CN108407119A - A kind of silicon single crystal rod processing unit (plant) - Google Patents
A kind of silicon single crystal rod processing unit (plant) Download PDFInfo
- Publication number
- CN108407119A CN108407119A CN201810453697.6A CN201810453697A CN108407119A CN 108407119 A CN108407119 A CN 108407119A CN 201810453697 A CN201810453697 A CN 201810453697A CN 108407119 A CN108407119 A CN 108407119A
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- single crystal
- silicon single
- crystal rod
- seat
- fixed
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 151
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 151
- 239000010703 silicon Substances 0.000 title claims abstract description 151
- 239000013078 crystal Substances 0.000 title claims abstract description 142
- 230000007246 mechanism Effects 0.000 claims abstract description 177
- 238000005520 cutting process Methods 0.000 claims abstract description 77
- 239000000463 material Substances 0.000 claims abstract description 42
- 230000001939 inductive effect Effects 0.000 claims abstract description 21
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims abstract description 7
- 230000006698 induction Effects 0.000 claims abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 73
- 229910003460 diamond Inorganic materials 0.000 claims description 30
- 239000010432 diamond Substances 0.000 claims description 30
- 230000000903 blocking effect Effects 0.000 claims description 28
- 239000007921 spray Substances 0.000 claims description 26
- 238000005507 spraying Methods 0.000 claims description 25
- 210000000078 claw Anatomy 0.000 claims description 17
- 239000003638 chemical reducing agent Substances 0.000 claims description 14
- 238000005096 rolling process Methods 0.000 claims description 13
- 238000003860 storage Methods 0.000 claims description 12
- 230000033001 locomotion Effects 0.000 claims description 11
- 238000009434 installation Methods 0.000 claims description 10
- 230000001737 promoting effect Effects 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000011435 rock Substances 0.000 claims 1
- 238000003754 machining Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 3
- 230000008569 process Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 12
- 230000005540 biological transmission Effects 0.000 description 10
- 230000000694 effects Effects 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 229910021419 crystalline silicon Inorganic materials 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000007667 floating Methods 0.000 description 3
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 235000013312 flour Nutrition 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The present invention relates to a kind of silicon single crystal rod processing unit (plant)s, including workbench, feed mechanism, to knife Material moving device and saw blade cutting operating mechanism, include sucker to knife Material moving device, Material moving device and testing agency, wherein testing agency includes connecting seat, round nut, slidiing pin, resetting spring, inductive switch and tablet, it is threadedly coupled between connecting seat and shifting rack, round nut is sheathed on outside connecting seat, slidiing pin one end connects resetting spring, the other end connects tablet, inductive switch is fixed on connecting seat, the induction end of inductive switch and the side wall of connecting seat are flush, tablet is flush with the sucker face after silicon single crystal rod is sucked, saw blade cutting operating mechanism is processed for monocrystalline silicon wafer.The feeding process of the present apparatus is simpler, and silicon single crystal rod travelling speed is fast, high in machining efficiency, ensures to ensure that the accuracy of silicon single crystal rod and original point position ensures its machining accuracy to reduce silicon single crystal rod Cutting Length error by the testing agency added.
Description
Technical field
The present invention relates to hard and brittle material cutting technology field more particularly to a kind of silicon single crystal rod processing unit (plant)s.
Background technology
In Chinese patent literature, publication number CN107443601A, it discloses a kind of monocrystalline bar MATERIAL CUTTING equipment,
Including rack, can on chassis the monocrystal rod feed device of sliding and running, the cutting frame on chassis, be mounted on
Saw blade cutting mechanism on cutting frame, fetches and delivers material robot and material at the monocrystal rod material torr ejection device that can be slided on chassis
Vehicle is characterized by：On back-up roller wheel component firm banking, the clamping jaw of two moveable clamping units is located at back-up roller wheel
Top, clamping unit may pass through the space below cutting frame, and saw blade cutting mechanism is single hop cutting, and servo motor driving is slowed down
Machine drives wheel and rack engagement to realize that the movement of bar floating jacking device, feeding robot are located at bar floating jacking device
Side.The equipment has the following deficiencies：
(1) silicon single crystal rod realizes self-centering clamping by the clamping jaw of two groups of removable clamping units, often executes a cutting
Action must all repeat the steps of：Clamping unit unclamps silicon single crystal rod and is placed on roll wheel assembly, moves clamping unit to finger
Positioning sets, clamps silicon single crystal rod disengaging roll wheel assembly again again, drives silicon single crystal rod to given cut position, cumbersome behaviour again
Make, the working efficiency of equipment can be substantially reduced, reduces yield, and it is not disclosed how school knife is carried out, to ensure in the equipment
The cutting accuracy of silicon single crystal rod, and traditional cutting school knife is all the school knife effect by way of manually observing or bracing wire positions
Rate is low, and cutting accuracy is low, is easy to affect greatly the machining accuracy of silicon single crystal rod.
(2) chucking power of support monocrystalline bar is provided by the cylinder of bar floating jacking device, and cylinder needs after ejection
Keep this ejection position constant until cutting completion, since bleed pressure is unstable, the loss of supply air line leak pressure, cuts off
Silicon single crystal rod Gravity changer can all have an impact chucking power afterwards, and monocrystal rod material position may be caused to move to influence cut quality.
(3) it is currently used for carrying out cold cut to annular diamond fretsaw and the spray equipment swept is mounted on cutting operating mechanism
The edge for cutting window, when just starting to cut farther out apart from silicon single crystal rod, cold cut water slug is splashed around after silicon single crystal rod, is done
Dirty working environment is unfavorable for environmental protection.
Invention content
For this reason, it may be necessary to a kind of silicon single crystal rod processing unit (plant) is provided, it is worked to solve existing silicon single crystal rod processing unit (plant)
The cumbersome efficiency of feeding is low in journey, the problem that silicon single crystal rod Cutting Length error is big, machining accuracy is low.
To achieve the above object, a kind of silicon single crystal rod processing unit (plant) is inventor provided, the processing unit (plant) includes work
Platform, feed mechanism, to knife Material moving device and saw blade cutting operating mechanism；
It is provided with multiple idler wheel mechanisms on the top surface of the workbench, the multiple idler wheel mechanism is along table spindle to row
Row；
The feed mechanism includes clamping device and conveying mechanism, and the clamping device is described for clamping silicon single crystal rod
Conveying mechanism includes carriage and the first driving mechanism, and the clamping device is fixed on carriage, first driving mechanism
For driving carriage to be axially moved along workbench；
Described includes sucker, Material moving device and testing agency to knife Material moving device, the Material moving device include move rack and
Second driving mechanism, second driving mechanism move rack along workbench axial movement for driving, and the sucker is fixed on shifting
On rack, sucker is used to paste the end face inhaled in silicon single crystal rod, and the testing agency includes connecting seat, round nut, sliding pin
Axis, resetting spring, inductive switch and tablet are threadedly coupled between the connecting seat and shifting rack, and the round nut is sheathed on
Outside connecting seat, accommodating hole is offered on connecting seat, the resetting spring is located in accommodating hole, and slidiing pin one end connection is multiple
Position spring, the other end connect tablet, and the inductive switch is fixed on connecting seat, the induction end of inductive switch and connecting seat
Side wall is flush, and the tablet is flush with the sucker face after silicon single crystal rod is sucked；
The saw blade cutting operating mechanism includes rack, saw blade cutting unit and hoisting mechanism, the saw blade cutting unit
Positioned at the top of workbench, saw blade cutting unit is fixed via hoisting mechanism and rack, and the hoisting mechanism drives saw blade cutting
Unit is processed monocrystalline silicon wafer.
