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CN108298238B - 物品保管设备 - Google Patents

物品保管设备 Download PDF

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Publication number
CN108298238B
CN108298238B CN201810031577.7A CN201810031577A CN108298238B CN 108298238 B CN108298238 B CN 108298238B CN 201810031577 A CN201810031577 A CN 201810031577A CN 108298238 B CN108298238 B CN 108298238B
Authority
CN
China
Prior art keywords
article
positioning member
surface portion
plan
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201810031577.7A
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English (en)
Chinese (zh)
Other versions
CN108298238A (zh
Inventor
堀井高宏
富田大地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Publication of CN108298238A publication Critical patent/CN108298238A/zh
Application granted granted Critical
Publication of CN108298238B publication Critical patent/CN108298238B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0492—Storage devices mechanical with cars adapted to travel in storage aisles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Of Machine Parts And Wound Products (AREA)
CN201810031577.7A 2017-01-12 2018-01-12 物品保管设备 Active CN108298238B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017003539A JP6686914B2 (ja) 2017-01-12 2017-01-12 物品保管設備
JP2017-003539 2017-01-12

Publications (2)

Publication Number Publication Date
CN108298238A CN108298238A (zh) 2018-07-20
CN108298238B true CN108298238B (zh) 2021-05-14

Family

ID=62868807

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810031577.7A Active CN108298238B (zh) 2017-01-12 2018-01-12 物品保管设备

Country Status (4)

Country Link
JP (1) JP6686914B2 (ja)
KR (1) KR102385796B1 (ja)
CN (1) CN108298238B (ja)
TW (1) TWI742215B (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI752865B (zh) * 2021-04-16 2022-01-11 迅得機械股份有限公司 具有擋止功能的卡匣及卡匣搬送系統

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6348708U (ja) * 1986-09-18 1988-04-02
US5246218A (en) * 1992-09-25 1993-09-21 Intel Corporation Apparatus for securing an automatically loaded wafer cassette on a wafer processing equipment
WO1999040623A1 (fr) * 1998-02-04 1999-08-12 Nikon Corporation Systeme d'exposition et appareil de positionnement de cassette a substrat
WO2001092135A8 (en) * 2000-05-09 2002-06-20 Fluoroware Inc Shock resistant variable load tolerant wafer shipper
KR100557854B1 (ko) * 2004-06-04 2006-03-10 주식회사 테라세미콘 반도체 제조장치의 웨이퍼 카세트 스테이지
JP2015171919A (ja) * 2014-03-11 2015-10-01 株式会社ダイフク 容器搬送設備
CN107130095A (zh) * 2016-02-26 2017-09-05 株式会社三井高科技 托盘和热处理方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4082652B2 (ja) * 2001-11-02 2008-04-30 平田機工株式会社 載置装置
TWI348988B (en) * 2006-08-04 2011-09-21 Hon Hai Prec Ind Co Ltd Tray locating-device
CN202186633U (zh) * 2011-07-29 2012-04-11 宸鸿科技(厦门)有限公司 承载装置
JP5795521B2 (ja) 2011-11-15 2015-10-14 リンテック株式会社 支持装置
JP6043939B2 (ja) 2012-08-24 2016-12-14 ボンドテック株式会社 基板上への対象物の位置決め方法及び装置
JP6191543B2 (ja) * 2014-05-22 2017-09-06 株式会社ダイフク 搬送装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6348708U (ja) * 1986-09-18 1988-04-02
US5246218A (en) * 1992-09-25 1993-09-21 Intel Corporation Apparatus for securing an automatically loaded wafer cassette on a wafer processing equipment
WO1999040623A1 (fr) * 1998-02-04 1999-08-12 Nikon Corporation Systeme d'exposition et appareil de positionnement de cassette a substrat
WO2001092135A8 (en) * 2000-05-09 2002-06-20 Fluoroware Inc Shock resistant variable load tolerant wafer shipper
KR100557854B1 (ko) * 2004-06-04 2006-03-10 주식회사 테라세미콘 반도체 제조장치의 웨이퍼 카세트 스테이지
JP2015171919A (ja) * 2014-03-11 2015-10-01 株式会社ダイフク 容器搬送設備
CN107130095A (zh) * 2016-02-26 2017-09-05 株式会社三井高科技 托盘和热处理方法

Also Published As

Publication number Publication date
KR20180083263A (ko) 2018-07-20
KR102385796B1 (ko) 2022-04-11
JP6686914B2 (ja) 2020-04-22
JP2018111577A (ja) 2018-07-19
TW201829270A (zh) 2018-08-16
CN108298238A (zh) 2018-07-20
TWI742215B (zh) 2021-10-11

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