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CN100539054C - Chip-packaging structure and preparation method thereof - Google Patents

Chip-packaging structure and preparation method thereof Download PDF

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Publication number
CN100539054C
CN100539054C CNB2007100876716A CN200710087671A CN100539054C CN 100539054 C CN100539054 C CN 100539054C CN B2007100876716 A CNB2007100876716 A CN B2007100876716A CN 200710087671 A CN200710087671 A CN 200710087671A CN 100539054 C CN100539054 C CN 100539054C
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CN
China
Prior art keywords
chip
lug boss
those
colloid
bonding wires
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2007100876716A
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Chinese (zh)
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CN101266932A (en
Inventor
乔永超
邱介宏
吴燕毅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BERMUDA CHIPMOS TECHNOLOGIES Co Ltd
Original Assignee
BERMUDA CHIPMOS TECHNOLOGIES Co Ltd
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Filing date
Publication date
Application filed by BERMUDA CHIPMOS TECHNOLOGIES Co Ltd filed Critical BERMUDA CHIPMOS TECHNOLOGIES Co Ltd
Priority to CNB2007100876716A priority Critical patent/CN100539054C/en
Priority to US11/737,766 priority patent/US20080224277A1/en
Publication of CN101266932A publication Critical patent/CN101266932A/en
Priority to US12/506,245 priority patent/US8088650B2/en
Application granted granted Critical
Publication of CN100539054C publication Critical patent/CN100539054C/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814—Conductive parts
    • H01L21/4821—Flat leads, e.g. lead frames with or without insulating supports
    • H01L21/4828—Etching
    • H01L21/4832—Etching a temporary substrate after encapsulation process to form leads
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    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
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    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495—Lead-frames or other flat leads
    • H01L23/49541—Geometry of the lead-frame
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    • H01L24/42—Wire connectors; Manufacturing methods related thereto
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    • H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
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    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
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    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
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    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
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    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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    • H01L2224/4911—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
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    • H01L24/42—Wire connectors; Manufacturing methods related thereto
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    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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    • H01L2924/19101—Disposition of discrete passive components
    • H01L2924/19107—Disposition of discrete passive components off-chip wires

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Lead Frames For Integrated Circuits (AREA)
  • Wire Bonding (AREA)

Abstract

The invention discloses a kind of manufacture method of chip-packaging structure, at first, provide a sheet metal with first lug boss, second lug boss and a plurality of the 3rd lug bosses.Afterwards, chip configuration on sheet metal, and is formed in order to be electrically connected at many bonding wires between the chip and second lug boss and second lug boss and the 3rd lug boss.Then, form colloid and colloid down in the upper and lower surface of sheet metal, this has a plurality of recesses in colloid down, to expose the part that is connected with each other between first lug boss, second lug boss and three lug bosses.At last, following colloid is this sheet metal of etching mask etching, make first lug boss, second lug boss and the 3rd lug boss form respectively lead frame chip carrier, frame and pin conflux.

