CN108655931B

CN108655931B - Cutting device

Info

Publication number: CN108655931B
Application number: CN201810251467.1A
Authority: CN
Inventors: 田中英明; 宫田谕
Original assignee: Disco Corp
Current assignee: Disco Corp
Priority date: 2017-03-28
Filing date: 2018-03-26
Publication date: 2021-11-23
Anticipated expiration: 2038-03-26
Also published as: CN108655931A; TW201836798A; TWI742263B; JP6847729B2; KR102325710B1; KR20180109698A; JP2018166178A

Abstract

Provided is a cutting device, which can mount a cutting tool on a main shaft without mistaking the type of the cutting tool mounted on the main shaft. The cutting device comprises: first and second cutting units (20-1, 20-2) having a tool cover fixed to the spindle housing; a chuck table (10) for holding a workpiece (201); and a control unit (100) including a tool information registration unit (101) for registering the type of the cutting tool. The tool cover has a movable portion that can be selectively positioned at an approaching position and a separating position. When the type of the first cutting tool is registered, the control unit (100) sets only the movable portion of the tool cover of the first cutting unit (20-1) at the separated position, and when the type of the second cutting tool is registered, the control unit (100) sets only the movable portion of the tool cover of the second cutting unit (20-2) at the separated position.

Description

Cutting device

Technical Field

The present invention relates to a cutting device for cutting a workpiece.

Background

There is known a cutting apparatus (dicing saw) for cutting various plate-like objects to be processed, such as semiconductor wafers and resin package substrates, with a cutting tool. The cutting device uses a biaxial type cutting device having two cutting units each including a spindle to which a cutting tool is attached and capable of simultaneously cutting two lines to be cut. The biaxial type cutting device performs effective cutting.

A biaxial type cutting apparatus is known which performs stepwise cutting, and has various types of cutting tools mounted on respective spindles, a cutting tool mounted on one spindle having a thick cutting edge to form a half-cut groove for removing a metal or a functional layer on a front surface of a workpiece, and a cutting tool mounted on the other spindle having a thin cutting edge to completely cut a groove bottom of the half-cut groove into chips (see, for example, patent documents 1 and 2).

Patent document 1: japanese patent No. 2892459

Patent document 2: japanese patent laid-open publication No. 2006-181700

When the stepped cutting is performed, if a cutting tool of an incorrect type is attached to each spindle and machining is performed in a biaxial type cutting apparatus, chipping may increase and the expected machining result may be significantly deteriorated. Therefore, a method of attaching the cutting tool to the spindle without mistaking the kind of the cutting tool attached to the spindle has been studied. For example, it is conceivable to attach a flange of the same color as the cutting tool or a tool container that houses the cutting tool to the spindle. In this case, when the machining is continued, the flange may be contaminated with chips and become difficult to distinguish, or when the attention of the operator is distracted, the recognition by color may be overlooked.

Disclosure of Invention

The present invention has been made in view of the above problems, and an object thereof is to provide a cutting device capable of attaching a cutting tool to a spindle without mistaking the kind of the cutting tool attached to the spindle.

In order to solve the above problems and achieve the object, a cutting device according to the present invention includes: a first cutting unit in which a first cutting tool is clamped and mounted on a flange fixed to a front end of the first spindle; a second cutting unit having a second cutting tool held and mounted on a flange fixed to a tip of the second spindle; a chuck table for holding a workpiece to be machined by the cutting tool; and a control unit that includes a tool information registration unit that registers a type of the cutting tool to be attached, and controls each component, wherein the cutting unit includes a tool cover that is fixed to a spindle housing that rotatably supports the spindle, and that covers the cutting tool to supply the machining liquid, the tool cover including: a fixing part fixed to the spindle housing; and a movable part for mounting the processing liquid nozzle to be openable and closable relative to the fixed part, the movable part can be selectively positioned at an approaching position where the machining liquid nozzle approaches the cutting tool and a separating position where the movable part is separated from the cutting tool and the cutting tool can be attached to and detached from the flange, when the first cutting tool is to be mounted, if the type of the first cutting tool is registered, the control unit sets the movable portion of the tool cover of the first cutting unit to the separated position without setting the movable portion of the tool cover of the second cutting unit to the separated position, when the second cutting tool is to be mounted, if the type of the second cutting tool is registered, the control unit sets the movable portion of the tool cover of the second cutting unit to the separated position without setting the movable portion of the tool cover of the first cutting unit to the separated position.

The cutting device may include a reading unit that reads an identification code including type information of the cutting tool provided in the cutting tool or a container that houses the cutting tool, and the type information read by the reading unit may be registered in the tool information registration unit.

In the cutting apparatus, the control unit may have a machining condition registration unit that registers a machining condition including a combination of the cutting tool and the spindle, and the control unit may determine the cutting unit to set the movable portion of the tool cover to the separated position based on a combination of the registered type of the cutting tool and the spindle.