As a kind of preferred structure of the present invention, the connecting seat includes fixed seat and sliding seat, the fixed seat with move
It is threadedly coupled between rack, is slidably socketed between the sliding seat and fixed seat, the fixed seat is opened up with inside sliding seat
There are accommodating hole, sliding seat to be connected to fixed seat, the resetting spring is located in the accommodating hole of fixed seat, described slidiing pin one end
It is connect with resetting spring, the other end connects tablet, and the inductive switch is fixed on sliding seat.
As a kind of preferred structure of the present invention, described further includes clamping workpiece to knife Material moving device, the clamping workpiece
It is fixed on and moves on rack, clamping workpiece is located at the both sides of sucker, and the clamping workpiece includes clamping seat, the first cylinder and the
The cylinder body of two cylinders, first cylinder is fixed on the side wall of clamping seat, and the telescopic rod of the first cylinder runs through clamping seat, stretches
Bar is fixed with withstanding tight block across clamping seat one end, and the telescopic rod outer cover between the withstanding tight block and clamping seat side wall is equipped with circle
The cylinder body of extensible cover, second cylinder is fixed on the side wall of clamping seat, and the telescopic rod of the second cylinder is flexible to be realized and the
One Telescopic-cylinder bar against or separation, be located at sucker both sides clamping workpiece the first cylinder telescopic rod towards sucker
Setting.
As the present invention a kind of preferred structure, the clamping device include the first master jaw, the second master jaw, claw and
Extensible member, the arc-shaped structure of first master jaw, the second master jaw, one end of the first master jaw and one end of extensible member are cut with scissors
It connects, the other end of the first master jaw is fixed with claw, and one end of the second master jaw and the other end of extensible member are hinged, the second claw
The other end of seat is fixed with claw, and the first master jaw connect carriage, the first master jaw with the second master jaw by support column
It can be rotated around with support column junction with the second master jaw.
As a kind of preferred structure of the present invention, the idler wheel mechanism includes U-shaped rolling wheel support frame, connecting rod and idler wheel,
The U-shaped rolling wheel support frame is fixedly connected with bench top, and the idler wheel is fixed on the U-shaped of rolling wheel support frame via connecting rod
In slot, idler wheel can be rotated around connecting rod, and along bench top axial alignment at two groups, two groups of idler wheel mechanisms exist multiple idler wheel mechanisms
It is symmetrical arranged in bench top, it is 30-60 ° that the extended line of idler wheel center line, which is formed by angle, in two groups of idler wheel mechanisms.
As a kind of preferred structure of the present invention, multiple clamping workpieces are additionally provided on the top surface of the workbench, it is described
For multiple clamping workpieces along bench top axial alignment at two groups, two groups of clamping workpieces are conllinear with two groups of idler wheel mechanisms.
As a kind of preferred structure of the present invention, the saw blade cutting operating mechanism is planer-type annular diamond wire sawing
Cutting mill structure, the planer-type annular diamond fretsaw cutting mechanism include portal frame, annular diamond fretsaw cutter unit and carry
Mechanism is risen, the annular diamond fretsaw cutter unit includes train installation panel, guide wheel assembly and annular diamond fretsaw, institute
It states annular diamond fretsaw to be laid in the guide wheel wire casing of guide wheel assembly, the hoisting mechanism includes promoting motor, being promoted and slowed down
Machine, lifting handle and hoisting nut, the promotion motor are set on the crossbeam of portal frame, promote motor via lifting speed reducer
It is connect with lifting handle, promotes motor for driving lifting handle to rotate, the hoisting nut is socketed on lifting handle, described
Train installation panel is mutually fixed with hoisting nut.
As a kind of preferred structure of the present invention, the processing unit (plant) further includes mobile spraying mechanism, the mobile spray
Mechanism includes mobile mechanism and spraying mechanism, and the spraying mechanism includes water storage box, flow pipe, water spray chamber, space limiting side plate and gear
Water hairbrush offers inlet opening, the flow pipe connection water storage box and water spray chamber, the bottom plate of the water spray chamber on the water storage box
On offer multiple hole for water sprayings, space limiting side plate, the bottom of the space limiting side plate are both provided on the front and rear sides face of the water spray chamber
End has arc notch, and water blocking hairbrush is both provided in the left and right sides of water spray chamber.
As a kind of preferred structure of the present invention, the processing unit (plant) further includes flexible water blocking mechanism, the flexible water blocking
Mechanism includes rolling-up mechanism and water blocking curtain sheet, and water blocking curtain sheet one end is fixed with workbench, the other end retracting of water blocking curtain sheet
In rolling-up mechanism.
As a kind of preferred structure of the present invention, the processing unit (plant) further includes taking piece tooling, the craft to take piece by hand
Tooling includes that Magnetic gauge stand, universal support arm and slice sucker, described universal support arm one end are connect with Magnetic gauge stand, universal support arm
The other end is connect with slice sucker, and piece tooling is taken to be located on workbench by hand, and the slice sucker is used for the monocrystalline silicon of slice
The end face of stick.
It is different from the prior art, above-mentioned technical proposal has the following advantages that：Silicon single crystal rod processing unit (plant) of the present invention is logical first
It crosses clamping device and silicon single crystal rod is gripped into fixation, then be transported to move knife by silicon single crystal rod to be processed by conveying mechanism and expect
At mechanism, clamping device unclamps silicon single crystal rod, only needs sucker that the end face of silicon single crystal rod is sucked later, and pass through Material moving device
Silicon single crystal rod is dragged into given cut position, after the completion of first time cutter is made, is reused to knife Material moving device
Feeding can be completed in dragging silicon single crystal rod so that feeding process is simpler, and silicon single crystal rod travelling speed is fast, high in machining efficiency；
In addition when the end face of silicon single crystal rod is sucked in sucker completely, the cutting origin of silicon single crystal rod, and the detection machine by adding are determined
Structure guarantee ensures that the accuracy of silicon single crystal rod and original point position ensures its processing to reduce silicon single crystal rod Cutting Length error
Precision.
