CN107983429B - Wideband type surface acoustic wave sorting chip based on bionic substrate - Google Patents
Wideband type surface acoustic wave sorting chip based on bionic substrate Download PDFInfo
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Abstract
The invention discloses a wideband surface acoustic wave sorting chip based on a bionic substrate. The chip consists of a piezoelectric substrate, a broadband interdigital transducer and a sorting flow channel system, wherein the interdigital transducer and the sorting flow channel system are arranged on the piezoelectric substrate at a certain angle, and the bottom of the sorting flow channel is manufactured into a structure similar to a dustpan screen with concave-convex moving surface. The sorting flow channel comprises an inlet flow channel, a sorting flow channel and an outlet flow channel, wherein the inlet flow channel, the sorting flow channel and the outflow flow channel are sequentially connected to form a sorting flow channel system. By utilizing the combined action of the surface acoustic wave generated by the broadband interdigital transducer and the sorting flow channel with a structure simulating the concave-convex motion surface of the dustpan screen, the motion track of particles with different sizes in the sorting flow channel is different, so that the multi-stage sorting of the particles is realized. The invention also has the advantages of simple structure, wide separation range, high separation efficiency and the like.
Description
Technical field:
the invention relates to a particle sorting chip, in particular to a novel broadband band type surface acoustic wave sorting chip with a bionic substrate.
The background technology is as follows:
the particle sorting chip based on the surface acoustic wave has the advantages of simple and compact structure, easy manufacture, suitability for mass production, integration, no damage to biological particles (such as cells), high sorting precision and the like, and has wide application in the fields of medicine synthesis, component screening, cell and inorganic particle sorting, theranostics and the like.
In recent decades, microfluidic technology has evolved rapidly in the fields of chemistry, biology, and pharmaceuticals. In recent years, in the field of microfluidic research, research on driving microfluidics by using surface acoustic waves has been developed with great effectiveness, and the particle sorting technology has also been greatly improved. Many research teams are currently devoted to the study of microfluidic particle sorting techniques, the techniques applied include passive sorting techniques using microstructures, fluid dynamics, etc., and active sorting techniques using external force fields of sound, light, electricity, magnetism, etc. Passive sorting techniques generally rely on the microstructure of the flow channels, which not only requires relatively tight control over the size and flow rate of the flow channels, but also results in flow channels that are prone to blockage and low sorting accuracy. In the active sorting technology, the optical sorting chip has a complex structure and relatively expensive equipment, and when sorting is performed according to an electric field and a magnetic field, special electric and magnetic properties of particles are required, so that the optical sorting chip has no generality.
Microfluidic particle sorting technology based on Surface Acoustic Waves (SAW) is an emerging sorting technology in recent years. A surface acoustic wave is a type of elastic acoustic wave that propagates on a solid surface. Sinusoidal voltage is applied to the interdigital transducer on the surface of the piezoelectric substrate, the surface of the substrate is deformed due to the piezoelectric inverse effect, so that surface acoustic waves are generated on the surface of the substrate, the amplitude of the surface acoustic waves is rapidly attenuated along with the increase of the depth of the substrate, and mechanical energy is concentrated in a depth range of one wavelength on the surface of the piezoelectric substrate. Thus, the surface acoustic wave system has a high energy density.
According to the different action principles, the applications of the surface acoustic wave in particle separation are mainly divided into two types. The sorting principle is that when the acoustic surface wave acts on the fluid in the micro-channel in one direction, the particles with different properties (density, diameter and compressibility) are subjected to different acoustic radiation forces, so that the lateral migration distances are also different, and further the sorting is realized. The other type is standing wave surface acoustic wave sorting, and the sorting principle is that when standing waves act on fluid in a micro-channel, pressure nodes and counter-pressure nodes which are periodically distributed are formed in the channel due to the effect of acoustic flow, and particles migrate to the pressure nodes or the counter-pressure nodes under the action of acoustic radiation force, so that sorting is realized. Compared with the travelling wave surface acoustic wave separation, the standing wave surface acoustic wave separation needs to symmetrically arrange two groups of interdigital transducers on two sides of a micro-channel in the design of a device, and the alignment accuracy requirement of the micro-channel and the interdigital transducers is very high.