The cutting device of the present invention has the following effects: the cutting tool can be attached to the spindle without mistaking the type of the cutting tool attached to the spindle.

Drawings

Fig. 1 is a perspective view showing a configuration example of a cutting apparatus according to embodiment 1.

Fig. 2 is a perspective view illustrating a spindle unit of a cutting unit of the cutting apparatus shown in fig. 1.

Fig. 3 is a perspective view illustrating a spindle and a flange of the spindle unit shown in fig. 2.

Fig. 4 is a perspective view illustrating a spindle and a cutting tool of the spindle unit shown in fig. 2.

Fig. 5 is a cross-sectional view in the Y-axis direction of the spindle unit shown in fig. 2.

Fig. 6 is a sectional view showing a state in which the main shaft of the main shaft unit shown in fig. 5 is locked.

Fig. 7 is a front view of a cutting unit of the cutting apparatus shown in fig. 1.

Fig. 8 is a front view showing a state in which a movable portion of a tool cover of a cutting unit of the cutting apparatus shown in fig. 7 is positioned at a separated position.

Fig. 9 is a perspective view showing a mounting and dismounting jig used when a cutting tool of the cutting apparatus shown in fig. 1 is replaced.

Fig. 10 is a plan view showing a torque driver for rotating the attachment/detachment jig shown in fig. 9.

Fig. 11 is a front view showing a state in which a cutting tool of the cutting apparatus shown in fig. 1 is replaced.

Fig. 12 is a side view partially in section showing a state in which a cutting tool of the cutting apparatus shown in fig. 1 is replaced.

Fig. 13 is an exploded perspective view showing a state in which a cutting tool for replacing the cutting apparatus shown in fig. 1 is housed in a container.

Fig. 14 is a plan view of a container for storing a cutting tool for replacement of the cutting apparatus shown in fig. 1.

Fig. 15 is a perspective view illustrating a reading unit of the cutting apparatus shown in fig. 1.

Fig. 16 is a functional flowchart of a control unit of the cutting apparatus shown in fig. 1.

Fig. 17 is a perspective view showing a cutting tool and a case attached to a cutting unit of the cutting apparatus according to embodiment 2.

Description of the reference symbols

1: a cutting device; 10: a chuck table; 20: a cutting unit; 20-1: a first cutting unit; 20-2: a second cutting unit; 21: a cutting tool; 21-1: a first cutting tool; 21-2: a second cutting tool; 22: a main shaft; 22-1: a first main shaft; 22-2: a second main shaft; 23: a spindle housing; 29: a flange; 30: a cutter cover; 31: a fixed part; 32: a movable part; 60: a container; 71: a bar code (identification code); 80: a reading unit; 100: a control unit; 101: a tool information registration unit; 102: a processing condition registration unit; 201: a workpiece; 321: cutting water nozzle (machining fluid nozzle).

Detailed Description

A mode (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. The components described below include those that can be easily conceived by those skilled in the art, and substantially the same. The following structures may be combined as appropriate. Various omissions, substitutions, and changes in the structure may be made without departing from the spirit of the invention.

[ embodiment 1]

A cutting apparatus according to embodiment 1 of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing a configuration example of a cutting apparatus according to embodiment 1.

The cutting apparatus 1 according to embodiment 1 is an apparatus for cutting a workpiece 201. In embodiment 1, the object 201 is a disc-shaped semiconductor wafer or optical device wafer made of silicon, sapphire, gallium, or the like. In the object 201, a device 204 is formed in a region partitioned in a lattice shape by a plurality of planned dividing lines 203 formed in a lattice shape on the front surface 202. The object 201 of the present invention may be a so-called TAIKO wafer having a thinned central portion and a thick portion formed on an outer peripheral portion, and the object 201 may be a rectangular package substrate, a ceramic plate, a glass plate, or the like having a plurality of devices sealed with resin, in addition to the wafer. An adhesive tape 206 as a protective member is stuck to the back surface 205 of the work 201. An annular frame 207 is attached to the outer periphery of the adhesive tape 206.

The cutting apparatus 1 shown in fig. 1 is an apparatus that holds a workpiece 201 by a chuck table 10 and cuts the workpiece 201 along a line 203 to be divided by a cutting tool 21 (shown in fig. 2). As shown in fig. 1, the cutting apparatus 1 includes: a chuck table 10 having a holding surface 11 for sucking and holding the workpiece 201; a cutting unit 20 that cuts a workpiece 201 held by the chuck table 10 by a cutting tool 21 attached to a spindle 22 (shown in fig. 2); and a control unit 100.

Further, the cutting device 1 includes: a not-shown processing feed unit that moves the chuck table 10 in an X-axis direction that is a processing feed direction parallel to the holding surface 11; an index feed unit, not shown, which moves the cutting unit 20 in a Y-axis direction, which is an index feed direction parallel to the holding surface 11 and perpendicular to the X-axis direction; and a non-illustrated cutting feed unit that moves the cutting unit 20 in a Z-axis direction parallel to a vertical direction perpendicular to both the X-axis direction and the Y-axis direction. Further, the cutting device 1 includes: a cassette lifter 110 that carries a cassette 111 that accommodates a plurality of workpieces 201 before and after cutting and moves the cassette 111 in the Z direction; and a conveyance unit, not shown, that carries the object 201 in and out of the cassette 111 and conveys the object 201.

