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CN100523754C - Optical fibre pressure intensity sensor based on beam of constant strength - Google Patents

Optical fibre pressure intensity sensor based on beam of constant strength Download PDF

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Publication number
CN100523754C
CN100523754C CNB2006101697530A CN200610169753A CN100523754C CN 100523754 C CN100523754 C CN 100523754C CN B2006101697530 A CNB2006101697530 A CN B2006101697530A CN 200610169753 A CN200610169753 A CN 200610169753A CN 100523754 C CN100523754 C CN 100523754C
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China
Prior art keywords
optical fiber
support tube
diaphragm
fiber grating
pressure sensor
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Expired - Fee Related
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CNB2006101697530A
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Chinese (zh)
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CN101210851A (en
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张文涛
李芳�
刘育梁
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Institute of Semiconductors of CAS
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Institute of Semiconductors of CAS
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Abstract

An optical fiber pressure sensor based on uniform strength beam comprises a supporting canister that is the main body of the optical fiber pressure sensor and is opened with two round holes at the opposite positions on the lower wall surface thereof; a diaphragm fixed at the lower end of the supporting canister; an end cover disposed at the upper end of the supporting canister and used for sealing the supporting canister; an L-shaped uniform strength beam, wherein, one side thereof is fixed on the side wall of the supporting canister, a space is provided between the other side and the diaphragm, a lug boss is disposed between the uniform strength beam and the center of the diaphragm and used for transmitting the deformation of the diaphragm; an optical fiber grating fixed on the bottom surface between the uniform strength beam and the diaphragm, wherein the tail fibers at the two ends of the optical fiber grating are respectively led out from the two round holes on the supporting canister; and a temperature compensation optical fiber grating fixed on the inner surface of the end cover, wherein the tail fiber at one end of the temperature compensation optical fiber grating is led out from one round hole on the supporting canister.