At present, the interdigital transducer applied in the surface acoustic wave particle sorting field can only generate maximum energy at one frequency, and when travelling wave surface acoustic wave particles are applied, particle sorting in a wider range is difficult to realize.
The invention comprises the following steps:
the invention aims to solve the problems, and provides a novel bionic substrate-based broadband surface acoustic wave sorting chip, which realizes large-range multi-stage sorting of particles by utilizing the combined action of surface acoustic waves generated by a broadband interdigital transducer and a substrate with a dustpan-imitating screen moving surface structure in a sorting flow channel.
The technical scheme adopted by the invention is as follows:
a layer of photoresist with double-trapezoid interdigital transducer patterns is drawn on the surface of a clean piezoelectric substrate (1) by utilizing a photoetching technology, the interdigital transducer and a sorting flow channel are placed at a certain angle, and a sputtering and stripping process is adopted to manufacture the double-trapezoid interdigital transducer (2) on the surface of the piezoelectric substrate.
A layer of photoresist with a concave-convex structure similar to a dustpan screen moving surface is drawn at a flow channel formed on the surface of a clean piezoelectric substrate (1) by utilizing a photoetching technology, and a bionic substrate (10) imitating the dustpan screen surface is manufactured at the bottom of a piezoelectric substrate sorting flow channel by adopting a sputtering and stripping process.
And engraving a mould of the micro-channel system by using an engraving machine, manufacturing the micro-channel system (5) by using a mould selected material (such as PDMS), and carrying out inlet and outlet interface processing.
Bonding the cleaned micro flow channel system (5) on the surface of the piezoelectric substrate (1).
The invention has the advantages that: according to different acoustic radiation forces of particles with different sizes under different frequencies, multistage separation of the particles can be realized in a large range and high efficiency by adjusting the input frequency of the interdigital transducer. And under the combined action of the surface acoustic wave generated by the broadband interdigital transducer and the substrate of the dustpan-like screen moving surface structure at the bottom of the flow channel, the high-purity multistage separation of particles can be realized. Besides, the invention has the characteristics of simple structure, easy manufacture, low cost and the like.
Description of the drawings:
FIG. 1 is an isometric view of a microfluidic chip of the invention
FIG. 2 is a front view of a sorting channel of a microfluidic chip according to the present invention
Fig. 3 is a schematic diagram of the principle of particle sorting by the microfluidic chip of the present invention.
The specific embodiment is as follows:
the structural features and operation of the present invention will be described in detail with reference to fig. 1, 2 and 3.
The invention provides a novel wideband surface acoustic wave sorting chip based on a bionic substrate. The chip mainly comprises a piezoelectric substrate (1), a broadband interdigital transducer (2) and a micro-channel system (5), wherein the micro-channel system (5) comprises deionized water inflow interfaces (13) and (16), a particle inflow interface (14), deionized water inflow channels (12) and (17), a particle inflow channel (15), a sorting channel (11), a large particle outflow channel (9), a medium particle outflow channel (6), a small particle outflow channel (3), a large particle outflow outlet (8), a medium particle outflow outlet (7) and a small particle outflow outlet (4).
When the particles are sorted, the whole chip is required to be placed at a certain angle with the horizontal plane, and the angle size of the chip is required to be adjusted according to the characteristics of the size and the like of the sorted particles.
The +/-two poles of the output signal of the signal generator are respectively connected with the two poles of the interdigital transducer, and then a continuous sine signal is output.
Liquid mixed with particles of different sizes is injected into the sorting flow channel system through the inflow interface (14) at a certain flow rate. Deionized water is injected into the sorting runner system through inflow interfaces (13) and (16) respectively at a certain flow rate, wherein the flow rate of the interface (13) is larger than that of the interface (16). Referring to fig. 2, particles with different sizes are subjected to the action of a concave-convex structure (10) similar to a dustpan screen moving surface at the bottom of a flow channel after flowing into a sorting flow channel (11), and large particles move faster than small particles.
