CN107717024A - The manufacture method and target material assembly of backboard - Google Patents
The manufacture method and target material assembly of backboard Download PDFInfo
- Publication number
- CN107717024A CN107717024A CN201610659597.XA CN201610659597A CN107717024A CN 107717024 A CN107717024 A CN 107717024A CN 201610659597 A CN201610659597 A CN 201610659597A CN 107717024 A CN107717024 A CN 107717024A
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- China
- Prior art keywords
- backboard
- manufacture method
- initial water
- water channel
- back side
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C3/00—Milling particular work; Special milling operations; Machines therefor
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C2220/00—Details of milling processes
- B23C2220/60—Roughing
- B23C2220/605—Roughing and finishing
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Abstract
The present invention provides a kind of manufacture method and target material assembly of backboard, and the manufacture method includes：Backboard blank is provided, the backboard blank includes solder side and the back side relative with the solder side；Roughing is carried out to the back side, initial water channel is formed in the back side；The initial water channel is finished, forms channel structure；In the finishing passes, using volatile solution as coolant.During the present invention finishes to the initial water channel, using volatile solution as coolant, it is not easy to form residual in the channel structure after coolant volatilization, so as to improve the surface cleanliness of the channel structure, color, and it can reduce or avoid the residual impurity in the channel structure, so as to improve the formation quality of the channel structure, and then improve the quality of the backboard.
Description
Technical field
The present invention relates to the manufacture method and target material assembly of field of semiconductor manufacture, more particularly to backboard.
Background technology
Sputtering technology is one of conventional process of field of semiconductor manufacture, with growing, the sputtering target of sputtering technology
Material serves more and more important effect in sputtering technology, the quality of sputtering target material directly influenced after sputtering into film quality
Amount.
In sputtering target material manufacturing field, target material assembly is the back of the body by meeting the target blankss of sputtering performance, being combined with target blankss
Plate is formed.With the continuous upgrading of Product Process, in order that backboard reaches good high temperature deformation resistance performance, water is used in backboard
Road structure design.During the use of target material assembly, continuously cooling water is flowed into the channel structure, to take away
The substantial amounts of heat of back plate surface is stated, the lasting high temperature deformation resistance ability of the backboard is realized, so as to improve the use of target material assembly
It is life-span, cost-effective.
But the performance of prior art target material assembly has much room for improvement.
The content of the invention
The present invention solves the problems, such as the manufacture method and target material assembly that are to provide a kind of backboard, improves the quality of backboard,
So as to improve the performance of target material assembly.
To solve the above problems, the present invention provides a kind of manufacture method of backboard, including：Backboard blank, the back of the body are provided
Plate blank material includes solder side and the back side relative with the solder side；Roughing is carried out to the back side, in the back side
Form initial water channel；The initial water channel is finished, forms channel structure；In the finishing passes, using easy
Volatile solvent soln is as coolant.
Optionally, the material of the backboard blank is 6061 aluminium alloys.
Optionally, in the finishing passes, using alcohol as coolant.
Optionally, the rough machined technique is rough milling technique.
Optionally, the step of rough milling technique includes：Using white steel knife cutter, the speed of mainshaft is 2500 revs/min
Clock is to 3200 revs/min, and the amount of feeding on the back side is that 1200 millimeters/going to 1700 millimeters/turn, and bite is 0.3 milli
Rice is to 0.7 millimeter.
Optionally, in the rough milling technical process, using cutting fluid as coolant.
Optionally, after completing the roughing, the opening size and depth of the initial water channel reserve allowance, described
Allowance is 0.5nm to 1mm.
Optionally, after forming the initial water channel, before being finished to the initial water channel, the manufacture method is also
Including：Plane leveling processing technology is carried out to the initial water channel.
Optionally, after completing the plane leveling processing technology, the flatness of the initial water channel is less than or equal to
0.1mm。
Optionally, the technique of the finishing is finish-milling processing technology.
Optionally, cutter is wolfram steel knife cutter used by the finish-milling processing technology.