As shown in fig. 1, the cutting apparatus 1 is a dicing saw having two cutting units 20 and cutting tools 21 arranged at facing positions, that is, two spindles, and is a so-called facing biaxial type cutting apparatus.

The chuck table 10 has a disk shape, and the holding surface 11 for holding the workpiece 201 is formed of porous ceramics or the like. The chuck table 10 is provided to be movable by the machining feed unit and rotatable about an axis parallel to the Z direction by a rotation drive source, not shown. The chuck table 10 is connected to a vacuum suction source, not shown, and sucks and holds the workpiece 201, which is cut by the cutting tool 21 of the cutting unit 20, by being sucked by the vacuum suction source. Further, a plurality of clamping portions 12 are provided around the chuck table 10, and are driven by an air actuator to clamp the annular frame 207 around the workpiece 201.

Next, the cutting unit 20 will be described with reference to the drawings. Fig. 2 is a perspective view illustrating a spindle unit of a cutting unit of the cutting apparatus shown in fig. 1. Fig. 3 is a perspective view illustrating a spindle and a flange of the spindle unit shown in fig. 2. Fig. 4 is a perspective view illustrating a spindle and a cutting tool of the spindle unit shown in fig. 2. Fig. 5 is a cross-sectional view in the Y-axis direction of the spindle unit shown in fig. 2. Fig. 6 is a sectional view showing a state in which the main shaft of the main shaft unit shown in fig. 5 is locked. Fig. 7 is a front view of a cutting unit of the cutting apparatus shown in fig. 1. Fig. 8 is a front view showing a state where a movable portion of a tool cover of a cutting unit of the cutting apparatus shown in fig. 7 is positioned at a separated position.

As shown in fig. 2, in the cutting unit 20, the cutting tool 21 is mounted by being sandwiched between flanges 29 fixed to the tip of the spindle 22. The cutting unit 20 cuts the workpiece 201 held by the chuck table 10 with the cutting tool 21. The cutting units 20 are provided so as to be movable in the Y-axis direction by the index feed unit and in the Z-axis direction by the cut feed unit with respect to the workpiece 201 held by the chuck table 10.

The cutting unit 20 has a spindle unit 27 shown in fig. 2 and a tool cover 30 shown in fig. 7. As shown in fig. 2, 3, and 4, the spindle unit 27 includes: a spindle 22, a spindle housing 23, a first flange member 24 (shown in fig. 3 and 4), a cutting tool 21, and an annular second flange member 25 (shown in fig. 2 and 7).

The spindle 22 is rotated around the axis parallel to the Y-axis direction by a spindle motor 223 shown in fig. 5 and 6. The spindle motor 223 has: a rotor 224 coupled to the main shaft 22; and a stator 225 that rotates the rotor 224. As shown in fig. 3, the main shaft 22 has, at its distal end portion: a tapered portion 221 whose diameter gradually decreases toward the front end; and a male screw 222 provided on the tip side of the tapered portion 221. The spindle housing 23 is formed in a substantially cylindrical shape, and is provided to be movable in the Y axis direction by the index feeding unit and to be movable in the Z axis direction by the cutting and feeding unit. The spindle housing 23 accommodates the spindle 22 in a state where a tip end portion formed with the male screw 222 is exposed. The spindle housing 23 supports the spindle 22 to be rotatable about the axis.

The first flange member 24 has: a cylindrical portion 241 attached to the outer periphery of the distal end portion of the spindle 22; and a flange portion 242 extending radially outward from the outer peripheral surface of the cylindrical portion 241. A male screw 243 is formed on the distal end side of the flange 242 of the cylindrical portion 241. The first flange member 24 is fixed to the main shaft 22 as shown in fig. 4 by fitting the distal end portion of the main shaft 22 into the cylindrical portion 241 and screwing the nut 28 to the outer periphery of the male screw 222 provided at the distal end portion of the main shaft 22.

The cutting tool 21 is a so-called hub tool, and has an annular cutting edge 212, and the cutting edge 212 is fixed to the outer periphery of a disc-shaped support base 211 to cut the workpiece 201. The cutting edge 212 is formed of abrasive grains such as diamond and CBN (Cubic Boron Nitride) and a binder material (bonding material) such as metal and resin, and has a predetermined thickness. Further, a gasketing tool composed only of the cutting edges 212 may be used as the cutting tool 21.

