CN107795471A - Fluid control device - Google Patents
Fluid control device Download PDFInfo
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- CN107795471A CN107795471A CN201610801636.5A CN201610801636A CN107795471A CN 107795471 A CN107795471 A CN 107795471A CN 201610801636 A CN201610801636 A CN 201610801636A CN 107795471 A CN107795471 A CN 107795471A
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- 239000012530 fluid Substances 0.000 title claims abstract description 111
- 230000001360 synchronised effect Effects 0.000 claims abstract description 88
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- 230000036961 partial effect Effects 0.000 description 13
- 239000000758 substrate Substances 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
Description
技术领域technical field
本发明关于一种流体控制装置,尤指一种具有可变形基座的流体控制装置。The invention relates to a fluid control device, in particular to a fluid control device with a deformable base.
背景技术Background technique
目前于各领域中无论是医药、计算机科技、打印及能源等工业,产品均朝精致化及微小化方向发展,其中微型泵、喷雾器、喷墨头及工业打印装置等产品所包含的流体输送结构为其关键技术,因此,如何藉创新结构突破其技术瓶颈,为发展的重要内容。At present, in various fields, whether it is medicine, computer technology, printing and energy industries, products are developing towards refinement and miniaturization. Among them, the fluid delivery structures included in products such as micro pumps, sprayers, inkjet heads and industrial printing devices Its key technology, therefore, how to break through its technical bottleneck through innovative structure is an important content of development.
请参阅图1A及图1B所示,图1A为习知流体控制装置的部分结构示意图,图1B为习知流体控制装置的部分结构组装偏移示意图。如图所示,习知的流体控制装置100的作动核心主要包含基板101及压电致动器102,基板101与压电致动器102是堆栈设置,且基板101与压电致动器102具有一间隙103,其中,该间隙103需保持一定深度,藉由此间隙103维持一定深度,当压电致动器102受施加电压而致动产生形变时,则可驱动流体于流体控制装置100的各腔室内流动,藉以达到流体传输的目的。然而,于此习知的流体控制装置100中,其中压电致动器102与基板101均为平板式的整体结构,且具有一定的刚性,在此条件下,欲使该两个整体均为平板式的结构彼此精准对位,以致使该两平板间产生具有一定之间隙103,即维持一定深度,会具有一定的困难度,极容易产生误差,因为上述任一具一定刚性的整体平板,如有任一边倾斜一角度θ,则于相对的位置均会产生相对的距离乘上该角度θ的位移值,例如ㄧ位移d,而导致该一定之间隙103的标线处增加d’(如图1B所示),或反之减少d’(未图示);特别是当流体控制装置朝向微小化的发展,每一组件的尺寸均朝微小化设计进行,使得该两平板间欲维持具有一定之间隙103,而不会增加或减少d’,进而保持间隙103的一定深度,其困难度越来越高,而若无法保持间隙103的一定深度,例如间隙103是增加上述一d’位移的误差时,将导致该间隙103的距离过大,进而使得流体传输效率不佳;反之,若间隙是于相反方向以致减少上述一d’位移(未图示),则使得间隙103的距离过小,进而在压电致动器102作动时易与其他组件接触干涉,而产生噪音的问题,并导致流体控制装置的不良率随之提升。Please refer to FIG. 1A and FIG. 1B . FIG. 1A is a partial structural schematic view of a conventional fluid control device, and FIG. 1B is a partial structural assembly offset schematic view of a conventional fluid control device. As shown in the figure, the operating core of the conventional fluid control device 100 mainly includes a substrate 101 and a piezoelectric actuator 102, the substrate 101 and the piezoelectric actuator 102 are stacked, and the substrate 101 and the piezoelectric actuator 102 has a gap 103, wherein the gap 103 needs to maintain a certain depth, and by maintaining a certain depth through the gap 103, when the piezoelectric actuator 102 is actuated and deformed by an applied voltage, the fluid can be driven in the fluid control device The flow in each chamber of 100 is used to achieve the purpose of fluid transmission. However, in the conventional fluid control device 100, the piezoelectric actuator 102 and the substrate 101 are both flat-shaped integral structures with certain rigidity. The flat plate structures are precisely aligned with each other, so that there is a certain gap 103 between the two flat plates, that is, maintaining a certain depth will be difficult and errors will easily occur, because any of the above-mentioned integral flat plates with a certain rigidity, If any side is inclined by an angle θ, the relative distance multiplied by the displacement value of the angle θ will be generated at the relative position, for example, a displacement d, which will cause an increase of d' at the marking line of the certain gap 103 (such as 1B), or conversely reduce d' (not shown); especially when the fluid control device is developing towards miniaturization, the size of each component is designed towards miniaturization, so that a certain distance between the two plates is maintained. The gap 103 will not increase or decrease d', and then maintain a certain depth of the gap 103, the difficulty is getting higher and higher, and if the certain depth of the gap 103 cannot be maintained, for example, the gap 103 is increased by the displacement of the above-mentioned d' When there is an error, the distance of the gap 103 will be too large, and the fluid transmission efficiency will be poor; on the contrary, if the gap is in the opposite direction so as to reduce the above-mentioned -d' displacement (not shown), the distance of the gap 103 will be too small , and furthermore, when the piezoelectric actuator 102 is actuated, it is easy to contact and interfere with other components, resulting in the problem of noise, and resulting in an increase in the failure rate of the fluid control device.
换言之,由于习知的流体控制装置100的压电致动器102与基板101均为具有一定刚性的平板式整体结构,两者平板间欲以整体对位方式,达到精准对位的目的显为困难,尤其在组件尺寸越趋微小,组装时更难精确对位,进而使流体输送的效能低落及产生噪音的问题,导致使用上的不便利及不舒适。In other words, since the piezoelectric actuator 102 and the base plate 101 of the conventional fluid control device 100 are flat plate-like overall structures with a certain rigidity, it is obviously necessary to achieve the purpose of precise alignment between the two plates in an overall alignment manner. Difficulties, especially as the size of the components becomes smaller, it is more difficult to accurately align during assembly, which further reduces the efficiency of fluid delivery and generates noise, resulting in inconvenient and uncomfortable use.
因此,如何发展一种可改善上述习知技术缺失,可使传统采用流体传输装置的仪器或设备达到体积小、微型化且静音,并克服组装时易产生误差的问题,进而达成轻便舒适的可携式目的的微型流体传输装置,实为目前迫切需要解决的问题。Therefore, how to develop a method that can improve the lack of the above-mentioned conventional technology, make the traditional instruments or equipment using fluid transmission devices small in size, miniaturized and quiet, and overcome the problem that errors are easily generated during assembly, so as to achieve light and comfortable comfort. The micro-fluid transfer device for portable purposes is an urgent problem to be solved at present.
发明内容Contents of the invention
本发明的主要目的在于解决习知的流体控制装置中,基板与压电致动器因组件微小化的设计,于组装时不易精确地定位而产生误差,使其于组装后难以维持其间隙的需求距离,进而导致流体输送的效能低落及产生噪音的问题,导致使用上的不便利及不舒适的问题。The main purpose of the present invention is to solve the problem that in the conventional fluid control device, due to the miniaturized design of the substrate and the piezoelectric actuator, it is difficult to accurately position and generate errors during assembly, making it difficult to maintain the gap after assembly. The distance is required, which in turn leads to the problem of low fluid delivery efficiency and noise generation, resulting in inconvenient and uncomfortable problems in use.
为达上述目的,本发明的一较广义实施样态为提供一种流体控制装置,包含:一压电致动器,由一压电组件贴附于一振动板的一表面所构成,该压电组件受施加电压而形变以驱动该振动板弯曲振动,该振动板具有一突出部,且其是相对设置于贴附该压电组件的该表面的另一表面;以及一可变形基座结构,为一挠性板及一流通板相互堆栈接合所构成,并可同步变形为一同步变形结构;其中,该可变形基座结构与该压电致动器的该振动板相对应接合定位,且可变形基座结构朝远离振动板的方向突出变形,以使该可变形基座结构的该挠性板与该振动板的该突出部之间定义出一特定深度,以及该挠性板具有一可动部,其是相对于该振动板的该突出部而设置。In order to achieve the above object, a broad implementation of the present invention is to provide a fluid control device, including: a piezoelectric actuator, composed of a piezoelectric component attached to a surface of a vibrating plate, the piezoelectric actuator The electrical component is deformed by the applied voltage to drive the vibrating plate to bend and vibrate, the vibrating plate has a protruding portion, and it is oppositely disposed on the other surface of the surface on which the piezoelectric component is attached; and a deformable base structure , which is composed of a flexible plate and a circulation plate stacked and joined together, and can be deformed synchronously to form a synchronous deformation structure; wherein, the deformable base structure and the vibrating plate of the piezoelectric actuator are correspondingly engaged and positioned, And the deformable base structure protrudes and deforms toward the direction away from the vibrating plate, so that a specific depth is defined between the flexible plate of the deformable base structure and the protrusion of the vibrating plate, and the flexible plate has A movable part is arranged relative to the protruding part of the vibrating plate.
