CN209545461U - Precision Piezoelectric driving device based on pinion shape Bionic flexible mechanism - Google Patents

Abstract

The utility model relates to a kind of Precision Piezoelectric driving devices based on pinion shape Bionic flexible mechanism, belong to precision actuation field.Including pedestal, compliant mechanism module, linear guide module；Pedestal is connect by four cone shaped countersinks thereon with external equipment, and pedestal is equipped with the positioning surface of protrusion；Compliant mechanism module is for driving linear guide module, including pinion shape Bionic flexible mechanism, piezoelectric stack A, support base, piezoelectric stack B；The pinion shape Bionic flexible mechanism is located and fixed on pedestal by the positioning surface on pedestal；Linear guide module includes guide rail, sliding block, for carrying or connecting driving target and output displacement.Advantage is: using single flexible mechanism, individually driving full existing straight line bidirectional-movement, reduce the influence of processing, rigging error to device performance, and small in size, compact-sized, control is simply, can be applied to the fields such as the precision actuation under micromanipulation, engineering in medicine, precision instrument, room temperature and low temperature environment.

Description

Precision Piezoelectric driving device based on pinion shape Bionic flexible mechanism

Technical field

The utility model relates to precision actuation field, in particular to a kind of piezoelectricity essence based on pinion shape Bionic flexible mechanism Close driving device.It can be applied to the neck such as precision actuation under micromanipulation, engineering in medicine, precision instrument, room temperature and low temperature environment Domain.

Background technique

Piezoelectric driving technology is as a kind of novel driving method, and there is displacement accuracy height, load to export, and big, structure is tight Gather, without electromagnetic interference, compatible vacuum low-temperature environment the advantages that, be suitably applied in precise driving device, be particularly subject to micro- behaviour The concern in the fields such as the precision actuation under work, engineering in medicine, precision instrument, room temperature and low temperature environment.Piezoelectric driving technology at present It can be divided mainly into resonant piezoelectric driving technology and non-resonant piezoelectric driving technology, wherein non-resonant piezoelectric driving technology It is broadly divided into Inchworm type piezoelectric driving technology and stick-slip formula piezoelectric driving technology again.In recent years, stick-slip formula piezoelectric driving technology by , be easy to control the advantages of simple in its structure and obtain tremendous development, wherein there are a kind of enhanced using parasitic motion principle it is viscous The Piexoelectric actuator of sliding driveability, such as Chinese patent (CN201720065487.0) using piezoelectric stack and flexible hinge Combination increases the frictional force to friction block using the hunt effect that flexible hinge generates, moves friction block along guide rail direction.

However it is existing using parasitic motion principle enhancing stick-slip driveability Piexoelectric actuator all use it is multiple soft Property mechanism, it is multiple driving be enough to realize straight line bidirectional-movement, this not only adds driving device volume be also introduced into manufacture, assembly miss Difference reduces the precision of driving device to a certain extent.Therefore it is full using single compliant mechanism, single driving to design a kind of energy Hair of the Piexoelectric actuator of existing straight line bidirectional-movement to the Piexoelectric actuator using hunt effect enhancing stick-slip driveability Exhibition has important application and research meaning.

Summary of the invention

The purpose of this utility model is to provide a kind of Precision Piezoelectric driving device based on pinion shape Bionic flexible mechanism, Solves the above problem of the existing technology.The utility model uses the Bionic flexible mechanism for imitating pinion bone structure, energy Enough functions of realizing using single compliant mechanism, the full existing straight line bidirectional-movement of single driving.Entire driving device is based on stick-slip Driving and parasitic motion principle, can be realized reliable and stable accurate straight line bidirectional-movement, and have it is small in size, compact-sized, Advantage easy to process, control is simple, positioning accuracy is high.