Description of the drawings
Fig. 1 is the oblique view of structural diagram of one embodiment of silicon single crystal rod processing unit (plant) of the present invention；
Fig. 2 is the oblique view of structural diagram of one embodiment of feed mechanism of silicon single crystal rod processing unit (plant) of the present invention；
Fig. 3 is the oblique view of structural diagram to one embodiment of knife Material moving device of silicon single crystal rod processing unit (plant) of the present invention；
Fig. 4 is the oblique view of structural diagram of one embodiment of clamping workpiece of silicon single crystal rod processing unit (plant) of the present invention；
Fig. 5 is the oblique view of structural diagram of one embodiment of testing agency of silicon single crystal rod processing unit (plant) of the present invention；
Fig. 6 is the schematic cross-sectional view of one embodiment of testing agency of silicon single crystal rod processing unit (plant) of the present invention；
Fig. 7 is the side structure schematic view of one embodiment of workbench of silicon single crystal rod processing unit (plant) of the present invention；
Fig. 8 is the front view structure signal of one embodiment of saw blade cutting operating mechanism of silicon single crystal rod processing unit (plant) of the present invention
Figure；
Fig. 9 is the backsight structural representation of one embodiment of saw blade cutting operating mechanism of silicon single crystal rod processing unit (plant) of the present invention
Figure；
Figure 10 is the oblique view of structural diagram of one embodiment of idler wheel mechanism of silicon single crystal rod processing unit (plant) of the present invention；
Figure 11 is the oblique view of structural diagram of one embodiment of mobile spraying mechanism of silicon single crystal rod processing unit (plant) of the present invention；
Figure 12 is the oblique view of structural diagram of flexible one embodiment of water blocking mechanism of silicon single crystal rod processing unit (plant) of the present invention；
Figure 13 is that the craft of silicon single crystal rod processing unit (plant) of the present invention takes the oblique view of structural diagram of one embodiment of piece tooling；
Figure 14 is a kind of oblique view of structural diagram of another embodiment of silicon single crystal rod processing unit (plant) of the present invention；
Figure 15 is the oblique view of structural diagram of another embodiment of feed mechanism of silicon single crystal rod processing unit (plant) of the present invention；
Figure 16 is the oblique view of structural diagram to another embodiment of knife Material moving device of silicon single crystal rod processing unit (plant) of the present invention.
Reference sign：
1, workbench；11, boss；
2, feed mechanism；
211, the first master jaw；212, the second master jaw；213, claw；214, extensible member；215, support column；216, it supports
Plate；
221, carriage；222, the first driving mechanism；2221, servo motor；2222, transmission gear；2223, driving cog
Item；2224, speed reducer；2225, the linear guide；2226, sliding block；
3, to knife Material moving device；
31, sucker；
321, rack is moved；322, the second driving mechanism；
33, testing agency；331, fixed seat；332, sliding seat；333, round nut；334, slidiing pin；335, bullet is resetted
Spring；336, inductive switch；337, tablet；
34, clamping workpiece；341, clamping seat；342, the first cylinder；343, the second cylinder；344, withstanding tight block；345, round
Extensible cover；
4, saw blade cutting operating mechanism；
41, portal frame；
42, annular diamond fretsaw cutter unit；421, train installs panel；422, guide wheel assembly；423, annular Buddha's warrior attendant
Stone line is sawed；
431, motor is promoted；432, lifting speed reducer；433, lifting handle；434, hoisting nut；435, lift rail；
436, sliding block is promoted；
5, idler wheel mechanism；51, U-shaped rolling wheel support frame；52, connecting rod；53, idler wheel；
6, silicon single crystal rod；
7, mobile spraying mechanism；
71, mobile mechanism；
721, water storage box；722, flow pipe；723, water spray chamber；724, space limiting side plate；725, water blocking hairbrush；
73, mounting bracket；
8, flexible water blocking mechanism；81, rolling-up mechanism；82, water blocking curtain sheet；
9, piece tooling is taken by hand；91, Magnetic gauge stand；92, universal support arm；93, it is sliced sucker.
Specific implementation mode
For the technology contents of technical solution, construction feature, the objects and the effects are described in detail, below in conjunction with specific reality
It applies example and attached drawing is coordinated to be explained in detail.
It please refers to Fig.1 to Figure 16, the present invention provides a kind of silicon single crystal rod processing unit (plant), the processing unit (plant) includes work
Platform 1, feed mechanism 2, to knife Material moving device 3 and saw blade cutting operating mechanism 4；
Bearing structure of the workbench 1 as silicon single crystal rod 6 to be processed, the movement and processing of silicon single crystal rod 6 are in work
Make to complete on platform 1.Specifically, multiple idler wheel mechanisms 5 are provided on the top surface of the workbench 1,5 edge of the multiple idler wheel mechanism
1 axial alignment of workbench.The idler wheel mechanism 5 is directly contacted with silicon single crystal rod 6, the idler wheel along idler wheel mechanism 5 of silicon single crystal rod 6
It is slided in face so that the movement of silicon single crystal rod 6 is more smoothly.
As shown in Fig. 2, feed mechanism one of of the feed mechanism 2 as the present apparatus, the monocrystalline being placed on workbench 1
Silicon rod 6 is transported to next unit by feed mechanism 2 first, with close to specified Working position.Specifically, the feed mechanism
2 include clamping device and conveying mechanism, and for the clamping device for clamping silicon single crystal rod 6, the conveying mechanism includes carriage
221 and first driving mechanism 222, the clamping device be fixed on carriage 221, first driving mechanism 222 is used for band
Dynamic carriage 221 is axially moved along workbench 1.Mounting bracket of the carriage 221 as clamping device, 222 band of the first driving mechanism
Dynamic carriage 221 moves, and to drive the clamping device of gripping silicon single crystal rod 6 to move, reaches the work of mobile silicon single crystal rod 6 to be processed
With.
