CN100523754C - Optical fibre pressure intensity sensor based on beam of constant strength - Google Patents
Optical fibre pressure intensity sensor based on beam of constant strength Download PDFInfo
- Publication number
- CN100523754C CN100523754C CNB2006101697530A CN200610169753A CN100523754C CN 100523754 C CN100523754 C CN 100523754C CN B2006101697530 A CNB2006101697530 A CN B2006101697530A CN 200610169753 A CN200610169753 A CN 200610169753A CN 100523754 C CN100523754 C CN 100523754C
- Authority
- CN
- China
- Prior art keywords
- optical fiber
- support tube
- diaphragm
- fiber grating
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
An optical fiber pressure sensor based on uniform strength beam comprises a supporting canister that is the main body of the optical fiber pressure sensor and is opened with two round holes at the opposite positions on the lower wall surface thereof; a diaphragm fixed at the lower end of the supporting canister; an end cover disposed at the upper end of the supporting canister and used for sealing the supporting canister; an L-shaped uniform strength beam, wherein, one side thereof is fixed on the side wall of the supporting canister, a space is provided between the other side and the diaphragm, a lug boss is disposed between the uniform strength beam and the center of the diaphragm and used for transmitting the deformation of the diaphragm; an optical fiber grating fixed on the bottom surface between the uniform strength beam and the diaphragm, wherein the tail fibers at the two ends of the optical fiber grating are respectively led out from the two round holes on the supporting canister; and a temperature compensation optical fiber grating fixed on the inner surface of the end cover, wherein the tail fiber at one end of the temperature compensation optical fiber grating is led out from one round hole on the supporting canister.
Description
Technical field
The present invention relates to the fiber optic sensor technology field, relate in particular to a kind of optical fiber pressure sensor based on the beam of uniform strength.
Background technology
Fibre Optical Sensor is compared with corresponding conventional sensors, has remarkable advantages at aspects such as sensitivity, dynamic range, reliabilities, seems particularly outstanding in building, oil, Military Application field.
Optical fiber pressure sensor is all mudulation effects of utilizing the biography light characteristic of optical fiber and it and surrounding environment to interact and produce, surveys the instrument of surrounding environment pressure.It is compared with traditional pressure transducer, and following main advantage is arranged: pressure is highly sensitive, be not subjected to electromagnetic interference (EMI), in light weight, high temperature resistant, structure is small and exquisite, reliable type height, and has information sensing concurrently and optical information is transmitted in advantages such as the whole body.
In view of the as above technical advantage of optical fiber pressure sensor, can satisfy of the requirement of each developed country in fields such as oil, military affairs, actively launched research at present in this regard.
In common intensity modulation type, digital, fiber Bragg grating type optical fiber pressure sensor, the fiber Bragg grating type optical fiber pressure sensor is present main direction of studying.
People such as Fu Haiwei and Fu Junmei has reported a kind of fiber bragg grating pressure sensor, be to adopt to be bonded in the way of carrying out enhanced sensitivity on the linear diaphragm at a end with fiber grating, drive fiber grating generation strain by circular iris in the displacement of normal direction, thereby detect pressure.The optical fiber pressure sensor of making requires the bonding optical fiber of prestress like this, and adopts point type bonding, complex process, and linear diaphragm is thinner, is difficult to measure for big pressure, and comparatively responsive for variation of temperature.
Therefore, how to simplify technology, improve the pressure measurement scope of sensor, eliminating responsive to temperature simultaneously is that optical fiber pressure sensor moves towards one of essential important technology that solves of practicability.
Summary of the invention
The technical matters that solves
In view of this, fundamental purpose of the present invention is to provide a kind of optical fiber pressure sensor, to reduce the packaging technology difficulty of optical fiber pressure sensor, improves the pressure measurement scope of sensor, the trip temperature of going forward side by side compensation.
