CN107795466B - Method for manufacturing fluid control device - Google Patents

Abstract

A method for manufacturing a fluid control device includes (a) providing a housing, a piezoelectric actuator and a deformable base structure, the piezoelectric actuator being composed of a piezoelectric element and a vibrating plate, the vibrating plate having a first surface and a corresponding second surface, the second surface having a protrusion, the deformable base structure including a flow plate and a flexible plate, the flexible plate having a movable portion; (b) mutually stacking and jointing the flexible plate and the circulating plate of the deformable base structure and performing prefabrication synchronous deformation operation to synchronously deform the flexible plate and the circulating plate to form a prefabricated synchronous deformation structure; (c) the housing, the piezoelectric actuator and the deformable base structure are sequentially stacked and positioned to be engaged with each other, and the preformed synchronous deformation structure of the deformable base structure is a protrusion with respect to the vibration plate so that a specific depth is defined between the movable portion and the protrusion.

Description

Method for manufacturing fluid control device

[ technical field ] A method for producing a semiconductor device

The present invention relates to a method for manufacturing a fluid control device, and more particularly, to a method for manufacturing a fluid control device having a deformable base.

[ background of the invention ]

At present, in all fields, no matter in medicine, computer technology, printing, energy and other industries, products are developed towards refinement and miniaturization, wherein fluid conveying structures contained in products such as micropumps, sprayers, ink jet heads, industrial printing devices and the like are key technologies thereof, so that how to break through technical bottlenecks thereof by means of innovative structures is an important content of development.

Referring to fig. 1A and 1B, fig. 1A is a schematic partial structure diagram of a conventional fluid control device, and fig. 1B is an assembly offset diagram of a partial structure of a conventional fluid control device. As shown in the drawings, the core of the conventional fluid control device 100 mainly includes a substrate 101 and a piezoelectric actuator 102, the substrate 101 and the piezoelectric actuator 102 are stacked, and the substrate 101 and the piezoelectric actuator 102 have a gap 103, wherein the gap 103 needs to maintain a certain depth, and the gap 103 maintains a certain depth, so that when the piezoelectric actuator 102 is actuated by an applied voltage to deform, fluid can be driven to flow in each chamber of the fluid control device 100, thereby achieving the purpose of fluid transmission. However, in the conventional fluid control apparatus 100, in which the piezoelectric actuator 102 and the substrate 101 are both of a flat-plate type integral structure and have a certain rigidity, under the condition that the two integral flat-plate structures are precisely aligned with each other, so that a certain gap 103 is generated between the two plates, i.e. a certain depth is maintained, which has a certain difficulty and is very easy to generate errors, because if any one of the integral flat-plates with certain rigidity is inclined by an angle θ, a displacement value obtained by multiplying a relative distance by the angle θ, such as a displacement d, is generated at the relative position, so as to increase d '(as shown in fig. 1B) at the marked line of the certain gap 103 or decrease d' (not shown) otherwise; particularly, as the fluid control apparatus is miniaturized, the size of each element is miniaturized, so that a certain gap 103 is maintained between the two plates, and d 'is not increased or decreased, thereby maintaining a certain depth of the gap 103, which is more and more difficult, and if the certain depth of the gap 103 cannot be maintained, for example, if the gap 103 increases the error of d' displacement, the distance of the gap 103 is too large, thereby the fluid transmission efficiency is not good; on the contrary, if the gap is in the opposite direction so as to reduce the d' displacement (not shown), the distance of the gap 103 is too small, and thus the piezoelectric actuator 102 is likely to contact and interfere with other elements during operation, which causes a problem of noise, and results in a consequent increase in the defective rate of the fluid control device.

In other words, since the piezoelectric actuator 102 and the substrate 101 of the conventional fluid control device 100 are both of a flat plate type integral structure with a certain rigidity, it is difficult to achieve the purpose of precise alignment between the two plates in an integral alignment manner, and particularly, the smaller the device size, the more difficult the precise alignment during assembly, which results in low fluid transmission performance and noise generation, thereby causing inconvenience and discomfort in use.

Therefore, how to develop a miniature fluid transmission device which can improve the above-mentioned known technical defects, can make the traditional instrument or equipment using the fluid transmission device achieve small volume, miniaturization and silence, and overcome the problem of easy error generation during assembly, thereby achieving the purpose of light and comfortable portability is a problem which needs to be solved at present.

[ summary of the invention ]

The main purpose of the present invention is to solve the problems of the prior art, such as inconvenient and uncomfortable use, caused by the difficulty in accurately positioning the substrate and the piezoelectric actuator during assembly due to the miniaturized design of the elements, which makes it difficult to maintain the required distance of the gap after assembly, resulting in low fluid delivery efficiency and noise generation.

To achieve the above object, a method for manufacturing a fluid control device according to a broader aspect of the present invention includes (a) providing a housing, a piezoelectric actuator and a deformable base structure, the piezoelectric actuator being composed of a piezoelectric element and a vibrating plate, the vibrating plate having a first surface and a corresponding second surface, the second surface having a protrusion, the deformable base structure including a flow plate and a flexible plate, the flexible plate having a movable portion; (b) stacking and jointing the flexible plate and the circulating plate of the deformable base structure and performing a prefabrication synchronous deformation operation to synchronously deform the flexible plate and the circulating plate to form a prefabricated synchronous deformation structure; and (c) stacking the housing, the piezoelectric actuator and the deformable base structure in sequence, and performing positioning and bonding, wherein the preformed synchronous deformation structure of the deformable base structure is the protrusion relative to the vibrating plate, so that a specific depth is defined between the movable part of the flexible plate and the protrusion of the vibrating plate.

To achieve the above object, another aspect of the present invention in a broader aspect provides a method of manufacturing a fluid control device, including (a) providing a housing, a piezoelectric actuator, and a deformable base structure, the piezoelectric actuator being composed of a piezoelectric element and a vibrating plate, the deformable base structure including a flow plate and a flexible plate, the flexible plate having a movable portion; (b) stacking and jointing the flexible plate and the circulating plate of the deformable base structure and performing a prefabrication synchronous deformation operation to synchronously deform the flexible plate and the circulating plate to form a prefabricated synchronous deformation structure; and (c) stacking the shell, the piezoelectric actuator and the deformable base structure in sequence, and performing positioning and bonding, wherein the preformed synchronous deformation structure is opposite to the vibration plate, so that a specific depth is defined between the movable part of the flexible plate and the vibration plate.

[ description of the drawings ]

Fig. 1A is a schematic partial structural view of a known fluid control device.