Optionally, the parameter of the finish-milling processing technology includes：The speed of mainshaft is 2800 revs/min to 3200 revs/min,
The amount of feeding on the back side is that 250 millimeters/going to 350 millimeters/turn, and bite is 0.07 millimeter to 1.03 millimeters.
Accordingly, the present invention also provides a kind of target material assembly, including：Target blankss；It is described with the backboard that the target blankss are combined
Backboard is formed using above-mentioned manufacture method.
Compared with prior art, technical scheme has advantages below：
It is cold using volatile solution as coolant during the present invention finishes to the initial water channel
But liquid volatilization after be not easy in the channel structure formed residual, so as to improve the surface cleanliness of the channel structure,
Color, and can reduce or avoid the residual impurity in the channel structure, so as to improve the formation of the channel structure
Quality, and then improve the quality of the backboard.
In alternative, in the finishing passes, using alcohol as coolant.Alcohol not only has well easy
Boiling characteristics, and there is preferable processing compatibility, avoid in the finishing passes, the quality of formed backboard is caused
Harmful effect.
In alternative, in the step of carrying out the finish-milling processing technology, the cutter used is wolfram steel knife, due to wolfram steel knife
Surface smoothness can reach mirror effect, and the wolfram steel knife is more sharp, therefore after forming channel structure, the water channel
The surface smoothness of structure is preferable, and less the defects of pit or burr, so as to improve the formation quality of the channel structure.
The present invention provides a kind of target material assembly, has channel structure in the backboard of the target material assembly；Due to the water channel
Surface cleanliness, the color of structure are preferable, less the defects of pit or burr, therefore the quality of the backboard is higher, accordingly
, the performance of the target material assembly is also higher.
Brief description of the drawings
Fig. 1 is the schematic flow sheet of the embodiment of manufacture method one of backboard of the present invention；
Fig. 2 to Fig. 5 is the structural representation of each step in embodiment illustrated in fig. 1；
Fig. 6 is the structural representation of the embodiment of target material assembly one of the present invention.
Embodiment
From background technology, in order that backboard reaches good high temperature deformation resistance performance, water is used inside the backboard
Road structure design.During the use of target material assembly, continuously cooling water is flowed into the channel structure, so as to
Take away the substantial amounts of heat in target material assembly surface.
But the quality of backboard still has much room for improvement, analyze its reason and be：Milling Process technique mainly is used with shape at present
It is general to use cutting fluid to play a part of lubricating and cool down in the Milling Processes into the channel structure.Due to
The cutting fluid is oily solution, and the cutting fluid is difficult to be completely removed after the channel structure is formed, therefore the water
Road structure content tends to have cutting fluid residual, and so as to cause the channel structure to occur, surface smoothness is not high, color and luster is obscure, outward appearance
The problems such as visually bad, form the second-rate of backboard；And then easily cause the repair rate of backboard to increase, accordingly also improve
Processing cost, it is unfavorable for producing in enormous quantities；Even in severe cases, the problem of also causing backboard to be scrapped.
In order to solve the above problems, the present invention provides a kind of manufacture method of backboard, including：Backboard blank is provided, it is described
Backboard blank includes solder side and the back side relative with the solder side；Roughing is carried out to the back side, at the back side
It is interior to form initial water channel；The initial water channel is finished, forms channel structure；In the finishing passes, use
Volatile solution is as coolant.
It is cold using volatile solution as coolant during the present invention finishes to the initial water channel
But liquid volatilization after be not easy in the channel structure formed residual, so as to improve the surface cleanliness of the channel structure,
Color, and can reduce or avoid the residual impurity in the channel structure, so as to improve the formation of the channel structure
Quality, and then improve the quality of the backboard.
It is understandable to enable the above objects, features and advantages of the present invention to become apparent, below in conjunction with the accompanying drawings to the present invention
Specific embodiment be described in detail.
Fig. 1 is refer to, shows the schematic flow sheet of the embodiment of manufacture method one of backboard of the present invention, it is provided by the present invention
The manufacture method of backboard include following basic step：
Step S1：Backboard blank is provided, the backboard blank includes solder side and the back of the body relative with the solder side
Face；
Step S2：Roughing is carried out to the back side, initial water channel is formed in the back side；
Step S3：The initial water channel is finished, forms channel structure；In the finishing passes, use
Volatile solution is as coolant.