附图说明Description of drawings
图1A为习知流体控制装置的部分结构示意图。FIG. 1A is a partial structural schematic diagram of a conventional fluid control device.
图1B为习知流体控制装置的部分结构组装偏移示意图。FIG. 1B is a schematic diagram of a partial structural assembly offset of a conventional fluid control device.
图2A为本发明较佳实施例的流体控制装置的正面分解结构示意图。FIG. 2A is a schematic exploded front view of a fluid control device according to a preferred embodiment of the present invention.
图2B为图2A所示的流体控制装置的正面组合结构示意图。FIG. 2B is a schematic diagram of the front assembled structure of the fluid control device shown in FIG. 2A .
图3为图2A所示的流体控制装置的背面分解结构示意图。FIG. 3 is a schematic diagram of an exploded rear view of the fluid control device shown in FIG. 2A .
图4A为图2A所示的流体控制装置的放大剖面结构示意图。FIG. 4A is an enlarged schematic cross-sectional structure diagram of the fluid control device shown in FIG. 2A .
图4B至图4C为图2A所示的流体控制装置的局部作动示意图。FIG. 4B to FIG. 4C are partial action diagrams of the fluid control device shown in FIG. 2A .
图5A为本发明较佳实施例的流体控制装置的可变形基座结构同步变形的第一实施态样示意图。FIG. 5A is a schematic diagram of a first embodiment of simultaneous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.
图5B为本发明较佳实施例的流体控制装置的可变形基座结构同步变形的第二实施态样示意图。FIG. 5B is a schematic diagram of a second implementation aspect of simultaneous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.
图5C为本发明较佳实施例的流体控制装置的可变形基座结构同步变形的第三实施态样示意图。FIG. 5C is a schematic diagram of a third embodiment of simultaneous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.
图5D为本发明较佳实施例的流体控制装置的可变形基座结构同步变形的第四实施态样示意图。FIG. 5D is a schematic diagram of a fourth implementation aspect of simultaneous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.
图6A为本发明较佳实施例的流体控制装置的可变形基座结构同步变形的第五实施态样示意图。Fig. 6A is a schematic diagram of a fifth embodiment of simultaneous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.
图6B为本发明较佳实施例的流体控制装置的可变形基座结构同步变形的第六实施态样示意图。Fig. 6B is a schematic diagram of a sixth embodiment of simultaneous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.
图6C为本发明较佳实施例的流体控制装置的可变形基座结构同步变形的第七实施态样示意图。6C is a schematic diagram of a seventh implementation aspect of simultaneous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.
图6D为本发明较佳实施例的流体控制装置的可变形基座结构同步变形的第八实施态样示意图。FIG. 6D is a schematic diagram of an eighth embodiment of simultaneous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.
图7A为本发明较佳实施例的流体控制装置的可变形基座结构同步变形的第九实施态样示意图。Fig. 7A is a schematic diagram of a ninth embodiment of simultaneous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.
图7B为本发明较佳实施例的流体控制装置的可变形基座结构同步变形的第十实施态样示意图。FIG. 7B is a schematic diagram of a tenth embodiment of simultaneous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.
图7C为本发明较佳实施例的流体控制装置的可变形基座结构同步变形的第十一实施态样示意图。Fig. 7C is a schematic diagram of an eleventh embodiment of simultaneous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.
图7D为本发明较佳实施例的流体控制装置的可变形基座结构同步变形的第十二实施态样示意图。Fig. 7D is a schematic diagram of a twelfth embodiment of simultaneous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.
图8为本发明较佳实施例的流体控制装置的可变形基座结构同步变形的第十三实施态样示意图。Fig. 8 is a schematic diagram of a thirteenth embodiment of simultaneous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.
【符号说明】【Symbol Description】
100:习知的流体控制装置100: Conventional Fluid Control Devices
101:基板101: Substrate
102:压电致动器102: Piezoelectric Actuator
103:间隙103: Gap
2:流体控制装置2: Fluid control device
20:可变形基座结构20: Deformable base structure
21:流通板21: circulation plate
21a:外部表面21a: External surface
21b:内部表面21b: Internal surface
210:进入孔210: Access hole
211:汇流通槽211: Confluence flow slot
212:汇流开口部212: confluence opening
22:挠性板22: Flexible board
22a:可动部22a: Movable part
22b:固定部22b: fixed part
23:压电致动器23: Piezoelectric Actuator
230:振动板230: vibration plate
230a:第二表面230a: second surface
230b:第一表面230b: first surface
230c:突出部230c: protrusion
231:外框231: Frame
232:支架232: bracket
233:压电组件233: Piezoelectric components
235:空隙235: Void
241、242:绝缘片241, 242: insulating sheet
25:导电片25: conductive sheet
26:壳体26: Housing
26a:容置空间26a: Accommodating space
268:侧壁268: side wall
δ:特定深度δ: specific depth
h:间距h: Spacing
A:暂存腔室A: Staging chamber
θ:角度θ: angle
d、d’:位移d, d': displacement
具体实施方式Detailed ways
体现本发明特征与优点的一些典型实施例将在后段的说明中详细叙述。应理解的是本发明能够在不同的态样上具有各种的变化,其皆不脱离本发明的范围,且其中的说明及附图在本质上是当作说明之用,而非架构于限制本发明。Some typical embodiments embodying the features and advantages of the present invention will be described in detail in the description in the following paragraphs. It should be understood that the present invention can have various changes in different aspects without departing from the scope of the present invention, and the description and drawings therein are used as illustrations in nature and not for limitation this invention.
本发明的流体控制装置2可应用于医药生技、能源、计算机科技或打印等工业,以用以传送流体,但不以此为限。请参阅图2A、图2B、图3及图4A所示,图2A为本发明为较佳实施例的流体控制装置的正面分解结构示意图,图2B为图2A所示的流体控制装置的正面组合结构示意图,图3为图2A所示的流体控制装置的背面分解结构示意图,图4A为图2A所示的流体控制装置的放大剖面结构示意图。如图2A及图3所示,本发明的流体控制装置2具有可变形基座结构20、压电致动器23、绝缘片241、242、导电片25及壳体26等结构,其中,可变形基座结构20则包含流通板21及挠性板22,但不以此为限。压电致动器23是对应于挠性板22而设置,该压电致动器23是由一振动板230以及一压电组件233组装而成,于本实施例中,可变形基座结构20、压电致动器23、绝缘片241、导电片25、另一绝缘片242等结构是相互堆栈设置,并容收于壳体26之内。The fluid control device 2 of the present invention can be applied in industries such as medical biotechnology, energy, computer technology, or printing to transmit fluids, but is not limited thereto. Please refer to Fig. 2A, Fig. 2B, Fig. 3 and Fig. 4A, Fig. 2A is a schematic diagram of the front exploded structure of the fluid control device according to a preferred embodiment of the present invention, and Fig. 2B is the front assembly of the fluid control device shown in Fig. 2A Schematic diagram of the structure, FIG. 3 is a schematic diagram of an exploded rear structure of the fluid control device shown in FIG. 2A , and FIG. 4A is a schematic diagram of an enlarged cross-sectional structure of the fluid control device shown in FIG. 2A . As shown in Figure 2A and Figure 3, the fluid control device 2 of the present invention has structures such as a deformable base structure 20, a piezoelectric actuator 23, insulating sheets 241, 242, conductive sheets 25, and a housing 26, among which, The deformed base structure 20 includes a circulation plate 21 and a flexible plate 22 , but is not limited thereto. The piezoelectric actuator 23 is arranged corresponding to the flexible plate 22. The piezoelectric actuator 23 is assembled by a vibrating plate 230 and a piezoelectric component 233. In this embodiment, the deformable base structure 20. The piezoelectric actuator 23 , the insulating sheet 241 , the conductive sheet 25 , another insulating sheet 242 and other structures are stacked on top of each other and housed in the casing 26 .