FIG. 1B is a schematic diagram illustrating a partial structure assembly offset of a known fluid control device.

Fig. 2 is a flow chart illustrating a manufacturing method of a fluid control device according to a preferred embodiment of the present disclosure.

Fig. 3A is a schematic cross-sectional structure diagram of the fluid control device of the present disclosure.

Fig. 3B is a partial operation schematic diagram of the fluid control device of the present disclosure.

Fig. 4A is a schematic diagram of a first embodiment of a preformed synchronous deformation structure of a fluid control device according to the preferred embodiment of the present invention.

Fig. 4B is a schematic diagram of a second implementation of the preformed synchronous deformation structure of the fluid control device according to the preferred embodiment of the present disclosure.

Fig. 4C is a schematic diagram of a third embodiment of a preformed synchronous deformation structure of the fluid control device according to the preferred embodiment of the present invention.

Fig. 4D is a schematic diagram of a fourth implementation manner of the preformed synchronous deformation structure of the fluid control device according to the preferred embodiment of the present disclosure.

Fig. 5A is a schematic diagram of a fifth embodiment of a preformed synchronous deformation structure of a fluid control device according to the preferred embodiment of the present invention.

Fig. 5B is a schematic diagram of a sixth implementation manner of the preformed synchronous deformation structure of the fluid control device according to the preferred embodiment of the present disclosure.

Fig. 5C is a schematic diagram of a seventh implementation manner of the preformed synchronous deformation structure of the fluid control device according to the preferred embodiment of the present disclosure.

Fig. 5D is a schematic diagram of an eighth implementation manner of the preformed synchronous deformation structure of the fluid control device according to the preferred embodiment of the present disclosure.

Fig. 6A is a schematic diagram of a ninth implementation of a preformed synchronous deformation structure of a fluid control device according to the preferred embodiment of the present disclosure.

Fig. 6B is a schematic diagram of a tenth implementation manner of the preformed synchronous deformation structure of the fluid control device according to the preferred embodiment of the present disclosure.

Fig. 6C is a schematic diagram of an eleventh implementation of the preformed synchronous deformation structure of the fluid control device according to the preferred embodiment of the present disclosure.

Fig. 6D is a schematic diagram of a twelfth implementation manner of the preformed synchronous deformation structure of the fluid control device according to the preferred embodiment of the disclosure.

Fig. 7 is a schematic diagram of a thirteenth implementation manner of the preformed synchronous deformation structure of the fluid control device according to the preferred embodiment of the present disclosure.

Fig. 8 is a flow chart illustrating a method for manufacturing a fluid control device according to another preferred embodiment of the present disclosure.

[ detailed description ] embodiments

Exemplary embodiments that embody features and advantages of this disclosure are described in detail below in the detailed description. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

The fluid control device 2 manufactured by the method can be applied to the industries of medical technology, energy, computer technology, printing and the like for transferring fluid, but not limited thereto. Referring to fig. 2 and 3A, fig. 2 is a schematic flow chart illustrating a manufacturing method of a fluid control device according to a preferred embodiment of the present invention, and fig. 3A is a schematic cross-sectional structure of the fluid control device according to the present invention. As shown in fig. 2, in the method for manufacturing the fluid control device of the present invention, and as shown in fig. 3A, first, as shown in step S31, the housing 26, the piezoelectric actuator 23, and the deformable base structure 20 are provided. The piezoelectric actuator 23 comprises a piezoelectric element 233 and a vibrating plate 230, the vibrating plate 230 has a first surface 230b and a corresponding second surface 230a, the second surface 230a has a protrusion 230 c; the vibrating plate 230 may be but not limited to a flexible square plate-shaped structure, the piezoelectric element 233 may be a square plate-shaped structure, the side length of the piezoelectric element is not greater than the side length of the vibrating plate 230, and the piezoelectric element 233 may be attached to the first surface 230b of the vibrating plate 230, but not limited thereto, the piezoelectric element 233 generates deformation to drive the vibrating plate 230 to perform bending vibration after being applied with voltage, the piezoelectric actuator 23 further includes an outer frame 231 and at least one support 232, the outer frame 231 is disposed around the outer side of the vibrating plate 230, and the shape of the outer frame also substantially corresponds to the shape of the vibrating plate 230, i.e., the outer frame may be but not limited to a square hollow frame-shaped structure, and the vibrating plate 230 and the outer frame 231 are connected by at least one support 232 and provide elastic support; and the deformable base structure 20 includes a flow plate 21 and a flexible plate 22, but not limited thereto, the flow plate 21 has at least one surface, the at least one surface includes an outer surface 21a, the flow plate 21 further has at least one inlet hole 210, at least one communicating groove 211 and a communicating opening portion 212, the inlet hole 210 penetrates the flow plate 21 and communicates with the at least one communicating groove 211, and the other end of the communicating groove 211 communicates with the communicating opening portion 212, the flexible plate 22 has a movable portion 22a and a fixed portion 22b, the flexible plate 22 is connected to the flow plate 21, so that the fixed portion 22b is fixedly connected to the flow plate 21, the movable portion 22a is a portion corresponding to the communicating opening portion 212, and the flow path hole 220 is provided on the movable portion 22a, and the flow path hole 220 corresponds to the communicating opening portion 212. The housing 26 has at least one discharge hole 261, the housing 26 not only is a single plate structure, but also can be a frame structure with a side wall 260 at the periphery for the piezoelectric actuator 23 to be disposed therein, i.e. the housing 26 can cover the piezoelectric actuator 23 and the deformable base structure 20, and a temporary storage chamber a for fluid communication is formed between the housing 26 and the piezoelectric actuator 23, and the discharge hole 261 is used for communicating with the temporary storage chamber a, so that the fluid can communicate with the outside of the housing 26.

