CN109818524B - Piezoelectric precision driving device and method based on bird wing-shaped bionic flexible mechanism - Google Patents
Piezoelectric precision driving device and method based on bird wing-shaped bionic flexible mechanism Download PDFInfo
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Abstract
The application relates to a piezoelectric precise driving device and method based on a bird wing-shaped bionic flexible mechanism, and belongs to the field of precise driving. The device comprises a base, a flexible mechanism module and a linear guide rail module; the base is connected with external equipment through four conical counter bores on the base, and a convex positioning surface is arranged on the base; the flexible mechanism module is used for driving the linear guide rail module and comprises a bird wing-shaped bionic flexible mechanism, a piezoelectric stack A, a supporting seat and a piezoelectric stack B; the bird wing-shaped bionic flexible mechanism is positioned and fixed on the base through a positioning surface on the base; the linear guide rail module comprises a guide rail and a sliding block and is used for carrying or connecting a driving target and outputting displacement. The advantages are that: the linear bidirectional motion is realized by adopting a single flexible mechanism and a single driving foot, the influence of processing and assembling errors on the performance of the device is reduced, and the device has small volume, compact structure and simple control, and can be applied to the fields of micromanipulation, medical engineering, precise instruments, precise driving under normal temperature and low temperature environments and the like.
Description
Technical Field
The application relates to the field of precise driving, in particular to a piezoelectric precise driving device and method based on a bird wing-shaped bionic flexible mechanism. Can be applied to the fields of micromanipulation, medical engineering, precise instruments, precise driving under normal temperature and low temperature environments, and the like.
Background
The piezoelectric driving technology is used as a novel driving mode, has the advantages of high displacement precision, large load output, compact structure, no electromagnetic interference, compatibility with vacuum low-temperature environment and the like, is suitable for being applied to a precise driving device, and is especially concerned by the fields of micromanipulation, medical engineering, precise instruments, precise driving under normal temperature and low temperature environments and the like. At present, the piezoelectric driving technology is mainly divided into a resonance type piezoelectric driving technology and a non-resonance type piezoelectric driving technology, wherein the non-resonance type piezoelectric driving technology is mainly divided into an inchworm type piezoelectric driving technology and a stick-slip type piezoelectric driving technology. In recent years, stick-slip piezoelectric driving technology has been developed due to its advantages of simple structure and easy control, and there is a piezoelectric driving device that uses parasitic motion principle to enhance stick-slip driving performance, for example, chinese patent (CN 201720065487.0) adopts a combination of a piezoelectric stack and a flexible hinge, and uses parasitic motion generated by the flexible hinge to increase friction force to a friction block, so that the friction block moves along a guide rail direction.
However, the existing piezoelectric driving device for enhancing the stick-slip driving performance by utilizing the parasitic motion principle adopts a plurality of flexible mechanisms and a plurality of drives to realize linear bidirectional motion, so that the volume of the driving device is increased, manufacturing and assembling errors are introduced, and the accuracy of the driving device is reduced to a certain extent. Therefore, the design of the piezoelectric driving device capable of realizing linear and bidirectional movement by adopting a single flexible mechanism and a single driving foot has important application and research significance for the development of the piezoelectric driving device for enhancing the stick-slip driving performance by utilizing parasitic movement.
Disclosure of Invention
The application aims to provide a piezoelectric precise driving device and method based on a bird wing-shaped bionic flexible mechanism, which solve the problems existing in the prior art. The bionic flexible mechanism simulating the wing bone structure is adopted, and the function of realizing linear bidirectional movement by utilizing a single flexible mechanism and a single driving foot can be realized. The whole driving device can realize stable and reliable precise linear bidirectional movement based on the stick-slip driving and parasitic movement principle, and has the advantages of small volume, compact structure, easy processing, simple control and high positioning precision.