Technical scheme of the present invention
For achieving the above object, technical scheme of the present invention is achieved in that
A kind of optical fiber pressure sensor based on the beam of uniform strength of the present invention is characterized in that, comprising:
One support tube is a cylindrical shell, and this support tube is the main body of optical fiber pressure sensor, and the position that the lower wall surface of this support tube is relative has two circular holes;
One diaphragm, this diaphragm is fixed on the lower end of support tube;
One end cap, this end cap is installed in the upper end of support tube, is used to seal support tube;
One equal strength beam, this equal strength beam is one L shaped, and the one side of this equal strength beam is fixed on the sidewall in the support tube, and a gap is arranged between the another side of this equal strength beam and the diaphragm, between this equal strength beam and the diaphragm center boss is arranged, this boss is used to transmit the deformation of diaphragm;
One fiber grating, this fiber grating are fixed on the bottom surface between the beam of uniform strength and the diaphragm, and the tail optical fiber at these fiber grating two ends two circular holes from the support tube is respectively drawn;
One temperature compensation optical fiber grating, this temperature compensation optical fiber grating are fixed on the inner face of end cap, and the tail optical fiber of this temperature compensation optical fiber grating one end is drawn from the circular hole on the support tube.
Wherein said diaphragm and support tube are for dividing body structure or being structure as a whole.
Wherein said diaphragm is the structure that the center is thick, the edge is gradually thin.
The wherein said beam of uniform strength is to be fixed on the inwall of support tube by bolt or bonding mode.
The fixed form of wherein said fiber grating and temperature compensation optical fiber grating is to be adhesively fixed.
The end that wherein said boss contacts with the beam of uniform strength has a groove, is used to pass the tail optical fiber of fiber grating.
The column type joint further is installed in the circular hole of wherein said support tube sidewall, is used for fixing the fiber grating of drawing and the tail optical fiber of temperature compensation optical fiber grating.
Scribble the high strength fluid sealant in wherein said support tube and end cap connection place and the column type joint, make the airtight air chamber of the inner formation of support tube.
Wherein said end cap is identical with support tube material coefficient of thermal expansion coefficient.
Beneficial effect
From technique scheme as can be seen, the present invention has following beneficial effect:
1, technology is simple.Carry out pressure detection and temperature compensation by fiber grating being adhered to the metal surface, reduced technology difficulty, make that process consistency is easy to guarantee.
2, sound pressure sensitivity is convenient to control.Material parameters such as geometric parameter such as thickness that can be by regulating the beam of uniform strength 40, the thickness of diaphragm 20, radius or elastic modulus wait the sensitivity of regulating optical fiber pressure sensor.
3, eliminated the influence that ambient temperature changes.Carried out temperature compensation by temperature compensation optical fiber grating 60, the deviation that sensor is caused because of ambient temperature changes is disallowable to be fallen.
Description of drawings
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail, wherein:
Fig. 1 is the structural profile synoptic diagram of optical fiber pressure sensor provided by the invention.
Fig. 2 is the synoptic diagram of boss 41 among Fig. 1.
Embodiment
As shown in Figure 1, Fig. 1 is the structural profile synoptic diagram of the optical fiber pressure sensor based on the beam of uniform strength provided by the invention.This optical fiber pressure sensor comprises: a support tube 10 is a cylindrical shell, and this support tube 10 is the main body of optical fiber pressure sensor, and the position that the lower wall surface of this support tube 10 is relative has two circular holes 11,12; One diaphragm 20, this diaphragm 20 is fixed on the lower end of support tube 10, is used to experience outside pressure; One end cap 30, this end cap 30 is installed in the upper end of support tube 10, is used to seal support tube 10; One equal strength beam 40, this equal strength beam 40 is one L shaped, the one side of this equal strength beam 40 is fixed on the sidewall in the support tube 10, between the another side of this equal strength beam 40 and the diaphragm 20 gap is arranged, between this equal strength beam 40 and diaphragm 20 centers boss 41 is arranged, this boss 41 is used for the deformation of diaphragm 20 is delivered to the end of the beam of uniform strength; One fiber grating 50, this fiber grating 50 are fixed on the bottom surface between the beam of uniform strength 40 and the diaphragm 20, are used to experience the strain on the beam of uniform strength, and the tail optical fiber at these fiber grating 50 two ends two circular holes 11,12 from the support tube 10 is respectively drawn; One temperature compensation optical fiber grating 60, this temperature compensation optical fiber grating 60 is fixed on the inner face of end cap 30, is used to experience temperature variation, carries out temperature compensation, and the tail optical fiber of these temperature compensation optical fiber grating 60 1 ends is drawn from the circular hole 11 on the support tube 10.