请继续参阅图2A、图2B、图3及图4A所示,本发明的流体控制装置2的流通板21是具有内部表面21b及相对应设置的外部表面21a,如图3所示,可见在外部表面21a上具有至少一进入孔210,于本发明较佳实施例中,进入孔210的数量为4个,但不以此为限,其是贯穿流通板21的外部表面21a及内部表面21b,主要用以供流体自装置外顺应大气压力的作用而自该至少一进入孔210流入流体控制装置2内。且又如图2A所示,由流通板21的内部表面21b可见,其上具有至少一汇流通槽211,用以与流通板21的外部表面21a的该至少一进入孔210对应设置。于该等汇流通槽211的中心交流处是具有汇流开口部212,且汇流开口部212是与汇流通槽211相连通,藉此可将自该至少一进入孔210进入汇流通槽211的流体引导并汇流集中至汇流开口部212,以进行传递。因此于本发明较佳实施例中,流通板21具有一体成型的进入孔210、汇流通槽211及汇流开口部212,且于该汇流开口部212处即对应形成一汇流流体的汇流腔室,以供流体暂存。于一些实施例中,流通板21的材质是可为但不限为由一不锈钢材质所构成。挠性板22是由一可挠性材质所构成,但不以此为限,且于挠性板22上具有一流路孔220,是对应于流通板21的内部表面21b的汇流开口部212而设置,以使流体可向下流通。于另一些实施例中,挠性板22是可由一铜材质所构成,但不以此为限,挠性板22具有一可动部22a及一固定部22b,如此挠性板22设置连接于流通板21上,为藉以固定部22b固定连接于流通板21上,而可动部22a为对应在汇流开口部212的处的部分,且流路孔220设置在可动部22a上。Please continue to refer to Fig. 2A, Fig. 2B, Fig. 3 and Fig. 4A, the flow plate 21 of the fluid control device 2 of the present invention has an inner surface 21b and a correspondingly arranged outer surface 21a, as shown in Fig. 3, it can be seen in There is at least one inlet hole 210 on the outer surface 21a. In a preferred embodiment of the present invention, the number of inlet holes 210 is 4, but not limited thereto, and they pass through the outer surface 21a and the inner surface 21b of the circulation plate 21 , mainly used for fluid to flow into the fluid control device 2 from the at least one inlet hole 210 in compliance with the effect of atmospheric pressure from outside the device. And as shown in FIG. 2A , it can be seen from the inner surface 21 b of the circulation plate 21 that there is at least one confluence flow groove 211 thereon for correspondingly setting the at least one inlet hole 210 on the outer surface 21 a of the circulation plate 21 . There is a confluence opening 212 at the center of the confluence flow grooves 211, and the confluence opening 212 communicates with the confluence flow groove 211, so that the fluid entering the confluence flow groove 211 from the at least one inlet hole 210 The guided and converging flow is concentrated to the confluence opening 212 for transmission. Therefore, in a preferred embodiment of the present invention, the circulation plate 21 has an integrally formed inlet hole 210, a confluence flow groove 211, and a confluence opening 212, and a confluence chamber corresponding to the confluence fluid is formed at the confluence opening 212, for fluid storage. In some embodiments, the material of the circulation plate 21 may be but not limited to be made of stainless steel. The flexible plate 22 is made of a flexible material, but not limited thereto, and has a flow path hole 220 on the flexible plate 22, corresponding to the confluence opening 212 of the inner surface 21b of the flow plate 21. Set so that fluid can flow downward. In some other embodiments, the flexible board 22 can be made of a copper material, but not limited thereto, the flexible board 22 has a movable part 22a and a fixed part 22b, so the flexible board 22 is set and connected to On the circulation plate 21, the fixed portion 22b is fixedly connected to the circulation plate 21, and the movable portion 22a is a part corresponding to the confluence opening 212, and the flow hole 220 is disposed on the movable portion 22a.
请继续参阅图2A、图2B及图3所示,本发明较佳实施例中,压电致动器23是包括压电组件233、振动板230、外框231以及至少一支架232,于本发明较佳实施例中,振动板230为可挠的正方形板状结构,且具有第一表面230b及相对应的第二表面230a,压电组件233为可方形板状结构,且其边长不大于振动板230的边长,并可贴附于振动板230的第一表面230b上,但不以此为限,该压电组件233施加电压后而产生形变驱动该振动板230弯曲振动。于本发明较佳实施例中,振动板230的第二表面230a还可具有一突出部230c,该突出部230c可为但不限为一圆形凸起结构;于振动板230的外侧则环绕设置外框231,外框231的型态亦大致对应于振动板230的型态,故外框231亦可为正方形的镂空框型结构;且振动板230与外框231之间是以至少一支架232连接,并提供弹性支撑。如图2A及图2B所示,壳体26具有至少一排出孔261,壳体26不仅为单一的板件结构,亦可为周缘具有侧壁260的框体结构,且由该周缘所构成的侧壁260与其底部的板件共同定义出一容置空间26a,用以供该压电致动器23设置于该容置空间26a中,故当本发明的流体控制装置2组装完成后,则其正面示意图会如图2B及图4A所示,即壳体26是罩盖于压电致动器23及可变形基座结构20之外,并使壳体26与压电致动器23之间构成一流体流通的暂存腔室A,且排出孔261用以连通暂存腔室A,使流体流通于壳体26之外。Please continue to refer to FIG. 2A, FIG. 2B and FIG. 3. In a preferred embodiment of the present invention, the piezoelectric actuator 23 includes a piezoelectric component 233, a vibrating plate 230, an outer frame 231 and at least one bracket 232. In a preferred embodiment of the invention, the vibrating plate 230 is a flexible square plate structure, and has a first surface 230b and a corresponding second surface 230a, the piezoelectric component 233 is a square plate structure, and its side length is not It is larger than the side length of the vibrating plate 230 and can be attached to the first surface 230b of the vibrating plate 230 , but not limited thereto. The piezoelectric component 233 generates deformation and drives the vibrating plate 230 to bend and vibrate after applying a voltage. In a preferred embodiment of the present invention, the second surface 230a of the vibrating plate 230 can also have a protruding portion 230c, which can be but not limited to a circular convex structure; The outer frame 231 is set, and the shape of the outer frame 231 roughly corresponds to the shape of the vibrating plate 230, so the outer frame 231 can also be a square hollow frame structure; The bracket 232 is connected and provides elastic support. As shown in Figures 2A and 2B, the casing 26 has at least one discharge hole 261, the casing 26 is not only a single plate structure, but also a frame structure with a side wall 260 on the periphery, and the structure formed by the periphery The side wall 260 and the plate at the bottom jointly define an accommodating space 26a for the piezoelectric actuator 23 to be disposed in the accommodating space 26a, so when the fluid control device 2 of the present invention is assembled, then Its front view will be shown in Figure 2B and Figure 4A, that is, the casing 26 is covered outside the piezoelectric actuator 23 and the deformable base structure 20, and the connection between the casing 26 and the piezoelectric actuator 23 A temporary storage chamber A for fluid communication is formed between them, and the discharge hole 261 is used to communicate with the temporary storage chamber A to allow the fluid to flow outside the casing 26 .
请参阅图4A至图4C,图4A为图2A所示的流体控制装置的剖面结构示意图,图4B至图4C为图2A所示的流体控制装置的局部作动示意图。于本实施例中,然于图4A至图4C中,绝缘片241、导电片25及另一绝缘片242均予以略示,且于此图4A至图4C中所显示的可变形基座结构20为其尚未产生同步变形前的型态,此等图标是用以说明本发明的可变形基座结构20的流通板21及挠性板22以及压电致动器23的结构、对应设置位置及作动关系等,合先叙明。Please refer to FIG. 4A to FIG. 4C . FIG. 4A is a schematic cross-sectional structure diagram of the fluid control device shown in FIG. 2A , and FIGS. 4B to 4C are partial schematic diagrams of the fluid control device shown in FIG. 2A . In this embodiment, however, in Fig. 4A to Fig. 4C, the insulating sheet 241, the conductive sheet 25 and another insulating sheet 242 are all shown schematically, and the deformable base structure shown in Fig. 4A to Fig. 4C 20 is the form before synchronous deformation. These icons are used to illustrate the structures and corresponding installation positions of the circulation plate 21, the flexible plate 22 and the piezoelectric actuator 23 of the deformable base structure 20 of the present invention. And the action relationship, etc., will be described first.
