CN109411529A - A kind of power device and preparation method thereof with super-junction structure - Google Patents
A kind of power device and preparation method thereof with super-junction structure Download PDFInfo
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- 238000002360 preparation method Methods 0.000 title abstract description 3
- 239000004065 semiconductor Substances 0.000 claims abstract description 153
- 238000000926 separation method Methods 0.000 claims abstract description 89
- 239000000758 substrate Substances 0.000 claims description 88
- 229910052751 metal Inorganic materials 0.000 claims description 24
- 239000002184 metal Substances 0.000 claims description 24
- 230000026267 regulation of growth Effects 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 108090000723 Insulin-Like Growth Factor I Proteins 0.000 claims description 2
- 102000013275 Somatomedins Human genes 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 189
- 238000000034 method Methods 0.000 description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 13
- 238000005530 etching Methods 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 238000000407 epitaxy Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 230000015556 catabolic process Effects 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 238000001312 dry etching Methods 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 230000001413 cellular effect Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000007521 mechanical polishing technique Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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Abstract
The invention discloses a kind of power device and preparation method thereof with super-junction structure, the power device with super-junction structure includes the super-junction structure in termination environment, the super-junction structure includes that the first semiconductor column of at least one the first conduction type and the second semiconductor column of at least one the second conduction type, the first semiconductor column are laterally arranged alternately with the second semiconductor column；Super-junction structure further includes the second separation layer and third separation layer, and the second separation layer is connect with one end of the second semiconductor column；Third separation layer is connect with one end of the first semiconductor column.The super-junction structure in power device of the present invention with super-junction structure is equivalent to multiple PN junctions parallel connections, can be by biggish leakage current, to play the role of protecting the active area of the power device with super-junction structure.
Description
Technical field
The present invention relates to technical field of semiconductors, especially a kind of with the power device of super-junction structure and its production side
Method.
Background technique
The voltage endurance capability of power device depends primarily on the reverse-biased breakdown voltage of specific PN junction in power device, and power device
Part certain current capacity in order to obtain, is usually composed in parallel by many cellulars.In power device reverse withstand voltage, due to member
Transverse electric field between born of the same parents and cellular is cancelled out each other not to be occurred inside cellular generally so that puncturing, but outmost cellular
It can puncture since electric field is concentrated.Therefore need to reduce electric field using knot terminal just to improve breakdown voltage.
Knot terminal is broadly divided into Truncated and extended two major classes, and wherein extended is that some prolong is arranged in main knot edge
Structure is stretched, these structures extend to the outside main knot depletion region, to play the role of reducing its electric field strength raising breakdown voltage.
Currently used extended structure knot terminal technology specifically includes that field plate techniques, field limiting ring technology, knot terminal extend (JTE) technology,
Variety lateral doping (VLD) technology, and reduce surface field (RESURF) technology etc..
Currently, power device includes the termination environment of active area and the adjacent active area, junction termination structures are arranged described
In epitaxial layer in termination environment, when power device high pressure is reverse-biased, pass through the junction termination structures and the reverse-biased PN of the epitaxial layer
Knot all exhausts to realize pressure resistance.But in some special applications, when especially application environment is poor, such as high temperature,
Easily there is integrity problem in high humidity etc., the power device, and electric leakage increases between showing as the source and drain of the power device, breakdown
Voltage reduce, when serious even will appear burn and short circuit.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of power devices with super-junction structure, this has super-junction structure
Power device when application environment is poor reliability still with higher.
In order to solve the above technical problems, the present invention adopts the following technical solutions: this has the power device of super-junction structure, packet
It includes:
Substrate, the substrate include the substrate of the first conduction type and the first conductive-type positioned at the upper surface of the substrate
The epitaxial layer of type；The termination environment of active area and the adjacent active area is provided on the substrate；
It is provided in the termination environment through the epitaxial layer and bottom connects the groove of the substrate；
It is formed in the first separation layer of the side wall of the groove；
It is formed in the groove and the super-junction structure between first separation layer, the super-junction structure includes extremely
First semiconductor column of few first conduction type and the second semiconductor column of at least one the second conduction type, described first
Semiconductor column is laterally arranged alternately with second semiconductor column；The super-junction structure further includes the second separation layer and third isolation
Layer, second separation layer are located at the upper surface of substrate and connect with one end of second semiconductor column；The third every
Absciss layer is connect with one end of first semiconductor column, and the other end of first semiconductor column is connect with the substrate；
Connect the first metal layer of the other end of second semiconductor column；
Second metal layer positioned at the lower surface of the substrate.