The cutting tool 21 is fixed to the spindle 22 by passing the cylindrical portion 241 of the first flange member 24 inside and overlapping the surface of the flange portion 242, and by screwing the second flange member 25 to the outer periphery of the male screw 243 formed in the cylindrical portion 241, the cutting tool 21 is held between the first flange member 24 and the second flange member 25. The first flange member 24 and the second flange member 25 sandwich and hold the cutting tool 21 therebetween, the first flange member 24 is fixed to one end of the spindle 22, and the second flange member 25 is fixed to the first flange member 24, thereby constituting a flange 29 that fixes the cutting tool 21 to the spindle 22. In this way, in the spindle unit 27 of the cutting unit 20, the cutting tool 21 is mounted so as to be sandwiched between the flanges 29 fixed to the tip of the spindle 22.

As shown in fig. 5 and 6, the spindle unit 27 includes a lock mechanism 271 that restricts rotation of the spindle 22. The lock mechanism 271 may have the same structure as the lock device shown in japanese patent application laid-open No. 2004-235250, for example, and the detailed structure thereof is omitted. The lock mechanism 271 has shaft lock pins 273, and the shaft lock pins 273 are provided to be slidable in the radial direction on the spindle case 23 so as to be engaged with and disengaged from a plurality of (for example, 3) engagement holes 272 formed on the same circumference at predetermined positions of the spindle 22.

The shaft lock pin 273 is biased in a direction of being disengaged from the engagement hole 272 by the coil spring 274. As shown in fig. 6, when pressurized gas is supplied from the pressurized gas supply source 276 to the shaft lock pin 273 by way of the switching valve 275 controlled by the control unit 100, the shaft lock pin 273 slides against the biasing force of the coil spring 274, engages in the engagement hole 272, and restricts rotation of the spindle 22 (i.e., locks the spindle 22). As shown in fig. 5, when the pressurized gas is not supplied from the pressurized gas supply source 276 to the shaft lock pin 273 in the lock mechanism 271 via the switching valve 275, the shaft lock pin 273 is disengaged from the engagement hole 272 by the biasing force of the coil spring 274, and the rotation of the spindle 22 is allowed.

The tool cover 30 is fixed to the spindle housing 23, covers the upper side and both sides of the cutting tool 21 in the X-axis direction, and supplies cutting water as a machining fluid to the cutting tool 21 during cutting. As shown in fig. 7 and 8, the tool cover 30 includes a fixed portion 31 and a movable portion 32.

The fixing portion 31 is fixed to the spindle housing 23. The fixing portion 31 covers the upper side and one side in the X-axis direction of the cutting insert 21. The fixed portion 31 is attached with the tool damage detector 50, and is provided with a cutting water injection port 311 for supplying cutting water to the cutting tool 21 during cutting. The tool damage detector 50 detects damage or wear of the cutting tool 21 during rotation of the cutting tool 21. The tool breakage detector 50 outputs the detection result to the control unit 100.

The movable portion 32 has a cutting water nozzle 321 as a machining liquid nozzle openably and closably attached to the fixed portion 31, and the movable portion 32 is attached to the other side of the fixed portion 31 in the X-axis direction. The movable portion 32 is supported by the fixed portion 31 to be movable in the X-axis direction. The movable portion 32 moves in the X-axis direction with respect to the fixed portion 31 by extending and contracting a rod 313 (shown in fig. 8) of the cylinder 312 housed in the fixed portion 31. Further, a cutting water nozzle 321 is attached to the lower end of the movable portion 32. The cutting water nozzle 321 extends from the lower end of the movable portion 32 toward the cutting water jet port 311, and a plurality of cutting water supply holes (not shown) for supplying cutting water to the cutting tool 21 and a cutting portion of the workpiece 201 to be cut by the cutting tool 21 during cutting are provided in the cutting water nozzle 321.

The movable portion 32 can be selectively positioned at an approaching position shown in fig. 7 where the cutting water nozzle 321 is brought close to the cutting tool 21 and a separating position shown in fig. 8 where the movable portion is separated from the cutting tool 21 and the cutting tool 21 can be attached to and detached from the spindle 22 by extending and contracting the rod 313 of the cylinder 312. The close position is a position where the attachment/detachment of the cutting tool 21 to the spindle 22 is restricted by the cutting water nozzle 321 or the like, and the separate position is a position where the attachment/detachment of the cutting tool 21 to the spindle 22 is permitted.

Next, a procedure of replacing the cutting tool 21 of the cutting unit 20 will be described with reference to the drawings. Fig. 9 is a perspective view showing a mounting and dismounting jig used when a cutting tool of the cutting apparatus shown in fig. 1 is replaced. Fig. 10 is a plan view showing a torque driver for rotating the attachment/detachment jig shown in fig. 9. Fig. 11 is a front view showing a state in which a cutting tool of the cutting apparatus shown in fig. 1 is replaced. Fig. 12 is a side view partially in section showing a state in which a cutting tool of the cutting apparatus shown in fig. 1 is replaced.

