1st inner space) the entrance part 37A (the 1st entrance part) by wherein; Be formed on that inner member 33B (the 2nd inner member) goes up and from the inlet duct 41B (the 2nd suction pipe) of housing 32 outsides towards the working medium of working space 34B (the 2nd inner space) the entrance part 37B (the 2nd entrance part) by wherein; Be formed on that inner member 33A goes up and from working space 34A towards the working medium of the outer pipe 42A of housing 32 outsides (the 1st discharge tube) 38A of export department (the 1st export department) by wherein; Be formed on that inner member 33B goes up and from working space 34B towards the working medium of the outer pipe 42B of housing 32 outsides (the 2nd discharge tube) 38B of export department (the 2nd export department) by wherein; Be separately positioned on one-way valve 39A, 39B (the 1st and the 2nd one-way valve) between entrance part 37A, 37B and working space 34A, the 34B; Be separately positioned on one-way valve 40A, 40B (the 3rd and the 4th one-way valve) between the 38A of export department, 38B and working space 34A, the 34B; A plurality of O shapes that gap between gap between working space 34A, 34B and the piezoelectric element 36 and entrance part 37A, 37B and the 38A of export department, 38B and housing 32 internal surfaces is sealed encircle 43 respectively., the slot part that platform (the 1st to the 4th one-way valve is provided with portion) is set and each O shape ring 43 is installed of one-way valve 39A, 39B, 40A, 40B is set here respectively, is provided with by on inner member 33A, 33B, processing in advance.
According to above-mentioned structure, also can with mode of execution 1 similarly, provide a kind of cycle efficiency that in the closed system of negative/positive pressure state, can use for a long time high piezoelectric pump 6 with low cost.
Further, owing to leak test hole 44A is communicated with the welding position of a plurality of metallic parts, so, can carry out the leak test of housing.
In addition, in the present embodiment, the situation to same with above-mentioned mode of execution 1 no longer repeats to describe in detail.
(mode of execution 3)
Fig. 4 is the sectional view of the piezoelectric pump of expression mode of execution 3.
The piezoelectric pump 6 of present embodiment is the variation of the piezoelectric pump 6 of mode of execution 1, it is characterized in that, the both sides of piezoelectric pump 36 are used as pump chamber (working space 34A, 34B).
Piezoelectric pump 6 is provided with as shown in Figure 4: be formed on that inner member 33A (the 1st inner member) goes up and from the inlet duct 41A (the 1st suction pipe) of housing 32 outsides towards the working medium of working space 34A (the 1st inner space) the entrance part 37A (the 1st entrance part) by wherein; Be formed on that inner member 33B (the 2nd inner member) goes up and from entrance part 37A towards the working medium of working space 34B (the 2nd inner space) the entrance part 37B (the 2nd entrance part) by wherein; Be formed on that inner member 33A goes up and from working space 34A towards the working medium of the outer pipe 42 (discharge tube) of the housing 32 outsides 38A of export department (the 1st export department) by wherein; Be formed on that inner member 33B goes up and from working space 34B towards the working medium of the outlet 38A 38B of export department (the 2nd export department) by wherein; Constitute by the hole or the groove that are formed on inner member 33A, the 33B, and the inlet interconnecting part 44B (the 1st interconnecting part) that entrance part 37A, 37B are communicated with; Constitute by the hole or the groove that are formed on inner member 33A, the 33B, and the outlet interconnecting part 44C (the 2nd interconnecting part) that the 38A of export department, 38B are communicated with; Be separately positioned on one-way valve 39A, 39B (the 1st and the 2nd one-way valve) between entrance part 37A, 37B and working space 34A, the 34B; Be separately positioned on one-way valve 40A, 40B (the 3rd and the 4th one-way valve) between the 38A of export department, 38B and working space 34A, the 34B; A plurality of O shapes that gap between gap between working space 34A, 34B and the piezoelectric element 36 and entrance part 37A, 37B and the 38A of export department, 38B and housing 32 internal surfaces is sealed encircle 43 respectively., the slot part that platform (the 1st to the 4th one-way valve is provided with portion) is set and each O shape ring 43 is installed of one-way valve 39A, 39B, 40A, 40B is set here respectively, is provided with by on inner member 33A, 33B, processing in advance.