As shown in figure 3, the another feed mechanism to knife Material moving device 3 as the present apparatus, had both played mobile monocrystalline
Silicon rod 6 arrives the effect of specified Working position, and plays the role of calibrating knife, ensures the accuracy of 6 working origin of silicon single crystal rod,
To ensure its machining accuracy.Specifically, described include sucker 31, Material moving device and testing agency 33 to knife Material moving device 3, it is described
Material moving device includes moving rack 321 and the second driving mechanism 322, and second driving mechanism 322 moves 321 edge of rack for driving
Workbench 1 is axially moved, and the sucker 31, which is fixed on, to be moved on rack 321, and sucker 31 is used to paste the end face inhaled in silicon single crystal rod 6
On, the testing agency 33 includes connecting seat, round nut, slidiing pin 334, resetting spring 335, inductive switch 336 and induction
Plate 337 is threadedly coupled between the connecting seat and shifting rack 321, and the round nut is sheathed on outside connecting seat, is opened up on connecting seat
There are accommodating hole, the resetting spring 335 to be located in accommodating hole, 334 one end of the slidiing pin connects resetting spring 335, another
End connection tablet 337, the inductive switch 336 are fixed on connecting seat, the induction end of inductive switch 336 and the side of connecting seat
Wall is flush, and the tablet 337 is flush with 31 face of sucker after silicon single crystal rod 6 is sucked.In the present apparatus, feed mechanism 2
Silicon single crystal rod 6 is transported forward first, until the front end face of silicon single crystal rod 6 touch sucker 31, clamping device decontrols monocrystalline at this time
Silicon rod 6, feed mechanism 2 return to initial position, until participate in cutting work next time when next 6 clamping of silicon single crystal rod, this
When sucker 31 sucked into the position of 6 front end face of the silicon single crystal rod origin long as cutting meter completely, band is moved by Material moving device
The dynamic silicon single crystal rod 6 sucked on sucker 31 moves forward, and when Material moving device moves to specified position, starts to cut work,
Because the origin long as cutting meter determines that Material moving device stop position determines, then silicon single crystal rod 6 in knife shift mechanism
Cutting Length be entirely accurate, and using this structure it is more efficient for the determination of Cutting Length, it is whole to provide
The processing efficiency of a device.Please refer to Fig. 5 and Fig. 6.In order to further increase the Cutting Length precision of silicon single crystal rod 6, knife is moved
It is also provided with testing agency 33 in material mechanism 3, the accuracy to ensure long origin in terms of cutting is specifically felt in testing agency 33
It answers plate 337 to be flush with sucker 31 face of the sucker 31 after sucking silicon single crystal rod 6, feels when sucker 31 does not suck silicon single crystal rod 6
Answer plate 337 that should first be struck on tablet 337 in the front of sucker 31, silicon single crystal rod 6, tablet 337 moves backward, single
The front end face of crystalline silicon rod 6 strikes when being sucked completely by sucker 31 on sucker 31, and tablet 337 is flush with 31 face of sucker, this
When tablet 337 touch contact inductive switch 336 backward, inductive switch 336 is lighted to ensure that silicon single crystal rod 6 and origin are fixed
The accuracy of position ensures its machining accuracy to reduce 6 Cutting Length error of silicon single crystal rod, and sucker 31 is detached from silicon single crystal rod 6
Later, under the action of resetting spring 335, tablet 337 is returned to original state, to carry out next calibration.And when sense
Inductive switch 336 lights and sucker 31 does not drive the movement of silicon single crystal rod 6 or silicon single crystal rod 6 to be dragged by sucker 31, and incudes and open
It closes 336 reactionless, illustrates that error occur in silicon single crystal rod 6 and original point position, determine precision then cutting is long and can then be reduced, at this time
The position of connecting seat is adjusted, adjustment connecting screw locks the depth for moving rack 321 to adjust the position of tablet 337 so that inhales
Sucker 31 face of the disk 31 after sucking silicon single crystal rod 6 is flush with tablet 337, determines that long origin is counted in the cutting of silicon single crystal rod 6
Accuracy, after rotatable connection seat regulates the position of tablet 337, then the round nut by being set in outside connecting seat is locked
Gu.Preferably, the sucker 31 is circle, and the center phase at the center and silicon single crystal rod 6 of the sucker 31 on moving rack 321 is arranged
It is corresponding.
The saw blade cutting operating mechanism 4 specifically executes the component of cutting function as the present apparatus, to list to be processed
Crystalline silicon rod 6 executes slice or break-in facility.Specifically, the saw blade cutting operating mechanism 4 includes rack, saw blade cutting unit
And hoisting mechanism, the saw blade cutting unit are located at the top of workbench 1, saw blade cutting unit is solid via hoisting mechanism and rack
Fixed, the hoisting mechanism drives saw blade cutting unit to be processed monocrystalline silicon wafer.
Fig. 5 and Fig. 6 are please referred to, as a preferred embodiment of the present invention, the connecting seat includes fixed seat 331 and slides
Dynamic seat 332 is threadedly coupled between the fixed seat 331 and shifting rack 321, is slided between the sliding seat 332 and fixed seat 331
Accommodating hole is offered inside socket, the fixed seat 331 and sliding seat 332, sliding seat 332 is connected to fixed seat 331, described
Resetting spring 335 is located in the accommodating hole of fixed seat 331, and 334 one end of the slidiing pin is connect with resetting spring 335, another
End connection tablet 337, the inductive switch 336 are fixed on sliding seat 332.Fixed seat 331 is as testing agency 33 and shifting
Rack 321 is directly connected to structure, is divided into fixed seat 331 and the purpose of sliding seat 332 to be connecting seat：It is cut when detecting
The long origin of meter is cut there are when error, then needing the front and back position to tablet 337 to be adjusted, that is, adjustment fixed seat 331
Upper screw thread locks the depth for moving rack 321, because what is used between sliding seat 332 and fixed seat 331 is slidably connected, in fixed seat
331 carry out rotation adjustment when locking depth, and when 332 diametrical position of sliding seat is constant, then being fixed on sliding seat 332
On inductive switch 336 can then keep constant with 337 relative position of tablet, to prevent to inductive switch 336 normally detection work
It impacts.In the particular embodiment, the connection of slidiing pin 334 Yu the resetting spring 335 can be sliding pin
One end of axis 334 directly with one end of resetting spring 335 against or slidiing pin 334 extend into the inward turning of resetting spring 335
In cavity, the limit protrusion that is arranged on slidiing pin 334 and 335 one end of resetting spring against.Preferably, the tablet 337
Plastic material is made, and is that tablet 337 impacts the quality of silicon single crystal rod 6, because silicon wafer and ferrous material are direct
Contact, ferrous material, which very likely carries, contains magnetic conductive substance, leads to the complication of silicon chip magnetic field edge effect, to influence
The quality of silicon crystal block after cutting.
