CN107263278A - Twin grinder and grinding technics - Google Patents
Twin grinder and grinding technics Download PDFInfo
- Publication number
- CN107263278A CN107263278A CN201710535090.8A CN201710535090A CN107263278A CN 107263278 A CN107263278 A CN 107263278A CN 201710535090 A CN201710535090 A CN 201710535090A CN 107263278 A CN107263278 A CN 107263278A
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- China
- Prior art keywords
- sun gear
- top lap
- gear
- abrasive disk
- external gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000007246 mechanism Effects 0.000 claims abstract description 49
- 238000000034 method Methods 0.000 claims abstract description 28
- 230000008569 process Effects 0.000 claims abstract description 26
- 230000008520 organization Effects 0.000 claims description 29
- 238000005498 polishing Methods 0.000 claims description 25
- 239000007788 liquid Substances 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 4
- 229920002635 polyurethane Polymers 0.000 claims description 4
- 239000004814 polyurethane Substances 0.000 claims description 4
- 238000013016 damping Methods 0.000 claims description 3
- 239000004744 fabric Substances 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 241000790917 Dioxys <bee> Species 0.000 description 1
- 229910003978 SiClx Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000003442 weekly effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0076—Other grinding machines or devices grinding machines comprising two or more grinding tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/28—Work carriers for double side lapping of plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/14—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by liquid or gas pressure
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention provides a kind of twin grinder and grinding technics, it is related to grinding technique field, the twin grinder that the present invention is provided includes：Drive mechanism, top lap, lower abrasive disk, sun gear, external gear and the erratic star wheel for card engaging workpiece, top lap, lower abrasive disk and sun gear are connected with drive mechanism；Sun gear and external gear are respectively positioned between top lap and lower abrasive disk, the periphery of sun gear and the periphery of erratic star wheel are equipped with the gear teeth, external gear is in a ring and inwall is toothed around, sun gear is located at the interior zone of external gear, in process of lapping, erratic star wheel is located between sun gear and external gear, and is engaged respectively with sun gear and external gear, and many all locating slots are provided with the end face of erratic star wheel.The twin grinder that the present invention is provided alleviates the low technical problem of single-sided lapping machine efficiency in the prior art.
Description
Technical field
The present invention relates to grinding technique field, more particularly, to a kind of twin grinder and grinding technics.
Background technology
Grinder is the grinding machine being ground with the lap tool for coating or being embedded in abrasive material to workpiece surface.It is mainly used in grinding work
High precision plane, the inside and outside face of cylinder, circular conical surface, sphere, flank and its alloytype face in part.Wherein, the work of single-sided lapping machine
It is exactly using coating as principle or is press-fitted the abrasive grain on mill, by grinds and workpiece under a certain pressure relative
The workpiece ground is fixed in smooth frock jig for grinding by motion, the finished machined carried out to finished surface in processing,
Abrasive disk is rotated counterclockwise, and porcelain ring drives the tool rotation equipped with workpiece, and gravity pressurization or other modes press to workpiece, work
Part rubs with abrasive disk relative motion, to reach the purpose of grinding and polishing.
In existing single-sided lapping machine, the locating slot for positioning workpiece, locating slot are provided with frock jig for grinding
Opening at be provided with clamping structure, locating slot has one week along the circumferentially distributed of frock jig for grinding, and the setting of clamping structure makes
Workpiece dress takes inconvenience during frock when being ground, and useful load is small, so as to influence grinding efficiency.
The content of the invention
It is low to alleviate single-sided lapping machine efficiency in the prior art it is an object of the invention to provide a kind of twin grinder
Technical problem.
The twin grinder that the present invention is provided includes：Drive mechanism, top lap, lower abrasive disk, sun gear, external gear and
For the erratic star wheel of clamping workpiece, the top lap, the lower abrasive disk and the sun gear connect with the drive mechanism
Connect；
The sun gear and the external gear are respectively positioned between the top lap and the lower abrasive disk, the sun gear
Periphery and the periphery of the erratic star wheel be equipped with the gear teeth, the external gear is in a ring and inwall is toothed around, the sun gear
In the interior zone of the external gear, process of lapping, the erratic star wheel is located between the sun gear and the external gear,
And engaged respectively with the sun gear and the external gear, many all locating slots are provided with the end face of the erratic star wheel.