Here, inlet interconnecting part 44B reaches on the internal surface of housing 32, is communicated with the welding position of a plurality of metallic parts.Thus, inlet interconnecting part 44B can be used as the leak test hole.On the other hand, outlet interconnecting part 44C seals by O shape ring (other O shape ring) is set on the mating face of inner member 33A, 33B, and is not communicated with the welding position of a plurality of metallic parts as shown in Figure 4.In addition, also inlet interconnecting part 44B sealing will be able to be exported interconnecting part 44C and will be communicated with the welding position.By inlet interconnecting part 44B is communicated with one and welding position among the outlet interconnecting part 44C, another person encircles with O shape and seals, and can avoid communicating with each other as entrance part 37A, 37B and the 38A of export department, the 38B of working medium path.
According to said structure, also can with mode of execution 1 similarly, provide a kind of cycle efficiency that in the closed system of negative/positive pressure state, can use for a long time high piezoelectric pump 6 with low cost.
In addition, inlet interconnecting part 44B and outlet interconnecting part 44C, owing to be on resin system inner member 33A, 33B, groove or hole to be set, so, need just can not form simply in the outer installment connecting tube of housing.Consequently, can realize the compact structure of piezoelectric pump 6.
In addition, in the present embodiment, the situation for same with above-mentioned mode of execution 1 is elaborated no longer repeatedly.
(explanation of Stirling cycle refrigerator)
With Fig. 5 one example and the working principle thereof of the structure of Stirling cycle refrigerator 4 are described.
As shown in Figure 5, the Stirling cycle refrigerator 4 of present embodiment is the Stirling engine of free piston type, comprising: housing 30; Be assembled in the pressure cylinder 13 in this housing 30; Reciprocating piston 14 and displacer 15 in this pressure cylinder 13; Regenerator 16; The working space 17 that comprises compression volume 17A and expansion space 17B; Radiating part 2; Endothermic section 3; Linear motor 23 as piston driver; Piston spring 24; Displacer spring 25; Displacer rod 26 and back pressure space 27.
In the example of Fig. 5, the frame of Stirling cycle refrigerator 4 (outer wall) is not to be made of single container, and is main by the housing 30 (reservoir portion) that is positioned at back pressure space 27 sides; Be positioned at radiating part 2 and the pipeline 18A and endothermic section 3 formations of working space 17 sides.Housing 30 has defined back pressure space 27.Being assembled with pressure cylinder 13, linear motor 23, piston spring 24 and displacer spring 25 in housing 30 is the various parts of representative.In the inside of above-mentioned frame, be filled with helium or working mediums such as hydrogen, nitrogen.
Between compression volume 17A and expansion space 17B, dispose regenerator 16, this regenerator 16 is to form by separate set coiled film with gap on the inner peripheral surface of pipeline 18A, by this regenerator 16 compression volume 17A is communicated with expansion space 17B.Thus, in Stirling cycle refrigerator 4, constitute the closed-loop path.The working medium fitting piston of enclosing in this closed-loop path 14 flows with the action of displacer 15, realizes contrary Stirling circulation described later.
Back pressure space 27 being arranged in pressure cylinder 13 outsides disposes linear motor 23.Linear motor 23 has inner yoke 20, movable magnet portion 21 and outside yoke 22, by this linear motor 23 pressure cylinder 13 axially on driven plunger 14.
One end of piston 14 is connected with the piston spring 24 that is made of leaf spring etc.This piston spring 24 has the function that elastic force is imposed on the elastic force applying mechanism of piston 14.By this piston spring 24 is applied elastic force, can make piston 14 in pressure cylinder 13, more stably carry out the periodicity to-and-fro motion.One end of displacer 15 is connected with displacer spring 25 by displacer rod 26.Displacer rod 26 connects the configuration of pistons 14 ground, and displacer spring 25 is made of leaf spring etc.The peripheral portion of the peripheral portion of this displacer spring 25 and piston spring 24 is by the support unit supporting of back pressure space 27 sides that extend to piston 14 from linear motor 23 (following also have the situation that is called the rear).
On the inner peripheral surface of radiating part 2, endothermic section 3, be respectively arranged with heat exchanger 18 and heat exchanger 19. Heat exchanger 18,19 carries out the heat exchange between compression volume 17A, expansion space 17B and radiating part 2, the suction portion 3 respectively.
