CN107941831B

CN107941831B - A kind of electron-beam excitation fluorescence imaging and fluorescence spectrum measuring apparatus and its method

Info

Publication number: CN107941831B
Application number: CN201610894552.0A
Authority: CN
Inventors: 朱瑞; 徐军; 刘亚琪
Original assignee: Peking University
Current assignee: Peking University
Priority date: 2016-10-13
Filing date: 2016-10-13
Publication date: 2019-08-13
Anticipated expiration: 2036-10-13
Also published as: CN107941831A

Abstract

The invention discloses a kind of electron-beam excitation fluorescence imaging and fluorescence spectrum measuring apparatus and its methods.Electron-beam excitation fluorescence imaging of the invention and fluorescence spectrum measuring apparatus include: scanning electron microscope system, sweep generator, phosphor collection coupled transmission system, fluorescence intensity detector, fluorescence spectrum detector, scanning synchronous signal acquisition device, Collaborative Control and data processing output system；The present invention uses modular framework, and the configuration adjustment of each module and subsequent upgrade flexibly facilitate very much；Each module cooperates with each other under unified the synchronized Coordinative Control of the Collaborative Control with data processing output system, guarantee stringent timing and logical order, and the operating condition of each module can be detected by feeding back interactive signal, finally realize high-precision electron-beam excitation fluorescence imaging and fluorescence spectral measuring；Phosphor collection coupled transmission system can greatly improve the resolution ratio of scanning electron microscope with fluorescence spectrum detector.

Description

A kind of electron-beam excitation fluorescence imaging and fluorescence spectrum measuring apparatus and its method

Technical field

The present invention relates to the detection of the fluorescence signal of electron-beam excitation and processing techniques, and in particular to a kind of electron-beam excitation is glimmering Light imaging and fluorescence spectrum measuring apparatus and its method.

Background technique

The fluorescence signal of electron-beam excitation, refer to when beam bombardment on the surface of the material, in addition to secondary electron, back scattering electricity Outside son, auger electrons and X-ray, the frequency launched is in ultraviolet, infrared or visible light wave range electromagnetic wave；Its basic principle It is excited by incident electron to upper state for the electronics of material internal, return lower state by certain relaxation time transition and discharges energy Amount, a portion energy are emitted in the form of electromagnetic radiation.Material generates the physical process of fluorescence under electron-beam excitation It is determined by its electronic structure, and the same elemental composition of electronic structure, lattice structure and defect and locating mechanics, calorifics, electromagnetism It is related to learn the factors such as environment.Therefore, electron-beam excitation fluorescence spectrum can reflect material physics itself by material electronics structure Characteristic.

The detection and processing of electron-beam excitation fluorescence signal are usually combined with scanning or transmission electron microscope, Neng Goushi The binding of existing morphology observation, structure and constituent analysis with electron-beam excitation fluorescence spectrum.Used in electron-beam excitation fluorescence Electron beam spot is very small, and energy is high；Compared to luminescence generated by light, electron-beam excitation fluorescence signal has high-space resolution, Gao Ji The features such as sending out energy, wide spectral range, big shooting depth, and can be realized full spectrum or the imaging of single spectrum fluorescent scanning.Electronics Shu Jifa fluorescence signal can be applied to the photism of the fluorescent materials such as micron, the semiconductor-quantum-point of nanoscale, quantum wire Quality Research.

Summary of the invention

In order to realize electron-beam excitation fluorescence signal detection, processing and analysis, the present invention provides a kind of electron beam and swashs Fluoresce imaging and fluorescence spectrum measuring apparatus and its method；It is visited by the ingehious design of phosphor collection and signal processing apparatus It surveys and focuses the fluorescence signal that electron beam is excited in sample surfaces progress point by point scanning, realize fluorescence imaging and spectral measurement.

It is an object of the present invention to provide a kind of electron-beam excitation fluorescence imaging and fluorescence spectrum measuring apparatus.

Electron-beam excitation fluorescence imaging of the invention and fluorescence spectrum measuring apparatus include: scanning electron microscope system, Sweep generator, phosphor collection coupled transmission system, fluorescence intensity detector, fluorescence spectrum detector, the synchronous letter of scanning Number collector, Collaborative Control and data processing output system；Wherein, Collaborative Control is with data processing output system as synchronous control System and data acquisition center, with scanning electron microscope system, sweep generator, phosphor collection coupled transmission system, glimmering Light-Intensity Detector, fluorescence spectrum detector and scanning synchronous signal acquisition device are connected with each other；Sweep generator is also connected with Electron beam external scan to scanning electron microscope system regulates and controls interface；Phosphor collection coupled transmission system is mounted on scanning electricity In the vacuum sample room of sub- microscopic system；Phosphor collection coupled transmission system is respectively connected to fluorescence intensity detector and fluorescence Spectral detector；Scanning electron microscope system, sweep generator, fluorescence intensity detector and fluorescence spectrum detector are also It is respectively connected to scanning synchronous signal acquisition device；Collaborative Control and data processing output system issue electric mirror control signal, transmission Electron beam external scan to scanning electron microscope system triggers interface, and control scanning electron microscope system receives external letter Number；Collaborative Control and data processing output system issue synchronous scanning to sweep generator and control signal, scanning signal hair Raw device generates the scan control signal of number, is transmitted to scanning synchronous signal acquisition device, and the scan control signal of number is turned After modified tone reason is at the scan control signal of simulation, the electron beam external scan regulation for being transmitted to scanning electron microscope system is connect Mouthful, control electron beam scan position and the scanning residence time of scanning electron microscope system；Scanning electron microscope system hair Radio beamlet is irradiated on the sample of the detection to be analyzed in the vacuum sample room of scanning electron microscope system, is excited wait divide The sample of analysis detection generates fluorescence；Phosphor collection coupled transmission system collects fluorescence, and exports in Collaborative Control and data processing Fluorescence is transmitted separately to fluorescence intensity detector and fluorescence spectrum detector under the control for dividing optical control signal of system；Fluorescence The synchronous acquisition trigger signal that intensity detector and fluorescence spectrum detector are issued in Collaborative Control and data processing output system Under control, synchronous acquisition fluorescence intensity signals and fluorescence spectrum signal respectively, and by fluorescence intensity signals and fluorescence spectrum signal It is transmitted to scanning synchronous signal acquisition device；Scan what synchronous signal acquisition device was issued in Collaborative Control and data processing output system Synchronous acquisition controls under signal control, receives the scan control signal of the number of sweep generator respectively, fluorescence intensity is visited Survey the secondary of the fluorescence intensity signals of device, the fluorescence spectrum signal of fluorescence spectrum detector and scanning electron microscope system generation Electronics or backscattered electron signal, then Collaborative Control and data processing output system will be transmitted to after signal aggregation process；By assisting It is controlled with synchronous scanning control signal, synchronous acquisition trigger signal and synchronous acquisition that control is issued with data processing output system Signal has synchronous temporal and logic relation, synchronous to issue corresponding synchronous acquisition when issuing a synchronous scanning control signal Trigger signal and synchronous acquisition control signal, realize within the scanning residence time that electron beam scan position remains unchanged, simultaneously The acquisition of fluorescence intensity signals and fluorescence spectrum signal is carried out, is finally carried out by Collaborative Control and data processing output system real-time Synchronous signal processing analysis simultaneously shows output.

Scanning electron microscope system includes: electron gun, electron-optical system, vacuum specimen chamber, signal detection system, electricity Gas control system and user's control system；Wherein, electron gun launching electronics beam forms the focusing of high quality through electron-optical system Electron beam is incident on the sample of the detection to be analyzed in vacuum sample room, the sample phase of electron beam and detection to be analyzed Interaction generates signal, and the fluorescence of generation is collected by phosphor collection coupled transmission system, other signals are received by signal detection system Collection；Electric control system provides electron beam external scan triggering interface, electron beam external scan regulation interface, external signal acquisition Interface and signal shared interface；Electron beam external scan triggers what interface Collaborative Control was issued with data processing output system Electric mirror control signal, electron beam external scan regulate and control the scan control letter for the simulation that interface sweep generator issues Number, control electron-optical system executes the control manipulation by sweep generator, and the synchronous reception of external signal acquisition interface is glimmering The fluorescence intensity signals of Light-Intensity Detector finally directly acquire fluorescence by user's control system of scanning electron microscope system The image of intensity distribution；It is removed caused by the synchronous sample interaction for reading electron beam with detection to be analyzed of signal detection system Other signals other than fluorescence, and each signal scanning imaging results are presented by user's control system；Signal detection system is to except glimmering Other signals other than light are improved, and the signal shared interface provided by electric control system, are transmitted to scanning and are synchronized The synchronous data collection unit of signal picker.