The above object of the present application is achieved by the following technical solutions:
the piezoelectric precise driving device based on the bird wing-shaped bionic flexible mechanism comprises a base 1, a flexible mechanism module and a linear guide rail module; the base 1 is connected with external equipment through four conical counter bores on the base, and a convex positioning surface is arranged on the base; the flexible mechanism module comprises a bird wing-shaped bionic flexible mechanism 2, a piezoelectric stack A3, a supporting seat 4 and a piezoelectric stack B5; the bird wing-shaped bionic flexible mechanism 2 is positioned and fixed on the base 1 through a positioning surface on the base 1, a flexible hinge A2-2 of the bird wing-shaped bionic flexible mechanism supports the piezoelectric stack B5, and the shearing force applied to the piezoelectric stack B5 is improved through micro deformation when the piezoelectric stack B5 works so as to avoid damage; the piezoelectric stack A3 and the piezoelectric stack B5 do not work simultaneously, are excited by sawtooth wave signals and output variable displacement, and when the piezoelectric stack A3 works, the driving foot 2-1 is pushed to rotate around the straight round flexible hinge C2-4 and the sliding block 6 of the linear guide rail module is driven to move to the right in a stepping mode; when the piezoelectric stack B5 works, the driving foot 2-1 is pushed to rotate around the straight round flexible hinge B2-3 and the sliding block 6 is driven to move leftwards in a stepping mode; the supporting seat 4 is positioned and fixed on the base 1 through a positioning surface on the base 1 to support the piezoelectric stack A3, and the shearing force suffered by the piezoelectric stack A3 is improved through small deformation to avoid damage when the piezoelectric stack A3 works.
The driving foot 2-1 of the bird wing-shaped bionic flexible mechanism rotates clockwise around the straight round flexible hinge C2-4 under the action of signal excitation extension of the piezoelectric stack A3 to drive the sliding block 6 of the linear guide rail module to move rightwards, meanwhile, force perpendicular to the driving direction is generated to press the sliding block 6 to increase driving friction force, when the piezoelectric stack A3 recovers the original length, the driving foot 2-1 generates retreating movement under the action of strain energy stored by the flexible hinge C2-4 and drives the sliding block 6 to move leftwards, meanwhile, the force on the sliding block 6 along the direction perpendicular to the driving direction is reduced, the driving friction force is reduced to weaken the retreating distance of the driving sliding block 6, and the movement displacement difference generated by the sliding block 6 in the whole movement period is the step length of one period.
The driving foot 2-1 of the bird wing-shaped bionic flexible mechanism rotates clockwise around the straight round flexible hinge B2-3 under the action of signal excitation extension of the piezoelectric stack B5 to drive the sliding block 6 to move leftwards, meanwhile, force perpendicular to the driving direction is generated to press the sliding block 6 to increase driving friction force, when the piezoelectric stack B5 recovers the original length, the driving foot 2-1 generates retreating movement under the action of strain energy stored by the flexible hinge B2-3 and drives the sliding block 6 to move rightwards, meanwhile, the force on the sliding block 6 along the direction perpendicular to the driving direction is reduced, the driving friction force is reduced to weaken the retreating distance of the driving sliding block 6, and the movement displacement difference generated by the sliding block 6 in the whole movement period is the step length of one period.
The linear guide rail module comprises a guide rail 7 and a sliding block 6, wherein the guide rail 7 is positioned and fixed on the base 1 through a positioning surface on the base 1, and plays a role in guiding the sliding block 6; the crossed rollers are arranged between the sliding block 6 and the guide rail 7, so that the sliding block 6 can move along the guide rail 7 in a straight line in a bidirectional manner, and a driving target can be connected through threads.