The above-mentioned purpose of the utility model is achieved through the following technical solutions:

Based on the Precision Piezoelectric driving device of pinion shape Bionic flexible mechanism, including pedestal 1, compliant mechanism module, straight line Rail module；The pedestal 1 is connect by four cone shaped countersinks thereon with external equipment, and pedestal is equipped with the positioning of protrusion Face；The compliant mechanism module includes pinion shape Bionic flexible mechanism 2, piezoelectric stack A3, support base 4, piezoelectric stack B5；It is described Pinion shape Bionic flexible mechanism 2 is located and fixed on pedestal 1 by the positioning surface on pedestal 1, pinion shape Bionic flexible mechanism Flexible hinge A2-2 support piezoelectric stack B5, and piezoelectric stack B5 work when by micro-strain improvement piezoelectric stack B5 by To shearing force avoid damaging；The piezoelectric stack A3 and piezoelectric stack B5 is not worked at the same time, all simultaneously by sawtooth signal excitation Output variation displacement pushes driving foot 2-1 to rotate around straight round flexible hinge C2-4 and drives straight when piezoelectric stack A3 works The sliding block 6 of line rail module generates to the right stepwise motion；Push driving foot 2-1 around directly round soft when piezoelectric stack B5 works Property hinge B2-3 is rotated and sliding block 6 is driven to generate stepwise motion to the left；Support base 4 is positioned simultaneously by the positioning surface on pedestal 1 It is fixed on pedestal 1 to support piezoelectric stack A3, and piezoelectric stack A3 is improved by micro-strain in piezoelectric stack A3 work The shearing force being subject to avoids damaging.

The driving foot 2-1 of the pinion shape Bionic flexible mechanism is under the action of piezoelectric stack A3 is motivated by signal and extended It rotates clockwise around straight round flexible hinge C2-4 to drive the sliding block 6 of linear guide module to move right, produces at the same time The raw power compressing sliding block 6 perpendicular to driving direction is to increase driving frictional force, when piezoelectric stack A3 restores raw footage, driving foot 2-1 generates rollback under the action of the strain energy that flexible hinge C2-4 is stored and moves and move downward with movable slider 6, at the same time Reduce to sliding block 6 along the power perpendicular to driving direction and then reduces driving frictional force with the rollback distance of weakening zone movable slider 6, The moving displacement difference that sliding block 6 generates in the entire period of motion is the step-length in one period.

The driving foot 2-1 of the pinion shape Bionic flexible mechanism is under the action of piezoelectric stack B5 is motivated by signal and extended It rotates clockwise around straight round flexible hinge B2-3 to drive sliding block 6 to move downward, is generated at the same time perpendicular to driving side To power compressing sliding block 6 to increase driving frictional force, when piezoelectric stack B5 restore raw footage when, drive foot 2-1 in flexible hinge It generates to retract under the action of the strain energy of B2-3 storage and moves and moved right with movable slider 6, reduce at the same time to 6 edge of sliding block Power and then reduction driving frictional force perpendicular to driving direction is with the rollback distance of weakening zone movable slider 6, in the entire period of motion The moving displacement difference that middle sliding block 6 generates is the step-length in one period.

The linear guide module includes guide rail 7, sliding block 6, and the guide rail 7 is positioned simultaneously by the positioning surface on pedestal 1 It is fixed on pedestal 1, plays the guiding role to sliding block 6；Crossed roller is housed between the sliding block 6 and guide rail 7, realizes sliding block 6 along guide rail 7 straight line bidirectional-movement, and driving target can be connected by screw thread.

Single compliant mechanism, the full existing straight line of single driving are utilized the utility model has the beneficial effects that: can be realized The function of bidirectional-movement is able to solve the existing Piexoelectric actuator using hunt effect enhancing stick-slip driveability due to using The problem of multiple compliant mechanisms, multiple drivings increase driving device volume and introduce manufacture, rigging error enough, and small in size, Compact-sized, control simply, can be applied to the accurate drive under engineering in medicine, precision instrument, micromanipulation, room temperature and low temperature environment It is dynamic to wait fields.The utility model driving device has many advantages, such as that movement travel is big, positioning accuracy is high, and has biggish load energy Power.The utility model is of great significance for the development in the fields such as precision actuation under China's vacuum low-temperature environment, aobvious The fields such as microoperation, engineering in medicine, precision instrument must have broad application prospects.

Detailed description of the invention

Attached drawing described herein is used to provide a further understanding of the present invention, and is constituted part of this application, The illustrative example and its explanation of the utility model do not constitute the improper limit to the utility model for explaining the utility model It is fixed.

Fig. 1 is the overall structure diagram of the utility model；

Fig. 2 is the compliant mechanism module diagram of the utility model；

Fig. 3 is the base schematic diagram of the utility model；

Fig. 4 is the sawtooth drive signal schematic representation of the utility model；

Fig. 5 is the counter motion schematic illustration of the utility model；

Fig. 6 is the forward motion schematic illustration of the utility model.