The beam of uniform strength 40 is to be fixed on the inwall of support tube 10 by bolt or bonding mode.
The fixed form of fiber grating 50 and temperature compensation optical fiber grating 60 is to be adhesively fixed.
The end that boss 41 contacts with the beam of uniform strength 40 has a groove 42 (among Fig. 2), is used to pass the tail optical fiber of fiber grating 50.
In the circular hole 11,12 of support tube 10 sidewalls column type joint 13,14 is installed further, is used for fixing the tail optical fiber of the fiber grating of drawing 50 and temperature compensation optical fiber grating 60.
Scribble the high strength fluid sealant in support tube 10 and end cap 30 connection places and the column type joint 13,14, make the airtight air chamber of support tube 10 inner formations.End cap 30 has the enough extraneous pressure of rigidity opposing with the sidewall of support tube 10, and the thickness of diaphragm 20 generally is far smaller than the thickness of support tube 10 sidewalls, thereby pressure-sensitive to external world, as sensing element.
When the external world had pressure action on sensor, deformation took place in diaphragm 20, curved inwardly, and the amount of flexibility at its center is delivered to the end of the beam of uniform strength 40 by boss 41, and the beam of uniform strength is bent.For the beam of uniform strength, its surperficial strain is uniformly, so just drives the fiber grating 50 that is bonded on the beam of uniform strength 40 and produces uniform stretching strain, thereby cause the variation of fiber grating reflection wavelength.For fiber grating, so the variable quantity of its reflection wavelength and strained being directly proportional are by detecting the size that the wavelength change amount can obtain outside pressure.
Simultaneously, the sensitivity of this optical fiber pressure sensor and multinomial structure and material relating to parameters.Change the sensitivity of this optical fiber pressure sensor such as the elastic modulus of the material of thickness that can be by regulating the beam of uniform strength 40 and use.The material parameters such as elastic modulus of the material that geometric parameter such as thickness that for another example can be by changing diaphragm 20, radius or diaphragm 20 use wait the sensitivity of regulating this optical fiber pressure sensor.
And, the tail optical fiber of the fiber grating 50 of this optical fiber pressure sensor and temperature compensation optical fiber grating 60 can be together in series with the sensor fibre and the temperature compensation optical fiber of another optical fiber pressure sensor respectively, carry out multimetering.
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the above only is specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of being made, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (9)
1, a kind of optical fiber pressure sensor based on the beam of uniform strength is characterized in that, comprising:
One support tube is a cylindrical shell, and this support tube is the main body of optical fiber pressure sensor, and the position that the lower wall surface of this support tube is relative has two circular holes;
One diaphragm, this diaphragm is fixed on the lower end of support tube;
One end cap, this end cap is installed in the upper end of support tube, is used to seal support tube;
One equal strength beam, this equal strength beam is one L shaped, and the one side of this equal strength beam is fixed on the sidewall in the support tube, and a gap is arranged between the another side of this equal strength beam and the diaphragm, between this equal strength beam and the diaphragm center boss is arranged, this boss is used to transmit the deformation of diaphragm;
One fiber grating, this fiber grating are fixed on the bottom surface between the beam of uniform strength and the diaphragm, and the tail optical fiber at these fiber grating two ends two circular holes from the support tube is respectively drawn;
One temperature compensation optical fiber grating, this temperature compensation optical fiber grating are fixed on the inner face of end cap, and the tail optical fiber of this temperature compensation optical fiber grating one end is drawn from the circular hole on the support tube.
2, optical fiber pressure sensor according to claim 1 is characterized in that, wherein said diaphragm and support tube are for dividing body structure or being structure as a whole.