The application further aims to provide a piezoelectric precise driving method based on the bird wing-shaped bionic flexible mechanism, which comprises the following steps of:
step (1) determining a driving direction, if the driving direction is forward, that is, the slider 6 moves rightwards, selecting the piezoelectric stack A3 as an excitation object, and if the driving direction is reverse, that is, the slider 6 moves leftwards, selecting the piezoelectric stack B5 as an excitation object;
step (2) applying a sawtooth wave excitation signal to the determined piezoelectric stack A3 or piezoelectric stack B5 to enable the sliding block 6 to move towards a target position, and adjusting the moving speed of the sliding block 6 by changing the amplitude and frequency of the excitation signal;
and (3) stopping applying the sawtooth wave excitation signal when the sliding block 6 reaches the target position, and finishing the driving task.
The application has the beneficial effects that: the piezoelectric driving device can realize the function of realizing linear bidirectional motion by utilizing a single flexible mechanism and a single driving foot, can solve the problems that the volume of the driving device is increased and manufacturing and assembly errors are introduced due to the adoption of a plurality of flexible mechanisms and a plurality of driving feet in the conventional piezoelectric driving device for enhancing the stick-slip driving performance by utilizing parasitic motion, has small volume, compact structure and simple control, and can be applied to the fields of medical engineering, precise instruments, micromanipulation, precise driving under normal temperature and low temperature environments and the like. The driving device has the advantages of large movement stroke, high positioning precision and the like, and has larger load capacity. The application has important significance for the development of fields such as precise driving in vacuum low-temperature environment in China, and has wide application prospect in the fields such as micromanipulation, medical engineering, precise instruments and the like.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate and explain the application and together with the description serve to explain the application.
FIG. 1 is a schematic diagram of the overall structure of the present application;
FIG. 2 is a schematic diagram of a flexible mechanism module of the present application;
FIG. 3 is a schematic view of a base of the present application;
FIG. 4 is a schematic diagram of a sawtooth excitation signal according to the present application;
FIG. 5 is a schematic diagram of the reverse motion principle of the present application;
fig. 6 is a schematic diagram of the principle of forward motion of the present application.
In the figure: 1. a base; 2. bird wing-shaped bionic flexible mechanism; 2-1, driving feet; 2-2, a flexible hinge A;2-3, a flexible hinge B;2-4, a flexible hinge C; 3. a piezoelectric stack A; 4. a support base; 5. a piezoelectric stack B; 6. a slide block; 7. and a guide rail.
Detailed Description
The details of the present application and its specific embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 6, the stick-slip type linear precise piezoelectric driving device and method based on the bird wing-shaped bionic flexible mechanism adopt a single flexible mechanism and a single driving foot to realize linear bidirectional movement, reduce the influence of processing and assembly errors on the performance of the device, have small volume, compact structure and simple control, and can be applied to the fields of micromanipulation, medical engineering, precise instruments, precise driving under normal temperature and low temperature environments and the like.
Referring to fig. 1 to 4, the piezoelectric precision driving device based on the bird wing-shaped bionic flexible mechanism comprises a base 1, a flexible mechanism module and a linear guide rail module; four conical counter bores are formed in the base 1 and are used for connecting the piezoelectric driving device with other equipment, and a convex positioning surface is designed on the base to facilitate precise assembly of other components;
the flexible mechanism module is used for driving the linear guide rail module and comprises a bird wing-shaped bionic flexible mechanism 2, a piezoelectric stack A3, a supporting seat 4 and a piezoelectric stack B5; the bird wing-shaped bionic flexible mechanism 2 is positioned through a positioning surface on the base 1 and is fixed on the base 1 through screws, the driving foot 2-1 of the bird wing-shaped bionic flexible mechanism can rotate clockwise around the straight round flexible hinge C2-4 under the action of signal excitation extension of the piezoelectric stack A3 to drive the sliding block 6 to move rightwards, meanwhile, force perpendicular to the driving direction is generated to press the sliding block 6 to increase driving friction force, load capacity and motion stability are enhanced, when the piezoelectric stack A3 is de-excited to restore the original length, the driving foot 2-1 can generate back motion under the action of strain energy stored by the flexible hinge C2-4 and drive the sliding block 6 to move leftwards, meanwhile, the force on the sliding block 6 along the direction perpendicular to the driving direction is reduced to further reduce the driving friction force so as to weaken the back distance of the driving sliding block 6, and the motion displacement difference generated by the sliding block 6 in the whole process is the total output displacement.