Sweep generator includes: sweep generator power supply, scan control unit, digital analog converter and simulation letter Number conditioning output unit；Wherein, sweep generator power supply is respectively connected to scan control unit, digital analog converter and simulation Signal condition output unit；Scan control unit receives the synchronous scanning that Collaborative Control and data processing output system issue and controls Signal, it is digital signal that synchronous scanning, which controls signal,；Scan control unit handles the signal received, and being converted to has The scan control signal of the number of sequential logic set by user, and the scan control signal of number is exported respectively to digital-to-analogue The synchronous data collection unit of converter and scanning synchronous signal acquisition device；Digital analog converter turns the scan control signal of number The scan control signal that scanning electron microscope system is capable of received simulation is changed and is modulated to, and according to set by user Sequential logic is sequentially output to analog signal conditioner output unit；Analog signal conditioner output unit to the analog signal of input into Row improves, and the scan control signal of the simulation after conditioning is transmitted to the electron beam external scan of scanning electron microscope system Regulate and control interface.

Phosphor collection coupled transmission system includes: reflecting surface mirror, reflecting surface mirror fixation in situ device, fluorescence coupler, glimmering Optical transport optical path, fluorescence transmission optical path vacuum peep exchange device and light-dividing device；Wherein, reflecting surface mirror is solid in situ by reflecting surface mirror Determine device to be fixed in the vacuum specimen chamber of scanning electron microscope system, a through-hole is opened on reflecting surface mirror, so that scanning electron The electron beam that high quality caused by microscopic system focuses passes through reflecting surface mirror, thus the sample phase interaction with detection to be analyzed With；Fluorescence is generated after electron beam and the interaction of the sample of detection to be analyzed, fluorescence is incident to fluorescence by reflecting surface mirror and couples Device；Incident fluorescence is coupled into fluorescence transmission optical path by fluorescence coupler；Fluorescence transmits optical path and uses flexible material or light guide Coupling or combination of the pipe with flexible material, fluorescence, which transmits optical path, peeps exchange device from vacuum sample by fluorescence transmission optical path vacuum Room is connected internally to outside；Fluorescence transmission optical path vacuum is peeped exchange device and is fixed on the locular wall of vacuum specimen chamber；In scanning electricity Light-dividing device is installed in fluorescence transmission optical path outside sub- microscopic system, it is by light-dividing device that fluorescence is same that fluorescence transmits optical path When be transmitted to fluorescence intensity detector and fluorescence spectrum detector；Light-dividing device and Collaborative Control and data processing output system connect Connect, Collaborative Control and data processing output system issue divide optical control signal control under, continuously adjust fluorescence and distribute to glimmering The relative scale of Light-Intensity Detector and fluorescence spectrum detector.

The setting position of reflecting surface mirror is determined by reflecting surface mirror fixation in situ device, and guarantees electron beam on reflecting surface mirror The axis in opened hole is combined through the focus of reflecting surface mirror again；Reflecting surface mirror is by reflecting surface mirror fixation in situ device with scanning The object lens rigidity and short distance of the electron-optical system of electron microscopy system connect, and enable to the design focus of reflecting surface mirror Within 6mm below the object lens lower surface of the electron-optical system of scanning electron microscope system, so as to realize scanning The high-resolution imaging of electron microscope；Reflecting surface mirror has the phosphor collection solid angle greater than 1/4 spherical surface, and there is high fluorescence to receive Collect efficiency；One end of reflecting surface mirror fixation in situ device is fixed on the vacuum specimen chamber of scanning electron microscope system, in addition One end position is flexibly adjustable, is fixed by positioning device on the object lens of the electron-optical system of scanning electron microscope system, And its position is accurately positioned by standard of object lens；Fluorescence coupler is fixed on reflecting surface mirror or in vacuum specimen chamber, position Vacuum flange interface position or fluorescence transmission the optical path vacuum of vacuum specimen chamber independent of scanning electron microscope system are peeped The position of exchange device.

Fluorescence intensity detector includes: that the first fluorescence couples incident interface, photoelectric signal transformation unit and fluorescence intensity letter Number conditioning output unit；Wherein, the first fluorescence couples incident interface and connect with photoelectric signal transformation unit；Photoelectric signal transformation list Member is connect with fluorescence intensity signals conditioning output unit, and photoelectric signal transformation unit includes photoelectric sensing component and electric signal output Unit；First fluorescence couples the fluorescence that incident interface is transmitted optic path by the fluorescence of phosphor collection coupled transmission system, And fluorescence is incident to the photoelectric sensing component of photoelectric signal transformation unit；Fluorescence is converted to electric signal by photoelectric sensing component, Electric signal conditioning is tentatively the fluorescence intensity signals of the simulation in setting amplitude range by electric signal output unit；Fluorescence intensity letter The synchronous acquisition trigger signal realization that number conditioning output unit is issued according to Collaborative Control and data processing output system starts, temporarily Stop or stop signal acquisition exports, and adjust the conditioning parameter of the fluorescence intensity signals of simulation in real time, by photoelectric signal transformation The fluorescence intensity signals of the simulation of unit output improve outer to scanning synchronous signal acquisition device and scanning electron microscope system Portion's signal detection interface is capable of the fluorescence intensity signals of received simulation, and the fluorescence intensity signals of the simulation after conditioning are passed The external signal acquisition for transporting to the synchronous data collection unit and scanning electron microscope system of scanning synchronous signal acquisition device connects Mouthful, or the fluorescence intensity signals for the simulation that photoelectric signal transformation unit exports are converted into scanning synchronous signal acquisition device and are swept The external signal sniffing interface for retouching electron microscopy system is capable of the fluorescence intensity signals of received number, and carries out digital letter Number conditioning, by the digital data transmission after conditioning to scan synchronous signal acquisition device synchronous data collection unit and scanning electron The external signal acquisition interface of microscopic system.

Fluorescence spectrum detector includes: that the second fluorescence couples incident interface, spectrometer, spectrometer external control unit outside and light Spectrum signal improves output unit；Wherein, the second fluorescence couples incident interface and connect with spectrometer；Spectrometer external control unit outside point It is not connect with spectrometer and spectral signal conditioning output unit；Spectral signal conditioning output unit is also connect with spectrometer, and with Scan the synchronous data collection unit connection of synchronous signal acquisition device；Second fluorescence couples incident interface phosphor collection coupling The fluorescence of the fluorescence transmission optic path of Transmission system, and fluorescence is incident to spectrometer；Spectrometer external control unit outside according to The synchronous acquisition trigger signal control spectrometer that Collaborative Control and data processing output system issue starts to acquire fluorescence, sets glimmering Light collection parameter；The control signal that spectrometer is issued according to spectrometer external control unit outside, each group of analysis composition incident fluorescence The intensity divided, obtains fluorescence spectrum signal, and fluorescence spectrum signal is kept in and is transmitted to spectral signal conditioning output unit；Light The fluorescence spectrum signal that spectrometer exports is converted to scanning synchronous signal acquisition device and can connect by spectrum signal conditioning output unit The digital data transmission after conditioning to scanning synchronization signal is adopted in the digital signal of receipts, row format of going forward side by side encapsulation and signal check and correction The synchronous data collection unit of storage.