In figure: 1, pedestal；2, pinion shape Bionic flexible mechanism；2-1, driving foot；2-2, flexible hinge A；2-3, flexible hinge Chain B；2-4, flexible hinge C；3, piezoelectric stack A；4, support base；5, piezoelectric stack B；6, sliding block；7, guide rail.

Specific embodiment

The detailed content and its specific embodiment of the utility model are further illustrated with reference to the accompanying drawing.

Referring to shown in Fig. 1 to Fig. 6, the stick-slip formula straight line precision pressure based on pinion shape Bionic flexible mechanism of the utility model Electric driver using single flexible mechanism, individually drives full existing straight line bidirectional-movement, reduces processing, rigging error pair The influence of device performance, and it is small in size, compact-sized, control is simple, can be applied to micromanipulation, engineering in medicine, precision instrument, The fields such as the precision actuation under room temperature and low temperature environment.

Referring to FIG. 1 to FIG. 4, the Precision Piezoelectric based on pinion shape Bionic flexible mechanism of the utility model drives dress It sets, including pedestal 1, compliant mechanism module, linear guide module；There are four cone shaped countersinks to be used for the piezoelectricity on the pedestal 1 Driving device is connect with other equipment, and design thereon has the positioning surface of protrusion to facilitate the precision assembly of other assemblies；

The compliant mechanism module is for driving linear guide module, including pinion shape Bionic flexible mechanism 2, piezoelectric stack A3, support base 4, piezoelectric stack B5；The pinion shape Bionic flexible mechanism 2 positions by the positioning surface on pedestal 1 and passes through spiral shell Nail is fixed on pedestal 1, and driving foot 2-1 can be under the action of piezoelectric stack A3 be motivated by signal and extended around straight round flexibility Hinge C2-4 rotates clockwise the power compressing sliding block 6 generated at the same time to drive sliding block 6 to move right perpendicular to driving direction Frictional force is driven to increase, strengthens load-carrying ability and kinetic stability, when piezoelectric stack A3, which is deactivated, restores raw footage, driving It generates to retract under the action of the strain energy that sufficient 2-1 can be stored in flexible hinge C2-4 and moves and moved downward with movable slider 6, with this Simultaneously reduce to sliding block 6 along the power perpendicular to driving direction so that reduce driving frictional force with the rollback of weakening zone movable slider 6 away from From the moving displacement difference that sliding block 6 generates in the whole process is its total output displacement.

The driving foot 2-1 can also be under the action of piezoelectric stack B5 be motivated by signal and is extended around straight round flexible hinge B2-3, which is rotated clockwise, generates the power compressing sliding block 6 perpendicular to driving direction at the same time to drive sliding block 6 to move downward to increase Add driving frictional force, strengthen load-carrying ability and kinetic stability, when piezoelectric stack B5, which is deactivated, restores raw footage, drives foot 2- 1 can generate rollback under the action of the strain energy that flexible hinge B2-3 is stored moves and moves right with movable slider 6, at the same time Reduce to sliding block 6 along the power perpendicular to driving direction and then reduces driving frictional force with the rollback distance of weakening zone movable slider 6, The moving displacement difference that sliding block 6 generates in whole process is its total output displacement.

The flexible hinge A2-2 plays the role of supporting piezoelectric stack B, and passes through small change in piezoelectric stack B work Shape improves the shearing force that piezoelectric stack B is subject to and avoids damaging；The piezoelectric stack A3 and piezoelectric stack B5 is not worked at the same time, the two Variation displacement can be all motivated and exported by sawtooth signal, and piezoelectric stack A3 will push driving foot 2-1 around straight round when working Flexible hinge C2-4 is rotated and sliding block 6 is driven constantly to generate stepwise motion to the right；Piezoelectric stack B5 will push driving when working Sufficient 2-1 is around straight round flexible hinge B2-3 and sliding block 6 is driven constantly to generate stepwise motion to the left；Support base 4 passes through pedestal 1 On positioning surface position and be fixed by screws on pedestal 1, play the role of supporting piezoelectric stack A, and in piezoelectric stack A work Improve the shearing force that piezoelectric stack A is subject to by micro-strain when making to avoid damaging, since it is not easy to pinion shape Bionic flexible Mechanism becomes one, therefore separately fabricated installation.