The driving foot 2-1 can also rotate clockwise around the straight round flexible hinge B2-3 under the action of signal excitation elongation of the piezoelectric stack B5 to drive the sliding block 6 to move leftwards, meanwhile, force perpendicular to the driving direction is generated to press the sliding block 6 to increase driving friction force, load capacity and motion stability are enhanced, when the piezoelectric stack B5 is deenergized to restore the original length, the driving foot 2-1 can generate retreating motion under the action of strain energy stored by the flexible hinge B2-3 and drive the sliding block 6 to move rightwards, meanwhile, the force on the sliding block 6 along the direction perpendicular to the driving direction is reduced, the driving friction force is further reduced to weaken the retreating distance of the driving sliding block 6, and the motion displacement difference generated by the sliding block 6 in the whole process is the total output displacement.
The flexible hinge A2-2 plays a role in supporting the piezoelectric stack B, and improves the shearing force applied to the piezoelectric stack B through micro deformation to avoid damage when the piezoelectric stack B works; the piezoelectric stack A3 and the piezoelectric stack B5 do not work simultaneously, both can be excited by sawtooth wave signals and output variable displacement, and when the piezoelectric stack A3 works, the driving foot 2-1 is pushed to rotate around the straight round flexible hinge C2-4 and the sliding block 6 is driven to continuously move to the right in a stepping way; when the piezoelectric stack B5 works, the driving foot 2-1 is pushed to wind the straight round flexible hinge B2-3 and the sliding block 6 is driven to continuously move leftwards to generate stepping motion; the supporting seat 4 is positioned through a positioning surface on the base 1 and is fixed on the base 1 through a screw, so that the piezoelectric stack A is supported, and the shearing force suffered by the piezoelectric stack A is improved through tiny deformation to avoid damage when the piezoelectric stack A works.
The linear guide rail module is used for carrying or connecting a driving target and outputting displacement and comprises a guide rail 7 and a sliding block 6, wherein the guide rail 7 is positioned through a positioning surface on the base 1 and is fixed on the base 1 through a screw, so that the guiding function of the sliding block 6 is achieved; the sliding block 6 and the guide rail 7 are provided with crossed rollers, so that linear bidirectional movement along the guide rail 7 is realized, and a driving target can be connected through threads.
Referring to fig. 1 to 6, the specific working procedure of the present application is as follows:
realization of linear rightward displacement of the piezoelectric precision driving device along the guide rail based on the bird wing-shaped bionic flexible mechanism:
when the sawtooth wave excitation signal is positioned at the rising edge, the piezoelectric stack A3 stretches to push the bird wing-shaped bionic flexible mechanism, so that the driving foot 2-1 generates clockwise rotation motion around the flexible hinge C2-4, the sliding block 6 of the linear guide rail module is pushed to move rightwards along the direction of the guide rail 7, and meanwhile, force vertical to the driving direction is generated to press the sliding block 6 to increase driving friction force so as to strengthen load capacity and motion stability; when the sawtooth wave excitation signal is at the falling edge, the piezoelectric stack A3 is rapidly contracted, the bird wing-shaped bionic flexible mechanism 2 and the driving foot 2-1 thereof can rapidly retract to the initial position under the action of strain energy stored by the flexible hinge C2-4, the restoring motion of the driving foot 2-1 can drive the sliding block 6 to move leftwards, meanwhile, the force on the sliding block 6 along the direction perpendicular to the driving direction is reduced, the driving friction force is further reduced to weaken the retraction distance for driving the sliding block 6, and the motion displacement difference generated by the sliding block 6 in the whole motion period is the step length of one period.