Fig. 3 and Fig. 4 are please referred to, as a preferred embodiment of the present invention, described further includes clamping to knife Material moving device 3
Workpiece 34, the clamping workpiece 34, which is fixed on, to be moved on rack 321, and clamping workpiece 34 is located at the both sides of sucker 31, the dress
It includes clamping seat 341, the first cylinder 342 and the second cylinder 343 to press from both sides workpiece 34, and the cylinder body of first cylinder 342 is fixed on dress
On the side wall of holder 341, the telescopic rod of the first cylinder 342 runs through clamping seat 341, and telescopic rod is fixed across 341 one end of clamping seat
There is withstanding tight block 344, the telescopic rod outer cover between 341 side wall of the withstanding tight block 344 and clamping seat is equipped with round extensible cover
345, the cylinder body of second cylinder 343 is fixed on the side wall of clamping seat 341, and the telescopic rod of the second cylinder 343 is flexible to be realized
With 342 telescopic rod of the first cylinder against or detach, the first cylinder 342 positioned at the clamping workpieces 34 of 31 both sides of sucker is stretched
Contracting bar is arranged towards sucker 31.The clamping workpiece 34 is used for when silicon single crystal rod 6 is cut, to silicon single crystal rod 6
It grips, specifically, the elongation of 342 telescopic rod of the first cylinder drives withstanding tight block 344 to be resisted against on silicon single crystal rod 6, then second
343 telescopic rod of cylinder is flexible to be caused to oppress to the telescoping cylinder of the first cylinder 342, by the clamping workpiece 34 of 31 both sides of sucker to list
Crystalline silicon rod 6 is clamped, and ensures stability when silicon single crystal rod 6 is cut.Preferably, 34 liang of the clamping workpiece of 31 both sides of sucker is stretched
It is 60-100 ° that contracting bar, which is formed by angle,.Preferably, the clamping seat 341 is used to install the through-hole of 342 telescopic rod of the first cylinder
The center of center deviation clamping seat 341, and positioned at the distal end of 343 mounting surface of the second cylinder, 343 telescopic rod of the second cylinder and first
342 telescopic rod of cylinder is mutually perpendicular to, and for the installation site of the second cylinder 343 close to ejection end, which makes the second cylinder 343 apply
The pressure bigger of 342 telescopic rod of the first cylinder is added to, frictional force is more stablized.Clamping workpiece 34 using the above structure, clamping
34 second cylinder 343 of workpiece can be the larger frictional force on 342 telescopic rod of the first cylinder with smaller ejection pressure conversion,
The silicon single crystal rod 6 caused by air cylinder air source pressure transient can be substantially reduced to shake in cutting process, and then collapsed
The generation of side or wavy surface, to ensure the cut quality of silicon single crystal rod 6；After silicon single crystal rod 6 is cut off, the clamping workpiece of withdrawal
Withstanding tight block, silicon single crystal rod 6 are fallen on idler wheel mechanism 5, and silicon single crystal rod 6 is driven by the sucker 31 on automatic tool preset Material moving device 3
It is moved to discharging region, high degree of automation, processing quality height.
In as with the embodiments shown in figures 2 and 3, first driving mechanism, 222 and second driving mechanism 322 includes watching
Motor 2221, transmission gear 2222 and driving rack 2223 are taken, the driving rack 2223 is arranged on the side wall of workbench 1,
The transmission gear 2222 is meshed with driving rack 2223.In the first driving mechanism 222, the servo motor 2221 it is defeated
Shaft is connect through carriage 221 with transmission gear 2222, and the servo motor 2221 starts, the output shaft of servo motor 2221
The transmission gear 2222 engaged is driven to rotate, transmission gear 2222 drives carriage 221 along driving rack 2223
It moves along a straight line.In the second driving mechanism 322, the output shaft of the servo motor 2221 is through shifting rack 321 and transmission
Gear 2222 connects, and the servo motor 2221 starts, and the output shaft of servo motor 2221 drives the transmission gear engaged
2222 rotate, and the rotation of transmission gear 2222 drives shifting rack 321 to move along a straight line along driving rack 2223.It is preferred that
, speed reducer 2224 is additionally provided between the servo motor 2221 and transmission gear 2222, the speed reducer 2224 is used for will
The high rotating speed that servo motor 2221 exports is exported after reducing by output shaft.Using such driving mechanism, clever structure, manufacture is more
What is added is simple, and driving mechanism is entirely set on the side of workbench 1, convenient for safeguarding.Preferably, the first driving mechanism 222 with
Second driving mechanism 322 is respectively arranged on two sides of workbench 1.Preferably, it is additionally provided with straight line on the workbench 1
Guide rail 2225 is provided with guide rail slide block 2226 on compatible shifting rack 321 and carriage 221 therewith, to ensure to move rack
321 more stablize with what carriage 221 moved.4 and Figure 16 are please referred to Fig.1, in certain other embodiments, the driving machine
It is slot type structure that structure, which uses ball leading screw driving, the workbench 1, and the both sides of workbench 1 have expects for carriage 221 and shifting
The straight slot that frame 321 is passed through and moved, it is preferred that driving mechanism includes moving guide rail, sliding block 2226 and feed screw nut, ball
Lead screw, servo motor 2221 and speed reducer 2224, the servo motor 2221 connect speed reducer 2224, the output of speed reducer 2224
Axis is connect with ball screw, and the feed screw nut is socketed on ball screw, and is fixed with mounting bracket, and the sliding block 2226 is arranged
In the lower section of mounting bracket, the linear guide 2225 is arranged along workbench 1 is axial, and the sliding block 2226 can be along the linear guide
2225 slidings.Specifically, the mounting bracket can be carriage 221 or move rack 321, i.e. the driving mechanism can be not only used for sending
Material mechanism 2 can also be used for knife Material moving device 3.
Referring to Fig. 2, as a preferred embodiment of the present invention, the clamping device includes the first master jaw 211, the
Two master jaws 212, claw 213 and extensible member 214, first master jaw 211, the arc-shaped structure of the second master jaw 212, the
One end of one master jaw 211 is hinged with one end of extensible member 214, and the other end of the first master jaw 211 is fixed with claw 213, the
One end of two master jaws 212 is hinged with the other end of extensible member 214, and the other end of the second master jaw 212 is fixed with claw 213,
First master jaw 211 connect carriage 221, the first master jaw 211 and second with the second master jaw 212 by support column 215
Master jaw 212 can be rotated around with 215 junction of support column.In the present embodiment, extensible member 214 elongation can drive be fixed on it is defeated
The first master jaw 211 and the second master jaw 212 on frame 221 is sent inwardly to be rotated around support column 215, the first claw 213 and second
Claw 213 is close to each other to shrink the clamping inner cavity of clamping device, and the claw 213 for being also secured to 213 open ends of claw is received
Contracting so that clamping device can clamp the silicon single crystal rod 6 on workbench 1, when extensible member 214 is shunk, the first deck and second
Master jaw 212 will be separated from each other, and to decontrol silicon single crystal rod 6, be fixed to the gripping of silicon single crystal rod 6 using the structural clamp mechanism
It is very simple and convenient.Preferably, the extensible member 214 can be electric cylinder, hydraulic cylinder or linear motor.It is preferred that
, the claw 213 is additionally provided with cushion on the contact surface of silicon single crystal rod 6, and cushion is made of polyurethane material.It is preferred that
, the clamping device further includes support plate 216, the both ends of the support plate 216 respectively with the first master jaw 211 and second
212 side walls hinged fixation of master jaw, the support plate 216 are used to improve the structural rigidity of entire clamping device, have enhanced securely
Degree.Please refer to Fig.1 4 and Figure 15, in certain other embodiments, the clamping device include holding frame, telescopic cylinder and
Clamping plate is limited, " Qian " structure is put up in the clamping, and clamping plate is pivotable is hinged on the two side of holding frame for the limit, described
One end of telescopic cylinder is fixed on holding frame, and one end and the bottom end of limit clamping plate are fixed.The telescopic rod of expansion bend cylinder extends
It drives the limit clamping plate of both sides to fold downwards, the cylinder that holds out against on holding frame is coordinated to be clamped silicon single crystal rod 6.