It is right below in conjunction with referring to figs. 2 to Fig. 5 in order to which the manufacture method of the backboard of the embodiment of the present invention is better described
The specific embodiment of the present invention is further described.
With reference to figure 2, perform step S1, there is provided backboard blank 100, the backboard blank 100 include solder side 101 and
The back side 102 relative with the solder side 101.
The backboard blank 100 forms backboard after following process；In sputtering target material manufacturing field, the backboard with
The target blankss for meeting sputtering performance are combined, and form target material assembly.The backboard is played a supporting role in the target material assembly, tool
There is the function of conduction heat.
In the present embodiment, the material of the backboard blank 100 is 6061 aluminium alloys.Wherein, 6061 aluminium alloys refer to mixing
It is miscellaneous to have the elements such as magnesium, silicon and form Mg2The aluminium alloy of Si phases；The aluminium alloy can also be doped with copper or Zn-ef ficiency, to improve
The intensity of the aluminium alloy.
The shape of the shape of the backboard and the target blankss matches, therefore the shape and target blankss of the backboard blank 100
Shape match.
Along parallel on the direction on target blankss surface, the shape of cross section of the target blankss can be wanted according to application environment and sputtering
Ask any of rounded, rectangle, annular or other analogous shapes (including regular shape and irregular shape)；Accordingly,
Along parallel on the direction on the surface of backboard blank 100, the shape of cross section of the backboard blank 100 can be circular, square
Any of shape, annular or other analogous shapes (including regular shape and irregular shape).In the present embodiment, the backboard
The shape of cross section of blank 100 is circle.
With reference to figure 3, step S2 is performed, roughing is carried out to the back side 102, initial water is formed in the back side 102
Road 112.
The initial water channel 112 forms channel structure after following process.
The shape of the initial water channel 112 is depending on process requirements.In the present embodiment, the initial water channel 112 is to enclose
The groove extended around the surface center of circle of the backboard blank 100 and with spiral.
In the present embodiment, the rough machined technique is rough milling technique.
Specifically, the step of carrying out rough milling technique to the back side 102 includes：The backboard blank 100 is installed
On the main shaft of lathe, white steel knife cutter is housed on the lathe；Set bite, the amount of feeding and lathe rotating speed；By the back of the body
Face 102 carries out rough milling to the back side 102 with the white steel knife cutter, forms initial water towards the white steel knife cutter
Road 112.
White steel knife has preferable toughness and higher hardness, therefore in the rough milling technical process, cutting
Measure larger, cutting speed is very fast.
It should be noted that bite and the amount of feeding are unsuitable excessive, it is also unsuitable too small.On the one hand, due to the bite
Influence the depth and opening size of the initial water channel 112 simultaneously with the amount of feeding, the bite and the amount of feeding are bigger, described first
The depth and opening size of beginning water channel 112 are also bigger.On the other hand, if the amount of feeding and bite are too small, easily cause
Process time is long；If the amount of feeding and bite are excessive, the flatness of the initial otch of water channel 112 is poor.Therefore,
In order to which the depth of the initial water channel 112 and opening size are controlled in the reasonable scope, and there is the initial water channel 112
Higher flatness, the bite and the amount of feeding of the rough milling technique need to control in the reasonable scope.In the present embodiment, eat
Knife amount is 0.3 millimeter to 0.7 millimeter, and the amount of feeding on the back side 102 is that 1200 millimeters/going to 1700 millimeters/turn.
It should also be noted that, the speed of mainshaft is faster, the process time of the rough milling technique is fewer；But too fast machine
Bed rotating speed can have an impact to the depth and opening size of the initial water channel 112, make the depth of the initial water channel 112 and open
Mouth size offset desired value.Therefore, in the present embodiment, the speed of mainshaft is 2500 revs/min to 3200 revs/min.