Realization of linear left displacement of the piezoelectric precision driving device along the guide rail based on the bird wing-shaped bionic flexible mechanism: when the sawtooth wave excitation signal is positioned at the rising edge, the piezoelectric stack B5 stretches to push the bird wing-shaped bionic flexible mechanism, so that the driving foot 2-1 generates anticlockwise rotation motion around the flexible hinge B2-3, the sliding block 6 of the linear guide rail module is pushed to move leftwards along the direction of the guide rail 7, and meanwhile, force perpendicular to the driving direction is generated to press the sliding block 6 to increase driving friction force so as to strengthen load capacity and motion stability; when the sawtooth wave excitation signal is at the falling edge, the piezoelectric stack B5 is rapidly contracted, the bird wing-shaped bionic flexible mechanism 2 and the driving foot 2-1 thereof can rapidly retract to the initial position under the action of strain energy stored by the flexible hinge B2-3, the restoring motion of the driving foot 2-1 can drive the sliding block 6 to move rightwards, meanwhile, the force on the sliding block 6 along the direction perpendicular to the driving direction is reduced, the driving friction force is further reduced to weaken the retraction distance for driving the sliding block 6, and the motion displacement difference generated by the sliding block 6 in the whole motion period is the step length of one period.
By repeatedly loading the sawtooth wave excitation signal, the piezoelectric driving device continuously accumulates step sizes to realize stepping displacement output. In addition, the accurate control of displacement can be realized to realize sub-nanometer positioning accuracy through displacement closed-loop control.
Referring to fig. 1 to 6, the piezoelectric precision driving method based on the bird wing-shaped bionic flexible mechanism of the application realizes displacement output of a sliding block by applying a sawtooth wave excitation signal to a corresponding piezoelectric stack, and adjusts the speed of the sliding block by changing the amplitude and frequency of the excitation signal, and specifically comprises the following steps:
step (1) of determining a driving direction, selecting a piezoelectric stack a as an excitation target if the driving direction is a forward direction (the slider 6 moves rightward), and selecting a piezoelectric stack B as an excitation target if the driving direction is a reverse direction (the slider 6 moves leftward);
step (2) applying a sawtooth wave excitation signal to the determined piezoelectric stack to enable the sliding block 6 to move towards a target position, wherein the moving speed of the sliding block 6 can be adjusted by changing the amplitude and frequency of the excitation signal;
and (3) stopping applying the sawtooth wave excitation signal when the sliding block 6 reaches the target position, and finishing the driving task by the driving device.
The above description is only a preferred example of the present application and is not intended to limit the present application, but various modifications and variations can be made to the present application by those skilled in the art. Any modification, equivalent replacement, improvement, etc. of the present application should be included in the protection scope of the present application.
Claims (5)
1. A piezoelectric precision driving device based on a bird wing-shaped bionic flexible mechanism is characterized in that: comprises a base (1), a flexible mechanism module and a linear guide rail module; the base (1) is connected with external equipment through four conical counter bores on the base, and a convex positioning surface is arranged on the base; the flexible mechanism module comprises a bird wing-shaped bionic flexible mechanism (2), a piezoelectric stack A (3), a supporting seat (4) and a piezoelectric stack B (5); the bird wing-shaped bionic flexible mechanism (2) is positioned and fixed on the base (1) through a positioning surface on the base (1), a flexible hinge A (2-2) of the bird wing-shaped bionic flexible mechanism supports the piezoelectric stack B (5), and the shearing force applied to the piezoelectric stack B (5) is improved through micro deformation when the piezoelectric stack B (5) works so as to avoid damage; the piezoelectric stack A (3) and the piezoelectric stack B (5) do not work simultaneously, are excited by sawtooth wave signals and output variable displacement, and when the piezoelectric stack A (3) works, the driving foot (2-1) is pushed to rotate around the straight round flexible hinge C (2-4) and the sliding block (6) of the linear guide rail module is driven to move rightwards in a stepping mode; when the piezoelectric stack B (5) works, the driving foot (2-1) is pushed to rotate around the straight round flexible hinge B (2-3) and the sliding block (6) is driven to move leftwards in a stepping mode; the supporting seat (4) is positioned and fixed on the base (1) through a positioning surface on the base (1) so as to support the piezoelectric stack A (3), and the shearing force applied to the piezoelectric stack A (3) is improved through small deformation to avoid damage when the piezoelectric stack A (3) works.