如图4A所示,当流通板21、挠性板22与压电致动器23对应组装后,则于挠性板22的流路孔220处可与流通板21的汇流开口部212共同形成一汇流流体的腔室,且在挠性板22与压电致动器23的外框231之间是具有间距h,于一些实施例中,该间距h中是可填充一介质,例如:导电胶,但不以此为限,通过介质接合定位,以使挠性板22与压电致动器23的振动板230的突出部230c之间可维持的一定距离,例如间距h,还可使挠性板22与压电致动器23的振动板230的突出部230c之间形成一特定深度δ,并进一步于该压电致动器23的振动板230振动时,可将该流体压缩(意即将该特定深度δ变小),并使流体的压力及流速均增大;另,该特定深度δ为一适当距离,用以使减少挠性板22与压电致动器23之间的接触干涉,以降低产生噪音的问题;以及,挠性板22与压电致动器23的振动板230的突出部230c之间特定深度δ所构成的腔室是通过挠性板22的流路孔220而与流通板21的汇流开口部212处汇流流体的腔室相连通。As shown in FIG. 4A, when the circulation plate 21, the flexible plate 22 and the piezoelectric actuator 23 are assembled correspondingly, the flow path hole 220 of the flexible plate 22 can be formed together with the confluence opening 212 of the circulation plate 21. A chamber for converging fluid, and there is a distance h between the flexible plate 22 and the outer frame 231 of the piezoelectric actuator 23. In some embodiments, the distance h can be filled with a medium, such as: conductive Glue, but not limited thereto, is positioned through medium bonding, so that a certain distance can be maintained between the flexible plate 22 and the protruding portion 230c of the vibrating plate 230 of the piezoelectric actuator 23, such as the distance h, and can also make A specific depth δ is formed between the flexible plate 22 and the protrusion 230c of the vibrating plate 230 of the piezoelectric actuator 23, and further when the vibrating plate 230 of the piezoelectric actuator 23 vibrates, the fluid can be compressed ( This means that the specific depth δ will be reduced), and the pressure and flow velocity of the fluid are increased; in addition, the specific depth δ is an appropriate distance to reduce the distance between the flexible plate 22 and the piezoelectric actuator 23. Contact interference to reduce the problem of noise generation; and, the cavity formed by a certain depth δ between the flexible plate 22 and the protrusion 230c of the vibrating plate 230 of the piezoelectric actuator 23 is a flow path through the flexible plate 22 The hole 220 communicates with the chamber where the confluent fluid is located at the confluent opening 212 of the flow plate 21 .
当流体控制装置2作动时,主要由压电致动器23受施加电压致动而进行垂直方向的往复式振动。如图4B所示,当压电致动器23受施加电压致动而向上振动时,由于挠性板22为轻、薄的片状结构,因此当压电致动器23振动时,挠性板22亦会随之共振而进行垂直方向的往复式振动,即为挠性板22的可动部22a的部分亦会随之弯曲振动形变,且该流路孔220设置于挠性板22的中心或邻近于中心处,因此当压电致动器23向上振动时,此时挠性板22的可动部22a会因压电致动器23向上振动的带动而将流体往上带入及推压而随着向上振动,则流体由流通板21上的至少一进入孔210进入,并通过至少一汇流通槽211以汇集到中央的汇流开口部212处,再经由挠性板22上与汇流开口部212对应设置的流路孔220向上流入至挠性板22与压电致动器23的振动板230的突出部230c之间的特定深度δ所构成的腔室中,通过此挠性板22的形变,以压缩挠性板22与压电致动器23的振动板230的突出部230c之间特定深度δ所构成的腔室的体积,并加强此腔室中间流通空间被压缩的动能,促使其内的流体推挤向两侧流动,进而经过振动板230与支架232之间的空隙而向上穿越流动。When the fluid control device 2 is actuated, the piezoelectric actuator 23 is mainly actuated by the applied voltage to vibrate reciprocatingly in the vertical direction. As shown in Figure 4B, when the piezoelectric actuator 23 is actuated by the applied voltage to vibrate upward, since the flexible plate 22 is a light and thin sheet structure, when the piezoelectric actuator 23 vibrates, the flexible The plate 22 will also resonate and vibrate in the vertical direction reciprocatingly, that is, the part of the movable part 22a of the flexible plate 22 will also bend and vibrate and deform accordingly, and the flow path hole 220 is arranged on the flexible plate 22. center or close to the center, so when the piezoelectric actuator 23 vibrates upwards, the movable part 22a of the flexible plate 22 will bring the fluid upward and upward due to the upward vibration of the piezoelectric actuator 23. Pushing and vibrating upwards, the fluid enters through at least one inlet hole 210 on the flow plate 21, and passes through at least one confluence flow groove 211 to collect at the central confluence opening 212, and then passes through the flexible plate 22 and The flow hole 220 corresponding to the confluence opening 212 flows upward into the chamber formed by a certain depth δ between the flexible plate 22 and the protruding portion 230c of the vibrating plate 230 of the piezoelectric actuator 23, and through this flexible The deformation of the plate 22 is to compress the volume of the cavity formed by the specific depth δ between the flexible plate 22 and the protruding portion 230c of the vibrating plate 230 of the piezoelectric actuator 23, and strengthen the compression of the middle flow space of the cavity. The kinetic energy causes the fluid inside to push and flow to both sides, and then pass through the gap between the vibrating plate 230 and the bracket 232 to flow upward.
至于图4C所示,当压电致动器23向下振动时,则挠性板22的可动部22a也随之共振向下弯曲振动形变,流体汇集到中央的汇流开口部212处变少,且压电致动器23亦向下振动,而位移至挠性板22与压电致动器23之间特定深度δ所构成腔室底部而加大腔室可压缩的体积,如此再重复图4B所示的实施作动,即可加大挠性板22与压电致动器23的振动板230的突出部230c之间特定深度δ所构成的腔室中间流通空间被压缩的空间,以达到较大的流体吸入量与排出量。As shown in FIG. 4C, when the piezoelectric actuator 23 vibrates downward, the movable part 22a of the flexible plate 22 also resonates and deforms downward by bending and vibrating, and the fluid pooling into the central confluence opening 212 becomes less. , and the piezoelectric actuator 23 also vibrates downward, and is displaced to the bottom of the chamber formed by a specific depth δ between the flexible plate 22 and the piezoelectric actuator 23 to increase the compressible volume of the chamber, and repeat The operation shown in FIG. 4B can increase the compressed space in the middle flow space of the chamber formed by the specified depth δ between the flexible plate 22 and the protruding portion 230c of the vibrating plate 230 of the piezoelectric actuator 23, In order to achieve greater fluid suction and discharge.