At the rear side of housing 30, balancer weight 29 is installed by leaf spring 28.Balancer weight 29 is the quality parts that are used for absorbing housing 30 vibrations that the vibration because of piston 14 and displacer 15 produces.Specifically, because of 15 vibrations of piston 14 and displacer under vibrative situation on the housing 30, balancer weight 29 is vibrated in the mode of the vibration of following this housing 30, thus, alleviates the vibration of Stirling cycle refrigerator 4.
The working principle of this Stirling cycle refrigerator 4 then, is described.
At first, make linear motor 23 work, driven plunger 14.The piston 14 that is driven by linear motor 23 compresses the working fluid in the compression volume 17A (working gas) near displacer 15.
Because piston 14 is near displacer 15, the temperature of the working medium in the compression volume 17A rises, and still, the heat that produces in this compression volume 17A sheds to the outside by radiating part 2.Therefore, the temperature maintenance of the working medium in the compression volume 17A is at the state of basic isothermal.That is, this process is equivalent to the isothermal compression process in the contrary Stirling circulation.
Flow into the high-pressure working medium in the 17B of expansion space, expand owing to displacer 15 moves to piston 14 sides (rear side).So along with displacer 15 moves rearward, the central part of displacer spring 25 is distortion highlightedly rearward also.
Though as mentioned above, expand in the 17B of expansion space by making working medium, the temperature of the working medium in the 17B of expansion space can descend, but, because by endothermic section 3 outside heat is transmitted in the 17B of expansion space, so, the basic isothermal that keeps in the 17B of expansion space.That is, this process is equivalent to the isothermal expansion process in the contrary Stirling circulation.
Afterwards, displacer 15 beginnings begin to move towards the direction away from piston 14.Thus, the working medium in the 17B of expansion space returns to compression volume 17A side once more by regenerator 16.At this moment, the heat that will accumulate in the regenerator 16 imposes on working medium, and working medium is heated up.That is, this process is equivalent to waiting in the contrary Stirling circulation and holds heating process.
By carrying out this a succession of process (appearance cooling procedure-isothermal expansion process such as isothermal compression process-wait-wait and hold heating process) repeatedly, constitute contrary Stirling circulation.Consequently, endothermic section 3 becomes low temperature gradually, till having low-down temperature (for example-50 ℃ about).On the other hand, radiating part 2 becomes high temperature (for example about 60 ℃) gradually.As mentioned above, the low temperature heat energy in the endothermic section 3 supplies in the refrigeration storehouse by the low temperature side circulation loop, and the heat in the radiating part 2 sheds by the 1st and the 2nd high temperature side circulation loop outside the refrigeration storehouse.
More than, embodiments of the present invention are illustrated, still, beginning just can predict and the characteristic of the respective embodiments described above can be carried out suitable combination.In addition, all only are for illustration for mode of executions disclosed herein, do not constitute limitation of the invention.Scope of the present invention represented by claim, be included in the implication of claims equivalence and scope in all changes of carrying out.
Utilizability on the industry
As described above, the present invention is applicable to piezoelectric pump and stirling refrigerator.
Claims (9)
1. piezoelectric pump comprises:
Housing (32) with a plurality of metallic part bonding formation;
With the separated by spaces in the described housing (32) is the piezoelectric element (36) of the 1st and the 2nd inner space (34,34A, 34B, 35); And
Be arranged between described housing (32) and the described piezoelectric element (36), and keep the nonmetal system the 1st and the 2nd inner member (33A, 33B) of described piezoelectric element (36).
2. piezoelectric pump as claimed in claim 1 is characterized in that,
The the described the 1st and the 2nd inner member (33A, 33B) is that resin is made,
The the described the 1st and the 2nd inner member (33A, 33B) defines the periphery of the described the 1st and the 2nd inner space (34,35) respectively,
Mode with the described piezoelectric element of clamping (36) between the described the 1st and the 2nd inner member (33A, 33B) keeps this piezoelectric element (36).