Correspondingly, the present invention also provides a kind of production method of power device with super-junction structure, this has superjunction knot
The production method of the power device of structure the following steps are included:
S01: providing substrate, and the substrate includes the substrate of the first conduction type and positioned at the of the upper surface of the substrate
The epitaxial layer of one conduction type；The termination environment of active area and the adjacent active area is provided on the substrate；In the terminal
The epitaxial layer formation is etched in area through the epitaxial layer and bottom connects the groove of the substrate；
S02: one separation layer of growth regulation on the side wall of the groove；
S03: the first epitaxial layer of one conduction type of growth regulation in the groove, through etching the first epitaxial layer shape
At at least one deep trench and at least one first semiconductor column, the deep trench laterally replaces row with first semiconductor column
Cloth；
S04: in the second separation layer of bottom grown of the deep trench；
S05: the second semiconductor column of two conduction type of extension growth regulation in the deep trench；
S06: from one end of the relatively described substrate of first semiconductor column be thinned first semiconductor column make it is described
The thickness that the height of first semiconductor column is less than the epitaxial layer is formed simultaneously between second semiconductor column and/or position
Shallow trench between second semiconductor column and first separation layer；
S07: three separation layer of growth regulation in the shallow trench；
S08: the first metal layer for connecting one end of relatively described second separation layer of the second semiconductor column is formed；
S09: second metal layer is grown in the lower surface of the substrate.
Compared with prior art, the present invention have it is following the utility model has the advantages that this have the power device of super-junction structure by
The first semiconductor column and the second of at least one the second conduction type by least one the first conduction type is set in termination environment
Semiconductor column is laterally arranged alternately and the super-junction structure that forms, and it is in parallel that the super-junction structure is equivalent to multiple PN junctions, can pass through
Biggish leakage current, to play the role of protecting the active area of the power device with super-junction structure.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are some embodiments of the invention, for ability
For the those of ordinary skill of domain, without creative efforts, it can also be obtained according to these attached drawings other attached
Figure.
Fig. 1 is the schematic diagram of the section structure for the power device with super-junction structure that one embodiment of the invention provides；
Fig. 2 is the process signal of the production method for the power device with super-junction structure that one embodiment of the invention provides
Figure；
Fig. 3 to Figure 15 is the section of the forming process for the power device with super-junction structure that one embodiment of the invention provides
Structural schematic diagram.
Description of symbols:
A: active area；B: termination environment；
10: substrate；11: substrate；12: epitaxial layer；20: groove；30: the first separation layers；40: the first epitaxial layers；40a: deep
Groove；40b: shallow trench；41: the first semiconductor columns；42: the second semiconductor columns；43: the second separation layers；44: third separation layer；
51: the first metal layer；52: second metal layer；60: dielectric layer；60a: contact hole.
Specific embodiment
The main needle power device of the present invention provides a solution the problem of reliability reduces when application environment is poor.
It is clear in order to be more clear the purpose of the present invention, technical solution and advantageous effects, below in conjunction with this hair
Attached drawing in bright embodiment, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described
Embodiment is only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field
Those of ordinary skill's every other embodiment obtained without making creative work, belongs to protection of the present invention
Range.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, or be somebody's turn to do
Invention product using when the orientation or positional relationship usually put, be merely for convenience of description of the present invention and simplification of the description, without
It is that the device of indication or suggestion meaning or element must have a particular orientation, be constructed and operated in a specific orientation, therefore not
It can be interpreted as limitation of the present invention.In addition, term " first ", " second ", " third " etc. are only used for distinguishing description, and cannot manage
Solution is indication or suggestion relative importance.
Special to illustrate herein for convenience of subsequent description: first conduction type can be N-type, then, described second leads
Electric type is p-type, conversely, first conduction type may be p-type, correspondingly, second conduction type is N-type.?
In next embodiment, retouched so that first conduction type is N-type and second conduction type is p-type as an example
It states, but is defined not to this.