The linear guide module is described for carrying or connecting driving target and output displacement, including guide rail 7, sliding block 6 Guide rail 7 is positioned and is fixed by screws on pedestal 1 by the positioning surface on pedestal 1, plays the guiding role to sliding block 6；Institute It states between sliding block 6 and guide rail 7 equipped with crossed roller, realizes the straight line bidirectional-movement along guide rail 7, and drive can be connected by screw thread Moving-target.

Referring to shown in Fig. 1 to Fig. 6, the specific work process of the utility model is as follows:

The realization that Precision Piezoelectric driving device based on pinion shape Bionic flexible mechanism is displaced to the right along guide rail straight line:

Sawtooth drive signal, when sawtooth drive signal is in rising edge, piezoelectric stack are applied to piezoelectric stack A3 A3 elongation pushes pinion shape Bionic flexible mechanism, makes the clockwise rotation for driving sufficient 2-1 to generate around flexible hinge C2-4, pushes away The sliding block 6 of dynamic linear guide module is moved right along the direction of guide rail 7, while generating the power compressing sliding block perpendicular to driving direction 6 increase driving frictional force to strengthen load-carrying ability and kinetic stability；When sawtooth drive signal is in failing edge, piezo stack Heap A3 is shunk rapidly, and pinion shape Bionic flexible mechanism 2 and its driving foot 2-1 can be in the works of the flexible hinge C2-4 strain energy stored It is quickly retracted into initial position with lower, the return motion of driving foot 2-1 will drive sliding block 6 and move downward, reduction pair at the same time Sliding block 6 is along the power perpendicular to driving direction and then reduces driving frictional force with the rollback distance of weakening zone movable slider 6, is entirely transporting The moving displacement difference that sliding block 6 generates in the dynamic period is the step-length in one period.

Precision Piezoelectric driving device based on pinion shape Bionic flexible mechanism is along guide rail straight line to the realization of left dislocation: to pressure Electricity stacks B5 and applies sawtooth drive signal, and when sawtooth drive signal is in rising edge, piezoelectric stack B5 elongation pushes bird Wing Bionic flexible mechanism makes the counter-clockwise rotary motion for driving sufficient 2-1 to generate around flexible hinge B2-3, pushes linear guide mould The sliding block 6 of block is moved downward along the direction of guide rail 7, while generation increases driving perpendicular to the power compressing sliding block 6 of driving direction and rubs Power is wiped to strengthen load-carrying ability and kinetic stability；When sawtooth drive signal is in failing edge, piezoelectric stack B5 is received rapidly It is quickly moved back under the action of the strain energy that contracting, pinion shape Bionic flexible mechanism 2 and its driving foot 2-1 can be stored in flexible hinge B2-3 It is back to initial position, the return motion of driving foot 2-1 will drive sliding block 6 and move right, reduces at the same time to sliding block 6 along vertical Reduce driving frictional force in turn in the power of driving direction with the rollback distance of weakening zone movable slider 6, is slided in the entire period of motion The moving displacement difference that block 6 generates is the step-length in one period.

By constantly repeating load sawtooth drive signal, which constantly accumulates step-length and realizes step-by-step movement Displacement output.In addition, the accurate control to displacement also may be implemented and realize Subnano-class positioning accurate by displacement closed-loop control Degree.

Referring to shown in Fig. 1 to Fig. 6, the Precision Piezoelectric driving device based on pinion shape Bionic flexible mechanism of the utility model Driving method, realize that the displacement of sliding block exports, and can lead to by applying sawtooth drive signal to corresponding piezoelectric stack The amplitude and frequency adjusting speed of slider for changing pumping signal are crossed, specifically includes the following steps:

Step (1) determines driving direction, if driving direction is positive (sliding block 6 moves right), selects piezoelectric stack A work Piezoelectric stack B is selected as incentive object if driving direction is reversed (sliding block 6 moves downward) for incentive object；

Step (2), which applies sawtooth drive signal to determining piezoelectric stack, moves sliding block 6 to target position, sliding block 6 Movement velocity can be adjusted by changing excitation signal amplitude and frequency；

Step (3) stops applying sawtooth drive signal, driving device completes this when sliding block 6 reaches target position Driving task.