Description

Optical fiber pressure sensor based on the beam of uniform strength
Technical field
The present invention relates to the fiber optic sensor technology field, relate in particular to a kind of optical fiber pressure sensor based on the beam of uniform strength.
Background technology
Fibre Optical Sensor is compared with corresponding conventional sensors, has remarkable advantages at aspects such as sensitivity, dynamic range, reliabilities, seems particularly outstanding in building, oil, Military Application field.
Optical fiber pressure sensor is all mudulation effects of utilizing the biography light characteristic of optical fiber and it and surrounding environment to interact and produce, surveys the instrument of surrounding environment pressure.It is compared with traditional pressure transducer, and following main advantage is arranged: pressure is highly sensitive, be not subjected to electromagnetic interference (EMI), in light weight, high temperature resistant, structure is small and exquisite, reliable type height, and has information sensing concurrently and optical information is transmitted in advantages such as the whole body.
In view of the as above technical advantage of optical fiber pressure sensor, can satisfy of the requirement of each developed country in fields such as oil, military affairs, actively launched research at present in this regard.
In common intensity modulation type, digital, fiber Bragg grating type optical fiber pressure sensor, the fiber Bragg grating type optical fiber pressure sensor is present main direction of studying.
People such as Fu Haiwei and Fu Junmei has reported a kind of fiber bragg grating pressure sensor, be to adopt to be bonded in the way of carrying out enhanced sensitivity on the linear diaphragm at a end with fiber grating, drive fiber grating generation strain by circular iris in the displacement of normal direction, thereby detect pressure.The optical fiber pressure sensor of making requires the bonding optical fiber of prestress like this, and adopts point type bonding, complex process, and linear diaphragm is thinner, is difficult to measure for big pressure, and comparatively responsive for variation of temperature.
Therefore, how to simplify technology, improve the pressure measurement scope of sensor, eliminating responsive to temperature simultaneously is that optical fiber pressure sensor moves towards one of essential important technology that solves of practicability.
Summary of the invention
The technical matters that solves
In view of this, fundamental purpose of the present invention is to provide a kind of optical fiber pressure sensor, to reduce the packaging technology difficulty of optical fiber pressure sensor, improves the pressure measurement scope of sensor, the trip temperature of going forward side by side compensation.
Technical scheme of the present invention
For achieving the above object, technical scheme of the present invention is achieved in that
A kind of optical fiber pressure sensor based on the beam of uniform strength of the present invention is characterized in that, comprising:
One support tube is a cylindrical shell, and this support tube is the main body of optical fiber pressure sensor, and the position that the lower wall surface of this support tube is relative has two circular holes;
One diaphragm, this diaphragm is fixed on the lower end of support tube;
One end cap, this end cap is installed in the upper end of support tube, is used to seal support tube;
One equal strength beam, this equal strength beam is one L shaped, and the one side of this equal strength beam is fixed on the sidewall in the support tube, and a gap is arranged between the another side of this equal strength beam and the diaphragm, between this equal strength beam and the diaphragm center boss is arranged, this boss is used to transmit the deformation of diaphragm;
One fiber grating, this fiber grating are fixed on the bottom surface between the beam of uniform strength and the diaphragm, and the tail optical fiber at these fiber grating two ends two circular holes from the support tube is respectively drawn;
One temperature compensation optical fiber grating, this temperature compensation optical fiber grating are fixed on the inner face of end cap, and the tail optical fiber of this temperature compensation optical fiber grating one end is drawn from the circular hole on the support tube.
Wherein said diaphragm and support tube are for dividing body structure or being structure as a whole.
Wherein said diaphragm is the structure that the center is thick, the edge is gradually thin.
The wherein said beam of uniform strength is to be fixed on the inwall of support tube by bolt or bonding mode.
The fixed form of wherein said fiber grating and temperature compensation optical fiber grating is to be adhesively fixed.
The end that wherein said boss contacts with the beam of uniform strength has a groove, is used to pass the tail optical fiber of fiber grating.
The column type joint further is installed in the circular hole of wherein said support tube sidewall, is used for fixing the fiber grating of drawing and the tail optical fiber of temperature compensation optical fiber grating.
Scribble the high strength fluid sealant in wherein said support tube and end cap connection place and the column type joint, make the airtight air chamber of the inner formation of support tube.
Wherein said end cap is identical with support tube material coefficient of thermal expansion coefficient.
Beneficial effect
From technique scheme as can be seen, the present invention has following beneficial effect:
1, technology is simple.Carry out pressure detection and temperature compensation by fiber grating being adhered to the metal surface, reduced technology difficulty, make that process consistency is easy to guarantee.
2, sound pressure sensitivity is convenient to control.Material parameters such as geometric parameter such as thickness that can be by regulating the beam of uniform strength 40, the thickness of diaphragm 20, radius or elastic modulus wait the sensitivity of regulating optical fiber pressure sensor.