Thereafter, as shown in step S32 of fig. 2, the flexible plate 22 and the flow plate 21 are stacked and joined to each other, and a preliminary simultaneous deformation operation is performed to deform the flexible plate 22 and the flow plate 21 simultaneously, thereby forming a preliminary molding simultaneous deformation structure. The pre-forming synchronous deformation operation may be a synchronous deformation operation applying an external force, or a synchronous deformation operation without an external force, where the synchronous deformation operation without an external force refers to that the deformable base structure 20 is subjected to a temperature change or other factors to cause a change in the structure interior and further cause an external deformation, rather than a deformation of the structure due to an applied force other than the structure itself, such as a thermal expansion deformation, a cold contraction deformation, and the like, so as to form the pre-forming synchronous deformation structure (as shown in fig. 4A to 7). In this embodiment, the preformed synchronous deformation operation is the synchronous deformation operation applying the external force, the synchronous deformation operation applying the external force is to apply at least one external force to at least one surface of the deformable base structure 20, the at least one external force may be only one external force applied at a time, or a plurality of external forces applied at the same time, but not limited thereto, and the at least one external force may be but not limited to a contact force, that is, the external force is applied to at least one surface of the deformable base structure 20 by contacting the external force, so as to synchronously deform the deformable base structure 20, thereby forming the preformed synchronous deformation structure, and the surface of the preformed synchronous deformation structure contacted by the external force generates at least one deformation structure, for example: the trace of the force application (not shown) is not limited to this. The at least one external force may be, but not limited to, an over-distance force that maintains a certain gap (not shown) with a surface to which the external force is applied, for example, the at least one external force is not limited to, but is an attraction force generated by a vacuum extractor or a magnetic attraction force, and the over-distance force such as the vacuum attraction force or the magnetic attraction force is applied to the deformable base structure 20, so that the deformable base structure 20 is deformed synchronously, thereby forming the preformed synchronous deformed structure.

Finally, as described in step S33, the housing 26, the piezoelectric actuator 23, and the deformable base structure 20 are stacked and positioned and bonded to each other, and the preformed synchronous deformation structure of the deformable base structure 20 is a protrusion 230c relative to the diaphragm 230, so that a specific depth δ is defined between the movable portion 22a of the flexible plate 22 and the protrusion 230c of the diaphragm 230. This step covers the housing 206 on the outer periphery of the piezoelectric actuator 23 (as shown in fig. 3A), wherein the deformable base structure 20 is not deformed synchronously in step S32, but it is mainly used to describe the way of stacking the fluid control device 2 in the present application, that is, the piezoelectric actuator 23 is disposed in the accommodating space 26a of the housing 26, and then the deformable base structure 20 or the deformable base structure of the preformed synchronous deformation structure is correspondingly assembled with the piezoelectric actuator 23 and disposed in the accommodating space 26a together, so as to close the bottom of the piezoelectric actuator 23, and the movable portion 22a is located opposite to the protrusion 130c of the vibrating plate 130, and in this embodiment, the preformed synchronous deformation structure of the deformable base structure 20 is synchronously deformable toward or away from the protrusion 130c of the vibrating plate 230, as shown in fig. 4A to 7, but not limited thereto, a specific depth δ is defined between the movable portion 22a of the flexible plate 22 and the protrusion 230c of the vibration plate 230, so as to manufacture the fluid control device 2 capable of maintaining the specific depth δ through a preformed synchronous deformation structure.

As shown in fig. 3A and 3B, when the flow plate 21, the flexible plate 22 and the piezoelectric actuator 23 are assembled correspondingly, a chamber for collecting fluid can be formed at the flow path hole 220 of the flexible plate 22 and the collecting opening 212 of the flow plate 21, and a space h is formed between the flexible plate 22 and the outer frame 231 of the piezoelectric actuator 23, and in some embodiments, the space h can be filled with a medium, such as: a conductive adhesive, but not limited thereto, is bonded and positioned through a medium so as to maintain a certain distance, for example, a distance h, between the flexure plate 22 and the vibration plate 230 of the piezoelectric actuator 23, and further, a certain depth δ is formed between the movable portion 22a of the flexure plate 22 and the protrusion 230c of the vibration plate 230, and when the vibration plate 230 vibrates, the fluid is compressed, that is, even if the distance between the movable portion 22a of the flexure plate 22 and the protrusion 230c of the vibration plate 230 becomes smaller, and the pressure and the flow rate of the fluid are both increased; in addition, the specific depth δ is a proper distance for reducing the contact interference between the movable portion 22a of the flexible board 22 and the protrusion 230c of the vibration board 230, so as to reduce the problem of noise generation; and a chamber having a specific depth δ between the movable portion 22a of the flexible plate 22 and the protruding portion 230c of the vibrating plate 230 communicates with a chamber in which the fluid is merged at the confluence opening portion 212 of the circulation plate 21 through the flow passage hole 220 of the flexible plate 22; when the fluid control device 2 is activated, the piezoelectric element 233 of the piezoelectric actuator 23 is actuated by an applied voltage to deform and drive the vibration plate 230 to perform a vertical reciprocating vibration, when the vibration plate 230 vibrates upward, the flexible plate 22 is a light and thin sheet-shaped structure, the flexible plate 22 also performs a vertical reciprocating vibration along with a resonance, that is, a portion of the movable portion 22a of the flexible plate 22 also performs a bending vibration deformation, and the flow path hole 220 is disposed at or near the center of the flexible plate 22, at this time, the movable portion 22a of the flexible plate 22 is driven by the upward vibration of the vibration plate 230 to bring and push a fluid upward to vibrate upward, and the fluid enters from at least one inlet hole 210 on the flow plate 21, passes through at least one confluence opening 211 to be converged at the confluence opening 212 at the center, and then flows upward through the movable portion 22a of the flexible plate 22 and the vibration opening 220 disposed on the flexible plate 22 corresponding to the confluence opening 212 to flow path plate 22 In the chamber formed by the specific depth δ between the protrusions 230c of the movable plate 230, the deformation of the flexible plate 22 compresses the volume of the chamber formed by the specific depth δ between the movable portion 22a of the flexible plate 22 and the piezoelectric actuator 23, and strengthens the kinetic energy of the compressed middle flow space of the chamber formed by the specific depth δ between the movable portion 22a of the flexible plate 22 and the protrusion 230c of the vibrating plate 230, so as to force the fluid therein to flow to both sides, and further to flow upward through the gap between the vibrating plate 230 and the support 232, and when the vibrating plate 230 vibrates in a downward bending manner, the resonance of the movable portion 22a of the flexible plate 22 is also deformed in a downward bending manner, the fluid is less collected to the central collecting opening 212, and the piezoelectric actuator 23 also vibrates downward, and is displaced to the bottom of the chamber formed by the specific depth δ between the movable portion 22a of the flexible plate 22 and the protrusion 230c of the vibrating plate 230, so as to increase the compressible volume of the chamber, by repeating the operation shown in fig. 3B, the space in which the flow space between the chambers is compressed by the specific depth δ between the movable portion 22a of the flexure plate 22 and the protrusion 230c of the vibration plate 230 can be increased, and a large amount of fluid suction and discharge can be achieved.