In the present embodiment, subsequent step also needs to be processed to form channel structure the initial water channel 112, in order that
The size of processing rear channel structure meets process requirements, after completing the rough milling technique, the opening of the initial water channel 112
Size and depth reserve allowance, are more than the opening size of the initial water channel 112 and subsequently form opening for channel structure
Mouth size, the depth of the initial water channel 112 is set to be less than the follow-up depth for forming channel structure.Wherein, the allowance
Refer to：The initial water channel 112 and the follow-up opening size difference for forming channel structure, the initial water channel 112 is with after
The continuous depth difference for forming channel structure.
It should be noted that the allowance is unsuitable very few, it is also unsuitable excessive.If the allowance is very few, after
It is continuous that the initial water channel 112 is processed, after meeting the channel structure of dimension target value with formation, the light of the channel structure
Cleanliness and glossiness are difficult to meet technological requirement；If the allowance is excessive, easily cause the time of subsequent machining technology
It is long.Therefore, in the present embodiment, the allowance is 0.5nm to 1mm.
In the present embodiment, during carrying out rough milling technique to the back side 102, cutting fluid is used to play cooling
And lubricant effect.
In the rough milling technique, the cutting output per knife is bigger, and caused cutting heat also compares more in the unit interval,
Also corresponding larger to the demand of cutting fluid, therefore, in the present embodiment, the cutting fluid that uses is water-soluble metalworking liquid (such as 3380
Cutting fluid).Water-soluble metalworking liquid is ejected by the subsidiary water pump of lathe, and the bore of delivery port is big, and pressure is also relatively
Height, the emitted dose in the unit interval is bigger, therefore can play preferably cooling and lubricant effect；So as to avoid in institute
State in rough milling technique, cause the initial water channel 112 to produce scratch and because cooling effect is bad because lubrication is bad
Cause the problem of having little time radiating in turning process.In other embodiments, pure oil type cutting fluid can also be used.
It should be noted that after forming the initial water channel 112, the manufacture method also includes：To the initial water channel
112 carry out plane leveling processing technology.
The plane flattens processing technology, for improving the flatness of the initial water channel 112, and removes the initial water
Deformation layer in road 112.
In the present embodiment, the plane is carried out to the initial water channel 112 using stamping machine and flattens processing technology.Complete institute
After stating plane leveling processing technology, the flatness of the initial water channel 112 is less than or equal to 0.1mm, after being advantageous to raising
The continuous topographical property for forming channel structure.
With reference to being profile along the radial direction of backboard 200 with reference to figure 4 and Fig. 5, Fig. 4, Fig. 5 is towards the back side 102
Top view, perform step S3, the initial water channel 112 (as shown in Figure 3) finished, formation channel structure 122 is (such as
Shown in Fig. 4)；In the finishing passes, using volatile solution as coolant.
By the finishing, the opening size and depth for making the channel structure 122 reach technological requirement, and make water channel
The finish and color of structure 122 are higher, outward appearance is visually qualified.After completing the finishing, remaining backboard blank 100 is (such as
Shown in Fig. 3) it is backboard 200.As shown in figure 5, in the present embodiment, the channel structure 122 is around the surface of the backboard 200
The center of circle and the groove extended with spiral
In the present embodiment, the technique of the finishing is finish-milling processing technology, knife used by the finish-milling processing technology
Have for wolfram steel knife cutter.
The surface smoothness of wolfram steel knife can reach mirror effect, and the wolfram steel knife is more sharp, therefore described in formation
After channel structure 122, the surface smoothness of the channel structure 122 is preferable, and less the defects of pit or burr, so as to improve
The formation quality of the channel structure 122.
Specifically, the step of carrying out finish-milling processing technology to the initial water channel 112 includes：By the backboard blank 100
On the main shaft of lathe, wolfram steel knife cutter is housed on the lathe；Set bite, the amount of feeding and lathe rotating speed；By institute
Initial water channel 112 is stated towards the wolfram steel knife cutter, finish-milling is carried out to the initial water channel 112 with the wolfram steel knife cutter and added
Work, form channel structure 122.