Scanning synchronous signal acquisition device includes: data acquisition controller, synchronous data collection unit, Data buffer sum number According to output unit；Wherein, data acquisition controller and synchronous data collection unit, Data buffer and data outputting unit connect It connects, and is connect with Collaborative Control with the Collaborative Control unit of data processing output system；Synchronous data collection unit also with data Buffer is connected, and respectively with the analog signal conditioner output unit of sweep generator, fluorescence intensity detector it is glimmering Light intensity signal improves output unit, the spectral signal conditioning output unit of fluorescence spectrum detector and scanning electron microscope The signal shared interface of the electric control system of system connects；Data buffer is also connect with data outputting unit；Data output Unit is additionally coupled to the data acquisition unit of Collaborative Control Yu data processing output system；Data acquisition controller receives collaboration control System controls signal with the synchronous acquisition that data processing output system issues, and is respectively converted into data acquisition instructions and is transmitted to synchronization Data acquisition unit is converted to instruction data storage and is transmitted to Data buffer, is converted to data output instruction and is transmitted to data Output unit；Synchronous data collection unit receives the data acquisition instructions that data acquisition controller issues, synchronous acquisition scanning letter The scan control signal of the number of number generator output, the fluorescence intensity signals of fluorescence intensity detector conditioning output, fluorescence light Compose the fluorescence spectrum signal of detector conditioning output, the secondary electron and back scattering electricity of scanning electron microscope system conditioning output Subsignal, data acquisition instructions control the acquisition of synchronous data collection unit beginning and end, and control signal according to synchronous acquisition Sequential logic set by middle user sets sequential logic when each circuit-switched data is acquired to synchronous data collection unit；It is synchronous Data acquisition unit collects glimmering at corresponding electron beam scan position in single pixel residence time (i.e. a timing cycles) Light intensity signal, fluorescence spectrum signal and secondary electron or backscattered electron signal data, electron beam scan position are strong with fluorescence Spending signal, fluorescence spectrum signal and secondary electron or backscattered electron signal has one-to-one relationship；Synchronous data collection list Member finally exports data to Data buffer；Data buffer receives the instruction data storage that data acquisition controller issues, With the collected data of synchronous data collection unit institute in the temporary set time range of set format, instruction data storage Synchronous data collection unit is completed according to time series stereodata Data buffer set by user in synchronous acquisition control signal Acquired data are kept in；Data outputting unit receives the data output instruction that data acquisition controller issues, and it is temporary to read data Data in storage, and exported with digital signal forwarding to Collaborative Control and data according to set format and sequential logic Output system is managed, data output instruction is exported according to time series stereodata data set by user in synchronous acquisition control signal Unit completes the forwarding output of Data buffer output data.

Collaborative Control and data processing output system include: a computer, Collaborative Control unit and data acquisition unit； Wherein, data acquisition unit is installed in the computer of Collaborative Control and data processing output system, and with scanning synchronization signal The data outputting unit of collector, Collaborative Control are connected with the Collaborative Control unit of data processing output system；Computer mentions For user's operating and controlling interface and interactive interface, and complete the record storage of Various types of data operation and information；Collaborative Control unit according to User's manipulation command issues electric mirror control signal, to the scan control of sweep generator to scanning electron microscope system Unit issue synchronous scanning control signal, to the light-dividing device of phosphor collection coupled transmission system sending divide optical control signal, to The spectrometer external control unit outside of fluorescence intensity signals the conditioning output unit and fluorescence spectrum detector of fluorescence intensity detector It issues synchronous acquisition trigger signal, issue synchronous acquisition control letter to the data acquisition controller of scanning synchronous signal acquisition device Number, issue data acquisition instructions to the data acquisition unit of Collaborative Control and data processing output system and time series stereodata is believed Number, and the feedback interaction that signal implementation progress is carried out with connect each section is completed, realize that measuring device each section is synchronous synergetic Operation, finally to user's operating and controlling interface of computer and interactive interface feedback control and parameter information；Synchronous scanning control signal, Synchronous acquisition trigger signal has synchronous temporal and logic relation with synchronous acquisition control signal, issues a synchronous scan control letter Number when, synchronous to issue synchronous acquisition trigger signal and synchronous acquisition controls signal, realization is remained unchanged in electron beam scan position The scanning residence time in, while carrying out the acquisition of fluorescence intensity signals and fluorescence spectrum signal, finally carried out by computer real When synchronous signal output and display, complete electron-beam excitation fluorescence imaging and fluorescence spectral measuring function；Collaborative Control unit Be installed in the computer of Collaborative Control and data processing output system, and with the electron beam of scanning electron microscope system outside Scanning triggering interface, the scan control unit of sweep generator, the light-dividing device of phosphor collection coupled transmission system, fluorescence Fluorescence intensity signals conditioning output unit, the spectrometer external control unit outside of fluorescence spectrum detector, scanning of intensity detector The data acquisition controller of synchronous signal acquisition device, Collaborative Control are connected with the data acquisition unit of data processing output system It connects；Data acquisition unit can summarize acquisition by the collected data-signal of scanning synchronous signal acquisition device, control further according to collaboration Data signal transmission to computer is carried out aggregation process by the data acquisition instructions and time series stereodata signal of unit processed.

It is another object of the present invention to provide a kind of electron-beam excitation fluorescence imaging and fluorescence spectrum measuring apparatus Control method.

The control method of electron-beam excitation fluorescence imaging and fluorescence spectrum measuring apparatus of the invention, comprising the following steps:

1) Collaborative Control and data processing output system issue electric mirror control signal, are transmitted to scanning electron microscope system Electron beam external scan trigger interface, control scanning electron microscope system receive external signal；

2) Collaborative Control and data processing output system issue synchronous scanning to sweep generator and control signal, scanning Signal generator generate number scan control signal, be transmitted to scanning synchronous signal acquisition device, and by number scan control After signal transformation conditioning is at the scan control signal of simulation, it is transmitted to the electron beam external scan tune of scanning electron microscope system Interface is controlled, electron beam scan position and the scanning residence time of scanning electron microscope system are controlled；

3) scanning electron microscope system launching electronics beam is irradiated in the vacuum sample room of scanning electron microscope system Detection to be analyzed sample on, excite detection to be analyzed sample generate fluorescence；

4) phosphor collection coupled transmission system collects fluorescence, and in the light splitting control of Collaborative Control and data processing output system Fluorescence is transmitted separately to fluorescence intensity detector and fluorescence spectrum detector under the control of signal processed；

5) fluorescence intensity detector and fluorescence spectrum detector are issued in Collaborative Control with data processing output system same It walks under the control of trigger collection signal, respectively synchronous acquisition fluorescence intensity signals and fluorescence spectrum signal, and by fluorescence intensity signals Scanning synchronous signal acquisition device is transmitted to fluorescence spectrum signal；

6) scanning synchronous signal acquisition device controls in the synchronous acquisition that Collaborative Control and data processing output system issue and believes Number control under, respectively receive sweep generator number scan control signal, fluorescence intensity detector fluorescence intensity The secondary electron or back scattering electricity that signal, the fluorescence spectrum signal of fluorescence spectrum detector and scanning electron microscope system generate Subsignal, then Collaborative Control and data processing output system will be transmitted to after signal aggregation process；

7) signal, synchronous acquisition trigger signal are controlled by the synchronous scanning that Collaborative Control and data processing output system issue There is synchronous temporal and logic relation with synchronous acquisition control signal, it is synchronous to issue when issuing a synchronous scanning control signal Corresponding synchronous acquisition trigger signal and synchronous acquisition control signal, and realization stops in the scanning that electron beam scan position remains unchanged It stays in the time, while carrying out the acquisition of fluorescence intensity signals and fluorescence spectrum signal, it is finally defeated with data processing by Collaborative Control System carries out the signal processing analysis of real-time synchronization and shows output out.

Advantages of the present invention:

Electron-beam excitation fluorescence imaging of the invention and fluorescence spectrum measuring apparatus use modular framework, each module Configuration adjustment and subsequent upgrade flexibly facilitate very much；Unified synchronous association of each module in Collaborative Control and data processing output system It is cooperated with each other under regulation system, guarantees stringent timing and logical order, and each mould can be detected by feedback interactive signal The operating condition of block finally realizes high-precision electron-beam excitation fluorescence imaging and fluorescence spectral measuring；Phosphor collection coupling passes The focus of the reflecting surface mirror of defeated system is located at 6mm below the object lens lower surface of the electron-optical system of scanning electron microscope system Within, it can be realized the high-resolution imaging of scanning electron microscope；Reflecting surface mirror has vertical greater than the phosphor collection of 1/4 spherical surface Body angle has high phosphor collection efficiency；Reflecting surface mirror fixation in situ device by introducing phosphor collection coupled transmission system will Reflecting surface mirror is directly fixed and is accurately located in scanning electron microscope system, in actual operation without doing additional adjustment, Greatly improve the efficiency of experiment test；Fluorescence transmits optical path and uses the coupling or knot of flexible material or photoconductive tube with flexible material Zoarium, position are transmitted independent of the vacuum flange interface position or fluorescence of the vacuum specimen chamber of scanning electron microscope system Optical path vacuum peeps the position of exchange device, and the installation site of the spectrometer of fluorescence spectrum detector is flexible, it is not necessary to scanning electricity The vacuum specimen chamber of sub- microscopic system is directly rigidly connected, and can greatly reduce the operation of the instruments such as spectrometer to scanning electron Microscopic system bring electromagnetism and mechanical disturbance improve the resolution ratio of scanning electron microscope.