In the preferred embodiment of the present invention, as mentioned above, the deformable base structure 20 is composed of the flow plate 21 and the flexible plate 22, wherein the flow plate 21 and the flexible plate 22 are stacked on each other, and both the flow plate 21 and the flexible plate 22 can be deformed synchronously by the pre-forming synchronous deformation operation to form the pre-formed synchronous deformation structure. More specifically, the synchronous deformation refers to the deformation of the flow-through plate 21 and the flexible plate 22, when either one of them is deformed, the other one is deformed with the same shape, i.e. the corresponding surfaces of the two are mutually jointed and positioned without any gap or parallel dislocation, for example, when the flow-through plate 21 of the deformable base structure 20 is deformed, the flexible plate 22 is deformed the same; similarly, when the flexible plate 22 of the deformable base structure 20 is deformed, the flow plate 21 is also deformed similarly. In addition, as described in the foregoing, in the known fluid control device, the piezoelectric actuator and the substrate are both of a flat plate type integral structure and have a certain rigidity, under the condition that the two integral flat plate type structures are precisely aligned with each other, so that a certain gap is maintained between the two plates, i.e. a certain depth is maintained, which has a certain difficulty and is very easy to generate errors, thereby causing various problems. Therefore, the present invention is characterized in that the preformed synchronous deformation structure of the deformable base structure 20 is used, which is the synchronous deformation structure of the flow plate 21 and the flexible plate 22, the deformable base structure 20 is equivalent to the substrate element of the prior art, but the flow plate 21 and the flexible plate 22 of the preformed synchronous deformation structure of the deformable base structure 20 have the various specific preformed synchronous deformation structures defined in the present invention, and the various specific preformed synchronous deformation structures can be kept within the required specific depth δ with the protrusion 230c of the opposite vibrating plate 230, so that even when the fluid control device 2 is miniaturized, the size of each element is miniaturized, and the preformed synchronous deformation structure can easily maintain a certain gap between the two, because the non-flat plate-shaped synchronous deformation structure (no matter the deformation is in the shapes of bending, taper, various curved surfaces, irregular shapes and the like) with the reduced alignment area is aligned with a flat plate, instead of aligning two large-area flat plates, a non-flat plate-shaped small area is aligned with a large-area flat plate, the gap error between the two flat plates can be easily reduced, and the problems of low efficiency and noise of fluid conveying are solved, so that the known problems of inconvenience and discomfort in use are solved.

In some embodiments, the preformed synchronous deformation structure may be a bending structure, a tapered structure, a bump plane structure, a curved structure, or an irregular structure, but not limited thereto, and the synchronous deformation structure will be described in detail in the following description.

As shown in fig. 4A and 4C, in the first and third embodiments, the preformed synchronous deformation structure is a bending synchronous deformation structure formed by the flow plate 21 and the flexible plate 22, that is, the bending synchronous deformation region of the preformed synchronous deformation structure is in the region of the movable portion 22a and in the region beyond the movable portion 22a, that is, the preformed synchronous deformation structures of the two embodiments are both bending synchronous deformation structures, but only the directions of the bending synchronous deformation of the two structures are different. As shown in fig. 4A, in the first embodiment, the bending deformation is performed in a bending synchronous deformation operation in which the outer surface 21a of the flow plate 21 of the deformable base structure 20 is bent and deformed in a direction approaching the protrusion 230c of the diaphragm 230, and the region of the movable portion 22a of the flexible plate 22 and the region beyond the movable portion 22a are also bent and deformed in a direction approaching the protrusion 230c of the diaphragm 230, thereby forming a bending synchronous deformation structure of a preform-molded synchronous deformation structure; as shown in fig. 4C, in the third embodiment, the bending deformation is performed in such a way that the outer surface 21a of the flow plate 21 of the deformable base structure 20 is bent and deformed in a direction away from the protrusion 230C of the diaphragm 230, and the region of the movable portion 22a of the flexible plate 22 and the region beyond the movable portion 22a are also bent and deformed in a direction away from the protrusion 230C of the diaphragm 230, thereby forming a bending deformation structure of the preformed synchronous deformation structure; therefore, the area of the movable portion 22a of the flexible plate 22 and the protrusion 230c of the vibrating plate 230 constituting the preformed synchronous deformation structure in the first and third embodiments are maintained within a range of a desired specific depth δ, and the fluid control device 2 for synchronously deforming the flow plate 21 and the flexible plate 22 having the preformed synchronous deformation structure in both embodiments is constituted.

As shown in fig. 5A and 5C, in the fifth and seventh embodiments, the preformed synchronous deforming structure is a tapered synchronous deforming structure formed by the flow plate 21 and the flexible plate 22, that is, the tapered synchronous deforming region of the preformed synchronous deforming structure is in the region of the movable portion 22a and in the other region beyond the movable portion 22a, that is, the synchronous deforming structures of both embodiments are tapered synchronous deforming structures, but only the directions of the tapered synchronous deforming of both embodiments are different. In the fifth embodiment shown in fig. 5A, the preliminary simultaneous deformation operation is performed in which the simultaneous deformation is performed in a tapered structure, in which the outer surface 21a of the flow plate 21 of the deformable base structure 20 is tapered toward the protrusion 230c of the diaphragm 230, and the region of the movable portion 22a of the flexible plate 22 and the region beyond the movable portion 22a are tapered toward the protrusion 230c of the diaphragm 230, so as to form a tapered simultaneous deformation structure of the preliminary formed simultaneous deformation structure; in the seventh embodiment shown in fig. 5C, the preformed synchronous deforming operation of synchronously deforming the flow plate 21 of the deformable base structure 20 into the tapered structure is performed, in which the outer surface 21a of the flow plate 21 is conically deformed in a direction away from the protrusion 230C of the diaphragm 230, and the area of the movable portion 22a of the flexible plate 22 and the other area beyond the movable portion 22a are also conically deformed in a direction away from the protrusion 230C of the diaphragm 230, so as to form the tapered synchronous deforming structure of the preformed synchronous deforming structure; therefore, in the fifth and seventh embodiments, the area of the movable portion 22a of the flexible plate 22 and the protrusion portion 230c of the vibration plate 230 constituting the preformed synchronous deformation structure are maintained within a range of a desired specific depth δ, thereby constituting the fluid control device 2 for the conical synchronous deformation of the flow plate 21 and the flexible plate 22 having the preformed synchronous deformation structure according to the two embodiments.