Description

Chip-packaging structure and preparation method thereof
Technical field
The invention relates to a kind of chip-packaging structure, and particularly relevant for a kind of chip-packaging structure with lead frame.
Background technology
In semiconductor industry, (integrated circuits, production IC) mainly can be divided into three phases to integrated circuit: the making (IC process) of the design of integrated circuit (IC design), integrated circuit and the encapsulation (IC package) of integrated circuit.
In the making of integrated circuit, chip (chip) is to finish via wafer (wafer) making, formation integrated circuit and cutting crystal wafer steps such as (wafer sawing).Wafer has an active face (activesurface), and its general reference wafer has the surface of active member (active device).After the integrated circuit of wafer inside was finished, the active face of wafer also disposed a plurality of weld pads (bonding pad), can outwards be electrically connected at a carrier (carrier) via these weld pads so that finally cut formed chip by wafer.Carrier for example is a lead frame (leadframe) or a base plate for packaging (package substrate).The mode that chip can routing engages (wire bonding) or chip bonding (flip chip bonding) is connected on the carrier, makes these weld pads of chip can be electrically connected at the contact of carrier, to constitute a chip-packaging structure.
Look schematic diagram on Fig. 1 existing chip packaging body.Fig. 2 is the generalized section of Fig. 1 chip packing-body.Please also refer to Fig. 1 and Fig. 2, for the convenience on illustrating, Fig. 1 and Fig. 2 are the schematic diagrames of perspective packing colloid 140, and only go out the profile of packing colloid 140 with dotted lines.Chip packing-body 100 comprises a lead frame 110, a chip 120, many first bonding wires (bonding wire) 130, many second bonding wires 132, many articles the 3rd bonding wires 134 and a packing colloid 140.Lead frame 110 comprises a chip carrier (die pad) 112, many interior pins 114 and the many framves 116 that conflux.Interior pin 114 is disposed at the periphery of chip carrier 112.Conflux frame 116 between chip carrier 112 and interior pin 114.
Chip 120 has an active surface 122 respect to one another and a back side 124.Chip 120 is disposed on the chip carrier 112, and the back side 124 is towards chip carrier 112.Chip 120 has a plurality of ground contacts 126 and a plurality of non-ground contacts 128, and wherein these non-ground contacts 128 comprise a plurality of power supply contacts and a plurality of signal contact.Ground contact 126 all is positioned on the active surface 122 with non-ground contact 128.
First bonding wire 130 is electrically connected at the frame 116 that confluxes with ground contact 126.Second bonding wire 132 frame 116 that will conflux is electrically connected at the grounding pin in pins 114 in these.134 of the 3rd bonding wires are electrically connected at pin in remaining 114 the second corresponding contact 128 respectively.Packing colloid 140 is coated on chip carrier 112, interior pin 114, the frame 116 that confluxes, chip 120, first bonding wire 130, second bonding wire 132 and the 3rd bonding wire 134 in it.
It should be noted that this lead frame 110 itself promptly has a chip carrier (die pad) 112, many interior pins 114 and the many framves 116 that conflux because existing chip encapsulating structure 100 is to use patterned lead frame in encapsulation process.Yet, in lead frame patterning manufacturing process, must use costly exposure imaging photomask, increase extra lead frame cost in rain.
Summary of the invention
The invention provides a kind of chip-packaging structure and preparation method thereof, to solve in the existing chip encapsulation procedure packaging cost problem of higher of directly using the patterning lead frame to be constituted.Therefore, the present invention uses a sheet metal, and is by the etch process technology, like this to form chip carrier, the conflux frame and the pin of lead frame on sheet metal in the middle of encapsulation process, the cost of manufacture that will help to save chip-packaging structure.
In addition, etch process of the present invention be following colloid by having recess as etching mask, to replace the existing required photomask of exposure imaging, so, can save down a large amount of photomask expenses, and then the reduction packaging cost.