于本发明的较佳实施例中,如前所述,可变形基座结构20是由流通板21及挠性板22所组成,其中流通板21及挠性板22为相互堆栈,且流通板21与挠性板22的两者同步变形以构成一同步变形结构。更进一步地说,前述的同步变形结构是指由流通板21及挠性板22的同步变形区域所构成,当其中任一者产生变形时,则另一者一定随之变形,且两者变形的形状均为一致,即两者相对应的表面是彼此互相接合并且定位,而两者之间不会有任何间隙或平行错位,举例来说,可变形基座结构20的流通板21产生变形时,挠性板22亦产生相同的变形;相同地,当可变形基座结构20的挠性板22产生变形时,流通板21亦产生相同的变形。于一些实施例中,流通板21及挠性板22是通过一黏着剂相互接合定位,但不以此为限。另,因如前习知内容所述及图1B所示,于习知的流体控制装置100中,其中压电致动器102与基板103均为平板式的整体结构,且具有一定的刚性,在此条件下,欲使该两个均为整体平板式的结构彼此精准对位,并使该两平板间维持一定之间隙,意即维持其所需求的一定深度,会具有相当的困难度,极容易产生误差,造成种种问题。所以本发明中各种的较佳实施例,其特征均是利用一可变形基座结构20,即为前述流通板21及挠性板22的同步变形,以构成同步变形结构,该同步变形结构相当于习知技术的基板101,但该同步变形结构的流通板21及挠性板22会有本发明中的各种实施例所定义的各种不同的实施态样,而该各种特定的同步变形结构均能与相对的压电致动器23的振动板230之间,保持在一所需求的特定间隙(即特定深度δ所构成的腔室)之内,故即使当流体控制装置2朝向微小化的发展,每一组件的尺寸均朝微小化设计进行,通过该同步变形结构仍能轻易使得该上述两者之间欲维持具有一定之间隙是容易的,因为利用其对位面积已缩小的非平板状的同步变形结构(无论该变形为弯曲状、锥形状、各种曲面状、不规则状等等形状)与一平板对位,而不再是两大面积的平板对位,而是一非平板状的小面积与一大面积的平板对位,故会轻易降低两者之间的间隙误差,进而达到解决流体输送的效能低落及产生噪音的问题,使得解决使用上的不便利及不舒适的习知问题。In a preferred embodiment of the present invention, as mentioned above, the deformable base structure 20 is composed of a flow plate 21 and a flexible plate 22, wherein the flow plate 21 and the flexible plate 22 are mutually stacked, and the flow plate 21 and the flexible plate 22 deform synchronously to form a synchronous deformation structure. Furthermore, the aforementioned synchronous deformation structure refers to the synchronous deformation area composed of the circulation plate 21 and the flexible plate 22. When any one of them is deformed, the other must be deformed accordingly, and both deform The shapes are consistent, that is, the corresponding surfaces of the two are mutually engaged and positioned without any gap or parallel displacement between the two, for example, the flow plate 21 of the deformable base structure 20 is deformed , the flexible plate 22 also undergoes the same deformation; similarly, when the flexible plate 22 of the deformable base structure 20 undergoes deformation, the circulation plate 21 also undergoes the same deformation. In some embodiments, the circulation plate 21 and the flexible plate 22 are fixed and bonded to each other through an adhesive, but not limited thereto. In addition, as described in the prior art and shown in FIG. 1B , in the conventional fluid control device 100, the piezoelectric actuator 102 and the substrate 103 are both flat plate-shaped integral structures with a certain degree of rigidity. Under such conditions, it will be quite difficult to make the two flat-plate structures precisely align with each other and maintain a certain gap between the two flat-plates, that is, to maintain a certain required depth. It is very easy to make mistakes and cause various problems. Therefore, various preferred embodiments of the present invention are characterized by utilizing a deformable base structure 20, which is the synchronous deformation of the aforementioned circulation plate 21 and flexible plate 22, to form a synchronous deformation structure, the synchronous deformation structure It is equivalent to the substrate 101 of the prior art, but the circulation plate 21 and the flexible plate 22 of the simultaneous deformation structure will have various implementations defined in various embodiments of the present invention, and the various specific Both the synchronous deformation structure and the vibrating plate 230 of the opposite piezoelectric actuator 23 can be kept within a required specific gap (that is, the cavity formed by a specific depth δ), so even when the fluid control device 2 With the development of miniaturization, the size of each component is designed towards miniaturization. Through the synchronous deformation structure, it is easy to maintain a certain gap between the above two, because the alignment area has been utilized. The reduced non-flat-shaped synchronous deformation structure (whether the deformation is curved, conical, various curved surfaces, irregular shapes, etc.) is aligned with a flat plate instead of two large-area flat plates. Instead, a non-flat small area is aligned with a large area flat plate, so the gap error between the two can be easily reduced, and then the problems of low fluid delivery efficiency and noise generation can be solved, making it possible to solve the problems in use. Conventional issues of convenience and discomfort.
于一些实施例中,可变形基座结构20为流通板21及挠性板22同步变形以构成的同步变形结构,即该可变形基座结构20的同步变形区域是可为在可动部22a的区域以及超出可动部22a其他区域,且该可变形基座结构20所构成的同步变形结构是可为弯曲结构或锥型结构或凸块平面结构,但并不以此为限。In some embodiments, the deformable base structure 20 is a synchronous deformation structure formed by synchronous deformation of the flow plate 21 and the flexible plate 22, that is, the synchronous deformation area of the deformable base structure 20 can be in the movable part 22a area and other areas beyond the movable part 22a, and the synchronous deformation structure formed by the deformable base structure 20 may be a curved structure, a tapered structure or a bump planar structure, but not limited thereto.
如图5A及图5C所示,于此第一实施态样及第三实施态样中,可变形基座结构20为流通板21及挠性板11所构成的弯曲同步变形结构,亦即可变形基座结构20的同步变形区域是在可动部22a的区域以及超出可动部22a其他区域,即该两实施态样的同步变形结构均为一弯曲同步变形结构,但仅两者的弯曲同步变形的方向有所差异。如图5A所示的第一实施态样中实施弯曲同步变形的方式为于可变形基座结构10的流通板21的外部表面21a朝向接近该振动板230的突出部230c方向弯曲变形,同时挠性板22的可动部22a的区域及超出可动部22a其他区域亦朝向接近该振动板230的突出部230c方向弯曲变形,以构成可变形基座结构20的弯曲同步变形结构;而如图5C所示的第三实施态样中实施弯曲同步变形为于可变形基座结构10的流通板21的外部表面21a朝向远离该振动板230的突出部230c方向弯曲变形,同时挠性板22的可动部22a的区域及超出可动部22a其他区域亦朝向远离该振动板230的突出部230c方向弯曲变形,以构成可变形基座结构20的弯曲同步变形结构;故第一实施态样及第三实施态样中构成可变形基座结构20的挠性板22与振动板230的突出部230c之间可保持在所需求的特定深度δ的范围之内,即该挠性板22的可动部22a的区域与振动板230的突出部230c之间保持在所需求的特定深度δ的范围之内,进而所构成此两实施态样的具有可变形基座结构20的流通板21及挠性板22构成弯曲同步变形结构的流体控制装置2。As shown in Figure 5A and Figure 5C, in the first embodiment and the third embodiment, the deformable base structure 20 is a bending simultaneous deformation structure composed of the circulation plate 21 and the flexible plate 11, that is, The synchronous deformation area of the deformation base structure 20 is in the area of the movable part 22a and other areas beyond the movable part 22a, that is, the synchronous deformation structure of the two embodiments is a bending synchronous deformation structure, but only the bending of the two The direction of the simultaneous deformation is different. In the first embodiment shown in FIG. 5A , the method of implementing bending simultaneous deformation is to bend and deform the outer surface 21a of the flow plate 21 of the deformable base structure 10 toward the protruding portion 230c of the vibrating plate 230, and at the same time flex The region of the movable part 22a of the sex plate 22 and other regions beyond the movable part 22a are also bent and deformed toward the direction close to the protruding part 230c of the vibrating plate 230, so as to form a bending-synchronous deformation structure of the deformable base structure 20; and as shown in FIG. In the third embodiment shown in 5C, the simultaneous bending deformation is implemented so that the outer surface 21a of the circulation plate 21 of the deformable base structure 10 bends and deforms in the direction away from the protruding portion 230c of the vibrating plate 230, and at the same time, the flexible plate 22 The region of the movable part 22a and other regions beyond the movable part 22a are also bent and deformed toward the direction away from the protruding part 230c of the vibrating plate 230, so as to form a bending simultaneous deformation structure of the deformable base structure 20; therefore, the first embodiment and In the third embodiment, the distance between the flexible plate 22 constituting the deformable base structure 20 and the protruding portion 230c of the vibrating plate 230 can be kept within the range of the required specific depth δ, that is, the flexible plate 22 can The region of the moving part 22a and the protruding part 230c of the vibrating plate 230 are kept within the range of the required specific depth δ, and then the circulation plate 21 with the deformable base structure 20 and the flexible The flexible plate 22 constitutes the fluid control device 2 of the bending synchronous deformation structure.