3. piezoelectric pump as claimed in claim 1 is characterized in that, also comprises:
Be formed on that described the 1st inner member (33A) is gone up and from the outside suction pipe (41) of described housing (32) towards as the working medium of described the 1st inner space (34) of the working space entrance part (37) by wherein;
Be formed on that described the 1st inner member (33A) is gone up and from described the 1st inner space (34) towards the working medium of the outside discharge tube (42) of described housing (32) export department (38) by wherein;
Be arranged on the 1st one-way valve (39) between described entrance part (37) and described the 1st inner space (34);
Be arranged on the 2nd one-way valve (40) between described export department (38) and described the 1st inner space (34); And
A plurality of O shapes that gap between gap between the described the 1st and the 2nd inner space (34,35) and the described piezoelectric element (36) and described entrance part (37) and described export department (38) and the described housing (32) is sealed are encircled (43) respectively,
On described the 1st inner member (33A), be provided with a plurality of slot parts that the 1st and the 2nd one-way valve that the described the 1st and the 2nd one-way valve (39,40) is set respectively is provided with portion and described a plurality of O shape rings (43) are set respectively.
4. piezoelectric pump as claimed in claim 3 is characterized in that, also comprises:
The interconnecting part (44) that will be communicated with as described the 2nd inner space (35) in back pressure space and described entrance part (37) or described export department (38),
Described interconnecting part (44) is made of the hole or the groove that are formed on the described the 1st and the 2nd inner member (33A, 33B).
5. piezoelectric pump as claimed in claim 3 is characterized in that, also is provided with the intercommunicating pore (44) that described entrance part (37) or described export department (38) are communicated with the junction of described metallic parts.
6. piezoelectric pump as claimed in claim 1 is characterized in that, also comprises:
Be formed on that described the 1st inner member (33A) is gone up and from outside the 1st suction pipe (41) of described housing (32) towards as the working medium of described the 1st inner space (34A) of working space the 1st entrance part (37A) by wherein;
Be formed on that described the 2nd inner member (33B) is gone up and from outside the 2nd suction pipe (41B) of described housing (32) towards as the working medium of described the 2nd inner space (34B) of working space the 2nd entrance part (37B) by wherein;
Be formed on that described the 1st inner member (33A) is gone up and from described the 1st inner space (34A) towards the working medium of outside the 1st discharge tube (42A) of described housing (32) the 1st export department (38A) by wherein;
Be formed on that described the 2nd inner member (33B) is gone up and from described the 2nd inner space (34B) towards the working medium of outside the 2nd discharge tube (42B) of described housing (32) the 2nd export department (38B) by wherein;
Be separately positioned on the 1st and the 2nd one-way valve (39A, 39B) between the described the 1st and the 2nd entrance part (37A, 37B) and the described the 1st and the 2nd inner space (34A, 34B);
Be separately positioned on the 3rd and the 4th one-way valve (40A, 40B) between the described the 1st and the 2nd export department (38A, 38B) and the described the 1st and the 2nd inner space (34A, 34B); And
A plurality of O shapes that gap between gap between the described the 1st and the 2nd inner space (34A, 34B) and the described piezoelectric element (36) and the described the 1st and the 2nd entrance part (37A, 37B) and the described the 1st and the 2nd export department (38A, 38B) and the described housing (32) is sealed are encircled (43) respectively
On the described the 1st and the 2nd inner member (33A, 33B), be provided with a plurality of slot parts that the 1st to the 4th one-way valve that described the 1st to the 4th one-way valve (39A, 39B, 40A, 40B) is set respectively is provided with portion and described a plurality of O shape rings (43) are set respectively.
7. piezoelectric pump as claimed in claim 6 is characterized in that, also is provided with the intercommunicating pore (44A) that the described the 1st or the 2nd entrance part (37A, 37B) or the described the 1st or the 2nd export department (38A, 38B) are communicated with the junction of described metallic parts.