Detailed description of the invention

Fig. 1 is the signal of one embodiment of electron-beam excitation fluorescence imaging and fluorescence spectrum measuring apparatus of the invention Figure；

Fig. 2 is the amplification of the phosphor collection coupled transmission system of electron-beam excitation fluorescence imaging and fluorescence spectrum measuring apparatus Schematic diagram.

Specific embodiment

With reference to the accompanying drawing, by embodiment, the present invention will be further described.

As shown in Figure 1, the electron-beam excitation fluorescence imaging and fluorescence spectrum measuring apparatus of the present embodiment include: scanning electron Microscopic system, sweep generator, phosphor collection coupled transmission system, fluorescence intensity detector, fluorescence spectrum detector, Scan synchronous signal acquisition device, Collaborative Control and data processing output system；Wherein, Collaborative Control and data processing output system As synchronously control and data acquisition center, biography is coupled with scanning electron microscope system, sweep generator, phosphor collection Defeated system, fluorescence intensity detector, fluorescence spectrum detector and scanning synchronous signal acquisition device are connected with each other；Scanning signal occurs Device is additionally coupled to the electron beam external scan regulation interface of scanning electron microscope system；The installation of phosphor collection coupled transmission system In the vacuum sample room of scanning electron microscope system；Phosphor collection coupled transmission system is respectively connected to fluorescence intensity detection Device and fluorescence spectrum detector；Scanning electron microscope system, sweep generator, fluorescence intensity detector and fluorescence spectrum Detector is further connected to scanning synchronous signal acquisition device.

Scanning electron microscope system includes electron gun 11, electron-optical system 12, vacuum specimen chamber 17, signal detection system System 13, electric control system 14 and user's control system；Wherein, 11 launching electronics beam 15 of electron gun, through electron-optical system 12 The focusing electron beam 15 for forming high quality, is incident on the sample 16 of the detection to be analyzed in vacuum specimen chamber 17, electronics Beam 15 and the interaction of the sample 16 of detection to be analyzed generate signal, and the fluorescence of generation is received by phosphor collection coupled transmission system Collection, other signals are collected by signal detection system 13；Electric control system 14 provides electron beam external scan triggering interface 19, electricity Beamlet external scan regulates and controls interface 110, external signal acquisition interface 111 and signal shared interface 112；The touching of electron beam external scan It generates interface 19 and receives the electric mirror control signal that Collaborative Control and data processing output system issue, the regulation of electron beam external scan connects Mouth 110 receives the scan control signal for the simulation that sweep generators issue, and control electron-optical system 12 is executed by scanning The control manipulation of signal generator, the synchronous fluorescence intensity signals for receiving fluorescence intensity detector of external signal acquisition interface 111, It can be used for acquiring fluorescence intensity signals, fluorescence intensity finally directly acquired by user's control system of scanning electron microscope system The image of distribution；The synchronous reading electron beam of signal detection system 13 and the sample 16 of detection to be analyzed remove caused by interacting Other signals other than fluorescence, and each signal scanning imaging results are presented by user's control system；Signal detection system 13 is to removing Other signals other than fluorescence are improved, and the signal shared interface 112 provided by electric control system 14, are transmitted to and are swept Retouch the synchronous data collection unit of synchronous signal acquisition device.

Scanning electron microscope system has following function: electron-optical system in 1. scanning electron microscope systems, Signal detection system and electric control system, which can cooperate with, provides adjusting function outside Electron Beam properties of flow, respectively by electric-controlled System processed provides electron beam external scan triggering interface 19 and electron beam external scan regulates and controls interface 110, and electron-optical system is held The external control manipulation that row is generated by external scanning signals generator, signal detection system complete the synchronous reading of signal so that electricity is presented Imaging results outside beamlet under regulation；2. signal detection system, electric control system in scanning electron microscope system and User's control system, which can cooperate with, completes synchronous reception, conditioning, display function that the same condition interaction of electron beam generates signal, Including by the fluorescence intensity detector and the fluorescence that detects such as fluorescence spectrum detector outside scanning electron microscope system, point External signal acquisition interface 111 is not provided by signal detection system and signal is improved, after electric control system will improve Signal collaboration scanning electron microscope system itself or external scanning signals generator generate electron beam synchronous scanning letter It number is transmitted to user's control system, the signal received is analyzed and processed and completes to show and store by user's control system, The function can be used for the fluorescence imaging of electron-beam excitation；3. signal detection system in scanning electron microscope system and electrical Control system, which can cooperate with, completes the output sharing functionality that the same condition interaction of electron beam generates signal, respectively by signal detection System acquisition signal simultaneously improves signal, and electric control system passes the signal after conditioning by signal shared interface 112 External equipment is transported to, synchronous signal acquisition device is such as scanned, realizes that signal with the shared of external equipment, completes signal by external equipment Monitoring, processing and analysis etc., the function can be used for the signals such as secondary electron and backscattered electron with the shared of external equipment.

Sweep generator includes sweep generator power supply 21, scan control unit 22,23 and of digital analog converter Analog signal conditioner output unit 24；Wherein, sweep generator power supply 21 is respectively connected to scan control unit 22, digital-to-analogue Converter 23 and analog signal conditioner output unit 24, are provided operating voltage, are connected with each other with power supply line；Scan control unit 22, which receive the synchronous scanning that Collaborative Control and data processing output system issue, controls signal, and it is number that synchronous scanning, which controls signal, Signal stops including scan position signal (the position coordinates signal in two-dimensional Cartesian system or polar coordinate system), single pixel point Stay time signal and scan control mode signal (such as transversal scanning, longitudinal scanning, circular scanning, helical scanning or arbitrarily selected Sector scanning etc.), scan control unit 22 handles the signal received, is converted to timing set by user The scan control signal of the number of logic, the two-dimensional coordinate information comprising each position pixel in scanning area set by user, And the scan control signal of number is exported to the synchronous data collection list of digital analog converter 23 and scanning synchronous signal acquisition device Member；The scan control signal of number is converted and be modulated to scanning electron microscope system by digital analog converter 23 can be received The scan control signal of simulation, gained analog signal include the two-dimensional coordinate of each position pixel in scanning area set by user Information, and be sequentially output according to sequential logic set by user to analog signal conditioner output unit 24；Analog signal conditioner Output unit 24 will be filtered the scan control signal of the simulation of input, noise reduction, amplification and clipping, and by the mould after conditioning Quasi- scan control signal is transmitted to the electron beam external scan regulation interface 110 of scanning electron microscope system.