When the cutting tool 21 of the cutting unit 20 is replaced, the movable portion 32 of the tool cover 30 is positioned at the separation position, and the second flange member 25 is attached to and detached from the outer periphery of the cylindrical portion 241 of the first flange member 24. The attaching and detaching jig 40 shown in fig. 9 and the torque driver 41 shown in fig. 10 are used to attach and detach the second flange member 25 to and from the outer periphery of the cylindrical portion 241 of the first flange member 24.

As shown in fig. 9, the attachment/detachment jig 40 has a circular recess 401, and 4 fixing nut gripping claws 402 are arranged on the inner circumferential surface of the circular recess 401 at equal intervals in the circumferential direction. The circular recess 401 can cover the outside of the second flange member 25 of the cutting unit 20 positioned at the separated position. Further, the attachment/detachment jig 40 comes into contact with the cutting water nozzle 321 or the like, and the circular recess 401 cannot cover the outside of the second flange member 25 of the cutting unit 20 positioned at the close position. The fixing nut holding claws 402 are arranged to be elastically deformable in the radial direction, and can hold the second flange members 25 covered by the circular recessed portion 401 from the outside. A through hole 403 into which the tip of the torque driver 41 is inserted is formed in the center of the circular recess 401. The planar shape of the through hole 403 is a regular hexagon.

As shown in fig. 10, the torque driver 41 includes: an engaging portion 411 having a hexagonal cross section and inserted into the through hole 403 of the attaching/detaching jig 40; and a handle 412 for changing the torque to the rotation of the cone. The torque driver 41 rotates the second flange member 25 with respect to the first flange member 24 by inserting the engaging portion 411 into the through hole 403 of the attaching and detaching jig 40 covering the outer side of the second flange member 25 and rotating the handle 412.

When the cutting tool 21 of the cutting unit 20 is replaced, the movable portion 32 of the tool cover 30 is positioned at the separated position, and as shown in fig. 11 and 12, the circular recess 401 is covered on the outside of the second flange member 25 and the engaging portion 411 of the handle 412 is inserted into the through hole 403. The handle 412 is rotated to rotate the second flange member 25 relative to the first flange member 24, thereby removing the second flange member 25 from the first flange member 24. After the cutting tool 21 is replaced, the second flange member 25 is accommodated in the circular recess 401 of the attaching and detaching jig 40, the second flange member 25 is screwed to the outer periphery of the male screw 243, and the engaging portion 411 of the handle 412 is inserted into the through hole 403. The handle 412 is rotated to rotate the second flange member 25 relative to the first flange member 24, thereby fixing the second flange member 25 to the first flange member 24 and clamping the replaced cutting tool 21 between the

flange members

24, 25. Further, since the circular recess 401 cannot cover the outside of the second flange member 25 of the cutting unit 20 positioned at the close position, the attaching and detaching jig 40 and the torque driver 41 cannot rotate the second flange member 25 of the cutting unit 20 positioned at the close position with respect to the first flange member 24.

In embodiment 1, the cutting insert 21 for replacement is housed in a container 60 shown in fig. 13 and 14. Fig. 13 is an exploded perspective view showing a state in which a cutting tool for replacing the cutting apparatus shown in fig. 1 is housed in a container. Fig. 14 is a plan view of a container for storing a cutting tool for replacement of the cutting apparatus shown in fig. 1.

Preferably, the container 60 is made of synthetic resin and is transparent. As shown in fig. 13, the container 60 includes: a main body container 61; and a cover 63 openably and closably attached to the main body case 61 via a hinge 62. The hinge 62 is a flexible so-called self-hinge formed thinner than the main body container 61 and the cover 63. The main body case 61 has a circular projection 64 into which a hole provided at the center of the cutting insert 21 is fitted.

The cover 63 is integrally formed with a hook 65 that can be locked to the outside of the main body container 61, and the cover 63 is held in a closed state with respect to the main body container 61 as shown in fig. 14 by locking the hook 65 to an engagement projection 66 formed on the main body container 61.

The cover 63 of the container 60 has a peelable sticker 70 attached (provided) to a predetermined portion of the outer surface thereof, the peelable sticker identifying the type of the cutting tool 21, i.e., the type information. The removable label 70 is printed with a barcode 71, and the barcode 71 is an identification code containing variety information for identifying the kind of the cutting tool 21. In embodiment 1, the removable label 70 is further printed with a character string 72 indicating the type of the cutting tool 21. The barcode 71 indicates the kind of the cutting tool 21.

The cutting apparatus 1 further includes a reading unit 80 shown in fig. 15 for reading the barcode 71. Fig. 15 is a perspective view illustrating a reading unit of the cutting apparatus shown in fig. 1. In embodiment 1, the reading unit 80 is a barcode reader that optically reads the barcode 71. The reading unit 80 outputs the type of the cutting tool 21 indicated by the read barcode 71 to the control unit 100.