Referring to Fig. 1, a kind of power device with super-junction structure includes:
Substrate 10, the substrate 11 of the substrate 10 including the first conduction type and positioned at the upper surface of the substrate 11
The epitaxial layer 12 of first conduction type；The termination environment B of active area A and the adjacent active area A are provided on the substrate 10.
It is provided in the termination environment B through the epitaxial layer 12 and bottom connects the groove 20 of the substrate 11；
It is formed in the first separation layer 30 of the side wall of the groove 20；
It is formed in the groove 20 and the super-junction structure between first separation layer 30, the super-junction structure packet
The first semiconductor column 41 of at least one the first conduction type and the second semiconductor column 42 of at least one the second conduction type are included,
First semiconductor column 41 is laterally arranged alternately with second semiconductor column 42；The super-junction structure further includes the second isolation
Layer 43 and third separation layer 44, second separation layer 43 be located at 11 upper surface of substrate and with second semiconductor column 42
One end connection；The third separation layer 44 is connect with one end of first semiconductor column 41, first semiconductor column 41
The other end connect with the substrate 11；
Connect the first metal layer 51 of the other end of second semiconductor column 42；
Second metal layer 52 positioned at the lower surface of the substrate 11.
Power device of the present invention with super-junction structure in the B of termination environment by being arranged by least one the first conduction
First semiconductor column 41 of type and the second semiconductor column 42 of at least one the second conduction type are laterally arranged alternately and form
Super-junction structure, it is in parallel that the super-junction structure is equivalent to multiple PN junctions, can be by biggish leakage current, to play to described
Have the function of that the active area A of the power device of super-junction structure is protected.
In general, the termination environment B also referred to as divides region, junction termination structures are additionally provided in the termination environment B, and (figure is not
Show), generation type, structure, setting position of the junction termination structures etc. belong to the prior art, and therefore not to repeat here.
Specifically, carrier of the substrate 11 as the power device with super-junction structure, primarily serves support
Effect.In the present embodiment, the substrate 11 is silicon substrate, and silicon is most common, cheap and stable performance semiconductor material,
It can effectively reduce cost and promote yield.In other embodiments, the material of the substrate 11 can also for silicon carbide, germanium or
Person's germanium silicon etc..In detail, the substrate 11 is the semiconductor of the first conduction type.In the present embodiment, first conductive-type
Type is N-type, therefore the substrate 11 is N-type semiconductor.In other embodiments, first conduction type may be P
Type, therefore, the substrate 11 are P-type semiconductor.The N-type substrate 11 can adulterate the elements shapes such as phosphorus, arsenic, antimony by silicon
At being not limited thereto.
Preferably, the epitaxial layer 12 is silicon epitaxy layer.It should be noted that the epitaxial layer 12 can be single layer,
It can be composed of multiple sub- epitaxial layers；Preferably, in the present embodiment, the epitaxial layer 12 is single layer.The epitaxial layer
12 be the first conduction type.In the present embodiment, first conduction type is N-type, therefore the epitaxial layer 12 is that N-type is partly led
Body.
The groove 20 connects the substrate 11 through the bottom of the epitaxial layer 12 and the groove 20.It is appreciated that
The groove 20, which has to pass through the epitaxial layer 12, could connect the substrate 11, i.e., the depth of the described groove 20 is greater than described outer
Prolong the thickness of layer 12, so that the bottom of the groove 20 extends in the substrate 11, to realize and the substrate 11
Connection.The width of the groove 20 is designed according to the structure of power device, and the width by the groove 20 is bigger, then the ditch
The logarithm of open ended PN junction is more in slot 20, then allow by leakage current it is bigger.
Preferably, first separation layer 30 is oxide layer.In the present embodiment, first separation layer 30 is oxidation
Silicon layer.Specifically, first separation layer 30 with a thickness of 1200~1500nm, to prevent knot terminal potential to the super-junction structure
Influence.