It should be noted that bite and the amount of feeding are unsuitable excessive, it is also unsuitable too small.On the one hand, due to the bite
Influence the depth and opening size of the channel structure 122 simultaneously with the amount of feeding, the bite and the amount of feeding are bigger, formation
The depth and opening size of channel structure 122 are also bigger.On the other hand, if the amount of feeding and bite are too small, easily lead
Cause the process time long；If the amount of feeding and bite are excessive, the flatness of the otch of channel structure 122 is poor.Cause
This, in order to which the depth of the channel structure 122 and opening size are controlled in the reasonable scope, and makes the channel structure 122
With higher flatness, the bite and the amount of feeding of the finish-milling processing technology need to control in the reasonable scope.The present embodiment
In, bite is 0.07 millimeter to 1.03 millimeters, to the amount of feeding of the channel structure 122 for 250 millimeters/go to 350 millimeters/
Turn.
It should also be noted that, the speed of mainshaft is faster, the process time of the finish-milling processing technology is fewer；But too fast machine
Bed rotating speed can have an impact to the depth and opening size of the channel structure 122, make the depth of the channel structure 122 and open
Mouth size offset desired value.Therefore, in the present embodiment, the speed of mainshaft is 2800 revs/min to 3200 revs/min.
In the present embodiment, in the finish-milling machining process, using alcohol as coolant.The alcohol can be
Industrial alcohol or analysis absolute alcohol.Wherein, it is the higher alcohol of concentration to analyze absolute alcohol, and alcohol concentration is more than or equal to
99.5%.
In the finish-milling processing technology, the cutting output per knife is smaller, and caused cutting heat is also less in the unit interval, to cutting
The demand for cutting liquid is few compared with the rough milling technique；Therefore in the present embodiment, alcohol can be used as cutting fluid, it is cold to play
But with the effect of lubrication.And because alcohol has volatile characteristic, it is residual that the formation in the channel structure 122 is not easy after volatilization
Stay, so as to improve surface cleanliness, the color of the channel structure 122, and can reduce or avoid the water channel knot
Residual impurity in structure 122, so as to improve the formation quality of the channel structure 122, and then improve the backboard 200
Quality.Accordingly, also reduce the backboard 200 reprocesses risk, improves the manufacture efficiency height of the backboard 200, favorably
In standardized production and cost savings.
In addition, alcohol not only has good volatile characteristic, also with preferable processing compatibility, avoid in the essence
In process, the quality of formed backboard 200 is had undesirable effect.
With reference to the structural representation for reference to figure 6, showing the embodiment of target material assembly one of the present invention.Accordingly, the present invention is gone back
A kind of target material assembly is provided, including：
Target blankss 300；
With the backboard 200 that the target blankss 300 are combined, the backboard 200 is formed using above-mentioned manufacture method.
In the present embodiment, the target blankss 300 form target material assembly 400 after backboard 200 is combined.
The shape of cross section of the target blankss 300 can be required according to application environment and sputtering rounded, rectangle, annular or its
Any of his analogous shape (including regular shape and irregular shape)；The shape of the backboard 200 and the target blankss 300
Shape match.In the present embodiment, the shape of cross section of the target blankss 300 is circular, the shape of cross section of the backboard 200
For circle.
The size of the backboard 200 is more than the size of the target blankss 300.In the present embodiment, the target blankss 300 are positioned at described
The center position of backboard 200.
In the present embodiment, there is channel structure 122 in the back side 102 of the backboard 200.In the use of target material assembly 400
During, continuously cooling water is flowed into the channel structure 122, so as to take away the surface of target material assembly 400
Substantial amounts of heat.Because surface cleanliness, the color of the channel structure 122 are preferable and less the defects of pit or burr,
Therefore the quality of the backboard 200 is higher, and accordingly, the yield of the target material assembly 400 is also higher.
Although of the invention, oneself discloses as above, and the present invention is not limited to this.Any those skilled in the art, do not departing from
In the spirit and scope of the present invention, it can make various changes or modifications, therefore protection scope of the present invention should be with claim
Limited range is defined.