The cutting apparatus 1 described above is an apparatus for performing so-called step cutting, in which different types of cutting tools 21 are attached to the spindles 22 of two cutting units 20, and after cutting to the middle of the planned dividing line 203 in the thickness direction by the cutting tool 21 of one cutting unit 20, the object 201 is divided into devices 204 by the cutting tool 21 of the other cutting unit 20.

Hereinafter, one cutting unit 20 is referred to as a first cutting unit 20-1, the spindle 22 of the first cutting unit 20-1 is referred to as a first spindle 22-1, and the cutting tool 21 is referred to as a first cutting tool 21-1. The other cutting unit 20 is referred to as a second cutting unit 20-2, the spindle 22 of the second cutting unit 20-2 is referred to as a second spindle 22-2, and the cutting tool 21 is referred to as a second cutting tool 21-2. In addition, in the case where it is not necessary to distinguish the first and second cutting units 20-1 and 20-2, it will be referred to as a cutting unit 20, in the case where it is not necessary to distinguish the first and second spindles 22-1 and 22-2, it will be referred to as a spindle 22, and in the case where it is not necessary to distinguish the first and second cutting tools 21-1 and 21-2, it will be referred to as a cutting tool 21. In order to perform so-called stepped cutting, the cutting apparatus 1 determines in advance the type of the first cutting tool 21-1 attached to the first spindle 22-1 of the first cutting unit 20-1, and determines in advance the type of the second cutting tool 21-2 attached to the second spindle 22-2 of the second cutting unit 20-2, which is different from the type of the first cutting tool 21-1.

The control unit 100 controls each of the above-described components of the cutting apparatus 1, and causes the cutting apparatus 1 to perform a machining operation on the workpiece 201. In addition, the control unit 100 is a computer. The control unit 100 is connected to a display unit 200 including a liquid crystal display device or the like for displaying a state of a machining operation, an image, or the like, and an input device, not shown, for use by an operator in registering machining content information or the like. The input device is constituted by at least one of external input devices such as a touch panel and a keyboard provided in the display unit 200. Fig. 16 is a functional flowchart of a control unit of the cutting apparatus shown in fig. 1.

As shown in fig. 1 and 16, the control unit 100 includes a tool information registration unit 101, a processing condition registration unit 102, and a determination unit 103. The tool information registration unit 101 registers the types of the cutting tools 21-1, 21-2 attached to the spindles 22-1, 22-2 of the respective cutting units 20-1, 20-2. The type of the cutting tool 21, which is the type of the item information read by the reading unit 80, is registered in the tool information registration unit 101.

The machining condition registration unit 102 registers machining conditions 104 including combinations of the cutting tools 21-1 and 21-2 and the spindles 22-1 and 22-2. As shown in fig. 16, the machining condition registration unit 102 includes: a first cutting condition registration section 104-1 that registers the condition of the first cutting unit 20-1; a second cutting condition registration unit 104-2 that registers the conditions of the second cutting unit 20-2; and a workpiece condition registration unit 104-3 for registering a processing condition of the workpiece 201.

The first cutting condition registration unit 104-1 registers the type of the first cutting tool 21-1 attached to the first spindle 22-1 of the first cutting unit 20-1, the number of lines to divide 203 that can be cut, and the length that can be cut, from an input device or the like. The second cutting condition registration unit 104-2 registers the type of the second cutting tool 21-2 attached to the second spindle 22-2 of the second cutting unit 20-2, the number of lines to divide 203 that can be cut, and the length that can be cut, from an input device or the like.

The workpiece condition registration unit 104-3 registers the outer diameter and thickness of the workpiece 201, the thickness of the adhesive tape 206, the height of the first cutting tool 21-1 from the holding surface 11 during cutting, the rotational speed of the first spindle 22-1, the height of the second cutting tool 21-2 from the holding surface 11 during cutting, the rotational speed of the second spindle 22-2, and the machining feed speed from an input device or the like.

The specifying unit 103 specifies one of the cutting units 20-1, 20-2 as the cutting unit 20 for which the movable portion 32 of the tool cover 30 is set to the separated position, based on the combination of the type of the cutting tool 21 registered by the tool information registration unit 101 and the spindles 22-1, 22-2 registered by the machining condition registration unit 102. When the type of the cutting tool 21 read by the reading unit 80 is registered in the tool information registration unit 101, the determination unit 103 refers to the first cutting condition registration unit 104-1 and the second cutting condition registration unit 104-2.

The determination unit 103 determines the cutting condition registration unit, out of the first cutting condition registration unit 104-1 and the second cutting condition registration unit 104-2, in which the same type of cutting tool 21 as the type of cutting tool 21 registered by the tool information registration unit 101 is registered, and determines the cutting units 20-1, 20-2 corresponding to the determined cutting condition registration units 104-1, 104-2. The determination unit 103 stops the spindle motor 223 of the determined cutting unit 20-1, 20-2, supplies pressurized gas to the shaft lock pin 273 of the lock mechanism 271, and causes the lock mechanism 271 to restrict the rotation of the spindles 22-1, 22-2, that is, to lock the spindles 22-1, 22-2. The specifying unit 103 extends the rod 313 of the cylinder 312 in the tool cover 30 of the specified cutting unit 20-1, 20-2 to set the movable unit 32 at the spaced position, and shortens the rod 313 of the cylinder 312 in the tool cover 30 of the unspecified cutting unit 20-1, 20-2 to maintain the movable unit 32 at the approaching position.