Further, the flatness of the top lap and the lower abrasive disk is respectively less than 0.05mm.
Further, in addition to controlling organization, pressure sensitive mechanism, the pressure sensitive are provided with the top lap
Mechanism is connected with the controlling organization signal, and the controlling organization is connected with the drive mechanism signal.
Preferably, grating scale is provided with the external gear, the grating scale is connected with the controlling organization signal.
Preferably, in addition to for counting the lower abrasive disk counter of the number of turns, the counter and the control are rotated
Mechanism signal connection processed.
Preferably, in addition to the time relay, the time relay respectively with the drive mechanism and the control machine
Structure signal is connected.
Further, in addition to amendment wheel, it is described amendment wheel in cylinder, it is described amendment wheel periphery be provided with and institute
State the gear teeth of sun gear and external gear engagement.
Further, the drive mechanism includes motor and linear drives part, and the motor is connected with the sun gear, institute
Linear drives part is stated to be connected with the top lap.
Further, the linear drives part includes cylinder, and the piston rod of the cylinder is connected with the top lap.
What the present invention was provided includes：Drive mechanism, top lap, lower abrasive disk, sun gear, external gear and for clamping work
The erratic star wheel of part, top lap and sun gear are connected with drive mechanism；Sun gear and external gear are respectively positioned on top lap with
Between abrasive disk, the periphery of sun gear and the periphery of erratic star wheel are equipped with the gear teeth, and external gear is in a ring and inwall is toothed around, too
Sun wheel is positioned at the interior zone of external gear, and in process of lapping, erratic star wheel is located between sun gear and external gear, and respectively with the sun
Many all locating slots are provided with wheel and external gear engagement, the end face of erratic star wheel.
In the twin grinder provided using the present invention, workpiece is set to pass through the locating slot positioning on erratic star wheel and erratic star wheel
On, erratic star wheel can increase the quantity of the workpiece of erratic star wheel positioning, the erratic star wheel that workpiece is located is put provided with many all locating slots
Between sun gear and external gear, and engaged respectively with sun gear and external gear, can place multiple between sun gear and external gear
Erratic star wheel, drive mechanism drives top lap to be moved to the direction close to lower abrasive disk, makes the upper surface of top lap and workpiece
Contact, drive mechanism drives sun gear to be rotated around the axis of itself, and sun gear engages the axle for making sun gear around itself with erratic star wheel
Line autobiography and the axis revolution around sun gear, while drive mechanism driving top lap and lower abrasive disk turn in the opposite direction
Dynamic, instrument produces relative motion with top lap, top lap is ground operation to workpiece.
Compared with existing single-sided lapping machine, the orientable workpiece number of erratic star wheel in the twin grinder that the present invention is provided
Amount increase, meanwhile, multiple erratic star wheels can be placed between sun gear and external gear, make the quantity of the workpiece of top lap simultaneous grinding
Increase, so as to improve grinding efficiency.
Another object of the present invention is to provide the twin grinder grinding work-piece described in a kind of utilization above-mentioned technical proposal
The grinding technics of one side, to alleviate the low technical problem of single-sided lapping machine efficiency in the prior art.
The grinding technics that the present invention is provided includes：
By clamping workpiece on the erratic star wheel in the twin grinder；
Between sun gear and external gear that erratic star wheel is positioned in the twin grinder；
Start the drive mechanism in the twin grinder, the workpiece is ground.
Further, the grinding steps of the workpiece are included：
Top lap in the twin grinder pastes oilstone disk and cooks corase grind operation, the granularity model of the oilstone disk
Enclose for 6um-8um；
Polyurethane skin is pasted on the top lap and using aluminum oxide in throw polishing working during liquid is done, it is described middle to throw liquid
Size range is 2um-3um；
Damping cloth and silica are pasted on the top lap, and polishing operation is done using fine polishing liquid, the essence is thrown
The size range of liquid is 80nm-100nm.