8. piezoelectric pump as claimed in claim 1 is characterized in that, also comprises:
Be formed on that described the 1st inner member (33A) is gone up and from the outside suction pipe (41) of described housing (32) towards as the working medium of described the 1st inner space (34) of working space the 1st entrance part (37A) by wherein;
Be formed on that described the 2nd inner member (33B) is gone up and from described the 1st entrance part (37A) towards the working medium of described the 2nd inner space (34B) the 2nd entrance part (37B) by wherein;
Be formed on that described the 1st inner member (33A) is gone up and from described the 1st inner space (34) towards the working medium of the outside discharge tube (42) of described housing (32) the 1st export department (38A) by wherein;
Be formed on that described the 2nd inner member (33B) is gone up and from described the 2nd inner space (33B) towards the working medium of described the 1st export department (38A) the 2nd export department (38B) by wherein;
Constitute by the hole or the groove that are formed on the described the 1st and the 2nd inner member (33A, 33B), with the 1st interconnecting part (44B) of the described the 1st and the 2nd entrance part (37A, 37B) connection;
Constitute by the hole or the groove that are formed on the described the 1st and the 2nd inner member (33A, 33B), with the 2nd interconnecting part (44C) of the described the 1st and the 2nd export department (38A, 38B) connection;
Be separately positioned on the 1st and the 2nd one-way valve (39A, 39B) between the described the 1st and the 2nd entrance part (37A, 37B) and the described the 1st and the 2nd inner space (34A, 34B);
Be separately positioned on the 3rd and the 4th one-way valve (40A, 40B) between the described the 1st and the 2nd export department (38A, 38B) and the described the 1st and the 2nd inner space (34A, 34B); And
A plurality of O shapes that gap between gap between the described the 1st and the 2nd inner space (34A, 34B) and the described piezoelectric element (36) and the described the 1st and the 2nd entrance part (37A, 37B) and the described the 1st and the 2nd export department (38A, 38B) and the described housing (32) is sealed are encircled (43) respectively
On the described the 1st and the 2nd inner member (33A, 33B), be provided with a plurality of slot parts that the 1st to the 4th one-way valve that described the 1st to the 4th one-way valve (39A, 39B, 40A, 40B) is set respectively is provided with portion and described a plurality of O shape rings (43) are set respectively.
9. a stirling refrigerator is characterized in that, the working medium circulation loop of high temperature side is provided with the piezoelectric pump described in the claim 1 (6).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004333189A JP3949135B2 (en) | 2004-11-17 | 2004-11-17 | Piezoelectric pump and Stirling refrigerator |
| JP333189/2004 | 2004-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101057077A true CN101057077A (en) | 2007-10-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2005800391131A Pending CN101057077A (en) | 2004-11-17 | 2005-11-11 | Piezoelectric pump and stirling refrigerator |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20080101965A1 (en) |
| EP (1) | EP1813811A1 (en) |
| JP (1) | JP3949135B2 (en) |
| KR (1) | KR20070073973A (en) |
| CN (1) | CN101057077A (en) |
| WO (1) | WO2006054488A1 (en) |
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2004
- 2004-11-17 JP JP2004333189A patent/JP3949135B2/en not_active Expired - Fee Related
-
2005
- 2005-11-11 CN CNA2005800391131A patent/CN101057077A/en active Pending
- 2005-11-11 EP EP05806011A patent/EP1813811A1/en not_active Withdrawn
- 2005-11-11 WO PCT/JP2005/020694 patent/WO2006054488A1/en not_active Application Discontinuation
- 2005-11-11 US US11/666,151 patent/US20080101965A1/en not_active Abandoned
- 2005-11-11 KR KR1020077013161A patent/KR20070073973A/en not_active Application Discontinuation
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| CN109162902A (en) * | 2018-09-20 | 2019-01-08 | 长春工业大学 | A kind of floating type I-shaped valve piezoelectric pump |
| CN109162902B (en) * | 2018-09-20 | 2023-12-15 | 长春工业大学 | Floating type I-shaped valve piezoelectric pump |
| CN113841018A (en) * | 2019-12-06 | 2021-12-24 | 福珞尔系统公司 | Center anchored MEMS-based active cooling system |
| CN113237246A (en) * | 2021-04-15 | 2021-08-10 | 成都仙德科技有限公司 | Stirling refrigerating and heating integrated machine |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1813811A1 (en) | 2007-08-01 |
| KR20070073973A (en) | 2007-07-10 |
| JP3949135B2 (en) | 2007-07-25 |
| JP2006144591A (en) | 2006-06-08 |
| WO2006054488A1 (en) | 2006-05-26 |
| US20080101965A1 (en) | 2008-05-01 |
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