3, optical fiber pressure sensor according to claim 1 and 2 is characterized in that, wherein said diaphragm is the structure that the center is thick, the edge is gradually thin.
4, optical fiber pressure sensor according to claim 1 is characterized in that, the wherein said beam of uniform strength is to be fixed on the inwall of support tube by bolt or bonding mode.
5, optical fiber pressure sensor according to claim 1 is characterized in that, the fixed form of wherein said fiber grating and temperature compensation optical fiber grating is to be adhesively fixed.
6, optical fiber pressure sensor according to claim 1 is characterized in that, the end that wherein said boss contacts with the beam of uniform strength has a groove, is used to pass the tail optical fiber of fiber grating.
7, optical fiber pressure sensor according to claim 3 is characterized in that, the column type joint further is installed in the circular hole of wherein said support tube sidewall, is used for fixing the fiber grating of drawing and the tail optical fiber of temperature compensation optical fiber grating.
8, according to claim 1 or 7 described optical fiber pressure sensors, it is characterized in that, scribble the high strength fluid sealant in wherein said support tube and end cap connection place and the column type joint, make the airtight air chamber of the inner formation of support tube.
9, optical fiber pressure sensor according to claim 1 is characterized in that, wherein said end cap is identical with support tube material coefficient of thermal expansion coefficient.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2006101697530A CN100523754C (en) | 2006-12-28 | 2006-12-28 | Optical fibre pressure intensity sensor based on beam of constant strength |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2006101697530A CN100523754C (en) | 2006-12-28 | 2006-12-28 | Optical fibre pressure intensity sensor based on beam of constant strength |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101210851A CN101210851A (en) | 2008-07-02 |
CN100523754C true CN100523754C (en) | 2009-08-05 |
Family
ID=39611024
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2006101697530A Expired - Fee Related CN100523754C (en) | 2006-12-28 | 2006-12-28 | Optical fibre pressure intensity sensor based on beam of constant strength |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN100523754C (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102072787A (en) * | 2010-10-29 | 2011-05-25 | 中国科学院上海光学精密机械研究所 | Temperature self-compensation fiber grating tension sensor |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2465397C (en) * | 2008-11-17 | 2013-04-10 | Messier Dowty Ltd | Load indicator |
CN101893492A (en) * | 2010-04-06 | 2010-11-24 | 中国地震局地壳应力研究所 | Mutually-clamped optical fiber grating temperature sensor |
CN104567706A (en) * | 2014-12-24 | 2015-04-29 | 北京交通大学 | Method used for detecting stress strain of engineering structure |
CN105509957B (en) * | 2016-01-06 | 2019-03-12 | 中国石油天然气股份有限公司 | Fiber grating pressure sensor |
CN107014299B (en) * | 2017-06-01 | 2019-06-11 | 哈尔滨工业大学 | Road relative horizontal displacement sensor between optical fiber grating layer |
CN115046661A (en) * | 2022-05-13 | 2022-09-13 | 中国地质调查局水文地质环境地质调查中心 | Small-size super weak fiber grating pressure sensor |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6181851B1 (en) * | 1997-05-29 | 2001-01-30 | E-Tek Dynamics, Inc. | Temperature-compensated optical fiber package |
US6276215B1 (en) * | 1997-12-05 | 2001-08-21 | Optoplan As | Sensor for measuring strain |
US6337932B1 (en) * | 1999-09-09 | 2002-01-08 | Agere Systems Guardian Corp. | Apparatus and method for thermostatic compensation of temperature sensitive devices |
CN1341208A (en) * | 1999-02-24 | 2002-03-20 | 西门子公司 | Bragg grating device for measuring mechanical force, utilization of said device and method for operating the same |