Please refer to figure, as a preferred embodiment of the present invention, the idler wheel mechanism 5 include U-shaped rolling wheel support frame 51,
Connecting rod 52 and idler wheel 53, the U-shaped rolling wheel support frame 51 are fixedly connected with 1 top surface of workbench, and the idler wheel 53 is via connection
Bar 52 is fixed in the U-lag of rolling wheel support frame, and idler wheel 53 can be rotated around connecting rod, and multiple idler wheel mechanisms 5 are along 1 top surface of workbench
Axial alignment is at two groups, and two groups of idler wheel mechanisms 5 are symmetrical arranged on 1 top surface of workbench, 53 center of idler wheel in two groups of idler wheel mechanisms 5
It is 30-60 ° that the extended line of line, which is formed by angle,.Idler wheel on 1 face of workbench is arranged to above structure, the peace of idler wheel 53
It fills fairly simple, without opening up idler wheel mounting hole on workbench 1, saves complicated installation process, worn in idler wheel 53
It only needs to dismantle the rolling wheel support frame where wearing idler wheel 53 and be replaced, replace simple brief cost, and use
Rolling wheel support frame installs idler wheel, it is only necessary to control the angle of inclination of rolling wheel support frame, you can very easily controls in idler wheel
The extended line of heart line is formed by angle, that is, holding angle of the silicon single crystal rod when being rolled on idler wheel mechanism.Preferably, two groups
It is 30-60 ° that the extended line of idler wheel center line, which is formed by angle, in idler wheel mechanism 5, and idler wheel is arranged to this angle in monocrystalline silicon
Stick when idler wheel upper feeding is cut, more stablize by the movement of silicon single crystal rod.
It please refers to Fig.1, Fig. 8 and Fig. 9, as a preferred embodiment of the present invention, the saw blade cutting operating mechanism 4 is
Planer-type annular diamond fretsaw cutting mechanism, the planer-type annular diamond fretsaw cutting mechanism includes portal frame 41, ring
Shape diamond fretsaw cutter unit 42 and hoisting mechanism, the annular diamond fretsaw cutter unit 42 include that train installs panel
421, guide wheel assembly 422 and annular diamond fretsaw 423, the annular diamond fretsaw 423 are laid in leading for guide wheel assembly 422
It takes turns in wire casing, the hoisting mechanism includes promoting motor 431, lifting speed reducer 432, lifting handle 433 and hoisting nut 434,
The promotion motor 431 is set on the crossbeam of portal frame 41, promotes motor 431 via lifting speed reducer 432 and lifting handle
433 connections promote motor 431 for driving lifting handle 433 to rotate, and the hoisting nut 434 is socketed on lifting handle 433
On, the train installation panel 421 is fixed with 434 phase of hoisting nut.Preferably, the processing unit (plant) further includes boss 11, institute
It states boss 11 to be arranged in the both sides of workbench 1, the rack is fixed on boss 11.Specifically, the portal frame 41 includes a left side
Right two root posts and the crossbeam for being connected to column top promote motor 431, lifting speed reducer 432 is fixed on crossbeam, annular
The train installation panel 421 of diamond fretsaw cutter unit 42 is fixed with 434 phase of hoisting nut, and the lifting handle 433 rotates
Hoisting nut 434 is driven to rise or decline.The driving force for promoting motor 431 and being used to provide lifting for hoisting mechanism.It is excellent
Choosing, lift rail 435 is additionally provided on the column, being fixed with matched promotion on train installation panel 421 slides
Block 436.The high rotating speed that the lifting speed reducer 432 is then used to be promoted the output of 431 output shaft of motor reduces, to slow down cutting
The lifting of unit or decrease speed.The lifting handle 433 coordinates with hoisting nut 434, by the rotation of lifting handle 433
Conversion of motion is the elevating movement of hoisting nut 434.In certain other embodiments, the saw blade cutting operating mechanism 4
It can be Wound-rotor type diamond fretsaw cutting mechanism.
In embodiment as shown in figure 11, the processing unit (plant) further includes mobile spraying mechanism 7, the mobile spraying mechanism
7 include mobile mechanism 71 and spraying mechanism, and the spraying mechanism includes water storage box 721, flow pipe 722 and water spray chamber 723, described
Inlet opening is offered on water storage box 721, the flow pipe 722 is connected to water storage box 721 and water spray chamber 723, the water spray chamber 723
Multiple hole for water sprayings are offered on bottom plate.The mobile spraying mechanism 7 can follow the cutting work of saw blade cutting operating mechanism 4
Carry out water cooling spray.External cooling water first passes around the inlet opening on water storage box 721 and is flowed into water storage box 721, then passes through
Flow pipe 722 is transported to water spray chamber 723, and the saw of silicon single crystal rod 6 is then sprayed onto by the multiple hole for water sprayings opened up on water spray chamber 723
In seam, the cut surface of diamond ring scroll saw and silicon single crystal rod 6 is cooled down, while can also be played to cutting break flour
It is moistened, prevents break flour from polluting working environment.The effect of the mobile mechanism 71 is that lifting up and down or reduces water spray
The position of case 723 follows cutting operating mechanism movement, in case with spraying mechanism operation interference occurs for saw blade cutting operating mechanism 4.
Preferably, the mobile mechanism 71 can be cylinder, hydraulic cylinder or linear motor.Preferably, the flow pipe 722 is steel
Pipe, and flow pipe 722 is two.Preferably, the mobile spraying mechanism 7 further includes mounting bracket 73, the mounting bracket
73 are arranged on the side of 41 crossbeam of portal frame, and the mobile mechanism 71 is fixed in mounting bracket 73.
1 is please referred to Fig.1, as a preferred embodiment of the present invention, the spraying mechanism further includes 724 He of space limiting side plate
Water blocking hairbrush 725 is both provided with space limiting side plate 724 on the front and rear sides face of the water spray chamber 723, and the diamond fretsaw is located at
Between front and back two pieces of space limiting side plates 724, the bottom end of the space limiting side plate 724 has arc notch, the left and right sides of water spray chamber 723
Water blocking hairbrush 725 is both provided on face.724 one side of the space limiting side plate can prevent the coolant liquid sprayed in hole for water spraying from spraying
To other positions, the waste of shower water is caused, is also had and 6 shape of silicon single crystal rod in the space limiting side plate 724 described in another aspect
Compatible arc notch, under the drive of mobile mechanism 71, two pieces of space limiting side plates 724 are just bonded and are resisted against silicon single crystal rod 6
Side on, the annular diamond fretsaw described at this time 423 is passed through between two pieces of space limiting side plates 724 just, annular diamond wire
423 pairs of silicon single crystal rods 6 of saw are cut, and space limiting side plate 724 is when carrying out cutting work by pushing down the two of 6 notch of silicon single crystal rod
End, when reducing cut-out 6 stress release of silicon single crystal rod so as to cause notch chipping possibility, spray liquid space limiting side plate 724 limit,
It can only spray into from the incision of silicon single crystal rod 6 and be gone out from two sides, good cold cut and chip removal not only effectively raise ring
The service life of shape diamond fretsaw 423 ensure that cut quality, also reduce the splashing of shower water.In addition, in practical work process
In, annular diamond fretsaw 423 can pass through the position of water blocking hairbrush 725, therefore water blocking hairbrush 725 can be cut in use
Cut out a scroll saw operation channel.Preferably, the space limiting side plate 724 is nylon material, can prevent silicon wafer material table
Face is scratched, and will not also be impacted to the quality of silicon single crystal rod 6.