As shown in fig. 6A and 6C, in the ninth and eleventh embodiments, the preformed synchronous deformation structure is a bump plane synchronous deformation structure formed by the circulation plate 21 and the flexible plate 22, that is, the bump plane synchronous deformation region of the preformed synchronous deformation structure is in the region of the movable portion 22a and in the other region beyond the movable portion 22a, that is, the synchronous deformation structures of both embodiments are bump plane synchronous deformation structures, but only the directions of the bump plane synchronous deformation of both embodiments are different. In the ninth embodiment shown in fig. 6A, the preformed synchronous deforming operation of synchronously deforming the flow plate 21 of the deformable base structure 20 into the convex planar structure is performed, in which the outer surface 21a of the flow plate 21 is deformed in the convex planar direction toward the protrusion 230c of the diaphragm 230 in the area of the movable portion 22a and in the area beyond the movable portion 22a, and the area of the movable portion 22a of the flexible plate 22 and in the area beyond the movable portion 22a are deformed in the convex planar direction toward the protrusion 230c of the diaphragm 230, so as to form the convex planar synchronous deforming structure of the preformed synchronous deforming structure; in the eleventh embodiment shown in fig. 7C, the preformed synchronous deforming operation is performed in which the synchronous deformation is a convex planar structure, in which the convex planar structure is formed by deforming the outer surface 21a of the flow plate 21 of the deformable base structure 20 in a direction away from the protrusion 230C of the vibrating plate 230 while the convex planar structure is formed in a direction away from the protrusion 230C of the vibrating plate 230 in the area of the movable portion 22a of the flexible plate 22 and the other area beyond the movable portion 22 a; therefore, in the ninth embodiment and the eleventh embodiment, the area of the movable portion 22a of the flexible plate 22 and the protrusion portion 230c of the vibration plate 230 constituting the preformed synchronous deformation structure are maintained within a range of a desired specific depth δ, thereby constituting the fluid control device 2 in which the projection planes of the flow plate 21 and the flexible plate 22 having the preformed synchronous deformation structure are deformed synchronously.

As another example, in some embodiments, the preformed synchronous deformation structure may be only a partially synchronous deformation structure of the flow-through plate 21 and the flexible plate 22, that is, the partially synchronous deformation region of the preformed synchronous deformation structure is only in the region of the movable portion 22a, and the partially synchronous deformation structure of the preformed synchronous deformation structure may be a curved structure, a tapered structure, or a bump planar structure, but not limited thereto.

As shown in fig. 4B and 4D, in the second and fourth embodiments, the preformed synchronous deforming structure is a partially-bent synchronous deforming structure composed of the flow plate 21 and the flexible plate 22, that is, the partially-bent deforming region of the preformed synchronous deforming structure is in the movable portion 22a region, that is, the synchronous deforming structures of both embodiments are a bent synchronous deforming structure, but only the directions of the bent synchronous deforming structures of both embodiments are different. As shown in fig. 4B, in the second embodiment, a pre-simultaneous deformation operation of partially bending-simultaneous deformation is performed, in which the area of the movable portion 22a at the position of the outer surface 21a of the flow plate 21 of the deformable base structure corresponding to the bus opening 212 is bent and deformed in the direction approaching the protrusion 230c of the diaphragm 230, and the area of the movable portion 22a of the flexible plate 22 is also bent and deformed in the direction approaching the protrusion 230c of the diaphragm 230, so as to achieve a pre-formed simultaneous deformation structure of partially bending-simultaneous deformation; in the fourth embodiment shown in fig. 4D, the preformed portion bending synchronous deforming operation is performed, in which the area of the outer surface 21a of the flow plate 21 of the preformed synchronous deforming structure corresponding to the movable portion 22a of the bus opening 212 is bent and deformed in a direction away from the protrusion 230c of the vibrating plate 230, and the area of the movable portion 22a of the flexible plate 22 is also bent and deformed in a direction away from the protrusion 230c of the vibrating plate 230, so as to form the preformed synchronous deforming structure, namely, the preformed portion bending synchronous deforming operation is performed; therefore, in the second and fourth embodiments, the area of the movable portion 22a of the flexible plate 22 and the protrusion 230c of the vibrating plate 230 constituting the preformed synchronous deformation structure are maintained within a range of a desired specific depth δ, and the fluid control device 2 having the preformed synchronous deformation structure of the two embodiments, in which the portions of the flow plate 21 and the flexible plate 22 are bent and deformed synchronously, is constituted.

As shown in fig. 5B and 5D, in the sixth embodiment and the eighth embodiment, the preformed synchronous deforming structure is a partial conical synchronous deforming structure of the flow plate 21 and the flexible plate 22, that is, the partial conical deforming area of the preformed synchronous deforming structure is in the movable portion 22a area, that is, the synchronous deforming structures of both embodiments are conical synchronous deforming structures, but only the directions of the conical synchronous deforming of both embodiments are different. In the sixth embodiment shown in fig. 5B, a pre-simultaneous deformation operation is performed in which the area of the movable portion 22a on the outer surface 21a of the flow plate 21 of the deformable base structure 20 corresponding to the bus opening 212 is deformed in a tapered manner toward the protrusion 230c of the diaphragm 230, and the area of the movable portion 22a of the flexible plate 22 is deformed in a tapered manner toward the protrusion 230c of the diaphragm 230, so as to achieve a pre-formed simultaneous deformation structure, i.e., a partially-tapered simultaneous deformation structure; in the eighth embodiment shown in fig. 5D, the preformed synchronous deforming operation of partially synchronously deforming the flow plate 21 of the deformable base structure into the tapered structure is performed, in which the area of the movable portion 22a of the flow plate 21 corresponding to the bus opening 212 is tapered toward the direction away from the protrusion 230c of the vibration plate 230, and the area of the movable portion 22a of the flexible plate 22 is also tapered toward the direction away from the protrusion 230c of the vibration plate 230, so as to form the partially tapered synchronous deforming structure of the preformed synchronous deforming structure; therefore, in the sixth embodiment and the eighth embodiment, the area of the movable portion 22a of the flexible plate 22 and the protrusion portion 230c of the vibration plate 230 constituting the preformed synchronous deformation structure are maintained within a range of a desired specific depth δ, and the flow control device 2 having the preformed synchronous deformation structure of the two embodiments and the flow plate 21 and the flexible plate 22 in which the partial tapers are deformed synchronously is constituted.