As shown in Fig. 2, phosphor collection coupled transmission system include reflecting surface mirror 31, reflecting surface mirror fixation in situ device 32, Fluorescence coupler 34, fluorescence transmission optical path 33, fluorescence transmission optical path vacuum peep exchange device 35 and light-dividing device 36；Wherein, it reflects Face mirror 31 is fixed in the vacuum specimen chamber 17 of scanning electron microscope system by reflecting surface mirror fixation in situ device 32, is reflected A through-hole is opened on face mirror 31, so that high quality caused by scanning electron microscope system focuses electron beam and passes through reflecting surface mirror 31, thus with scanning electron microscope system sample stage carried sample interaction；The setting position of reflecting surface mirror 31 It is determined by reflecting surface mirror fixation in situ device 32, and guarantees that electron beam is overlapped and wears with the axis in opened hole on reflecting surface mirror 31 Cross the focus of reflecting surface mirror 31；Reflecting surface mirror 31 is by reflecting surface mirror fixation in situ device 32 with scanning electron microscope system 18 rigidity of object lens and short distance of electron-optical system connect, and the design focus of reflecting surface mirror 31 is enabled to be located at scanning electron Below 18 lower surface of object lens of the electron-optical system of microscopic system within 6mm, the height of scanning electron microscope can be realized Resolution imaging；Reflecting surface mirror 31 has the phosphor collection solid angle greater than 1/4 spherical surface, has high phosphor collection efficiency；Reflection One end of face mirror fixation in situ device 32 is fixed on the vacuum specimen chamber of scanning electron microscope system, the spirit of other end position Work is adjustable, can be fixed by positioning device on the object lens 18 of the electron-optical system of scanning electron microscope system, and with object Mirror 18 is that standard is accurately positioned its position；Fluorescence is generated after electron beam and sample interaction, fluorescence is entered by reflecting surface mirror 31 It is incident upon fluorescence coupler 34；Incident fluorescence is coupled into fluorescence transmission optical path 33 by fluorescence coupler 34, and fluorescence coupler 34 is solid Due on reflecting surface mirror 31 or in vacuum specimen chamber；Fluorescence transmits optical path 33 and fluorescence is transmitted to fluorescence by light-dividing device 36 Intensity detector and fluorescence spectrum detector；The fluorescence input terminal of fluorescence transmission optical path 33 is located at scanning electron microscope system In vacuum specimen chamber, it is fixed on the setting position in the vacuum specimen chamber of fluorescence coupler 34 or scanning electron microscope system； The fluorescence output end of fluorescence transmission optical path 33 is located at outside scanning electron microscope system, is fixed on the coupling of the first and second fluorescence At incident interface 41 and 51；Fluorescence transmits coupling or combination of the optical path 33 using flexible material or photoconductive tube with flexible material, Optical path is transmitted independent of the vacuum flange interface position or fluorescence of the vacuum specimen chamber of scanning electron microscope system in its position Vacuum peeps the position of exchange device 35；Fluorescence, which transmits optical path 33, peeps exchange device 35 from vacuum specimen chamber by fluorescence transmission optical path vacuum Be connected internally to outside；Fluorescence transmission optical path vacuum is peeped exchange device 35 and is fixed on the locular wall of vacuum specimen chamber, with vacuum method Based on blue interface, flange-interface two sides can enable fluorescence high efficiency penetrate, and can shield external stray light incidence entrance Fluorescence transmits optical path 33；Light-dividing device 36, light splitting are installed in fluorescence transmission optical path 33 outside scanning electron microscope system Device 36 is connect with Collaborative Control with data processing output system, in the light splitting that Collaborative Control and data processing output system issue It controls under signal control, fluorescence can be continuously adjusted and distribute comparing to fluorescence intensity detector and fluorescence spectrum detector Example.

Fluorescence intensity detector includes that the first fluorescence couples incident interface 41, photoelectric signal transformation unit 42, fluorescence intensity Signal condition output unit 43；Wherein, the first fluorescence couples incident 41 high efficiency of interface and receives by phosphor collection coupled transfer system The fluorescence of system transmits the fluorescence that optical path 33 is transmitted, and fluorescence is incident to the photoelectric sensing component of photoelectric signal transformation unit 42, And the interference of external stray light can be shielded；First fluorescence couples incident interface and connect with photoelectric signal transformation unit 42；Light Electric signal converting unit 42 includes photoelectric sensing component and electric signal output unit, and photoelectric sensing component will be incident to fluorescence intensity The fluorescence of detector is converted to electric signal, and electric signal conditioning is tentatively the simulation in setting amplitude range by electric signal output unit Fluorescence intensity signals；Photoelectric signal transformation unit 42 is located inside fluorescence intensity detector, and improves with fluorescence intensity signals Output unit 43 connects, and can shield the interference of external stray light and the interference of stray EM field；Fluorescence intensity signals conditioning is defeated The synchronous acquisition trigger signal realization that unit 43 is issued according to Collaborative Control and data processing output system out starts, suspend or Stop signal acquisition output, and the conditioning parameter of the fluorescence intensity signals of simulation is adjusted in real time, by photoelectric signal transformation unit 42 The fluorescence intensity signals of the simulation of output are filtered, noise reduction, amplification and clipping, improve scanning synchronous signal acquisition device extremely and Scanning electron microscope system is capable of the fluorescence intensity signals standard of received simulation, and the fluorescence of the simulation after conditioning is strong Degree signal is transmitted to the synchronous data collection unit of scanning synchronous signal acquisition device and the external letter of scanning electron microscope system Number acquisition interface 111, or the analog signal sample conversion that photoelectric signal transformation unit 42 is exported is scanning synchronous signal acquisition The external signal sniffing interface of device and scanning electron microscope system is capable of the fluorescence intensity signals of received number, and carries out The fluorescence intensity signals of number after conditioning are transmitted to scanning and synchronized by zero averaging, singular point rejecting and elimination trend term etc. The synchronous data collection unit of signal picker and the external signal acquisition interface 111 of scanning electron microscope system.

Fluorescence spectrum detector includes that the second fluorescence couples incident interface 51, spectrometer 52, spectrometer external control unit outside 53, spectral signal improves output unit 54；Wherein, the second fluorescence couples incident interface 51 and connect with spectrometer 52；Outside spectrometer Portion's control unit 53 is connect with spectrometer 52 and spectral signal conditioning output unit 54 respectively；Spectral signal improves output unit 54 It also connect with spectrometer 52, and is connect with the synchronous data collection unit of scanning synchronous signal acquisition device；Second fluorescence is coupled into It penetrates 51 high efficiency of interface and receives the fluorescence transmitted by the fluorescence transmission optical path 33 of phosphor collection coupled transmission system, and fluorescence is entered It is incident upon spectrometer 52, and the interference of external stray light can be shielded；Spectrometer is issued according to spectrometer external control unit outside 53 Control signal, for analyze composition incident fluorescence each wavelength (or energy) (range) at intensity, obtain fluorescence spectrum letter Breath, and information is sent into spectral signal and improves output unit 54；Spectrometer is a kind of mature scientific research and industrial device, is had Multiple functions and different performance, can be according to performance parameter set by electron-beam excitation fluorescence imaging and fluorescence spectrum measuring apparatus It is selected；Spectrometer external control unit outside 53 is triggered according to the synchronous acquisition that Collaborative Control and data processing output system issue Signal control spectrometer start acquire spectral signal, set spectra collection parameter, including acquisition time, wavelength or energy range, Counting mode, acquisition mode (single acquisition, multi collect superposition or multi collect take average etc.) etc., and by spectral signature data Temporary and output to spectral signal improves output unit 54；The light that spectral signal conditioning output unit 54 is used to export spectrometer Spectrum signal (digital signal or the analog signal according to sequential export) is converted to scanning synchronous signal acquisition device can be received Digital signal, row format of going forward side by side encapsulation, signal check and correction etc., by the digital data transmission after conditioning to scanning synchronous signal acquisition device Synchronous data collection unit.