The super-junction structure includes first semiconductor column 41 and second semiconductor column 42.Wherein, described first
Semiconductor column 41 is the first conduction type, and in the present embodiment, first conduction type is N-type, therefore described the first half lead
Scapus 41 is N-type semiconductor.In other embodiments, first conduction type may be p-type, therefore, described the first half
Conductor pin 41 is P-type semiconductor.In more detail, first semiconductor column 41 is that the first conduction type of heavy doping is partly led
Body.Therefore first semiconductor column 41 is N+ semiconductor column in the present embodiment.Second semiconductor column 42 is led for second
Electric type, in the present embodiment, second conduction type are p-type, therefore second semiconductor column 42 is P-type semiconductor.
In other embodiments, second conduction type may be N-type, and therefore, second semiconductor column 42 is that N-type is partly led
Body.In more detail, second semiconductor column 42 is the second conductive type semiconductor of heavy doping.Therefore institute in the present embodiment
Stating the second semiconductor column 42 is P+ semiconductor column.In the present embodiment, the super-junction structure includes two the first semiconductor columns 41
With three the second semiconductor columns 42, first semiconductor column 41 and second semiconductor column 42 are laterally arranged alternately.In general,
Total impurity content is equal with impurity content total in second semiconductor column 42 in first semiconductor column 41.?
In the present embodiment, the doping concentration of second semiconductor column 42 is lower than the doping concentration of first semiconductor column 41.
Further, the width of first semiconductor column 41 is less than the width of second semiconductor column 42.Described first
The width of semiconductor column 41 is preferably 3~5 μm, and the width of second semiconductor column 42 is preferably 2~4 μm.
Further, first semiconductor column 41 and second semiconductor column 42 are formed by way of extension.
First semiconductor column 41 that is formed by way of extension and second semiconductor column 42 it is of uniform size, thus anti-
Only first semiconductor column 41 and second semiconductor column 42 occur that electric leakage is bigger than normal, breakdown drop because both ends size is inconsistent
The problems such as low.
The super-junction structure further includes second separation layer 43 and the third separation layer 44.Second separation layer 43
Preferably oxide layer.In the present embodiment, second separation layer 43 is silicon oxide layer.The third separation layer 44 is preferably oxygen
Change layer.In the present embodiment, the third separation layer 44 is silicon oxide layer.The thickness of second separation layer 43 is greater than described the
The thickness of three separation layers 44.Preferably, second separation layer 43 with a thickness of 1600~1800nm, the third separation layer 44
With a thickness of 1200~1400nm.
The usual junction termination structures are ring structure, and the super-junction structure may be ring structure.The superjunction knot
Structure can be set in the side of the relatively described active area A of the junction termination structures, and the breakdown reverse voltage of the super-junction structure is low
In the pressure resistance of the junction termination structures, and it is higher than the applied voltage range of the power device with super-junction structure.
The first metal layer 51 with the source metal in the power device with super-junction structure for connecting, in institute
State the power device with super-junction structure it is reverse-biased in the case where, the current potential of the first metal layer 51 and the source metal
Current potential is equal.
The second metal layer 52 constitutes the drain metal of the power device with super-junction structure.
Referring to Fig. 2, a kind of production method of the power device with super-junction structure comprising following steps:
S01: providing substrate 10, the substrate 11 of the substrate 10 including the first conduction type and positioned at the upper of the substrate 10
The epitaxial layer 12 of first conduction type on surface；The terminal of active area A and the adjacent active area A are provided on the substrate 10
Area B；The epitaxial layer 12 is etched in the termination environment B to be formed through the epitaxial layer 12 and the bottom connection substrate 11
Groove 20；
S02: one separation layer 30 of growth regulation on the side wall of the groove 20；
S03: first epitaxial layer 40 of one conduction type of growth regulation in the groove 20, through etching first extension
Layer 40 forms at least one deep trench 40a and at least one first semiconductor column 41, and the deep trench 40a is led with described the first half
Scapus 41 is laterally arranged alternately；
S04: in the second separation layer of bottom grown 43 of the deep trench 40a；
S05: the second semiconductor column 42 of two conduction type of extension growth regulation in the deep trench 40a；
S06: first semiconductor column 41, which is thinned, from one end of the relatively described substrate 11 of first semiconductor column 41 makes
The height for obtaining first semiconductor column 41, which is less than the thickness of the epitaxial layer 12 and is formed, is located at second semiconductor column 42
Between and/or the shallow trench 40b between second semiconductor column 42 and first separation layer 30；
S07: three separation layer 44 of growth regulation in the shallow trench 40b；
S08: the first metal layer for connecting one end of relatively described second separation layer 43 of the second semiconductor column 42 is formed
51；
S09: second metal layer 52 is grown in the lower surface of the substrate 11.