As shown in fig. 6B and 6D, in the tenth embodiment and the twelfth embodiment, the preformed synchronous deformation structure is a partial bump plane synchronous deformation structure of the flow plate 21 and the flexible plate 22, that is, a partial bump plane deformation region of the preformed synchronous deformation structure is in the movable portion 22a region, that is, the synchronous deformation structures of both embodiments are a bump plane synchronous deformation structure, but only the directions of the bump plane synchronous deformations of both embodiments are different. In the tenth embodiment shown in fig. 6B, the preformed synchronous deforming operation is performed in which the area of the movable portion 22a at the position corresponding to the bus opening 212 on the outer surface 21a of the flow plate 21 of the deformable base structure 20 is deformed in a convex plane direction toward the protruding portion 230c of the vibrating plate 230, and the area of the movable portion 22a of the flexible plate 22 is deformed in a convex plane direction toward the protruding portion 230c of the vibrating plate 230, so as to form the preformed synchronous deforming structure of the partial convex plane; in the twelfth embodiment shown in fig. 6D, the preformed synchronous deforming operation is performed in which the partial synchronous deformation is the bump-plane structure, in which the area of the outer surface 21a of the flow plate 21 of the preformed synchronous deforming structure corresponding to the movable portion 22a of the bus opening 212 is bump-plane-deformed in the direction away from the protrusion 230c of the vibrating plate 230, and the area of the movable portion 22a of the flexible plate 22 is also bump-plane-deformed in the direction away from the protrusion 230c of the vibrating plate 230, so as to form the partial bump-plane synchronous deforming structure of the preformed synchronous deforming structure; in the tenth and twelfth embodiments, the area of the movable portion 22a of the flexible plate 22 and the protrusion 230c of the vibrating plate 230 constituting the preformed synchronous deformation structure are maintained within a range of a desired specific depth δ, and the flow control device 2 having the preformed synchronous deformation structure of the two embodiments, in which the flow plate 21 and the flexible plate 22 are deformed in a planar synchronous manner, is constituted.

As mentioned above, in some embodiments, the preformed synchronous deformation structure is a curved synchronous deformation structure formed by the flow plate 21 and the flexible plate 22, and the curved synchronous deformation structure is formed by a plurality of curved surfaces with different curvatures or curved surfaces with the same curvature, and please refer to the thirteenth embodiment of fig. 7, which performs the preformed synchronous deformation operation of synchronously deforming to a curved structure, wherein the outer surface 21a of the flow plate 21 of the deformable base structure is formed by a plurality of curved surfaces with different curvatures, and the surface of the flexible plate 22 is also formed by a plurality of curved surfaces with different curvatures, so as to form the curved synchronous deformation structure of the preformed synchronous deformation structure, so that the curved synchronous deformation structure of the preformed synchronous deformation structure and the protrusion 230c of the vibrating plate 230 are maintained within the required specific depth range δ, further, the fluid control device 2 is constituted by deforming the curved surface structures of the flow path plate 21 and the flexible plate 22 in synchronization with each other, which are preformed in synchronization with each other.

In other embodiments, the synchronous deformation structure of the preformed synchronous deformation structure is not necessarily a regular synchronous deformation structure, but may also be an irregular synchronous deformation structure, that is, the surfaces of the flow plate 21 and the flexible plate 22 of the preformed synchronous deformation structure are irregular synchronous deformation structures, but not limited thereto. In other embodiments, the preformed synchronous deforming structure may be a protrusion synchronous deforming structure facing a direction close to the protrusion 230c of the vibration plate 230, or may be a protrusion synchronous deforming structure facing a direction away from the protrusion 230c of the vibration plate 230, and a specific depth δ is defined between the protrusion synchronous deforming structure and the protrusion 230c of the vibration plate 230.

The preformed synchronous deformable structure produced in the embodiments described herein may have many embodiments, and may be changed according to the actual implementation, and is not limited to the embodiments described above.

In other embodiments, the vibrating plate 230 of the piezoelectric actuator 23 may not have the protrusion 230c, that is, the second surface 230a of the vibrating plate 230 of the piezoelectric actuator 23 may be but is not limited to a planar structure (not shown); therefore, in this embodiment, the gap h between the deformable base structure 20 and the piezoelectric actuator 23 is the distance between the flexible plate 22 of the deformable base structure 20 and the second surface 230a of the vibration plate 230 of the piezoelectric actuator 23, and after assembly, the deformable base 20 is deformed synchronously to form the preformed synchronous deformed structure, and the preformed synchronous deformed structure and the vibration plate 230 are maintained within the required range of the specific depth δ, so that the flexible plate 22 and the vibration plate 230 of the piezoelectric actuator 23 are in contact with each other to reduce interference, thereby improving the efficiency of fluid transmission and further reducing the problem of noise generation. In this embodiment, the preformed synchronous deforming structure may be a curved structure, a tapered structure, a bump planar structure, a curved structure or an irregular structure, as mentioned above, and is not limited thereto.

Therefore, the diaphragm 230 of the piezoelectric actuator 23 is not provided with the protrusion 230c, and another preferred embodiment of the manufacturing method thereof is described below. Fig. 8 is a flow chart illustrating a method for manufacturing a fluid control device according to another preferred embodiment of the present disclosure. As shown in fig. 8, in the manufacturing method of the fluid control device according to the present invention, as described in step S41, the housing 26, the piezoelectric actuator 230, and the deformable base structure 20 are provided; the piezoelectric actuator 23 is also composed of a piezoelectric element 233 and a vibrating plate 230, the vibrating plate 230 is a flexible square plate-shaped structure, and has a first surface 230b and a corresponding second surface 230a, the piezoelectric element 233 is a flexible square plate-shaped structure, and has a side length no greater than that of the vibrating plate 230, and can be attached to the first surface 230b of the vibrating plate 230, but not limited thereto, the piezoelectric element 233 generates deformation to drive the vibrating plate 230 to vibrate in a bending manner after being applied with a voltage.