The present invention proposes a kind of manufacture method of chip-packaging structure, and it comprises the following steps.At first, provide a sheet metal, this sheet metal has a upper surface and a lower surface.Wherein, the upper surface of metallic film has one first lug boss, one second lug boss and a plurality of the 3rd lug boss, this second lug boss is between first lug boss and these the 3rd lug bosses, and first lug boss, second lug boss and these the 3rd lug bosses are to be connected with each other.Afterwards, provide a chip, this chip has an active face, a back side and a plurality of chip pad.Wherein, these chip pad are to be disposed on the active face of chip.Next, the back side with chip is bonded on first lug boss.Afterwards, form many first bonding wires and many second bonding wires, wherein these first bonding wires connect these chip pad and second lug boss respectively, and these second bonding wires connect these second lug bosses and the 3rd lug boss respectively.Then, form on one colloid and colloid once, wherein colloid envelopes upper surface, chip and these first bonding wires and second bonding wire of sheet metal on this, and down colloid envelopes the lower surface of sheet metal, and exposes the part that first lug boss, second lug boss and these the 3rd lug bosses link to each other each other.At last, following colloid is this sheet metal of etching mask etching, be electrically insulated each other up to first lug boss, second lug boss and these the 3rd lug bosses, so, first lug boss promptly forms a chip carrier, second lug boss and promptly forms the frame that confluxes, and these the 3rd lug bosses promptly form a plurality of pins.
In an embodiment of the present invention, sheet metal is a Copper Foil.
In an embodiment of the present invention, these first bonding wires and second bonding wire are to be formed by the routing joining technique.
In an embodiment of the present invention, following colloid comprises a plurality of recesses, to expose the part that first lug boss, second lug boss and these the 3rd lug bosses link to each other each other.
In an embodiment of the present invention, the manufacture method of this chip-packaging structure comprises that also the formation colloid is in these recesses of following colloid.
In addition, the present invention proposes a kind of chip-packaging structure in addition, and it mainly comprises colloid, one first time colloid and one second time colloid on a chip, a lead frame, many first bonding wires, many second bonding wires.This chip has an active face, a back side and a plurality of chip pad, and wherein these chip pad are disposed on the active face.Lead frame has a upper surface and a lower surface corresponding with it, and it comprises a chip carrier, a plurality of pin and at least one frame that confluxes, and the back side of this chip is to be bonded on the chip carrier.These pins are around this chip carrier.This frame that confluxes is between chip carrier and these pins.Many first bonding wires connect these chip pad frame that confluxes therewith respectively.Many second bonding wires connect this conflux frame and these pin respectively.Colloid envelopes upper surface, chip and first bonding wire and second bonding wire of lead frame on this.First time colloid envelopes the lower surface of lead frame, and it has a plurality of recesses, exposing corresponding to chip carrier and the last colloid between the frame of confluxing, corresponding to the last colloid that confluxes between frame and these pins, and corresponding to the last colloid between the two adjacent pins.
In an embodiment of the present invention, this chip-packaging structure also comprises colloid one second time, is formed in the recess of first time colloid.
The manufacture method of disclosed chip-packaging structure, be earlier with chip configuration on sheet metal, on chip and sheet metal, form required bonding wire and packing colloid again.At last, etch away the part sheet metal, can form lead frame chip carrier, frame and interior pin conflux.
For above-mentioned feature and advantage of the present invention can be become apparent, preferred embodiment cited below particularly, and conjunction with figs. is described in detail below.
Description of drawings
Fig. 1 illustrates to looking schematic diagram on the existing chip packaging body.
Fig. 2 illustrates the generalized section into Fig. 1 chip packing-body.
Fig. 3 A～3F illustrates and is a kind of making flow process generalized section of chip-packaging structure according to an embodiment of the invention.
Embodiment
Fig. 3 A～3F illustrates and is a kind of making flow process generalized section of chip-packaging structure according to an embodiment of the invention.At first, please refer to Fig. 3 A, a sheet metal 210 is provided, it has a upper surface 210a and a lower surface 210b.The upper surface 210a of this metallic film 210 is formed with a plurality of grooves, it being divided into one first lug boss 212, one second lug boss 214 and a plurality of the 3rd lug boss 216, and first lug boss 212, second lug boss 214 and these the 3rd lug bosses 216 are to be connected with each other.Wherein, first lug boss 212 is positioned at the middle body of sheet metal 210 approximately, and second lug boss 214 is the outsides that are surrounded on first lug boss 212, and these the 3rd lug bosses 216 are to be surrounded on second lug boss, 214 outsides.In addition, first lug boss 212, second lug boss 214 and a plurality of the 3rd lug boss 216 have chip carrier respectively, the profile of conflux frame and pin, make its through can be respectively after following process as the chip carrier in the lead frame, frame and pin conflux.In this embodiment, sheet metal 210 can be made up of Copper Foil.