With reference to the accompanying drawings, the production method of the power device with super-junction structure is elaborated.
It should be noted that during the production method of the power device of the present invention with super-junction structure, usually
The super-junction structure first is formed in the termination environment B, is arranged in the active area A and the termination environment B again later corresponding
Other specific ground structures, to prevent during making the super-junction structure epitaxy technique etc. to the shadow of other specific structures
It rings.
Fig. 3 and Fig. 4 are please referred to, step S01 is executed: substrate 10 is provided.The substrate 10 includes substrate 11.The substrate 11
As the carrier of the power device with super-junction structure, the effect of support is primarily served.In the present embodiment, the substrate
11 be silicon substrate, and silicon is most common, cheap and stable performance semiconductor material, can effectively reduce cost and promotes yield.
In other embodiments, the material of the substrate 11 can also be silicon carbide, germanium or germanium silicon etc..In detail, the substrate
11 be the semiconductor of the first conduction type.In the present embodiment, first conduction type is N-type, therefore the substrate 11 is N
Type semiconductor.In other embodiments, first conduction type may be p-type, and therefore, the substrate 11 is p-type half
Conductor.The N-type substrate 11 can adulterate the elements such as phosphorus, arsenic, antimony by silicon and be formed, and be not limited thereto.
The substrate 10 further includes epitaxial layer 12.In the present embodiment, the preferably described epitaxial layer 12 is silicon epitaxy layer.It needs
Illustrate, the epitaxial layer 12 can be single layer, can also be composed of multiple sub- epitaxial layers；Preferably, in this implementation
In example, the epitaxial layer 12 is single layer.The epitaxial layer 12 is the first conduction type, and in the present embodiment, described first is conductive
Type is N-type, therefore the epitaxial layer 12 is N-type semiconductor.
Further, the epitaxial layer 12 is etched from the upper surface of the epitaxial layer 12 in the termination environment B, and is formed
Groove 20.The groove 20 connects the substrate 11 through the bottom of the epitaxial layer 12 and the groove 20.It is appreciated that institute
The substrate 11 could be connected by stating groove 20 and having to pass through the epitaxial layer 12.Specifically, in order to guarantee the bottom of the groove 20
Portion connects the substrate 11, can carry out over etching to the epitaxial layer 12, i.e., etching is that depth is greater than the epitaxial layer 12
Thickness is connect to realize with the substrate 11 so that the bottom of the groove 20 extends in the substrate 11.Institute
The width for stating groove 20 is designed according to the structure of power device, and the width by the groove 20 is bigger, then in the groove 20
The logarithm of open ended PN junction is more, then allow by leakage current it is bigger.
Specifically, the groove 20 is formed to include the following steps: to be laid with one layer in the upper surface of the epitaxial layer 12 first
Photoresist layer (not shown) later carries out the photoresist layer as exposure mask using the mask plate with 20 figure of groove
Exposure, then develop, it is formed and the consistent window (not shown) of 20 figure of groove on the photoresist layer；With described
Photoresist layer performs etching simultaneously shape to the epitaxial layer 12 from the window of the photoresist layer by the way of etching as exposure mask
At the groove 20.In detail, the method for the etching includes dry etching and wet etching.In the present embodiment, it preferably adopts
With the method for dry etching.The etching agent of the dry etching is plasma, using plasma and is etched substance reaction,
Volatile materials is formed, or directly bombards the substance that is etched and is allowed to be corroded, can be realized anisotropic etching, so that it is guaranteed that
When making the groove 20 position of the groove 20, shape and size precision, and dry etching easily realize automation, place
Reason process is not introduced into pollution, cleannes height.After producing the groove 20, the photoresist layer is first removed using cleaning solution.