In step S42, the housing 20, the piezoelectric actuator 23, and the deformable base structure 20 are sequentially stacked and bonded to each other, and a preliminary simultaneous deformation operation is performed to synchronously deform the flexible plate 22 and the flow plate 21, thereby forming a preliminary molded simultaneous deformation structure. The pre-forming synchronous deformation operation may be a pre-forming synchronous deformation operation applying an external force, or a non-external pre-forming synchronous deformation operation, where the non-external pre-forming synchronous deformation operation refers to a change in the interior of the deformable base structure 20 caused by a temperature change or other non-external factors, and further causes an external deformation, rather than a deformation of the structure due to an application of a force other than the structure itself, such as a thermal expansion deformation, a cold contraction deformation, and so on, to form the pre-formed synchronous deformation structure (as shown in fig. 4A to 7). In this embodiment, the pre-forming synchronous deformation operation is the synchronous deformation operation applying the external force, the pre-forming synchronous deformation operation applying the external force applies at least one external force to at least one surface of the deformable base structure 20 to form the pre-formed synchronous deformation structure, and the at least one external force may be applied by only one external force at a time or by applying a plurality of external forces at the same time, but not limited thereto. The at least one external force may be, but is not limited to, a contact force, i.e., the external force is applied to at least one surface of the deformable base structure 20 to generate a synchronous deformation of the deformable base structure 20, so as to form the preformed synchronous deformation structure, and the surface of the preformed synchronous deformation structure contacted by the external force will generate at least one deformation structure (such as force application trace, not shown), and the at least one external force can also be but not limited to an over-distance force keeping a certain gap (not shown) with the surface applied by the external force, for example, the at least one external force is an attractive force or a magnetic attractive force generated by a vacuum extractor, and the like, but not limited to this, and the at least one external force is applied to the deformable base structure 20 by an excessive force such as the vacuum attractive force or the magnetic attractive force, the simultaneous deformation of deformable base structure 20 may be produced to form the preformed simultaneous deformation structure.

Finally, as shown in step S43, the case 26, the piezoelectric actuator 23, and the deformable base structure 20 are stacked one on another in order, and are positioned and bonded so that a specific depth δ is defined between the movable portion 22a of the flexure plate 22 and the diaphragm 230. This step covers the outer periphery of the piezoelectric actuator 23 with a housing 206 (as shown in figure 3A), that is, the piezoelectric actuator 23 is disposed in the accommodating space 26a of the housing 26, and then the deformable base structure 20 having the preformed synchronous deformation structure is assembled with the piezoelectric actuator 23 and disposed in the accommodating space 26a together, so as to close the bottom of the piezoelectric actuator 23, and the position of the movable portion 22a with respect to the vibration plate 130, and in the present embodiment, the preformed simultaneous deformation structure can be synchronously deformed toward or away from the vibration plate 230, as shown in fig. 4A to 7, and not limited thereto, it is mainly to define a specific depth delta between the flexible board 22 and the vibration board 230, thereby manufacturing the fluid control device 2 capable of maintaining the required specific depth delta through the preformed synchronous deformation structure.

Through the above-mentioned various embodiments, the deformable base 20 having the preformed synchronous deformation structure is assembled, so that the movable portion 22a of the flexible plate 22 and the protrusion 230c of the vibration plate 230 of the preformed synchronous deformation structure can be maintained within the range of the required specific depth δ, and the range of the specific depth δ is limited, or the movable portion 22a of the flexible plate 22 and the vibration plate 230 of the preformed synchronous deformation structure can be maintained within the range of the required specific depth δ, and the range of the specific depth δ is limited, thereby avoiding the problems of the fluid control device 2 such as too large or too small gap caused by the assembling error, the contact interference between the flexible plate 22 and the piezoelectric actuator 23, the poor fluid transmission efficiency, and the noise generation.

In summary, the fluid control device of the present invention can perform the pre-forming synchronous deformation operation on the deformable base structure before assembly to generate the synchronous deformation, so as to form the pre-formed synchronous deformation structure, and after the pre-forming synchronous deformation structure is assembled with the piezoelectric actuator, the movable portion of the flexible plate of the pre-formed synchronous deformation structure and the protrusion of the vibration plate can be maintained within the range of the required specific depth, or the movable portion of the flexible plate of the pre-formed synchronous deformation structure and the vibration plate can be maintained within the range of the required specific depth δ, so that the movable portion of the flexible plate of the pre-formed synchronous deformation structure and the vibration plate (or the protrusion of the vibration plate) can be adjusted to the range of the required specific depth, thereby reducing the contact interference between the flexible plate and the piezoelectric actuator, and improving the fluid transmission efficiency, the effect of reducing noise can be achieved to reduce the reject ratio of the product and improve the quality of the fluid control device.

Various modifications may be made by those skilled in the art without departing from the scope of the invention as defined by the appended claims.

[ notation ] to show

100: known fluid control devices

101: substrate

102: piezoelectric actuator

103: gap

2: fluid control device

20: deformable base structure

21: flow plate

21 a: exterior surface

21 b: first surface

210: feed inlet

211: conflux through groove

212: confluence opening part

22: flexible board

22 a: movable part

22 b: fixing part

23: piezoelectric actuator

230: vibrating plate

230a, 230 b: surface of

230 c: projection part

231: outer frame

232: support frame

233: piezoelectric element

δ: a specific depth

h: distance between each other

d. d': displacement of

θ: angle of rotation

S31-S33: steps of a method of manufacturing a fluid control device

S41-S43: steps of a method of manufacturing a fluid control device

Claims (25)

1. A method of manufacturing a fluid control device, comprising:

(a) providing a shell, a piezoelectric actuator and a deformable base structure, wherein the piezoelectric actuator is composed of a piezoelectric element and a vibrating plate, the vibrating plate is provided with a first surface and a corresponding second surface, the second surface is provided with a protruding part, the deformable base structure comprises a circulating plate and a flexible plate, and the flexible plate is provided with a movable part;

(b) stacking and jointing the flexible plate and the circulating plate of the deformable base structure and performing a prefabrication synchronous deformation operation to synchronously deform the flexible plate and the circulating plate to form a prefabricated synchronous deformation structure; and

(c) the shell, the piezoelectric actuator and the deformable base structure are stacked in sequence and are positioned and jointed, and the preformed synchronous deformation structure of the deformable base structure is the protruding part corresponding to the vibrating plate, so that a specific depth is defined between the movable part of the flexible plate and the protruding part of the vibrating plate.

2. The method of manufacturing a fluid control device according to claim 1, wherein a synchronous deformation region of the preformed synchronous deformation structure is in the movable portion region of the flexible plate, and the preformed synchronous deformation structure is a bending synchronous deformation structure defining a specific depth between the bending synchronous deformation structure and the protrusion of the vibration plate.

3. The method of manufacturing a fluid control device according to claim 1, wherein a synchronous deformation region of the preformed synchronous deformation structure is in the movable portion region of the flexible plate, and the preformed synchronous deformation structure is a tapered synchronous deformation structure defining a specific depth between the tapered synchronous deformation structure and the protrusion of the vibration plate.