Claims (13)
- A kind of 1. manufacture method of backboard, it is characterised in that including：Backboard blank is provided, the backboard blank includes solder side and the back side relative with the solder side；Roughing is carried out to the back side, initial water channel is formed in the back side；The initial water channel is finished, forms channel structure；In the finishing passes, using volatile solution As coolant.
- 2. the manufacture method of backboard as claimed in claim 1, it is characterised in that the material of the backboard blank closes for 6061 aluminium Gold.
- 3. the manufacture method of backboard as claimed in claim 1, it is characterised in that in the finishing passes, using alcohol As coolant.
- 4. the manufacture method of backboard as claimed in claim 1, it is characterised in that the rough machined technique is rough milling work Skill.
- 5. the manufacture method of backboard as claimed in claim 4, it is characterised in that include the step of the rough milling technique： Using white steel knife cutter, the speed of mainshaft is 2500 revs/min to 3200 revs/min, and the amount of feeding on the back side is 1200 Millimeter/going to 1700 millimeters/turns, and bite is 0.3 millimeter to 0.7 millimeter.
- 6. the manufacture method of backboard as claimed in claim 4, it is characterised in that in the rough milling technical process, adopt Coolant is used as by the use of cutting fluid.
- 7. the manufacture method of backboard as claimed in claim 1, it is characterised in that after completing the roughing, the initial water The opening size and depth in road reserve allowance, and the allowance is 0.5nm to 1mm.
- 8. the manufacture method of backboard as claimed in claim 1, it is characterised in that after forming the initial water channel, to described first Before beginning water channel is finished, the manufacture method also includes：Plane leveling processing technology is carried out to the initial water channel.
- 9. the manufacture method of backboard as claimed in claim 8, it is characterised in that after completing the plane leveling processing technology, The flatness of the initial water channel is less than or equal to 0.1mm.
- 10. the manufacture method of backboard as claimed in claim 1, it is characterised in that the technique of the finishing is processed for finish-milling Technique.
- 11. the manufacture method of backboard as claimed in claim 10, it is characterised in that knife used by the finish-milling processing technology Have for wolfram steel knife cutter.
- 12. the manufacture method of backboard as claimed in claim 10, it is characterised in that the parameter bag of the finish-milling processing technology Include：The speed of mainshaft is 2800 revs/min to 3200 revs/min, the amount of feeding on the back side for 250 millimeters/go to 350 millis Rice/turn, bite are 0.07 millimeter to 1.03 millimeters.
- A kind of 13. target material assembly, it is characterised in that including：Target blankss；With the backboard that the target blankss are combined, the backboard uses the system as described in any one of claim 1~12 claim The method of making is formed.
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| CN112676782A (en) * | 2020-12-25 | 2021-04-20 | 宁波江丰电子材料股份有限公司 | Method for assembling titanium target and copper back plate |
| CN112846651A (en) * | 2020-12-25 | 2021-05-28 | 宁波江丰电子材料股份有限公司 | Method for assembling titanium target and aluminum back plate |
| CN112959010A (en) * | 2021-02-18 | 2021-06-15 | 宁波江丰电子材料股份有限公司 | Method for assembling target and copper back plate |
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| CN112676782A (en) * | 2020-12-25 | 2021-04-20 | 宁波江丰电子材料股份有限公司 | Method for assembling titanium target and copper back plate |
| CN112846651A (en) * | 2020-12-25 | 2021-05-28 | 宁波江丰电子材料股份有限公司 | Method for assembling titanium target and aluminum back plate |
| CN112846651B (en) * | 2020-12-25 | 2022-10-28 | 宁波江丰电子材料股份有限公司 | Method for assembling titanium target and aluminum back plate |
| CN112959010A (en) * | 2021-02-18 | 2021-06-15 | 宁波江丰电子材料股份有限公司 | Method for assembling target and copper back plate |
| CN112959010B (en) * | 2021-02-18 | 2022-07-15 | 宁波江丰电子材料股份有限公司 | Method for assembling target and copper back plate |
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