Fig. 5 and Fig. 6 are please referred to, step S02: one separation layer 30 of growth regulation on the side wall of the groove 20 is executed.Specifically
Ground first grows first separation layer in the upper surface on the surface of the bottom and side wall of the groove 20 and the epitaxial layer 12
30.First separation layer 30 with a thickness of 1200~1500nm.It is preferred that first separation layer 30 is oxide layer.In this implementation
In example, first separation layer 30 is silicon oxide layer.More specifically, growing first separation layer 30 using thermal oxidation method.?
First separation layer 30 can also be grown using the method for deposition in other embodiments, be not limited thereto.
Further, first separation layer 30 is performed etching, and removes described the of the bottom for being located at the groove 20
One separation layer 30.Preferably, first separation layer 30 of the bottom of the groove 20 is located at using dry etching removal.
Fig. 7 and Fig. 8 are please referred to, step S03 is executed: forming the first semiconductor column 41 in the groove 20.
Specifically, the upper surface of first separation layer 30 first in the groove 20 and outside the groove 20 is raw
Long first epitaxial layer 40.In detail, first epitaxial layer 40 is the first conductive type semiconductor.In the present embodiment, described
First conduction type is N-type, therefore first epitaxial layer 40 is N-type semiconductor.In other embodiments, it described first leads
Electric type may be p-type, and therefore, first epitaxial layer 40 is P-type semiconductor.In more detail, first epitaxial layer
40 be the first conductive type semiconductor of heavy doping.In the present embodiment, first epitaxial layer 40 is N+ semiconductor.Specifically
Ground forms first epitaxial layer 40 using epitaxy method.The epitaxy method includes depositing operation, and the depositing operation can be with
It is selected from one of electron beam evaporation, chemical vapor deposition, atomic layer deposition, sputtering.Preferably, it uses in the present embodiment
The upper surface growth described the of first separation layer 30 of the chemical vapor deposition in the groove 20 and outside the groove 20
One epitaxial layer 40.
Further, planarization process is carried out to first epitaxial layer 40, described in removing outside the groove 20
First epitaxial layer 40 retains first epitaxial layer 40 for being located at the upper surface in the groove 20 and being located at the substrate 11.
In detail, using the mode of chemically mechanical polishing (Chemical Mechanical Polishing, CMP) to outside described first
Prolong layer 40 and carries out planarization process.Chemical Mechanical Polishing Technique has the chemical action of the mechanical abrasive action of abrasive grain and oxidant
Combine to machine, it can be achieved that the not damaged surface processing of ultraprecise, meets characteristic size in 0.35 μm of global planarizartion below
It is required that.In other specific embodiments, first epitaxial layer 40 can also be carried out by the way of dry etching flat
Change processing.
Further, first epitaxial layer 40 is carried out through etching, and forms at least one deep trench 40a and extremely
Few first semiconductor column 41, the deep trench 40a are laterally arranged alternately with first semiconductor column 41.In this implementation
In example, etches first epitaxial layer 40 and form three deep trench 40a and two first semiconductor columns 41.It can be with
Understand, the bottom of the deep trench 40a is connect with the substrate 11, and first semiconductor column 41 also connects with the substrate 11
It connects, and first semiconductor column 41 is also the first conduction type.In the present embodiment, first semiconductor column 41 is N+
Semiconductor column.In detail, the width of first semiconductor column 41 is preferably 3~5 μm.
Referring to Fig. 9, executing step S04: in the second separation layer of bottom grown 43 of the deep trench 40a.It can manage
Solution, second separation layer 43 are connect with the substrate 11, and are located at the upper surface of the substrate 11.Second separation layer
43 be preferably oxide layer.In the present embodiment, second separation layer 43 is silicon oxide layer.In detail, second separation layer
43 with a thickness of 1600~1800nm.
Specifically, in the present embodiment, second separation layer 43 can first pass through the method for deposition in the deep trench
It is etched back to the silica after filling silica in 40a and is formed.In other embodiments, second separation layer 43 can also
The silica is etched back to after silica is formed, herein to be filled in the deep trench 40a by directly thermal oxidation method
It is not construed as limiting.
Referring to Fig. 10, executing step S05: two semiconductor column 42 of growth regulation in the deep trench 40a.