The foregoing is merely the preferred embodiments of the utility model, are not intended to limit the utility model, for ability For the technical staff in domain, various modifications and changes may be made to the present invention.It is all to made by the utility model it is any modification, Equivalent replacement, improvement etc., should be included within the scope of protection of this utility model.

Claims (4)

1. a kind of Precision Piezoelectric driving device based on pinion shape Bionic flexible mechanism, it is characterised in that: including pedestal (1), soft Property mechanism module, linear guide module；The pedestal (1) is connect by four cone shaped countersinks thereon with external equipment, pedestal It is equipped with the positioning surface of protrusion；The compliant mechanism module includes pinion shape Bionic flexible mechanism (2), piezoelectric stack A(3), branch Support seat (4), piezoelectric stack B(5)；The pinion shape Bionic flexible mechanism (2) is positioned and fixed by the positioning surface on pedestal (1) On pedestal (1), the flexible hinge A(2-2 of pinion shape Bionic flexible mechanism) support piezoelectric stack B(5), and in piezoelectric stack B (5) passing through micro-strain improvement piezoelectric stack B(5 when working) shearing force that is subject to avoids damaging；The piezoelectric stack A(3) with Piezoelectric stack B(5) do not work at the same time, all motivated by sawtooth signal and export variation displacement, piezoelectric stack A(3) work when push away It is dynamic to drive foot (2-1) around straight round flexible hinge C(2-4) it rotates and the sliding block (6) of linear guide module is driven to generate to the right Stepwise motion；Piezoelectric stack B(5) work when push drive foot (2-1) around straight round flexible hinge B(2-3) rotate and drive Movable slider (6) generates stepwise motion to the left；Support base (4) is located and fixed within pedestal (1) by the positioning surface on pedestal (1) On to support piezoelectric stack A(3), and pass through micro-strain improvement piezoelectric stack A(3 in piezoelectric stack A(3) work) be subject to Shearing force avoids damaging.

2. the Precision Piezoelectric driving device according to claim 1 based on pinion shape Bionic flexible mechanism, it is characterised in that: The driving foot (2-1) of the pinion shape Bionic flexible mechanism (2) is under the action of piezoelectric stack A(3) is motivated by signal and extended Around straight round flexible hinge C(2-4) it rotates clockwise to drive the sliding block (6) of linear guide module to move right, it is same with this When generate perpendicular to driving direction power compressing sliding block (6) to increase driving frictional force, when piezoelectric stack A(3) restore raw footage When, drive foot (2-1) under the action of the strain energy that flexible hinge C(2-4) store generate retract move and with movable slider (6) to Left movement reduces reduce driving frictional force in turn along the power perpendicular to driving direction to sliding block (6) to weaken drive at the same time The rollback distance of sliding block (6), the moving displacement difference that sliding block (6) generates in the entire period of motion are the step in one period It is long.

3. the Precision Piezoelectric driving device according to claim 1 based on pinion shape Bionic flexible mechanism, it is characterised in that: The driving foot (2-1) of the pinion shape Bionic flexible mechanism (2) is under the action of piezoelectric stack B(5) is motivated by signal and extended Around straight round flexible hinge B(2-3) it rotates clockwise to drive sliding block (6) to move downward, it is generated at the same time perpendicular to drive Power compressing sliding block (6) in dynamic direction, when piezoelectric stack B(5) restores raw footage, drives foot (2-1) to increase driving frictional force It generates to retract under the action of the strain energy of flexible hinge B(2-3) storage and moves and moved right with movable slider (6), it is same with this When reduce to sliding block (6) along perpendicular to driving direction power so that reduce driving frictional force with the rollback of weakening zone movable slider (6) Distance, the moving displacement difference that sliding block (6) generates in the entire period of motion are the step-length in one period.

4. the Precision Piezoelectric driving device according to claim 1 based on pinion shape Bionic flexible mechanism, it is characterised in that: The linear guide module includes guide rail (7), sliding block (6), and the guide rail (7) is positioned simultaneously by the positioning surface on pedestal (1) It is fixed on pedestal (1), plays the guiding role to sliding block (6)；Crossed roller is housed between the sliding block (6) and guide rail (7), Realize that sliding block (6) along the straight line bidirectional-movement of guide rail (7), and can connect driving target by screw thread.