3, eliminated the influence that ambient temperature changes.Carried out temperature compensation by temperature compensation optical fiber grating 60, the deviation that sensor is caused because of ambient temperature changes is disallowable to be fallen.
Description of drawings
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail, wherein:
Fig. 1 is the structural profile synoptic diagram of optical fiber pressure sensor provided by the invention.
Fig. 2 is the synoptic diagram of boss 41 among Fig. 1.
Embodiment
As shown in Figure 1, Fig. 1 is the structural profile synoptic diagram of the optical fiber pressure sensor based on the beam of uniform strength provided by the invention.This optical fiber pressure sensor comprises: a support tube 10 is a cylindrical shell, and this support tube 10 is the main body of optical fiber pressure sensor, and the position that the lower wall surface of this support tube 10 is relative has two circular holes 11,12; One diaphragm 20, this diaphragm 20 is fixed on the lower end of support tube 10, is used to experience outside pressure; One end cap 30, this end cap 30 is installed in the upper end of support tube 10, is used to seal support tube 10; One equal strength beam 40, this equal strength beam 40 is one L shaped, the one side of this equal strength beam 40 is fixed on the sidewall in the support tube 10, between the another side of this equal strength beam 40 and the diaphragm 20 gap is arranged, between this equal strength beam 40 and diaphragm 20 centers boss 41 is arranged, this boss 41 is used for the deformation of diaphragm 20 is delivered to the end of the beam of uniform strength; One fiber grating 50, this fiber grating 50 are fixed on the bottom surface between the beam of uniform strength 40 and the diaphragm 20, are used to experience the strain on the beam of uniform strength, and the tail optical fiber at these fiber grating 50 two ends two circular holes 11,12 from the support tube 10 is respectively drawn; One temperature compensation optical fiber grating 60, this temperature compensation optical fiber grating 60 is fixed on the inner face of end cap 30, is used to experience temperature variation, carries out temperature compensation, and the tail optical fiber of these temperature compensation optical fiber grating 60 1 ends is drawn from the circular hole 11 on the support tube 10.
Diaphragm 20 can adopt different processing and fabricating modes to make it to become the branch body structure with support tube 10 or be structure as a whole.And diaphragm 20 is the structure that the center is thick, the edge is gradually thin, under same pressure action, will produce bigger distortion like this.
The beam of uniform strength 40 is to be fixed on the inwall of support tube 10 by bolt or bonding mode.
The fixed form of fiber grating 50 and temperature compensation optical fiber grating 60 is to be adhesively fixed.
The end that boss 41 contacts with the beam of uniform strength 40 has a groove 42 (among Fig. 2), is used to pass the tail optical fiber of fiber grating 50.
In the circular hole 11,12 of support tube 10 sidewalls column type joint 13,14 is installed further, is used for fixing the tail optical fiber of the fiber grating of drawing 50 and temperature compensation optical fiber grating 60.
Scribble the high strength fluid sealant in support tube 10 and end cap 30 connection places and the column type joint 13,14, make the airtight air chamber of support tube 10 inner formations.End cap 30 has the enough extraneous pressure of rigidity opposing with the sidewall of support tube 10, and the thickness of diaphragm 20 generally is far smaller than the thickness of support tube 10 sidewalls, thereby pressure-sensitive to external world, as sensing element.
When the external world had pressure action on sensor, deformation took place in diaphragm 20, curved inwardly, and the amount of flexibility at its center is delivered to the end of the beam of uniform strength 40 by boss 41, and the beam of uniform strength is bent.For the beam of uniform strength, its surperficial strain is uniformly, so just drives the fiber grating 50 that is bonded on the beam of uniform strength 40 and produces uniform stretching strain, thereby cause the variation of fiber grating reflection wavelength.For fiber grating, so the variable quantity of its reflection wavelength and strained being directly proportional are by detecting the size that the wavelength change amount can obtain outside pressure.
End cap 30 adopts the thermal expansivity identical materials to make with support tube 10, when the temperature in the external world changes, because the variation of the fiber grating reflection wavelength that temperature variation causes is identical for sensing grating 50 with temperature compensation optical fiber grating 60, so the method that can subtract each other by the drift value with its wavelength is eliminated influence of temperature variation.
Simultaneously, the sensitivity of this optical fiber pressure sensor and multinomial structure and material relating to parameters.Change the sensitivity of this optical fiber pressure sensor such as the elastic modulus of the material of thickness that can be by regulating the beam of uniform strength 40 and use.The material parameters such as elastic modulus of the material that geometric parameter such as thickness that for another example can be by changing diaphragm 20, radius or diaphragm 20 use wait the sensitivity of regulating this optical fiber pressure sensor.
And, the tail optical fiber of the fiber grating 50 of this optical fiber pressure sensor and temperature compensation optical fiber grating 60 can be together in series with the sensor fibre and the temperature compensation optical fiber of another optical fiber pressure sensor respectively, carry out multimetering.
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the above only is specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of being made, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (9)