如图6A及图6C所示,于此第五实施态样及第七实施态样中,可变形基座结构20为流通板21及挠性板22所构成的锥形同步变形结构,亦即可变形基座结构20的同步变形区域是在可动部22a的区域及超出可动部22a其他区域,即该两实施态样的同步变形结构均为一锥形同步变形结构,但仅两者的锥形同步变形的方向有所差异。而如图6A所示的第五实施态样中实施锥形同步变形的方式为于可变形基座结构10的流通板21的外部表面21a朝向接近该振动板230的突出部230c方向锥形变形,同时挠性板22的可动部22a的区域及超出可动部22a其他区域亦朝向接近该振动板230的突出部230c方向锥形变形,以构成可变形基座结构20的锥形同步变形结构;而如图6C所示的第七实施态样中实施锥形同步变形为于可变形基座结构10的流通板21的外部表面21a朝向远离该振动板230的突出部230c方向锥形变形,同时挠性板22的可动部22a的区域及超出可动部22a其他区域亦朝向远离该振动板230的突出部230c方向锥形变形,以构成可变形基座结构20的锥形同步变形结构;故第五实施态样及第七实施态样中以构成可变形基座结构20的挠性板22与振动板230的突出部230c之间可保持在所需求的特定深度δ的范围之内,即挠性板22的可动部22a的区域与振动板230的突出部230c之间保持在所需求的特定深度δ的范围之内,进而构成此两实施态样的具有可变形基座结构20的流通板21及挠性板22构成锥形同步变形结构的流体控制装置2。As shown in Figure 6A and Figure 6C, in the fifth embodiment and the seventh embodiment, the deformable base structure 20 is a tapered simultaneous deformation structure formed by the circulation plate 21 and the flexible plate 22, that is The synchronous deformation area of the deformable base structure 20 is in the area of the movable part 22a and other areas beyond the movable part 22a, that is, the synchronous deformation structure of the two embodiments is a conical synchronous deformation structure, but only the two The direction of the conical simultaneous deformation of the different. In the fifth embodiment shown in FIG. 6A , the method of implementing the simultaneous conical deformation is that the outer surface 21 a of the flow plate 21 of the deformable base structure 10 is deformed in a conical shape toward the protruding portion 230 c of the vibrating plate 230 . At the same time, the region of the movable part 22a of the flexible plate 22 and other regions beyond the movable part 22a are also conically deformed toward the direction close to the protruding part 230c of the vibrating plate 230, so as to form the conical simultaneous deformation of the deformable base structure 20 structure; and in the seventh embodiment as shown in FIG. 6C , the tapered simultaneous deformation is implemented to conically deform the outer surface 21a of the flow plate 21 of the deformable base structure 10 toward the direction away from the protruding portion 230c of the vibrating plate 230 At the same time, the region of the movable part 22a of the flexible plate 22 and other regions beyond the movable part 22a are also conically deformed toward the direction away from the protruding part 230c of the vibrating plate 230, so as to form the conical simultaneous deformation of the deformable base structure 20 structure; therefore, in the fifth embodiment and the seventh embodiment, the gap between the flexible plate 22 constituting the deformable base structure 20 and the protruding portion 230c of the vibrating plate 230 can be kept within the range of the required specific depth δ Inside, that is, the area between the movable part 22a of the flexible plate 22 and the protruding part 230c of the vibrating plate 230 is kept within the range of the required specific depth δ, thus forming the deformable base of the two embodiments The circulation plate 21 and the flexible plate 22 of the structure 20 constitute the fluid control device 2 with a conical synchronous deformation structure.
如图7A及图7C所示,于此第九实施态样及第十一实施态样中,可变形基座结构20为流通板21及挠性板22所构成的凸块平面同步变形结构,亦即可变形基座结构20的同步变形区域是在可动部22a的区域及超出可动部22a其他区域,即该两实施态样的同步变形结构均为一凸块平面同步变形结构,但仅两者的凸块平面同步变形的方向有所差异。而如图7A所示的第九实施态样中实施凸块平面同步变形的方式为于可变形基座结构10的流通板21的外部表面21a于可动部22a的区域及超出可动部22a其他区域朝向接近该振动板230的突出部230c方向凸块平面变形,同时挠性板22的可动部22a的区域及超出可动部22a其他区域亦朝向接近该振动板230的突出部230c方向凸块平面变形,以构成可变形基座结构20的锥形同步变形结构;而如图7C所示的第十一实施态样中实施凸块平面同步变形为于可变形基座结构10的流通板21的外部表面21a朝向远离该振动板230的突出部230c方向凸块平面变形,同时挠性板22的可动部22a的区域及超出可动部22a其他区域亦朝向远离该振动板230的突出部230c方向凸块平面变形,以构成可变形基座结构20的凸块平面同步变形结构;故第九实施态样及第十一实施态样中以构成可变形基座结构20的挠性板22与振动板230的突出部230c之间可保持在所需求的特定深度δ的范围之内,即挠性板22的可动部22a的区域与振动板230的突出部230c之间保持在所需求的特定深度δ的范围之内,进而构成此两实施态样的具有可变形基座结构20的流通板21及挠性板22构成凸块平面同步变形结构的流体控制装置2。As shown in Fig. 7A and Fig. 7C, in the ninth embodiment and the eleventh embodiment, the deformable base structure 20 is a synchronous deformation structure of the bump plane formed by the circulation plate 21 and the flexible plate 22, That is, the synchronous deformation area of the deformable base structure 20 is in the area of the movable part 22a and other areas beyond the movable part 22a, that is, the synchronous deformation structure of the two embodiments is a synchronous deformation structure of a bump plane, but Only the directions of simultaneous deformation of the bump planes of the two are different. In the ninth embodiment shown in FIG. 7A , the way to implement simultaneous deformation of the bump plane is on the outer surface 21a of the circulation plate 21 of the deformable base structure 10, in the area of the movable part 22a and beyond the movable part 22a. The other areas are deformed towards the protruding portion 230c of the vibrating plate 230, and the area of the movable portion 22a of the flexible plate 22 and other areas beyond the movable portion 22a are also oriented towards the protruding portion 230c of the vibrating plate 230. The bump plane is deformed to form a conical synchronous deformation structure of the deformable base structure 20; and in the eleventh embodiment shown in FIG. The outer surface 21a of the plate 21 is deformed toward the protrusion 230c away from the vibrating plate 230, and the area of the movable portion 22a of the flexible plate 22 and other areas beyond the movable portion 22a are also oriented away from the vibrating plate 230. The protruding part 230c is deformed in the direction of the bump plane to form a synchronous deformation structure of the bump plane of the deformable base structure 20; therefore, in the ninth embodiment and the eleventh embodiment, the flexible The distance between the plate 22 and the protruding portion 230c of the vibrating plate 230 can be kept within the range of the required specific depth δ, that is, the area of the movable portion 22a of the flexible plate 22 and the protruding portion 230c of the vibrating plate 230 can be kept within the range of Within the range of the required specific depth δ, the circulation plate 21 and the flexible plate 22 with the deformable base structure 20 constituting the two embodiments constitute the fluid control device 2 with the synchronous deformation structure of the bump plane.
又如前述,于另一些实施例中,可变形基座结构20亦可为流通板21及挠性板22仅部分同步变形以构成的同步变形结构,即该可变形基座结构20的同步变形区域仅在于挠性板22的可动部22a的区域,且此可变形基座结构20所构成的同步变形结构亦可为弯曲结构或锥型结构或凸块平面结构,但亦不以此为限。As mentioned above, in some other embodiments, the deformable base structure 20 can also be a synchronous deformation structure formed by only partially synchronously deforming the circulation plate 21 and the flexible plate 22, that is, the synchronous deformation of the deformable base structure 20 The area is only in the area of the movable part 22a of the flexible plate 22, and the synchronous deformation structure formed by the deformable base structure 20 can also be a curved structure or a tapered structure or a bump planar structure, but it is not intended to be limit.