Afterwards, please refer to Fig. 3 B, a chip 220 is provided, this chip 220 has an active face 220a, a back side 220b and a plurality of chip pad 222, wherein, active face 220a is with respect to back side 220b, and chip pad 222 is to be disposed on the active face 220a of chip 220.The back side 220b of this chip 220 is bonded on first lug boss 212 of sheet metal 210.For example, chip 220 can stick together the glue material by one and is fixed on first lug boss 212.
Next, please refer to Fig. 3 C, form many first bonding wires 230 and many second bonding wires 240, wherein these first bonding wires 230 are connected between the chip pad 222 and second lug boss 214, and these second bonding wires 240 are connected between second lug boss 214 and the 3rd lug boss 216.And these first bonding wires 230 and second bonding wire 240 are formed by the routing joining technique.
Afterwards, please refer to Fig. 3 D, go up in the upper surface 210a of sheet metal 210 and lower surface 210b and form on one colloid 250 and colloid 260 once.Wherein, last colloid 250 envelopes part upper surface 210a, chip 220, first bonding wire 230 and second bonding wire 240 of sheet metal 210; And down colloid 260 envelopes the lower surface 210b of sheet metal 210, and it has a plurality of recesses 262, to expose the part that first lug boss 212, second lug boss 214 and the 3rd lug boss 216 link to each other each other on the sheet metal 210.This down recess 262 of colloid 260 be that corresponding protuberance 282 forms on the mould 280 required when forming down colloid 260.
At last, please refer to Fig. 3 E, following colloid 260 is the lower surface 210b of this sheet metal 210 of etching mask etching, be electrically insulated each other with these the 3rd lug bosses 216 up to first lug boss 212, second lug boss 214, so, this first lug boss 212 promptly can be used as chip carrier 212 ', this second lug boss 214 in the lead frame 210 ' and promptly can be used as the frame 214 ' that confluxes, and these the 3rd lug bosses 216 promptly can be used as pin 216 '.So far, promptly roughly finish the making flow process of chip-packaging structure 200.
For preventing that the chip carrier 212 ' among Fig. 3 E, conflux frame 214 ' and pin 216 ' are because of being exposed to the problem that oxidation easily takes place in the air, please refer to shown in Fig. 3 F, can be after finishing the step shown in Fig. 3 E, form colloid 270 in the recess 262 of colloid 260 down, with the chip carrier 212 ' that prevents Fig. 3 E, conflux frame 214 ' and pin 216 ' because of being exposed to the problem that oxidation takes place in the air.
In sum, the present invention proposes a kind of manufacture method of brand-new chip-packaging structure, at first, provides a sheet metal with first lug boss, second lug boss and a plurality of the 3rd lug bosses.Afterwards, chip configuration on sheet metal, and is formed in order to electrically connect many bonding wires between chip and second lug boss and second lug boss and the 3rd lug boss.Then, form colloid and reach colloid down on the upper and lower surface of sheet metal, this has a plurality of recesses in colloid down, to expose the part that is connected with each other between first lug boss, second lug boss and three lug bosses.At last, following colloid is this sheet metal of etching mask etching, make first lug boss, second lug boss and the 3rd lug boss form respectively lead frame chip carrier, frame and pin conflux.
The manufacture method of disclosed chip-packaging structure is different from and existingly is with the chip encapsulating manufacturing procedure part of lead frame as carrier: the existing chip encapsulation procedure is directly to carry out the encapsulation of chip with ready-made patterning lead frame, and chip-packaging structure of the present invention be earlier with chip configuration on sheet metal, form required bonding wire and packing colloid again, at last, etch away the sheet metal of part again, with the chip carrier that forms lead frame, frame and interior pin conflux.Because the manufacture method of chip-packaging structure provided by the present invention is to use a sheet metal, in the middle of encapsulation process, pass through the etch process technology, with the chip carrier that on sheet metal, forms lead frame, frame and pin conflux, so, can save its cost of manufacture, to solve in the prior art because of directly using the patterning lead frame to cause the packaging cost problem of higher.
In addition, etch process of the present invention is to be used as etching mask by the following colloid with recess, has the required photomask of exposure imaging now to replace by the following colloid with recess, and then saves a large amount of photomask expenses, to reach the purpose that reduces packaging cost.
Though the present invention discloses as above with preferred embodiment; right its is not in order to limit the present invention; have in the technical field under any and know the knowledgeable usually; without departing from the spirit and scope of the present invention; when can doing a little change and retouching, so protection scope of the present invention is when with being as the criterion that claim was defined.