It please refers to Fig.1 and Figure 14 is also set up as a preferred embodiment of the present invention on the top surface of the workbench 1
Have multiple clamping workpieces 34, the multiple clamping workpiece 34 along 1 top surface axial alignment of workbench at two groups, two groups of clamping workpieces 34
It is conllinear with two groups of idler wheel mechanisms 5.In the present embodiment, clamping and fixing device of the clamping workpiece 34 as silicon single crystal rod 6
One of, the withstanding tight block 344 of clamping workpiece 34 jacks up silicon single crystal rod 6 upwards, and two groups of clamping workpieces form a V-arrangement angle face, single
Crystalline silicon rod can securely fix silicon single crystal rod, prevent processed under the action of its own gravity and withstanding tight block frictional force
There is the case where chipping in Cheng Zhong, silicon single crystal rod.When needing mobile silicon single crystal rod, clamping workpiece is packed up so that silicon single crystal rod is fallen
Onto idler wheel mechanism, you can very easily realize the movement of silicon single crystal rod.In a preferred embodiment, clamping workpiece can also match
It closes other gripping bodies to fix silicon single crystal rod, such as the pushing of spraying mechanism postive stop baffle, silicon single crystal rod 6 can be played very well
Position-limiting action, the clamping workpiece 34 on 1 top surface of the workbench can also coordinate to the clamping workpiece 34 on knife position-limit mechanism
Silicon single crystal rod 6 to be processed is fixed.Preferably, recessing groove, the recessing groove are additionally provided on the workbench 1
For annular diamond fretsaw 423 by preferably to be cut to silicon single crystal rod 6.Implementing in use, the resigning
Slot can be that the gap between two U-shaped rolling wheel support frames 51 is formed.Preferably, the clamping work on 1 top surface of workbench is set
Part 34 is at least 4, and is symmetrically arranged at the both sides of 1 recessing groove of workbench, and such structure is in annular diamond fretsaw 423
When being cut to silicon single crystal rod 6, the limit of silicon single crystal rod 6 is more stablized.
2 are please referred to Fig.1, as a preferred embodiment of the present invention, the processing unit (plant) further includes flexible water blocking mechanism
8, the flexible water blocking mechanism 8 includes rolling-up mechanism 81 and water blocking curtain sheet 82, and described 82 one end of water blocking curtain sheet is solid with workbench 1
Fixed, the other end of water blocking curtain sheet 82 furls in rolling-up mechanism 81.The flexible water blocking mechanism 8 is for preventing spraying cooling water
Splashing, the use environment of operator is impacted.Specifically, the rolling-up mechanism 81 is arranged in saw blade cutting operating mechanism
On 4 cutting rack, such as 421 bottom end of train installation panel of annular diamond fretsaw cutter unit 42, rolling-up mechanism 81 can be with
It train installation panel 421 to move up and down, water blocking curtain sheet 82 then can in real time be wound in rolling-up mechanism 81, further to flying
The spray liquid splashed is blocked and water conservancy diversion, to reduce pollution of the spray liquid to environment of splashing.Preferably, the workbench
The both sides of 1 top surface are provided with collecting tank.Specifically, the rolling-up mechanism 81 includes winding babinet and rotation axis, the Water shielding curtain
82 one end of piece is fixed on the rotating shaft.In other examples, the flexible water blocking mechanism 8 is similar with the structure for furling ruler,
Rolling-up mechanism 81 includes winding babinet and compression shrapnel, and the water blocking curtain sheet 82 is wrapped in outside compression shrapnel.
3 are please referred to Fig.1, as a preferred embodiment of the present invention, the processing unit (plant) further includes taking piece tooling by hand
9, the craft take piece tooling 9 include Magnetic gauge stand 91, universal support arm 92 and slice sucker 93, described 92 one end of universal support arm with
Magnetic gauge stand 91 connects, and the other end of universal support arm 92 is connect with slice sucker 93, and piece tooling 9 is taken to be located on workbench 1 by hand,
The end face of silicon single crystal rod 6 of the slice sucker 93 for slice.When carrying out silicon single crystal rod 6 and being sliced operation, sucker 31 adsorbs
In the end face of silicon rod to be cut, then by 91 absorption workbench 1 of Magnetic gauge stand, the universal support arm 92 of magnetic is then locked, to complete to wait for
It cuts the clamping of silicon chip, after slice, lower silicon slice can be unloaded as long as gently stirring 31 1 jiaos of sucker.And it carries out silicon single crystal rod 6 and cuts
Constantly, will can by hand take piece tooling 9 to be placed on does not influence the region or directly remove craft that silicon single crystal rod 6 blocks for disconnected work
Take piece tooling 9.Take piece work simple in structure by hand, operation is extremely convenient, completely solves the problem of silicon chip is easily broken into pieces.Preferably,
The slice sucker 93 is no vacuum source sucker 31.
It should be noted that although the various embodiments described above have been described herein, it is not intended to limit
The scope of patent protection of the present invention.Therefore, based on the present invention innovative idea, to embodiment described herein carry out change and repair
Change, or using equivalent structure or equivalent flow shift made by description of the invention and accompanying drawing content, it directly or indirectly will be with
Upper technical solution is used in other related technical areas, is included within the scope of patent protection of the present invention.
Claims (10)
1. a kind of silicon single crystal rod processing unit (plant), which is characterized in that the processing unit (plant) includes workbench, feed mechanism, moved to knife
Expect mechanism and saw blade cutting operating mechanism；
Multiple idler wheel mechanisms are provided on the top surface of the workbench, the multiple idler wheel mechanism is along workbench axial alignment；
The feed mechanism includes clamping device and conveying mechanism, and the clamping device is for clamping silicon single crystal rod, the conveying
Mechanism includes carriage and the first driving mechanism, and the clamping device is fixed on carriage, and first driving mechanism is used for
Carriage is driven to be axially moved along workbench；
Described includes sucker, Material moving device and testing agency to knife Material moving device, and the Material moving device includes moving rack and second
Driving mechanism, second driving mechanism move rack along workbench axial movement for driving, and the sucker is fixed on shifting rack
On, sucker is used to paste the end face inhaled in silicon single crystal rod, and the testing agency includes connecting seat, round nut, slidiing pin, answers
Position spring, inductive switch and tablet are threadedly coupled between the connecting seat and shifting rack, and the round nut is sheathed on connecting seat
Outside, accommodating hole is offered on connecting seat, the resetting spring is located in accommodating hole, and slidiing pin one end connection resets bullet
Spring, the other end connect tablet, and the inductive switch is fixed on connecting seat, the induction end of inductive switch and the side wall of connecting seat
It is flush, the tablet is flush with the sucker face after silicon single crystal rod is sucked；
The saw blade cutting operating mechanism includes rack, saw blade cutting unit and hoisting mechanism, and the saw blade cutting unit is located at
The top of workbench, saw blade cutting unit are fixed via hoisting mechanism and rack, and the hoisting mechanism drives saw blade cutting unit
Monocrystalline silicon wafer is processed.