Scanning synchronous signal acquisition device includes data acquisition controller 61, synchronous data collection unit 62, Data buffer 63 and data outputting unit 64；Wherein, data acquisition controller 61 and synchronous data collection unit 62,63 sum number of Data buffer It connects according to output unit 64, and is connect with Collaborative Control with the Collaborative Control unit of data processing output system；Synchrodata is adopted Collection unit 62 also with scanning synchronous signal acquisition device Data buffer 63 be connected, and respectively with the mould of sweep generator Fluorescence intensity signals the conditioning output unit, fluorescence spectrum detector of quasi- signal condition output unit 24, fluorescence intensity detector Spectral signal conditioning output unit 54 and scanning electron microscope system electric control system signal shared interface 112 Connection；Data buffer 63 is also connect with data outputting unit 64；Data outputting unit 64 is additionally coupled to Collaborative Control and data Handle the data acquisition unit of output system；Data acquisition controller 61 receives Collaborative Control and data processing output system issues Synchronous acquisition control signal, be converted to data acquisition instructions and be transmitted to synchronous data collection unit 62, be converted to data storage Instruction is transmitted to Data buffer 63, is converted to data output instruction and is transmitted to data outputting unit 64；Data acquisition instructions control 62 beginning and end of synchronous data collection unit acquisition processed, and patrolled according to timing set by user in synchronous acquisition control signal Collect the sequential logic set when each circuit-switched data is acquired to synchronous data collection unit 62；Instruction data storage is adopted according to synchronizing The completion of time series stereodata Data buffer 63 set by user synchronous data collection unit 62 is acquired in set control signal Data are kept in；Data output instruction is exported according to time series stereodata data set by user in synchronous acquisition control signal Unit 64 completes the forwarding output of 63 output data of Data buffer；Synchronous data collection unit 62 is according to data acquisition controller The scan control signal of the number of the output of the 61 data acquisition instructions synchronous acquisition sweep generators issued is (according to user The user of set Sequential logic output sets the two-dimensional coordinate information of each position pixel in scanning area), fluorescence intensity visits Survey the fluorescence intensity signals of device conditioning output, fluorescence spectrum signal, the scanning electron microscopy of the conditioning output of fluorescence spectrum detector The secondary electron and backscattered electron signal of mirror systemic regulation output, and data are exported to Data buffer 63；Synchrodata Acquisition unit 62 collects the fluorescence in single pixel residence time (i.e. a timing cycles) at corresponding electron beam scan position Strength signal, fluorescence spectrum signal and secondary electron or backscattered electron signal data, the same fluorescence intensity of electron beam scan position Signal, fluorescence spectrum signal and secondary electron or backscattered electron signal have one-to-one relationship；Data buffer 63 receives The instruction data storage that data acquisition controller 61 issues, with synchrodata in the temporary set time range of set format The collected data of acquisition unit institute；Data outputting unit 64 reads the data in Data buffer 63, and according to set Format and sequential logic are with digital signal forwarding output to Collaborative Control and data processing output system.

Collaborative Control and data processing output system include that a computer 71, Collaborative Control unit 72 and data acquisition are single Member 73；Wherein, data acquisition unit 73 is installed in the computer 71 of Collaborative Control and data processing output system, and with scanning The data outputting unit 64 of synchronous signal acquisition device, Collaborative Control are connected with the Collaborative Control unit 72 of data processing output system It connects；Computer 71 provides user's operating and controlling interface and interactive interface, and completes the record storage of Various types of data operation and information；Collaboration Control unit 72 issues electric mirror control signal according to user's manipulation command, to scanning electron microscope system, sends out to scanning signal The scan control unit 22 of raw device issues synchronous scanning control signal, sends out to the light-dividing device 36 of phosphor collection coupled transmission system Divide optical control signal out, improve the light of output unit and fluorescence spectrum detector to the fluorescence intensity signals of fluorescence intensity detector Spectrometer external control unit outside 53 issue synchronous acquisition trigger signal, to scanning synchronous signal acquisition device data acquisition controller 61 It issues synchronous acquisition control signal, issue data acquisition to the data acquisition unit 73 of Collaborative Control and data processing output system Instruction and time series stereodata signal, and the feedback interaction that signal implementation progress is carried out with connected each section is completed, it realizes and surveys The synchronous synergetic operation of device each section is measured, finally to user's operating and controlling interface of computer 71 and interactive interface feedback control and parameter Information；Synchronous scanning, which controls signal, synchronous acquisition trigger signal, with synchronous acquisition control signal there is synchronous sequential logic to close System, when issuing a synchronous scan control signal, synchronous sending synchronous acquisition trigger signal and synchronous acquisition control signal, realize In the scanning residence time that electron beam scan position remains unchanged, while carrying out adopting for fluorescence intensity signals and fluorescence spectrum signal Collection is finally carried out the signal output and display of real-time synchronization by computer 71, completes electron-beam excitation fluorescence imaging and fluorescence light Spectrometry function；Collaborative Control unit 72 is installed in the computer 71 of Collaborative Control and data processing output system, and is swept together Retouch the electron beam external scan triggering interface 19 of electron microscopy system, the scan control unit 22, glimmering of sweep generator Light collects the light-dividing device 36 of coupled transmission system, the fluorescence intensity signals of fluorescence intensity detector improve output unit, fluorescence The spectrometer external control unit outside 53 of spectral detector, the data acquisition controller 61 for scanning synchronous signal acquisition device, collaboration control System is connected with the data acquisition unit 73 of data processing output system；It is same by scanning that data acquisition unit 73 can summarize acquisition The collected data-signal of signal picker is walked, further according to the data acquisition instructions and time series stereodata of Collaborative Control unit 72 Data signal transmission to computer 71 is carried out aggregation process by signal.

It is finally noted that the purpose for publicizing and implementing mode is to help to further understand the present invention, but ability The technical staff in domain is understood that without departing from the spirit and scope of the invention and the appended claims, various replacements and Modification is all possible.Therefore, the present invention should not be limited to embodiment disclosure of that, the scope of protection of present invention with Subject to the range that claims define.

Claims

1. a kind of electron-beam excitation fluorescence imaging and fluorescence spectrum measuring apparatus, the measuring device include: scanning electron microscopy Mirror system, phosphor collection coupled transmission system, fluorescence intensity detector, fluorescence spectrum detector；The phosphor collection coupling passes Defeated system is mounted in the vacuum sample room of scanning electron microscope system；The phosphor collection coupled transmission system is separately connected To fluorescence intensity detector and fluorescence spectrum detector；The scanning electron microscope system launching electronics beam, is irradiated to scanning On the sample of detection to be analyzed in the vacuum sample room of electron microscopy system, the sample of detection to be analyzed is excited to generate glimmering Light；It is characterized in that, the measuring device further include: sweep generator, scanning synchronous signal acquisition device, Collaborative Control with Data processing output system；Wherein, the Collaborative Control and data processing output system are as in synchronously control and data acquisition The heart, with scanning electron microscope system, sweep generator, phosphor collection coupled transmission system, fluorescence intensity detector, glimmering Light spectral detector and scanning synchronous signal acquisition device are connected with each other；It is aobvious that the sweep generator is additionally coupled to scanning electron The electron beam external scan of micromirror systems regulates and controls interface；The scanning electron microscope system, sweep generator, fluorescence are strong Degree detector and fluorescence spectrum detector are further connected to scanning synchronous signal acquisition device；The Collaborative Control and data processing Output system issues electric mirror control signal, is transmitted to the electron beam external scan triggering interface of scanning electron microscope system, control Scanning electron microscope system processed receives external signal；The Collaborative Control and data processing output system occur to scanning signal Device issues synchronous scanning and controls signal, and sweep generator generates the scan control signal of number, is transmitted to the synchronous letter of scanning Number collector, and by the transformation conditioning of the scan control signal of number at the scan control signal of simulation after, be transmitted to scanning electron The electron beam external scan of microscopic system regulates and controls interface, controls the electron beam scan position of scanning electron microscope system and sweeps Retouch the residence time；The phosphor collection coupled transmission system collects fluorescence, and in Collaborative Control and data processing output system Divide under the control of optical control signal and fluorescence is transmitted separately to fluorescence intensity detector and fluorescence spectrum detector；The fluorescence is strong Spend the synchronous acquisition trigger signal control that detector and fluorescence spectrum detector are issued in Collaborative Control and data processing output system Under system, difference synchronous acquisition fluorescence intensity signals and fluorescence spectrum signal, and fluorescence intensity signals and fluorescence spectrum signal are passed Transport to scanning synchronous signal acquisition device；The scanning synchronous signal acquisition device is issued in Collaborative Control and data processing output system Synchronous acquisition control signal control under, respectively receive sweep generator number scan control signal, fluorescence intensity The fluorescence intensity signals of detector, the fluorescence spectrum signal of fluorescence spectrum detector and scanning electron microscope system generate two Secondary electronics or backscattered electron signal, then Collaborative Control and data processing output system will be transmitted to after signal aggregation process；By Synchronous scanning control signal, synchronous acquisition trigger signal and the synchronous acquisition control that Collaborative Control and data processing output system issue Signal processed has synchronous temporal and logic relation, and when issuing a synchronous scanning control signal, synchronous sending synchronizes accordingly is adopted Collect trigger signal and synchronous acquisition controls signal, realizes within the scanning residence time that electron beam scan position remains unchanged, together The acquisition of Shi Jinhang fluorescence intensity signals and fluorescence spectrum signal is finally carried out by Collaborative Control and data processing output system real When synchronous signal processing analysis and show output.