Specifically, the upper table of first separation layer 30 first in the deep trench 40a and outside the deep trench 40a
The second epitaxial layer (not shown) of length of looking unfamiliar.In detail, second epitaxial layer is the second conductive type semiconductor.In the present embodiment
In, second conduction type is p-type, therefore second epitaxial layer is P-type semiconductor.In other embodiments, described
Two conduction types may be N-type, and therefore, second epitaxial layer is N-type semiconductor.In more detail, second extension
Layer is the second conductive type semiconductor of heavy doping.In the present embodiment, second epitaxial layer is P+ semiconductor.Specifically,
Second epitaxial layer is formed using epitaxy method.The epitaxy method includes depositing operation, and the depositing operation can be choosing
From one of electron beam evaporation, chemical vapor deposition, atomic layer deposition, sputtering.Preferably, in the present embodiment using chemistry
Described in the upper surface growth of first separation layer 30 of the vapor deposition in the deep trench 40a and outside the deep trench 40a
Second epitaxial layer.
Further, planarization process is carried out to second epitaxial layer, to remove the institute being located at outside the deep trench 40a
The second epitaxial layer is stated, described the second of the upper surface for being located in the deep trench 40a and being located at second separation layer 43 is retained
Epitaxial layer, to form at least one described second semiconductor column 42 being located in the deep trench 40a.In the present embodiment,
The quantity of the deep trench 40a is three, then the quantity of second semiconductor column 42 is also three, second semiconductor column
42 are laterally arranged alternately with first semiconductor column 41.It is appreciated that second semiconductor column 42 is isolated with described second
Layer 43 connects, and second semiconductor column 42 is also the second conduction type.In the present embodiment, second semiconductor column
42 be P+ semiconductor column.In detail, the width of second semiconductor column 42 is preferably 2~4 μm.
It please refers to Figure 11, executes step S06: by lithography and etching from the relatively described lining of first semiconductor column 41
First semiconductor column 41 is thinned in the one end at bottom 11, to form at least one shallow trench 40b.Described the first half lead after being thinned
The height of scapus 41 is less than the thickness of the epitaxial layer 12.It is appreciated that the bottom of the shallow trench 40b is lower than the epitaxial layer
12 upper surface.In the present embodiment, the quantity of first semiconductor 41 is two, and the quantity of the shallow trench 40b is also
Two.In the present embodiment, the shallow trench 40b is between second semiconductor column 42.The position of the shallow trench 40b
Set related to the position of first semiconductor column 41 and quantity, in other embodiments, the shallow trench 40b can also be located at
Between second semiconductor column 42 and first separation layer 30.When the quantity of first semiconductor column 41 is multiple,
The shallow trench 40b that can also be formed simultaneously between second semiconductor column 42 and first separation layer 30 and
The shallow trench 40b between second semiconductor column 42.
Figure 12 to Figure 14 is please referred to, step S07 is executed: filling third separation layer 44 in the shallow trench 40b；It can manage
Solution, the third separation layer 44 are connect with first semiconductor column 41, and are located at the upper surface of first semiconductor column 41.
The third separation layer 44 is preferably oxide layer.In the present embodiment, the third separation layer 44 is silicon oxide layer.In detail,
The third separation layer 44 with a thickness of 1200~1400nm.
Specifically, in the present embodiment, the third separation layer 44 is formed by the method deposited.In other embodiments
In, it can also be formed, be not limited thereto by directly thermal oxidation method.
Further, planarization process is carried out, first separation layer 30 for being located at the upper surface of the epitaxial layer 12 is removed,
Second semiconductor column 42 and the third separation layer 44 are thinned simultaneously.
Further, in the upper surface of the epitaxial layer 12, second semiconductor column 42 and the third separation layer 44
Somatomedin layer 60.
Further, the dielectric layer 60 is etched from the upper surface of the dielectric layer 60, and is formed and runs through the dielectric layer
60 and corresponding second semiconductor column 42 contact hole 60a.
Figure 15 is please referred to, executes step S08: in the contact hole 60a and the upper surface deposited metal of the dielectric layer 60
And form the first metal layer 51 for connecting second semiconductor column 42.
Please refer to Figure 15, execute step S09: the substrate 11 lower surface deposited metal and form second metal layer
52。
The foregoing is merely one embodiment of the present of invention, are not intended to limit the invention, all in essence of the invention
Within mind and principle, any modification, equivalent substitution, improvement and etc. done be should be included within the scope of the present invention.