Referring to fig. 3, after particles of different sizes enter the sorting flow channel (11), the mixed particles are concentrated in a set area of the sorting flow channel due to different flow rates of deionized water injected into the inflow interfaces (13) and (16). Under the combined action of fluid, the dustpan-like structure and the sound radiation force, the movement track of the particles is parabolic, and the large particles move relatively quickly and have relatively large deflection angles, so that the large-size particles can flow out of the outflow runner (9) relatively quickly, the medium particles flow out of the outflow runner (6), and the small particles flow out of the outflow runner (3).
The wideband interdigital transducer adopted by the invention is different from the traditional interdigital transducer in that the wideband interdigital transducer can only generate maximum energy under one frequency, and the wideband interdigital transducer can generate great energy under a certain frequency range. Therefore, according to different acoustic radiation forces of particles with different sizes under different frequencies, multistage separation of the particles can be realized in a large range and high efficiency by adjusting the input frequency of the interdigital transducer.
Claims (1)
1. A wideband surface acoustic wave sorting chip based on a bionic substrate is characterized by comprising a piezoelectric substrate (1), a wideband interdigital transducer (2) on the piezoelectric substrate (1) and a sorting flow channel system (5) based on PDMS, wherein the multistage sorting of particles is realized by the combined action of a surface acoustic wave generated by the wideband interdigital transducer (2) and a sorting flow channel with a dustpan-like structure; the bottom area of the micro-channel is made into a structure (10) similar to the concave-convex shape of the bottom of the dustpan; when the particles are sorted, the whole chip is placed at a certain angle with the horizontal plane, and the size of an included angle between the whole chip and the horizontal plane is adjusted according to the different sizes of the sorted particles; the operating frequency of the wideband interdigital transducer can be adjusted based on the size of the selected particles.
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| CN107983429B true CN107983429B (en) | 2023-08-29 |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109174426B (en) * | 2018-08-01 | 2020-10-30 | 哈尔滨工业大学（深圳） | Particle sorting device and method for sorting particles in liquid |
| CN110918140A (en) * | 2018-09-20 | 2020-03-27 | 北京怡天佳瑞科技有限公司 | Microfluidic chip, device containing same and method for separating particles |
| CN109865543B (en) * | 2019-04-02 | 2020-06-23 | 武汉大学 | High-flux microfluidic bulk wave sorting chip and preparation method thereof |
| CN113134399B (en) * | 2021-04-27 | 2022-04-08 | 吉林大学 | Large-flux cell acoustic sorting chip |
| CN116656489B (en) * | 2023-07-28 | 2023-10-27 | 中南大学 | Standing wave acoustic fluid control device for sorting exosomes in body fluid and use method thereof |
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| DE10337097A1 (en) * | 2003-08-04 | 2004-08-26 | Institut für Physikalische Hochtechnologie e.V. | Micro-dispersed fluid phase separation, comprises at least two defined surface elements which have different boundary surface energies |
| CN207899469U (en) * | 2018-01-18 | 2018-09-25 | 吉林大学 | A kind of wideband belt surface acoustic wave sorting chip based on bionical substrate |
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| EP2178646A1 (en) * | 2007-08-23 | 2010-04-28 | Cynvenio Biosystems, LLC | Trapping magnetic sorting system for target species |
| US20160250637A1 (en) * | 2013-10-25 | 2016-09-01 | Monash University | Virtual deterministic lateral displacement for particle separation using surface acoustic waves |
| US10391491B2 (en) * | 2014-08-07 | 2019-08-27 | The General Hospital Corporation | Platelet-targeted microfluidic isolation of cells |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| DE10337097A1 (en) * | 2003-08-04 | 2004-08-26 | Institut für Physikalische Hochtechnologie e.V. | Micro-dispersed fluid phase separation, comprises at least two defined surface elements which have different boundary surface energies |
| CN207899469U (en) * | 2018-01-18 | 2018-09-25 | 吉林大学 | A kind of wideband belt surface acoustic wave sorting chip based on bionical substrate |
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