1, a kind of optical fiber pressure sensor based on the beam of uniform strength is characterized in that, comprising:
One support tube is a cylindrical shell, and this support tube is the main body of optical fiber pressure sensor, and the position that the lower wall surface of this support tube is relative has two circular holes;
One diaphragm, this diaphragm is fixed on the lower end of support tube;
One end cap, this end cap is installed in the upper end of support tube, is used to seal support tube;
One equal strength beam, this equal strength beam is one L shaped, and the one side of this equal strength beam is fixed on the sidewall in the support tube, and a gap is arranged between the another side of this equal strength beam and the diaphragm, between this equal strength beam and the diaphragm center boss is arranged, this boss is used to transmit the deformation of diaphragm;
One fiber grating, this fiber grating are fixed on the bottom surface between the beam of uniform strength and the diaphragm, and the tail optical fiber at these fiber grating two ends two circular holes from the support tube is respectively drawn;
One temperature compensation optical fiber grating, this temperature compensation optical fiber grating are fixed on the inner face of end cap, and the tail optical fiber of this temperature compensation optical fiber grating one end is drawn from the circular hole on the support tube.
2, optical fiber pressure sensor according to claim 1 is characterized in that, wherein said diaphragm and support tube are for dividing body structure or being structure as a whole.
3, optical fiber pressure sensor according to claim 1 and 2 is characterized in that, wherein said diaphragm is the structure that the center is thick, the edge is gradually thin.
4, optical fiber pressure sensor according to claim 1 is characterized in that, the wherein said beam of uniform strength is to be fixed on the inwall of support tube by bolt or bonding mode.
5, optical fiber pressure sensor according to claim 1 is characterized in that, the fixed form of wherein said fiber grating and temperature compensation optical fiber grating is to be adhesively fixed.
6, optical fiber pressure sensor according to claim 1 is characterized in that, the end that wherein said boss contacts with the beam of uniform strength has a groove, is used to pass the tail optical fiber of fiber grating.
7, optical fiber pressure sensor according to claim 3 is characterized in that, the column type joint further is installed in the circular hole of wherein said support tube sidewall, is used for fixing the fiber grating of drawing and the tail optical fiber of temperature compensation optical fiber grating.
8, according to claim 1 or 7 described optical fiber pressure sensors, it is characterized in that, scribble the high strength fluid sealant in wherein said support tube and end cap connection place and the column type joint, make the airtight air chamber of the inner formation of support tube.
9, optical fiber pressure sensor according to claim 1 is characterized in that, wherein said end cap is identical with support tube material coefficient of thermal expansion coefficient.
CNB2006101697530A 2006-12-28 2006-12-28 Optical fibre pressure intensity sensor based on beam of constant strength Expired - Fee Related CN100523754C (en)

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Cited By (1)

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GB2465397C (en) * 2008-11-17 2013-04-10 Messier Dowty Ltd Load indicator
CN101893492A (en) * 2010-04-06 2010-11-24 中国地震局地壳应力研究所 Mutually-clamped optical fiber grating temperature sensor
CN104567706A (en) * 2014-12-24 2015-04-29 北京交通大学 Method used for detecting stress strain of engineering structure
CN105509957B (en) * 2016-01-06 2019-03-12 中国石油天然气股份有限公司 Fiber grating pressure sensor
CN107014299B (en) * 2017-06-01 2019-06-11 哈尔滨工业大学 Road relative horizontal displacement sensor between optical fiber grating layer
CN115046661A (en) * 2022-05-13 2022-09-13 中国地质调查局水文地质环境地质调查中心 Small-size super weak fiber grating pressure sensor

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CN102072787A (en) * 2010-10-29 2011-05-25 中国科学院上海光学精密机械研究所 Temperature self-compensation fiber grating tension sensor

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