Claims (7)

1. the manufacture method of a chip-packaging structure comprises:
One sheet metal is provided, have a upper surface and a lower surface, wherein this upper surface of this metallic film has one first lug boss, one second lug boss and a plurality of the 3rd lug boss, this second lug boss is between this first lug boss and those the 3rd lug bosses, and this first lug boss, this second lug boss and those the 3rd lug bosses are to be connected with each other;
One chip is provided, and this chip has an active face, a back side and a plurality of chip pad, and wherein those chip pad are disposed on this active face;
This back side of this chip is bonded on this first lug boss;
Form many first bonding wires and many second bonding wires, wherein those first bonding wires are to connect those chip pad and those second lug bosses respectively, and those second bonding wires are to connect this second lug boss and those the 3rd lug bosses respectively;
Form on one colloid and colloid once, wherein should go up colloid is this upper surface, this chip and those first bonding wires and those second bonding wires that envelopes this sheet metal, this time colloid is this lower surface that envelopes this sheet metal, and exposes the part that this first lug boss, this second lug boss and those the 3rd lug bosses link to each other each other; And
With this time colloid is this sheet metal of etching mask etching, be electrically insulated each other up to this first lug boss, this second lug boss and those the 3rd lug bosses, so, this first lug boss promptly forms a chip carrier, this second lug boss and promptly forms the frame that confluxes, and those the 3rd lug bosses promptly form a plurality of pins.
2. the manufacture method of chip-packaging structure as claimed in claim 1 is characterized in that, this sheet metal is a Copper Foil.
3. the manufacture method of chip-packaging structure as claimed in claim 1 is characterized in that, those first bonding wires and those second bonding wires are to be formed by the routing joining technique.
4. the manufacture method of chip-packaging structure as claimed in claim 1 is characterized in that, this time colloid comprises a plurality of recesses, to expose the part that this first lug boss, this second lug boss and those the 3rd lug bosses link to each other each other.
5. the manufacture method of chip-packaging structure as claimed in claim 4 is characterized in that, also comprises forming colloid in those recesses of this time colloid.
6. chip-packaging structure comprises:
One chip has an active face, a back side and a plurality of chip pad, and wherein those chip pad are disposed on this active face;
One lead frame has a upper surface and a lower surface corresponding with it, and this lead frame comprises:
One chip carrier, this back side of this chip are to be bonded on this chip carrier;
A plurality of pins are around this chip carrier; And
At least one frame that confluxes is between this chip carrier and those pins;
Many first bonding wires connect those chip pad and this frame that confluxes respectively;
Many second bonding wires connect this conflux frame and those pin respectively;
Colloid on one envelopes this upper surface, this chip and those first bonding wires and those second bonding wires of this lead frame; And
One first time colloid, envelope this lower surface of this lead frame, wherein this first time colloid has a plurality of recesses, go up colloid, go up colloid to expose corresponding to this being somebody's turn to do between frame and those pins of confluxing corresponding to this chip carrier and this being somebody's turn to do between the frame of confluxing, and corresponding to the upward colloid between two adjacent these pins.
7. chip-packaging structure as claimed in claim 6 is characterized in that, also comprises colloid one second time, is formed in those recesses of this first time colloid.
CNB2007100876716A 2007-03-13 2007-03-13 Chip-packaging structure and preparation method thereof Expired - Fee Related CN100539054C (en)

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US11/737,766 US20080224277A1 (en) 2007-03-13 2007-04-20 Chip package and method of fabricating the same
US12/506,245 US8088650B2 (en) 2007-03-13 2009-07-20 Method of fabricating chip package

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