2. silicon single crystal rod processing unit (plant) according to claim 1, which is characterized in that the connecting seat includes fixed seat and cunning
Dynamic seat is threadedly coupled between the fixed seat and shifting rack, is slidably socketed between the sliding seat and fixed seat, the fixed seat
With accommodating hole is offered inside sliding seat, sliding seat is connected to fixed seat, and the resetting spring is located at the accommodating hole of fixed seat
In, described slidiing pin one end is connect with resetting spring, and the other end connects tablet, and the inductive switch is fixed on sliding seat
On.
3. silicon single crystal rod processing unit (plant) according to claim 2, which is characterized in that described further includes dress to knife Material moving device
Workpiece is pressed from both sides, the clamping workpiece, which is fixed on, to be moved on rack, and clamping workpiece is located at the both sides of sucker, and the clamping workpiece includes
The cylinder body of clamping seat, the first cylinder and the second cylinder, first cylinder is fixed on the side wall of clamping seat, and the first cylinder is stretched
Contracting bar runs through clamping seat, and telescopic rod is fixed with withstanding tight block across clamping seat one end, between the withstanding tight block and clamping seat side wall
Telescopic rod outer cover is equipped with round extensible cover, and the cylinder body of second cylinder is fixed on the side wall of clamping seat, the second cylinder
Telescopic rod it is flexible realize with the first Telescopic-cylinder bar against or detach, positioned at the first gas of the clamping workpiece of sucker both sides
The telescopic rod of cylinder is arranged towards sucker.
4. silicon single crystal rod processing unit (plant) according to claim 1, which is characterized in that the clamping device includes the first claw
Seat, the second master jaw, claw and extensible member, the arc-shaped structure of first master jaw, the second master jaw, the first master jaw
One end and one end of extensible member are hinged, and the other end of the first master jaw is fixed with claw, one end of the second master jaw and extensible member
The other end it is hinged, the other end of the second master jaw is fixed with claw, and the first master jaw and the second master jaw pass through support column
Carriage is connected, the first master jaw and the second master jaw can be rotated around with support column junction.
5. silicon single crystal rod processing unit (plant) according to claim 1, which is characterized in that the idler wheel mechanism includes U-shaped idler wheel
Supporting rack, connecting rod and idler wheel, the U-shaped rolling wheel support frame are fixedly connected with bench top, and the idler wheel is via connecting rod
It is fixed in the U-lag of rolling wheel support frame, idler wheel can be rotated around connecting rod, and multiple idler wheel mechanisms are along bench top axial alignment
At two groups, two groups of idler wheel mechanisms are symmetrical arranged in bench top, the extended line institute of idler wheel center line in two groups of idler wheel mechanisms
The angle of formation is 30-60 °.
6. silicon single crystal rod processing unit (plant) according to claim 5, which is characterized in that also set up on the top surface of the workbench
Have multiple clamping workpieces, the multiple clamping workpiece along bench top axial alignment at two groups, two groups of clamping workpieces and two groups
Idler wheel mechanism is conllinear.
7. silicon single crystal rod processing unit (plant) according to claim 1, which is characterized in that the saw blade cutting operating mechanism is dragon
Gate-type annular diamond fretsaw cutting mechanism, the planer-type annular diamond fretsaw cutting mechanism include portal frame, annular gold
Hard rock saw blade cutting unit and hoisting mechanism, the annular diamond fretsaw cutter unit include train installation panel, guide wheel group
Part and annular diamond fretsaw, the annular diamond fretsaw are laid in the guide wheel wire casing of guide wheel assembly, the hoisting mechanism
It is set on the crossbeam of portal frame including promoting motor, lifting speed reducer, lifting handle and hoisting nut, the promotion motor,
It promotes motor to connect with lifting handle via lifting speed reducer, promotes motor and be used to that lifting handle to be driven to rotate, the promotion spiral shell
Mother set is connected on lifting handle, and the train installation panel is mutually fixed with hoisting nut.
8. silicon single crystal rod processing unit (plant) according to claim 1 or claim 7, which is characterized in that the processing unit (plant) further includes moving
Dynamic spraying mechanism, the mobile spraying mechanism includes mobile mechanism and spraying mechanism, and the spraying mechanism includes water storage box, send water
Pipe, water spray chamber, space limiting side plate and water blocking hairbrush, offer inlet opening on the water storage box, the flow pipe connection water storage box with
Water spray chamber offers multiple hole for water sprayings on the bottom plate of the water spray chamber, is respectively provided on the front and rear sides face of the water spray chamber limited
The bottom end of position side plate, the space limiting side plate has arc notch, and water blocking hairbrush is both provided in the left and right sides of water spray chamber.
9. silicon single crystal rod processing unit (plant) according to claim 1, which is characterized in that the processing unit (plant) further includes flexible gear
Water dispenser structure, the flexible water blocking mechanism includes rolling-up mechanism and water blocking curtain sheet, and water blocking curtain sheet one end is fixed with workbench, gear
The other end of curtain sheet furls in rolling-up mechanism.
10. silicon single crystal rod processing unit (plant) according to claim 1, which is characterized in that the processing unit (plant) further includes craft
Piece tooling is taken, it includes Magnetic gauge stand, universal support arm and slice sucker, described universal support arm one end and magnetic that the craft, which takes piece tooling,
Property gauge stand connection, the other end of universal support arm connect with slice sucker, takes piece tooling to be located on workbench by hand, the slice suction
End face of the disk for the silicon single crystal rod of slice.
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| CN201810453697.6A CN108407119B (en) | 2018-05-14 | 2018-05-14 | Monocrystalline silicon rod processing device |
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Effective date of registration: 20240703 Address after: No. 1588 Lingmei South Street, Hushi Town, Xiuyu District, Putian City, Fujian Province, 351100 Patentee after: Fujian Tianshiyuan Intelligent Equipment Co.,Ltd. Country or region after: China Address before: No.6 Nanxing Road, sugarcane street, Minhou County, Fuzhou City, Fujian Province, 350100 Patentee before: FUZHOU TIANRUI SCROLL SAW TECHNOLOGY Co.,Ltd. Country or region before: China |