2. measuring device as described in claim 1, which is characterized in that the scanning electron microscope system include: electron gun, Electron-optical system, vacuum specimen chamber, signal detection system, electric control system and user's control system；Wherein, the electronics Rifle launching electronics beam, through electron-optical system formed high quality focusing electron beam, be incident in vacuum sample room to On the sample of analysis detection, the sample interaction of electron beam and detection to be analyzed generates signal, and the fluorescence of generation is received by fluorescence Collect coupled transmission system to collect, other signals are collected by signal detection system；The electric control system is provided outside electron beam Scanning triggering interface, electron beam external scan regulation interface, external signal acquisition interface and signal shared interface；The electron beam External scan triggers the electric mirror control signal that interface Collaborative Control and data processing output system issue, and sweeps outside electron beam The scan control signal for the simulation that regulation interface sweep generator issues is retouched, control electron-optical system is executed by sweeping The control manipulation of signal generator is retouched, external signal acquisition interface synchronizes the fluorescence intensity signals for receiving fluorescence intensity detector, The image of fluorescence intensity distribution is finally directly acquired by user's control system of scanning electron microscope system；The signal detection Other signals caused by the synchronous sample interaction for reading electron beam and detection to be analyzed of system in addition to fluorescence, and by Each signal scanning imaging results are presented in user's control system；The signal detection system carries out other signals in addition to fluorescence Conditioning, and the signal shared interface provided by electric control system, are transmitted to the synchrodata of scanning synchronous signal acquisition device Acquisition unit.

3. measuring device as described in claim 1, which is characterized in that the sweep generator includes: scanning signal hair Raw device power supply, scan control unit, digital analog converter and analog signal conditioner output unit；Wherein, the scanning signal occurs Device power supply is respectively connected to scan control unit, digital analog converter and analog signal conditioner output unit；The scan control list Member receives the synchronous scanning that Collaborative Control and data processing output system issue and controls signal, and it is number that synchronous scanning, which controls signal, Signal；The scan control unit handles the signal received, is converted to sequential logic set by user The scan control signal of number, and the scan control signal of number is exported respectively to digital analog converter and scanning synchronization signal and is adopted The synchronous data collection unit of storage；The scan control signal of number is converted and is modulated to scanning electron by the digital analog converter Microscopic system is capable of the scan control signal of received simulation, and according to sequential logic set by user be sequentially output to Analog signal conditioner output unit；The analog signal conditioner output unit improves the analog signal of input, and will adjust The scan control signal of simulation after reason is transmitted to the electron beam external scan regulation interface of scanning electron microscope system.

4. measuring device as described in claim 1, which is characterized in that the phosphor collection coupled transmission system includes: reflection Face mirror, reflecting surface mirror fixation in situ device, fluorescence coupler, fluorescence transmission optical path, fluorescence transmission optical path vacuum peep exchange device and Light-dividing device；Wherein, the reflecting surface mirror is fixed on scanning electron microscope system by reflecting surface mirror fixation in situ device In vacuum specimen chamber, a through-hole is opened on reflecting surface mirror, so that the electricity that high quality caused by scanning electron microscope system focuses Beamlet passes through reflecting surface mirror, so that the sample with detection to be analyzed interacts；Electron beam and the sample of detection to be analyzed are mutual Fluorescence is generated after effect, fluorescence is incident to fluorescence coupler by reflecting surface mirror；The fluorescence coupler is by incident fluorescence coupling It closes and enters fluorescence transmission optical path；The fluorescence transmission optical path uses flexible material or photoconductive tube with the coupling or combination of flexible material Body, fluorescence transmission optical path peep exchange device by fluorescence transmission optical path vacuum and are connected internally to outside from vacuum specimen chamber；It is described Fluorescence transmission optical path vacuum is peeped exchange device and is fixed on the locular wall of vacuum specimen chamber；It is glimmering outside scanning electron microscope system Light-dividing device is installed, and fluorescence transmits optical path and fluorescence simultaneous transmission to fluorescence intensity detected by light-dividing device in optical transport optical path Device and fluorescence spectrum detector；The light-dividing device is connect with Collaborative Control with data processing output system, Collaborative Control with What data processing output system issued divides under optical control signal control, continuously adjusts fluorescence and distributes to fluorescence intensity detector and glimmering The relative scale of light spectral detector.

5. measuring device as claimed in claim 4, which is characterized in that the setting position of the reflecting surface mirror is former by reflecting surface mirror The fixed device in position determines, and guarantees that electron beam is combined through the coke of reflecting surface mirror with the axis in opened hole on reflecting surface mirror again Point；Reflecting surface mirror is rigid with the object lens of the electron-optical system of scanning electron microscope system by reflecting surface mirror fixation in situ device Property and closely connect, enable to the design focus of reflecting surface mirror to be located at the electron-optical system of scanning electron microscope system Object lens lower surface below within 6mm；Reflecting surface mirror has the phosphor collection solid angle greater than 1/4 spherical surface.

6. measuring device as described in claim 1, which is characterized in that the fluorescence intensity detector includes: the first fluorescence coupling It is incorporated into and penetrates interface, photoelectric signal transformation unit and fluorescence intensity signals conditioning output unit；Wherein, first fluorescence is coupled into Interface is penetrated to connect with photoelectric signal transformation unit；The photoelectric signal transformation unit and fluorescence intensity signals conditioning output unit connect It connects, photoelectric signal transformation unit includes photoelectric sensing component and electric signal output unit；First fluorescence couples incident interface It receives by the fluorescence of the fluorescence transmission optic path of phosphor collection coupled transmission system, and fluorescence is incident to photoelectric signal transformation The photoelectric sensing component of unit；Fluorescence is converted to electric signal by the photoelectric sensing component, and electric signal output unit tentatively will be electric Signal condition is the fluorescence intensity signals for setting the simulation in amplitude range；Fluorescence intensity signals conditioning output unit according to The synchronous acquisition trigger signal realization that Collaborative Control and data processing output system issue starts, suspend or stop signal acquires Output, and adjusts the conditioning parameter of the fluorescence intensity signals of simulation in real time, the simulation that photoelectric signal transformation unit is exported it is glimmering Light intensity signal is improved to the external signal acquisition interface institute energy of scanning synchronous signal acquisition device and scanning electron microscope system The fluorescence intensity signals of enough received simulations, and the fluorescence intensity signals of the simulation after conditioning are transmitted to scanning synchronization signal and are adopted The synchronous data collection unit of storage and the external signal acquisition interface of scanning electron microscope system, or photosignal is turned The fluorescence intensity signals for changing the simulation of unit output are converted to scanning synchronous signal acquisition device and scanning electron microscope system External signal acquisition interface is capable of the fluorescence intensity signals of received number, and carries out digital signal condition, after conditioning The outside of digital data transmission extremely the synchronous data collection unit of scanning synchronous signal acquisition device and scanning electron microscope system Signal acquisition interface.

7. measuring device as described in claim 1, which is characterized in that the fluorescence spectrum detector includes: the second fluorescence coupling It is incorporated into and penetrates interface, spectrometer, spectrometer external control unit outside and spectral signal conditioning output unit；Wherein, second fluorescence Incident interface is coupled to connect with spectrometer；The spectrometer external control unit outside is exported with spectrometer and spectral signal conditioning respectively Unit connection；The spectral signal conditioning output unit is also connect with spectrometer, and synchronous with scanning synchronous signal acquisition device Data acquisition unit connection；The fluorescence that second fluorescence couples incident interface phosphor collection coupled transmission system transmits light The fluorescence of road transmission, and fluorescence is incident to spectrometer；The spectrometer external control unit outside is according at Collaborative Control and data The synchronous acquisition trigger signal control spectrometer that reason output system issues starts to acquire fluorescence, sets fluorescent collecting parameter；It is described The control signal that spectrometer is issued according to spectrometer external control unit outside, the intensity of each component of analysis composition incident fluorescence, obtains To fluorescence spectrum signal, and fluorescence spectrum signal is kept in and is transmitted to spectral signal conditioning output unit；The spectral signal The fluorescence spectrum signal that spectrometer exports is converted to scanning synchronous signal acquisition device by conditioning output unit being capable of received number Word signal, row format of going forward side by side encapsulation and signal check and correction, by the digital data transmission after conditioning to scanning synchronous signal acquisition device Synchronous data collection unit.