Claims (10)
1. a kind of power device with super-junction structure characterized by comprising
Substrate, the substrate include the substrate of the first conduction type and the first conduction type positioned at the upper surface of the substrate
Epitaxial layer；The termination environment of active area and the adjacent active area is provided on the substrate；
It is provided in the termination environment through the epitaxial layer and bottom connects the groove of the substrate；
It is formed in the first separation layer of the side wall of the groove；
It is formed in the groove and the super-junction structure between first separation layer, the super-junction structure includes at least one
First semiconductor column of a first conduction type and the second semiconductor column of at least one the second conduction type, described the first half lead
Scapus is laterally arranged alternately with second semiconductor column；The super-junction structure further includes the second separation layer and third separation layer,
Second separation layer is located at the upper surface of substrate and connect with one end of second semiconductor column；The third separation layer
It is connect with one end of first semiconductor column, the other end of first semiconductor column is connect with the substrate；
Connect the first metal layer of the other end of second semiconductor column；
Second metal layer positioned at the lower surface of the substrate.
2. the power device according to claim 1 with super-junction structure, which is characterized in that the super-junction structure is annular
Structure.
3. the power device according to claim 1 with super-junction structure, which is characterized in that the thickness of first separation layer
Degree is 1200~1500nm.
4. the power device according to claim 1 with super-junction structure, which is characterized in that the thickness of second separation layer
Degree is greater than the thickness of the third separation layer.
5. the power device according to claim 4 with super-junction structure, which is characterized in that the thickness of second separation layer
Degree be 1600~1800nm, the third separation layer with a thickness of 1200~1400nm.
6. the power device according to claim 1 with super-junction structure, which is characterized in that first semiconductor column
Width is 3-5um, and the width of second semiconductor column is 2-4um.
7. the power device according to claim 1 with super-junction structure, which is characterized in that further include being located at the extension
The dielectric layer of the upper surface of layer and the super-junction structure.
8. the power device according to claim 1 with super-junction structure, which is characterized in that first semiconductor column and
Second semiconductor column is formed by way of extension.
9. the production method of the power device according to claim 1 with super-junction structure, which is characterized in that including following
Step:
S01: providing substrate, and the substrate includes the substrate of the first conduction type and leads positioned at the first of the upper surface of the substrate
The epitaxial layer of electric type；The termination environment of active area and the adjacent active area is provided on the substrate；In the termination environment
The epitaxial layer formation is etched through the epitaxial layer and bottom connects the groove of the substrate；
S02: one separation layer of growth regulation on the side wall of the groove；
S03: the first epitaxial layer of one conduction type of growth regulation in the groove, through etch first epitaxial layer formed to
A few deep trench and at least one first semiconductor column, the deep trench are laterally arranged alternately with first semiconductor column；
S04: in the second separation layer of bottom grown of the deep trench；
S05: the second semiconductor column of two conduction type of extension growth regulation in the deep trench；
S06: first semiconductor column is thinned from one end of the relatively described substrate of first semiconductor column and makes described first
The height of semiconductor column is less than the thickness of the epitaxial layer, is formed simultaneously between second semiconductor column and/or is located at
Shallow trench between second semiconductor column and first separation layer；
S07: three separation layer of growth regulation in the shallow trench；
S08: the first metal layer for connecting one end of relatively described second separation layer of the second semiconductor column is formed；
S09: second metal layer is grown in the lower surface of the substrate.
10. the production method of the power device according to claim 9 with super-junction structure, which is characterized in that S07 is also wrapped
Include the upper surface somatomedin layer in the epitaxial layer and the third separation layer；It etches the dielectric layer and is formed through described
The contact hole of dielectric layer and corresponding second semiconductor column.
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| US20070013412A1 (en) * | 2005-06-23 | 2007-01-18 | Denso Corporation | Semiconductor device having super junction structure and method for manufacturing the same |
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| US20070013412A1 (en) * | 2005-06-23 | 2007-01-18 | Denso Corporation | Semiconductor device having super junction structure and method for manufacturing the same |
| US7342422B2 (en) * | 2005-06-23 | 2008-03-11 | Denso Corporation | Semiconductor device having super junction structure and method for manufacturing the same |
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