如图5B及图5D所示,于第二实施态样及第四实施态样中,可变形基座结构20即为流通板21及挠性板22仅部分同步变形所构成的弯曲同步变形结构,亦即可变形基座结构20的同步变形区域是在可动部22a的区域,即此两实施态样的同步变形结构均为一弯曲同步变形结构,然其弯曲同步变形仅为部分弯曲同步变形,且此两实施态样的差异仅在于其部分弯曲同步变形的方向有所不同。如图5B所示的第二实施态样中实施部分弯曲同步变形的方式为于可变形基座结构10的流通板21的外部表面21a对应汇流开口部212处的可动部22a区域朝向接近该振动板230的突出部230c方向弯曲变形,同时挠性板22的可动部22a区域亦朝向接近该振动板230的突出部230c方向弯曲变形,以达成可变形基座结构20产生部分弯曲同步变形结构;而如图5D所示的第四实施态样中实施部分弯曲同步变形为于可变形基座结构10的流通板21的外部表面21a对应汇流开口部212的可动部22a区域朝向远离该振动板230的方向弯曲变形,同时挠性板22的可动部22a区域亦朝向远离该振动板230的突出部230c方向弯曲变形,以构成可变形基座结构20部分弯曲同步变形结构;故第二实施态样及第四实施态样中以构成可变形基座结构20的挠性板22的可动部22a区域与振动板230的突出部230c之间可保持在所需求的特定深度δ的范围之内,即挠性板22的可动部22a的区域与振动板230的突出部230c之间保持在所需求的特定深度δ的范围之内,进而构成此两实施态样的具有可变形基座结构20的流通板21及挠性板22构成部分弯曲同步变形结构的流体控制装置2。As shown in Figure 5B and Figure 5D, in the second embodiment and the fourth embodiment, the deformable base structure 20 is a bending simultaneous deformation structure formed by the circulation plate 21 and the flexible plate 22 being partially deformed simultaneously , that is, the synchronous deformation area of the deformable base structure 20 is in the area of the movable part 22a, that is, the synchronous deformation structures of the two embodiments are both a bending synchronous deformation structure, but their synchronous bending deformation is only part of the synchronous bending deformation, and the difference between the two implementations is only in the direction of partial bending simultaneous deformation. In the second embodiment shown in FIG. 5B , the way to implement partial bending simultaneous deformation is that the area of the movable part 22a corresponding to the confluence opening 212 on the outer surface 21a of the flow plate 21 of the deformable base structure 10 faces close to the The protruding part 230c of the vibrating plate 230 bends and deforms, and the movable part 22a of the flexible plate 22 also bends and deforms in the direction close to the protruding part 230c of the vibrating plate 230, so as to achieve partial bending and simultaneous deformation of the deformable base structure 20 structure; and in the fourth embodiment as shown in FIG. 5D , in the fourth embodiment, partial bending is simultaneously deformed so that the area of the movable part 22a corresponding to the confluence opening 212 on the outer surface 21a of the flow plate 21 of the deformable base structure 10 faces away from the The direction of the vibrating plate 230 is bent and deformed, and at the same time, the region of the movable portion 22a of the flexible plate 22 is also bent and deformed in a direction away from the protruding portion 230c of the vibrating plate 230, so as to form a part of the deformable base structure 20 that bends and deforms simultaneously; therefore, the first In the second embodiment and the fourth embodiment, the gap between the movable part 22a region of the flexible plate 22 and the protruding part 230c of the vibrating plate 230 constituting the deformable base structure 20 can be maintained at a specific required depth δ. Within the range, that is, the area between the movable part 22a of the flexible plate 22 and the protruding part 230c of the vibrating plate 230 is kept within the range of the required specific depth δ, and then constitutes the deformable The circulation plate 21 and the flexible plate 22 of the base structure 20 constitute a part of the fluid control device 2 with a bending simultaneous deformation structure.
如图6B及图6D所示,于第六实施态样及第八实施态样中,可变形基座结构20为流通板21及挠性板22仅部分同步变形所构成的锥形同步变形结构,亦即可变形基座结构20的同步变形区域是在可动部22a的区域,即此两实施态样的同步变形结构均为一锥形同步变形结构,然其锥形同步变形仅为部分锥形同步变形,且此两实施态样的差异仅在于其部分锥形同步变形的方向有所不同。如图6B所示的第六实施态样中实施部分锥形同步变形的方式为于可变形基座结构10的流通板21的外部表面21a对应汇流开口部212处的可动部22a区域朝向接近该振动板230的突出部230c方向锥形变形,同时挠性板22的可动部22a区域亦朝向接近该振动板230的突出部230c方向锥形变形,以达成可变形基座结构20产生部分锥形同步变形结构;而如图6D所示的第八实施态样中实施部分锥形同步变形为于可变形基座结构10的流通板21的外部表面21a对应汇流开口部212的可动部22a区域朝向远离该振动板230的突出部230c方向锥形变形,同时挠性板22的可动部22a区域亦朝向远离该振动板230的突出部230c方向锥形变形,以构成可变形基座结构20的部分锥形同步变形结构;故第六实施态样及第八实施态样中以构成可变形基座结构20的挠性板22的可动部22a区域与振动板230的突出部230c之间可保持在所需求的特定深度δ的范围之内,即挠性板22的可动部22a的区域与振动板230的突出部230c之间保持在所需求的特定深度δ的范围之内,进而构成此两实施态样的具有可变形基座结构20的流通板21及挠性板22构成部分锥形同步变形结构的流体控制装置2。As shown in Figure 6B and Figure 6D, in the sixth embodiment and the eighth embodiment, the deformable base structure 20 is a tapered simultaneous deformation structure formed by the circulation plate 21 and the flexible plate 22 being partially deformed simultaneously , that is, the synchronous deformation area of the deformable base structure 20 is in the area of the movable part 22a, that is, the synchronous deformation structures of the two embodiments are all conical synchronous deformation structures, but the conical synchronous deformation is only a part The cones are deformed simultaneously, and the difference between the two implementations is only that the directions of the partial cones are deformed simultaneously. In the sixth embodiment shown in FIG. 6B , the method of implementing partial conical simultaneous deformation is that the area of the movable part 22a corresponding to the confluence opening 212 on the outer surface 21a of the flow plate 21 of the deformable base structure 10 faces toward the The protruding portion 230c of the vibrating plate 230 is deformed in a conical shape, and the movable portion 22a of the flexible plate 22 is also conically deformed in a direction close to the protruding portion 230c of the vibrating plate 230, so as to achieve a deformable base structure 20. Tapered synchronous deformation structure; and in the eighth embodiment shown in FIG. 6D, the partial conical synchronous deformation is implemented as the movable part corresponding to the confluence opening 212 on the outer surface 21a of the flow plate 21 of the deformable base structure 10 The region 22a of the flexible plate 22 is conically deformed toward the direction away from the protruding portion 230c of the vibrating plate 230, and the region of the movable portion 22a of the flexible plate 22 is also conically deformed toward the direction away from the protruding portion 230c of the vibrating plate 230 to form a deformable base. Part of the conical simultaneous deformation structure of the structure 20; therefore, in the sixth embodiment and the eighth embodiment, the movable part 22a region of the flexible plate 22 of the deformable base structure 20 and the protruding part 230c of the vibrating plate 230 can be kept within the range of the required specific depth δ, that is, the area between the movable part 22a of the flexible plate 22 and the protruding portion 230c of the vibrating plate 230 is kept within the range of the required specific depth δ , and furthermore, the flow plate 21 and the flexible plate 22 with the deformable base structure 20 constituting the two embodiments constitute the fluid control device 2 with a partially tapered synchronous deformation structure.