4. The method of manufacturing a fluid control device according to claim 1, wherein a synchronous deformation region of the preformed synchronous deformation structure is in the movable portion region of the flexible plate, and the preformed synchronous deformation structure is a bump plane synchronous deformation structure defining a specific depth between the bump plane synchronous deformation structure and the protrusion of the vibration plate.

5. The method of claim 1, wherein a synchronous deformation region of the preformed synchronous deformation structure is at and beyond a movable portion region of the flexible plate, and a specific depth is defined between the preformed synchronous deformation structure and the protrusion of the vibration plate.

6. The method of manufacturing a fluid control device according to claim 1, wherein a simultaneous deformation region of the preformed synchronous deformation structure is in and beyond a movable portion region of the flexible plate, and the preformed synchronous deformation structure is a bending synchronous deformation structure defining a specific depth between the bending synchronous deformation structure and the protrusion of the vibration plate.

7. The method of manufacturing a fluid control device according to claim 1, wherein a simultaneous deformation region of the preformed simultaneous deformation structure is in a movable portion region of the flexible plate and beyond the movable portion region, and the preformed simultaneous deformation structure is a tapered simultaneous deformation structure defining a specific depth between the tapered simultaneous deformation structure and the protrusion of the vibration plate.

8. The method of manufacturing a fluid control device according to claim 1, wherein a synchronous deformation region of the preformed synchronous deformation structure is in and beyond the movable portion region of the flexible plate, and the preformed synchronous deformation structure is a bump plane synchronous deformation structure defining a specific depth between the bump plane synchronous deformation structure and the protrusion of the vibration plate.

9. The method according to claim 1, wherein the preformed simultaneous deformation structure is a curved simultaneous deformation structure formed by the flow plate and the flexible plate, the curved simultaneous deformation structure is formed by a plurality of curved surfaces having different curvatures, and a specific depth is defined between the curved simultaneous deformation structure of the flexible plate and the protrusion of the vibration plate.

10. The method according to claim 1, wherein the preformed simultaneous deformation structure is a curved simultaneous deformation structure formed by the flow plate and the flexible plate, the curved simultaneous deformation structure is formed by a plurality of curved surfaces having the same curvature, and a specific depth is defined between the curved simultaneous deformation structure of the flexible plate and the protrusion of the vibration plate.

11. The method of claim 1, wherein the preformed synchronization deformation structure is an irregular synchronization deformation structure formed by the flow plate and the flexible plate, and a specific depth is defined between the irregular synchronization deformation structure of the flexible plate and the protrusion of the vibration plate.

12. The method according to any one of claims 1 to 11, wherein the preformed synchronization deformation structure is a protrusion synchronization deformation structure protruding toward a direction approaching the protrusion of the vibration plate, the protrusion synchronization deformation structure and the protrusion of the vibration plate defining a specific depth therebetween.

13. The method according to any one of claims 1 to 11, wherein the preformed synchronization deformation structure is a protrusion synchronization deformation structure protruding in a direction away from the protrusion of the vibration plate, the protrusion synchronization deformation structure and the protrusion of the vibration plate defining a specific depth therebetween.

14. The method of manufacturing a fluid control device according to claim 1, wherein the vibration plate of the piezoelectric actuator has a square shape and is configured to vibrate in a bending manner, and the piezoelectric actuator further comprises:

an outer frame surrounding the vibrating plate; and

at least one support connected between one side of the vibrating plate and the outer frame for elastic support.

15. The method of claim 1, wherein the preformed simultaneous deformation structure is positioned with respect to the vibrating plate by bonding with a medium, and the medium is an adhesive.

16. The method of claim 1, wherein the housing and the piezoelectric actuator are stacked to form a buffer chamber in fluid communication, and the housing has at least one exhaust hole communicating between the buffer chamber and an exterior of the housing.

17. The method of claim 1, wherein the flexible plate has a flow path hole and is disposed at or near a center of the movable portion for passing a fluid.

18. The method according to claim 17, wherein the flow plate has at least one inlet hole penetrating the flow plate and communicating with the at least one communicating groove, at least one communicating groove having another end communicating with the communicating groove, and a communicating opening corresponding to the movable portion of the flexible plate and communicating with the flow passage hole of the flexible plate.

19. A method of manufacturing a fluid control device, comprising:

(a) providing a shell, a piezoelectric actuator and a deformable base structure, wherein the piezoelectric actuator is composed of a piezoelectric element and a vibrating plate, the deformable base structure comprises a circulating plate and a flexible plate, and the flexible plate is provided with a movable part;

(b) stacking and jointing the flexible plate and the circulating plate of the deformable base structure and performing a prefabrication synchronous deformation operation to synchronously deform the flexible plate and the circulating plate to form a prefabricated synchronous deformation structure; and

(c) the shell, the piezoelectric actuator and the deformable base structure are stacked in sequence and are positioned and jointed, and the preformed synchronous deformation structure is opposite to the vibrating plate so that a specific depth is defined between the movable part of the flexible plate and the vibrating plate.

20. The method of claim 19, wherein the preformed simultaneous deformation structure is a bending simultaneous deformation structure formed by the flow plate and the flexible plate, and a specific depth is defined between the bending simultaneous deformation structure and the vibration plate.

21. The method of claim 19, wherein the preformed simultaneous deformation structure is a conical simultaneous deformation structure formed by the flow plate and the flexible plate, and a specific depth is defined between the conical simultaneous deformation structure and the vibration plate.

22. The method of claim 19, wherein the preformed simultaneous deformation structure is a convex planar simultaneous deformation structure formed by the flow plate and the flexible plate, and a specific depth is defined between the convex planar simultaneous deformation structure and the vibration plate.

23. The method of claim 19, wherein the preformed simultaneous deformation structure is a curved simultaneous deformation structure formed by the flow plate and the flexible plate, the curved simultaneous deformation structure is formed by a plurality of curved surfaces with different curvatures, and a specific depth is defined between the curved simultaneous deformation structure of the flexible plate and a protrusion of the vibration plate.

24. The method of claim 19, wherein the preformed simultaneous deformation structure is a curved simultaneous deformation structure formed by the flow plate and the flexible plate, the curved simultaneous deformation structure is formed by a plurality of curved surfaces having the same curvature, and a specific depth is defined between the curved simultaneous deformation structure of the flexible plate and a protrusion of the vibration plate.

25. The method of claim 19, wherein the preformed synchronization deformation structure is an irregular synchronization deformation structure formed of the flow plate and the flexible plate, and a specific depth is defined between the irregular synchronization deformation structure of the flexible plate and a protrusion of the vibration plate.

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