2. The piezoelectric precision driving device based on the bird wing-shaped bionic flexible mechanism according to claim 1, wherein: the driving foot (2-1) of the bird wing-shaped bionic flexible mechanism (2) rotates clockwise around the straight round flexible hinge C (2-4) under the action of signal excitation extension of the piezoelectric stack A (3) to drive the sliding block (6) of the linear guide rail module to move rightwards, meanwhile, force perpendicular to the driving direction is generated to press the sliding block (6) to increase driving friction force, when the piezoelectric stack A (3) recovers the original length, the driving foot (2-1) generates retreating movement under the action of strain energy stored by the flexible hinge C (2-4) and drives the sliding block (6) to move leftwards, meanwhile, the force of the sliding block (6) along the direction perpendicular to the driving direction is reduced to further reduce the driving friction force to weaken the retreating distance of the driving sliding block (6), and the moving displacement difference generated by the sliding block (6) in the whole moving period is the step length of one period.
3. The piezoelectric precision driving device based on the bird wing-shaped bionic flexible mechanism according to claim 1, wherein: the driving foot (2-1) of the bird wing-shaped bionic flexible mechanism (2) rotates clockwise around the straight round flexible hinge B (2-3) under the action of signal excitation extension of the piezoelectric stack B (5) to drive the sliding block (6) to move leftwards, meanwhile, force perpendicular to the driving direction is generated to press the sliding block (6) to increase driving friction force, when the piezoelectric stack B (5) recovers the original length, the driving foot (2-1) generates retreating movement under the action of strain energy stored by the flexible hinge B (2-3) and drives the sliding block (6) to move rightwards, meanwhile, the force on the sliding block (6) along the direction perpendicular to the driving direction is reduced, the driving friction force is further reduced to weaken the retreating distance for driving the sliding block (6), and the moving displacement difference generated by the sliding block (6) in the whole moving period is the step length of one period.
4. The piezoelectric precision driving device based on the bird wing-shaped bionic flexible mechanism according to claim 1, wherein: the linear guide rail module comprises a guide rail (7) and a sliding block (6), wherein the guide rail (7) is positioned and fixed on the base (1) through a positioning surface on the base (1) to play a role in guiding the sliding block (6); the crossed rollers are arranged between the sliding blocks (6) and the guide rails (7), so that the sliding blocks (6) can move in a straight line and two directions along the guide rails (7), and a driving target can be connected through threads.
5. A driving method implemented by using the piezoelectric precision driving device based on the bird wing-shaped bionic flexible mechanism according to any one of claims 1 to 4, which is characterized in that: the method comprises the following steps:
step (1) determining a driving direction, if the driving direction is forward, namely, the sliding block (6) moves rightwards, selecting the piezoelectric stack A (3) as an excitation object, and if the driving direction is reverse, namely, the sliding block (6) moves leftwards, selecting the piezoelectric stack B (5) as the excitation object;
step (2) applying a sawtooth wave excitation signal to the determined piezoelectric stack A (3) or piezoelectric stack B (5) to enable the sliding block (6) to move towards a target position, wherein the moving speed of the sliding block (6) is adjusted by changing the amplitude and frequency of the excitation signal;
and (3) stopping applying the sawtooth wave excitation signal when the sliding block (6) reaches the target position, and finishing the driving task.
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