如图7B及图7D所示,于第十实施态样及第十二实施态样中,可变形基座结构20为流通板21及挠性板22仅部分同步变形所构成的部分凸块平面同步变形结构,亦即可变形基座结构20的同步变形区域同样仅在于可动部22a的区域,即此两实施态样的同步变形结构均为一凸块平面同步变形结构,然其凸块平面同步变形仅为部分凸块平面同步,且此两实施态样的差异仅在于其部分凸块平面同步变形的方向有所不同。如图7B所示的第十实施态样中实施部分凸块平面同步变形的方式为于可变形基座结构10的流通板21的外部表面21a对应汇流开口部212处的可动部22a区域朝向接近该振动板230的突出部230c方向凸块平面变形,同时挠性板22的可动部22a区域亦朝向接近该振动板230的突出部230c方向凸块平面变形,以构成可变形基座结构20的部分凸块平面同步变形结构;而如图7D所示的第十二实施态样中实施部分凸块平面同步变形为于可变形基座结构10的流通板21的外部表面21a对应汇流开口部212的可动部22a区域朝向远离该振动板230的突出部230c方向凸块平面变形,同时挠性板22的可动部22a区域亦朝向远离该振动板230的突出部230c方向凸块平面变形,以构成可变形基座结构20的部分凸块平面同步变形结构;故第十实施态样及第十二实施态样中以构成可变形基座结构20的挠性板22的可动部22a区域与振动板230的突出部230c之间可保持在所需求的特定深度δ的范围之内,即挠性板22的可动部22a的区域与振动板230的突出部230c之间保持在所需求的特定深度δ的范围之内,进而构成此两实施态样的具有可变形基座结构20的流通板21及挠性板222构成部分凸块平面同步变形结构的流体控制装置2。As shown in Figure 7B and Figure 7D, in the tenth embodiment and the twelfth embodiment, the deformable base structure 20 is a part of the bump plane formed by the simultaneous deformation of the circulation plate 21 and the flexible plate 22. The synchronous deformation structure, that is, the synchronous deformation area of the deformable base structure 20 is also only in the area of the movable part 22a, that is, the synchronous deformation structures of these two embodiments are all synchronous deformation structures of a bump plane, but the bumps The plane synchronous deformation is only the plane synchronization of part of the bumps, and the difference between the two embodiments is only the direction of the plane synchronous deformation of the part of the bumps. In the tenth embodiment shown in FIG. 7B , the way to implement the simultaneous deformation of part of the bump plane is that the outer surface 21a of the flow plate 21 of the deformable base structure 10 corresponds to the region of the movable part 22a at the confluence opening 212 toward The plane of the bump near the protruding portion 230c of the vibrating plate 230 is deformed, and the area of the movable portion 22a of the flexible plate 22 is also deformed toward the protruding portion 230c of the vibrating plate 230 to form a deformable base structure. The synchronous deformation structure of part of the bump plane in 20; and the synchronous deformation of part of the bump plane in the twelfth embodiment shown in FIG. The region of the movable part 22a of the flexible plate 212 is deformed toward the convex plane in the direction away from the protruding part 230c of the vibrating plate 230, and the region of the movable part 22a of the flexible plate 22 is also deformed in the direction of the protruding part 230c away from the vibrating plate 230. Deformation, to form the synchronous deformation structure of part of the bump plane of the deformable base structure 20; therefore, in the tenth embodiment and the twelfth embodiment, the movable part of the flexible plate 22 constituting the deformable base structure 20 22a and the protruding portion 230c of the vibrating plate 230 can be kept within the range of the required specific depth δ, that is, the area of the movable portion 22a of the flexible plate 22 and the protruding portion 230c of the vibrating plate 230 are kept within Within the range of the required specific depth δ, the circulation plate 21 and the flexible plate 222 with the deformable base structure 20 constituting the two embodiments constitute the fluid control device 2 with a synchronous deformation structure of part of the protrusions.
又如前述,于一些实施例中,可变形基座结构20的流通板21及挠性板22的表面也可为亦可构成一曲面同步变形结构态样,该曲面同步变形结构为数个不同曲率的曲面所构成,或者是亦可由相同曲率的曲面所构成,请参阅图8的第十三实施态样,其中实施曲面结构同步变形的方式为于可变形基座结构20的流通板21的外部表面21a上产生为数个不同曲率的曲面所构成的曲面同步变形,此同时挠性板22亦为会同步变形而具有数个不同曲率的曲面,如此以构成可变形基座结构20的曲面同步变形结构,然而,此曲面同步变形的方式亦不以此为限,亦可为于挠性板22的表面上产生为数个不同曲率的曲面所构成的曲面同步变形,以使流通板21产生对应的曲面同步变形,并共同构成变形基座结构20的曲面同步变形结构;藉此以使可变形基座结构20的曲面同步变形结构与振动板230的突出部230c之间可保持在所需求的特定深度δ的范围之内,进而构成具有可变形基座结构20的流通板21及挠性板22构成曲面同步变形结构结构的流体控制装置2。As mentioned above, in some embodiments, the surfaces of the flow plate 21 and the flexible plate 22 of the deformable base structure 20 may also form a curved surface synchronously deformable structure, and the curved surface synchronously deformable structure has several different curvatures. , or it can also be composed of curved surfaces with the same curvature. Please refer to the thirteenth embodiment in FIG. The surface 21a is formed by several curved surfaces with different curvatures and deforms synchronously. At the same time, the flexible plate 22 is also a curved surface with several different curvatures that deforms synchronously. In this way, the curved surfaces forming the deformable base structure 20 are deformed simultaneously. structure, however, the method of synchronous deformation of the curved surface is not limited thereto, and the surface of the flexible plate 22 may be formed of several curved surfaces with different curvatures to simultaneously deform, so that the circulation plate 21 produces a corresponding The curved surface deforms synchronously, and together constitutes the curved surface synchronously deformable structure of the deformable base structure 20; thereby, the space between the curved surface synchronously deformable structure of the deformable base structure 20 and the protruding portion 230c of the vibrating plate 230 can be kept at the required specific Within the range of the depth δ, the circulation plate 21 and the flexible plate 22 with the deformable base structure 20 form a fluid control device 2 with a curved surface synchronous deformation structure.
于另一些实施例中,可变形基座结构20的流通板21及挠性板22所构成的同步变形结构不一定为规则形态的同步变形结构,亦可为不规则状的同步变形结构,意即于可变形基座结构20的流通板21或挠性板22的表面上形成不规则状的同步变形,以使流通板21及挠性板22对应构成一不规则状同步变形结构,但不以此为限。且该挠性板22的不规则状同步变形结构与振动板230的突出部230c之间同样可维持所需求的特定深度。In some other embodiments, the synchronous deformation structure formed by the circulation plate 21 and the flexible plate 22 of the deformable base structure 20 is not necessarily a regular synchronous deformation structure, but also an irregular synchronous deformation structure, meaning That is, an irregular synchronous deformation is formed on the surface of the circulation plate 21 or the flexible plate 22 of the deformable base structure 20, so that the circulation plate 21 and the flexible plate 22 form an irregular synchronous deformation structure correspondingly, but not This is the limit. Moreover, a required specific depth can also be maintained between the irregular simultaneous deformation structure of the flexible plate 22 and the protruding portion 230c of the vibrating plate 230 .
通过上述弯曲结构、锥形结构、凸块平面结构、曲面结构或不规则状结构等各种实施态样,均可使可变形基座结构20的可动部22a与振动板230的突出部230c之间保持在所需求的特定深度δ的范围之内,通过此特定深度δ的范围限定,则可避免流体控制装置2组装时的误差造成间隙过大或过小、及其所导致挠性板22与振动板230的突出部230c彼此接触干涉,进而使流体传输效率不佳、并会产生噪音等问题。Through various implementations such as the above-mentioned curved structure, tapered structure, bump planar structure, curved surface structure or irregular structure, the movable part 22a of the deformable base structure 20 and the protruding part 230c of the vibrating plate 230 can be made Keep within the range of the required specific depth δ, by limiting the range of this specific depth δ, it is possible to avoid errors in the assembly of the fluid control device 2 that cause the gap to be too large or too small, and the resulting flexible plate 22 and the protruding portion 230c of the vibrating plate 230 contact and interfere with each other, resulting in poor fluid transmission efficiency, noise and other problems.
综上所述,本发明的流体控制装置是通过可变形基座结构的流通板及挠性板所构成的同步变形结构,该同步变形的实施方式是可为朝向接近或远离该压电致动器,以使可变形基座结构的挠性板与振动板的突出部之间保持、并调校在所需求的特定深度的范围之内,进而减少挠性板与振动板的突出部的接触干涉,从而可提升流体传输的效率,还可达到降低噪音的功效。如此一来,本发明的流体控制装置通过可同步变形的可变形基座结构,进而可调整、校正所需求特定深度,以达到流体控制装置的最佳流体传输效率、降低噪音,同时还可降低产品的不良率,提升流体控制装置的质量。To sum up, the fluid control device of the present invention is a synchronous deformation structure formed by the flow plate and the flexible plate of the deformable base structure. The implementation of the synchronous deformation can be towards or away from the piezoelectric actuator. device, so that the flexible plate of the deformable base structure and the protruding part of the vibrating plate are kept and adjusted within the required specific depth range, thereby reducing the contact between the flexible plate and the protruding part of the vibrating plate Interference, thereby improving the efficiency of fluid transmission, and also achieving the effect of reducing noise. In this way, the fluid control device of the present invention can adjust and correct the required specific depth through the deformable base structure that can deform synchronously, so as to achieve the best fluid transmission efficiency of the fluid control device, reduce noise, and at the same time reduce The defect rate of the product is improved, and the quality of the fluid control device is improved.
本发明可由熟知此技术的人士任施匠思而为诸般修饰,但皆不脱离如所附权利要求书所限定的保护范围。The present invention can be modified in various ways by those skilled in the art without departing from the scope of protection as defined in the appended claims.
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