8. measuring device as described in claim 1, which is characterized in that the scanning synchronous signal acquisition device includes: that data are adopted Collect controller, synchronous data collection unit, Data buffer and data outputting unit；Wherein, the data acquisition controller with Synchronous data collection unit, Data buffer are connected with data outputting unit, and with Collaborative Control and data processing output system Collaborative Control unit connection；The synchronous data collection unit is also connected with Data buffer, and respectively with scanning signal The analog signal conditioner output unit of generator, the fluorescence intensity signals of fluorescence intensity detector improve output unit, fluorescence light The signal for composing the spectral signal conditioning output unit of detector and the electric control system of scanning electron microscope system is shared Interface connection；Data buffer is also connect with data outputting unit；The data outputting unit is additionally coupled to Collaborative Control and number According to the data acquisition unit of processing output system；The data acquisition controller receives Collaborative Control and data processing output system The synchronous acquisition of sending controls signal, and is respectively converted into data acquisition instructions and is transmitted to synchronous data collection unit, is converted to Instruction data storage is transmitted to Data buffer, is converted to data output instruction and is transmitted to data outputting unit；The same step number The data acquisition instructions that data acquisition controller issues, the number of synchronous acquisition sweep generator output are received according to acquisition unit The scan control signal of word, the fluorescence intensity signals of fluorescence intensity detector conditioning output, the conditioning output of fluorescence spectrum detector Fluorescence spectrum signal, scanning electron microscope system conditioning output secondary electron and backscattered electron signal, data acquisition When instructing control synchronous data collection unit beginning and end acquisition, and being controlled in signal set by user according to synchronous acquisition Sequence logic sets sequential logic when each circuit-switched data is acquired to synchronous data collection unit；The synchronous data collection unit Collect fluorescence intensity signals in the single pixel residence time at corresponding electron beam scan position, fluorescence spectrum signal and secondary Electronics or backscattered electron signal data, the same fluorescence intensity signals of electron beam scan position, fluorescence spectrum signal and secondary electron Or backscattered electron signal has one-to-one relationship；The synchronous data collection unit, which finally exports data to data, keeps in Device；Data buffer receives the instruction data storage that data acquisition controller issues, when temporary set with set format Between the collected data of synchronous data collection unit institute in range, instruction data storage is according to user in synchronous acquisition control signal Set time series stereodata Data buffer completes the temporary of the acquired data of synchronous data collection unit；The data are defeated Unit receives the data output instruction that data acquisition controller issues out, reads the data in Data buffer, and according to set Fixed format and sequential logic is with digital signal forwarding output to Collaborative Control and data processing output system, data output instruction Data buffer output is completed according to time series stereodata data outputting unit set by user in synchronous acquisition control signal The forwarding of data exports.

9. measuring device as described in claim 1, which is characterized in that the Collaborative Control and data processing output system packet It includes: a computer, Collaborative Control unit and data acquisition unit；Wherein, the data acquisition unit is installed on Collaborative Control In the computer of data processing output system, and with the scanning data outputting unit of synchronous signal acquisition device, Collaborative Control with The Collaborative Control unit of data processing output system is connected；The computer provides user's operating and controlling interface and interactive interface, and Complete the record storage of Various types of data operation and information；Collaborative Control unit is according to user's manipulation command, to scanning electron microscopy Mirror system issues electric mirror control signal, synchronous scanning control signal issued to the scan control unit of sweep generator, to The light-dividing device sending of phosphor collection coupled transmission system divides optical control signal, to the fluorescence intensity signals of fluorescence intensity detector The spectrometer external control unit outside for improving output unit and fluorescence spectrum detector issues synchronous acquisition trigger signal, same to scanning The data acquisition controller for walking signal picker issues synchronous acquisition control signal, to Collaborative Control and data processing output system Data acquisition unit issue data acquisition instructions and time series stereodata signal, and complete and connect each section progress signal The feedback interaction of implementation progress, realizes the synchronous synergetic operation of measuring device each section, finally to user's operating and controlling interface of computer And interactive interface feedback control and parameter information；Synchronous scanning controls signal, synchronous acquisition trigger signal and synchronous acquisition control Signal has synchronous temporal and logic relation, synchronous to issue synchronous acquisition trigger signal when issuing a synchronous scan control signal Signal is controlled with synchronous acquisition, is realized within the scanning residence time that electron beam scan position remains unchanged, while carrying out fluorescence The acquisition of strength signal and fluorescence spectrum signal is finally carried out the signal output and display of real-time synchronization by computer, completes electricity Beamlet excites fluorescence imaging and fluorescence spectral measuring function；It is defeated with data processing that the Collaborative Control unit is installed on Collaborative Control Out in the computer of system, and occur with the electron beam external scan of scanning electron microscope system triggering interface, scanning signal The fluorescence intensity signals of the scan control unit of device, the light-dividing device of phosphor collection coupled transmission system, fluorescence intensity detector Improve the data acquisition of output unit, the spectrometer external control unit outside of fluorescence spectrum detector, scanning synchronous signal acquisition device Controller, Collaborative Control are connected with the data acquisition unit of data processing output system；The data acquisition unit can converge Total acquisition by the collected data-signal of scanning synchronous signal acquisition device, data acquisition instructions further according to Collaborative Control unit and Data signal transmission to computer is carried out aggregation process by time series stereodata signal.

10. a kind of control method of electron-beam excitation fluorescence imaging and fluorescence spectrum measuring apparatus, which is characterized in that the control Method the following steps are included:

1) Collaborative Control and data processing output system issue electric mirror control signal, are transmitted to the electricity of scanning electron microscope system Beamlet external scan triggers interface, and control scanning electron microscope system receives external signal；

2) Collaborative Control and data processing output system issue synchronous scanning to sweep generator and control signal, scanning signal Generator generate number scan control signal, be transmitted to scanning synchronous signal acquisition device, and by number scan control signal After transformation conditioning is at the scan control signal of simulation, the electron beam external scan regulation for being transmitted to scanning electron microscope system is connect Mouthful, control electron beam scan position and the scanning residence time of scanning electron microscope system；

3) scanning electron microscope system launching electronics beam, be irradiated in the vacuum sample room of scanning electron microscope system to On the sample of analysis detection, the sample of detection to be analyzed is excited to generate fluorescence；

4) phosphor collection coupled transmission system collects fluorescence, and controls and believe in the light splitting of Collaborative Control and data processing output system Number control under fluorescence is transmitted separately to fluorescence intensity detector and fluorescence spectrum detector；

5) fluorescence intensity detector and fluorescence spectrum detector Collaborative Control and data processing output system issue synchronize adopt Collect under trigger signal control, respectively synchronous acquisition fluorescence intensity signals and fluorescence spectrum signal, and by fluorescence intensity signals and glimmering Light spectral signal is transmitted to scanning synchronous signal acquisition device；

6) scanning synchronous signal acquisition device controls signal control in the synchronous acquisition that Collaborative Control and data processing output system issue Under system, respectively receive sweep generator number scan control signal, fluorescence intensity detector fluorescence intensity signals, Secondary electron or the backscattered electron letter that the fluorescence spectrum signal and scanning electron microscope system of fluorescence spectrum detector generate Number, then Collaborative Control and data processing output system will be transmitted to after signal aggregation process；

7) the synchronous scanning control signal that is issued by Collaborative Control and data processing output system, synchronous acquisition trigger signal and same It walks acquisition control signal and synchronizes and issue accordingly when issuing a synchronous scanning control signal with synchronous temporal and logic relation Synchronous acquisition trigger signal and synchronous acquisition control signal, realize when scanning that electron beam scan position remains unchanged stops In, while the acquisition of fluorescence intensity signals and fluorescence spectrum signal is carried out, finally it is by Collaborative Control and data processing output System carries out the signal processing analysis of real-time synchronization and shows output.