CN2748890Y (en) * | 2004-11-17 | 2005-12-28 | 周智 | Fiber grating ice pressure sensor |
CN1244827C (en) * | 2001-05-29 | 2006-03-08 | 瑞兴科技股份有限公司 | Fiber grating temperature compensator and its making process |
CN1287135C (en) * | 2004-05-19 | 2006-11-29 | 南开大学 | Temperature automaticcompensating optical fiber grating force sensor |
-
2006
- 2006-12-28 CN CNB2006101697530A patent/CN100523754C/en not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6181851B1 (en) * | 1997-05-29 | 2001-01-30 | E-Tek Dynamics, Inc. | Temperature-compensated optical fiber package |
US6276215B1 (en) * | 1997-12-05 | 2001-08-21 | Optoplan As | Sensor for measuring strain |
CN1341208A (en) * | 1999-02-24 | 2002-03-20 | 西门子公司 | Bragg grating device for measuring mechanical force, utilization of said device and method for operating the same |
US6337932B1 (en) * | 1999-09-09 | 2002-01-08 | Agere Systems Guardian Corp. | Apparatus and method for thermostatic compensation of temperature sensitive devices |
CN1244827C (en) * | 2001-05-29 | 2006-03-08 | 瑞兴科技股份有限公司 | Fiber grating temperature compensator and its making process |
CN1287135C (en) * | 2004-05-19 | 2006-11-29 | 南开大学 | Temperature automaticcompensating optical fiber grating force sensor |
CN2748890Y (en) * | 2004-11-17 | 2005-12-28 | 周智 | Fiber grating ice pressure sensor |
Non-Patent Citations (2)
Title |
---|
温度补偿的悬臂梁光纤光栅力传感研究. 范文龙等.光子学报,第30卷第11期. 2001 * |
高灵敏度的光纤光栅压强传感器. 傅海威等.光学学报,第24卷第2期. 2004 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102072787A (en) * | 2010-10-29 | 2011-05-25 | 中国科学院上海光学精密机械研究所 | Temperature self-compensation fiber grating tension sensor |
Also Published As
Publication number | Publication date |
---|---|
CN101210851A (en) | 2008-07-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101206149B (en) | Diaphragm type optical fiber pressure sensor | |
CN100523754C (en) | Optical fibre pressure intensity sensor based on beam of constant strength | |
CN100514006C (en) | Optical fiber grating sonic device | |
CN101285845B (en) | Cantilever beam type optical fibre grating accelerometer | |
CN101285847B (en) | Temperature insensitive optical fibre grating acceleration sensor | |
CN100585407C (en) | Optical fibre grating accelerometer based on cantilever beam deflection | |
CN100529701C (en) | Optical fiber pressure sensor based on membrane deflection | |
US5072617A (en) | Fiber-optic liquid level sensor | |
Liu et al. | UV adhesive diaphragm-based FPI sensor for very-low-frequency acoustic sensing | |
US9658123B2 (en) | All-optical pressure sensor | |
CN101900616B (en) | Optical fiber Bragg grating pressure sensor and corresponding measurement method thereof | |
US11796411B2 (en) | Sensor with a flexible plate | |
CN202008416U (en) | Optical fiber Bragg grating pressure sensor | |
CN109060106B (en) | Double-cavity combined optical interference sound sensor probe and sensing system thereof | |
CN107911782B (en) | Optical fiber microphone probe and optical fiber microphone system | |
CN103674358B (en) | Method for compensating temperature of diaphragm type fiber F-P (Fabry-Perot) cavity pressure sensor | |
CN102680161B (en) | Fiber brag grating atmospheric pressure sensing system | |
CN101598802B (en) | Optical fiber laser detector capable of being used on land and underwater | |
CN100514014C (en) | Optical fiber pipe hydraulic sensor | |
CN101206129A (en) | Sensitization structure for optical fiber grating sensor | |
KR20120036351A (en) | Pressure measuring cell arrangement comprising an optical diaphragm prssure measuing cell | |
WO2015080663A1 (en) | Micro-machined optical pressure sensors | |
CN107351102A (en) | Fiber grating force-touch sensor, robot and its manipulator finger tip | |
CN113865773A (en) | High-sensitivity optical fiber surface plasmon atmospheric pressure detector | |
CN107621328B (en) | Atmospheric pressure measuring device and method |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090805 Termination date: 20100128 |