In this way, when the first cutting tool 21-1 is to be mounted, if the type of the first cutting tool 21-1 is registered in the tool information registration unit 101, the determination unit 103 locks the first spindle 22-1 of the first cutting unit 20-1 and sets the movable portion 32 of the tool cover 30 of the first cutting unit 20-1 to the separated position while maintaining the movable portion 32 of the tool cover 30 of the second cutting unit 20-2 at the close position and not at the separated position. When the second cutting tool 21-2 is to be attached, if the type of the second cutting tool 21-2 is registered in the tool information registration unit 101, the determination unit 103 locks the second spindle 22-2 of the second cutting unit 20-2 and sets the movable portion 32 of the tool cover 30 of the second cutting unit 20-2 to the separated position while maintaining the movable portion 32 of the tool cover 30 of the first cutting unit 20-1 at the close position and not setting the position at the separated position.

Next, a machining operation of the cutting apparatus 1 according to embodiment 1 will be described. In the machining operation of the cutting apparatus 1 according to embodiment 1, the operator registers the machining content information in the control unit 100, places the cassette 111 containing the workpiece 201 before the cutting on the cassette lifter 110, and when the operator instructs the start of the machining operation, the control unit 100 starts the machining operation.

In the processing operation, the control unit 100 takes the workpiece 201 out of the conveying unit, and sucks and holds the workpiece 201 to the holding surface 11 via the adhesive tape 206. The control unit 100 adjusts the relative positions of the workpiece 201 held by the chuck table 10 and the cutting units 20-1 and 20-2 by performing image processing such as pattern matching for positioning the cutting tools 21-1 and 21-2 of the cutting units 20-1 and 20-2 on an image captured by an imaging unit, not shown, attached to the second cutting unit 20-2.

Then, the control unit 100 cuts the line to divide 203 of the object 201 by relatively moving the cutting tools 21-1 and 21-2 and the object 201 along the line to divide 203 by the processing feed unit, the index feed unit, the cutting feed unit, and the rotation drive source based on the processing content information.

When the control unit 100 cuts all the lines 203 to divide the object 201 into the devices 204, the object 201 is carried into the box 111, the object 201 stored in the box 111 is sequentially cut, and when the cutting of all the objects 201 in the box 111 is completed, the processing operation is terminated.

As described above, according to the cutting apparatus 1 of embodiment 1, when the first cutting tool 21-1 is to be attached, only the movable portion 32 of the tool cover 30 of the first cutting unit 20-1 is set at the separated position, and when the second cutting tool 21-2 is to be attached, only the movable portion 32 of the tool cover 30 of the second cutting unit 20-2 is set at the separated position. Therefore, the cutting apparatus 1 can mount the cutting tools 21-1, 21-2 to the main shafts 22-1, 22-2 of the cutting units 20-1, 20-2 positioned at the separated positions by using the attaching and detaching jig 40. In the cutting apparatus 1, the second flange member 25 of the cutting unit 20 positioned at the adjacent position cannot be rotated by the attaching/detaching jig 40 or the like, and therefore, even if it is desired to attach the cutting tool 21 to the spindle 22 of the cutting unit 20 positioned at the adjacent position, the attachment cannot be physically attached. As a result, even if the attention of the operator is lost, the cutting apparatus 1 can attach the cutting tool 21 to the spindle 22 without making a mistake as to the type of the cutting tool 21 attached to the spindle 22.

The cutting apparatus 1 further includes a reading unit 80, the reading unit 80 reads the barcode 71 provided on the container 60 that houses the cutting tool 21, and the type of the cutting tool 21 read by the reading unit 80 is registered in the tool information registration unit 101. Therefore, in the cutting apparatus 1, the barcode 71 is read by the reading unit 80, and the cutting tool 21 can be attached to the spindle 22 without changing the type of the cutting tool 21 attached to the spindle 22.

In the cutting apparatus 1, the types of the cutting tools 21-1, 21-2 attached to the spindles 22-1, 22-2 of the respective cutting units 20-1, 20-2 are registered in the cutting condition registers 104-1, 104-2 of the machining condition register 102 of the control unit 100. Therefore, the cutting apparatus 1 can compare the type of the cutting tool 21 registered in the tool information registration unit 101 with the types of the cutting tools 21-1 and 21-2 registered in the cutting condition registration units 104-1 and 104-2. As a result, only the movable portion 32 of the tool cover 30 of the cutting unit 20 to which the type of cutting tool 21 registered by the tool information registration portion 101 is attached can be reliably positioned at the separated position.

[ embodiment 2]

A cutting apparatus according to embodiment 2 of the present invention will be described with reference to the drawings. Fig. 17 is a perspective view showing a cutting tool and a case attached to a cutting unit of the cutting apparatus according to embodiment 2. In fig. 17, the same reference numerals are given to the same portions as those in embodiment 1, and the description thereof is omitted.

The cutting apparatus 1 according to embodiment 2 is the same as that according to embodiment 1 except that the detachable sticker 70 for identifying the type of the cutting tool 21 is attached (provided) to a predetermined portion of the support base 211 of the cutting tool 21. The reading unit 80 of the cutting apparatus 1 according to embodiment 2 reads the barcode 71 of the releasable label 70 provided on the cutting tool 21.

In the cutting apparatus 1 according to embodiment 2, the cutting tool 21 is attached to the spindle 22 of the cutting unit 20 positioned at the separated position, as in embodiment 1, and thus the cutting tool 21 can be attached to the spindle 22 without making a mistake as to the type of the cutting tool 21 attached to the spindle 22.

In the cutting apparatus 1 according to embodiment 2, since the detachable sticker 70 for specifying the type of the cutting tool 21 is attached to a predetermined portion of the support base 211 of the cutting tool 21, even if the cutting tool 21 is removed from the container 60 and the container 60 from which the cutting tool 21 is removed is not clear with the passage of time or the like, the bar code 71 attached to the cutting tool 21 can be read to attach the cutting tool 21 to the spindle 22 without making mistakes in the type.

The control unit 100 of the cutting apparatus 1 according to embodiments 1 and 2 described above includes: an arithmetic processing device including a microprocessor such as a CPU (central processing unit), a storage device including a memory such as a ROM (read only memory) or a RAM (random access memory), and an input/output interface device. The arithmetic processing device of the control unit 100 performs arithmetic processing according to a computer program stored in the storage device, and outputs a control signal for controlling the cutting apparatus 1 to the above-described constituent elements of the cutting apparatus 1 via the input/output interface device. The function of the tool information registration unit 101 of the control unit 100 is realized by the arithmetic processing unit writing the type of the cutting tool 21 read by the reading unit 80 into the storage device. The function of the processing condition registration unit 102 of the control unit 100 is realized by the arithmetic processing unit writing the processing conditions in the storage device. That is, the functions of the tool information registration unit 101 and the machining condition registration unit 102 of the control unit 100 are realized by a storage device. The function of the determination unit 103 of the control unit 100 is realized by the arithmetic processing device executing a computer program stored in the storage device.

The present invention is not limited to the above embodiments. That is, various modifications can be made and implemented without departing from the scope of the present invention. In the cutting apparatus 1 shown in embodiment 1 and embodiment 2, the reading unit 80 reads the barcode 71 and the types of the cutting tools 21-1 and 21-2 read by the reading unit 80 are registered in the tool information registration unit 101, but in the present invention, the operator may operate the input device to register the types of the cutting tools 21-1 and 21-2 in the tool information registration unit 101.

Claims

1. A cutting device, comprising:

a first cutting unit in which a first cutting tool is clamped and mounted on a flange fixed to a front end of the first spindle;

a second cutting unit having a second cutting tool held and mounted on a flange fixed to a tip of the second spindle;

a chuck table for holding a workpiece to be machined by the cutting tool; and

a control unit including a tool information registration unit for registering a type of the cutting tool to be mounted, the control unit controlling each component,

the cutting device is characterized in that,

the cutting unit has a tool cover fixed to a spindle housing for rotatably supporting the spindle, and supplying a machining fluid while covering the cutting tool,

the cutter cover has:

a fixing part fixed to the spindle housing; and

a movable portion that mounts the machining liquid nozzle so as to be openable and closable with respect to the fixed portion, the movable portion being selectively positionable at an approaching position where the machining liquid nozzle approaches the cutting tool and a separating position where the movable portion is separated from the cutting tool and the cutting tool is attachable to and detachable from the flange,

when the first cutting tool is to be mounted, if the type of the first cutting tool is registered, the control unit sets the movable portion of the tool cover of the first cutting unit to the separated position without setting the movable portion of the tool cover of the second cutting unit to the separated position,

when the second cutting tool is to be mounted, if the type of the second cutting tool is registered, the control unit sets the movable portion of the tool cover of the second cutting unit to the separated position without setting the movable portion of the tool cover of the first cutting unit to the separated position.

2. The cutting device of claim 1,

the cutting device comprises a reading unit for reading the identification code containing the variety information of the cutting tool arranged on the cutting tool or a container for containing the cutting tool,

the item information read by the reading unit is registered in the tool information registration unit.

3. The cutting apparatus of claim 1,

the control unit has a machining condition registration unit that registers a machining condition including a combination of the cutting tool and the spindle, and determines the cutting unit that sets the movable portion of the tool cover at the separated position based on a combination of the type of the cutting tool registered by the tool information registration unit and the spindle registered by the machining condition registration unit.