Further, in the corase grind operation, the range of speeds of the top lap is 8-15r/min, it is described under grind
The range of speeds of mill is 10-20r/min, and process time is 390S, and tonnage scope is 25-65KG.
Further, in the middle polishing working, the range of speeds of the top lap is 10-20r/min, it is described under
The range of speeds of abrasive disk is 12-25r/min, and process time is 690S, and tonnage scope is 35-80KG.
Further, in the polishing operation, the range of speeds of the top lap is 8-12r/min, it is described under grind
The range of speeds of mill is 10-15r/min, and process time is 450S, and tonnage scope is 25-45KG.
Described grinding technics had the advantage that with above-mentioned twin grinder relative to prior art it is identical, herein not
Repeat again.
Brief description of the drawings
, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical scheme of the prior art
The accompanying drawing used required in embodiment or description of the prior art is briefly described, it should be apparent that, in describing below
Accompanying drawing is some embodiments of the present invention, for those of ordinary skill in the art, before creative work is not paid
Put, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of twin grinder provided in an embodiment of the present invention；
Fig. 2 is to correct the structural representation of wheel in twin grinder provided in an embodiment of the present invention.
Icon：100- top laps；Abrasive disk under 200-；300- sun gears；400- external gears；500- feelings of stress
Answer mechanism；600- amendment wheels；700- cylinders.
Embodiment
Technical scheme is clearly and completely described below in conjunction with accompanying drawing, it is clear that described implementation
Example is a part of embodiment of the invention, rather than whole embodiments.Based on the embodiment in the present invention, ordinary skill
The every other embodiment that personnel are obtained under the premise of creative work is not made, belongs to the scope of protection of the invention.
In the description of the invention, it is necessary to explanation, term " " center ", " on ", " under ", "left", "right", " vertical ",
The orientation or position relationship of the instruction such as " level ", " interior ", " outer " be based on orientation shown in the drawings or position relationship, merely to
Be easy to the description present invention and simplify description, rather than indicate or imply signified device or element must have specific orientation,
With specific azimuth configuration and operation, therefore it is not considered as limiting the invention.In addition, term " first ", " second ",
" the 3rd " is only used for describing purpose, and it is not intended that indicating or implying relative importance.
In the description of the invention, it is necessary to illustrate, unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected, or be integrally connected；Can
To be mechanical connection or electrical connection；Can be joined directly together, can also be indirectly connected to by intermediary, Ke Yishi
The connection of two element internals.For the ordinary skill in the art, with concrete condition above-mentioned term can be understood at this
Concrete meaning in invention.
Embodiment one
Fig. 1 is the structural representation of twin grinder provided in an embodiment of the present invention, as shown in figure 1, the embodiment of the present invention
The twin grinder of offer includes：Drive mechanism, top lap 100, lower abrasive disk 200, sun gear 300, external gear 400 and use
In the erratic star wheel of clamping workpiece, top lap 100, lower abrasive disk 200 and sun gear 300 are connected with drive mechanism；Sun gear
300 and external gear 400 be respectively positioned between top lap 100 and lower abrasive disk 200, the periphery of sun gear 300 and erratic star wheel it is outer
It is equipped with the gear teeth week, external gear 400 is in a ring and inwall is toothed around, sun gear 300 is located at the interior zone of external gear 400,
In process of lapping, erratic star wheel is located between sun gear 300 and external gear 400, and is nibbled respectively with sun gear 300 and external gear 400
Close, many all locating slots are provided with the end face of erratic star wheel.
Specifically, the diameter of top lap 100 is equal with the diameter of lower abrasive disk 200, and the axis of top lap 100
Direction is identical with the axis direction of lower abrasive disk 200；Sun gear 300 and external gear 400 are respectively positioned on top lap 100 and lower grinding
Between disk 200, the axis direction phase of the axis direction of sun gear 300 and the axis direction of external gear 400 with lower abrasive disk 200
Together；Sun gear 300 is located at the interior zone of external gear 400, and the diameter of erratic star wheel is equal to the straight of sun gear 300 and external gear 400
Footpath is poor, in process of lapping, and erratic star wheel is engaged with sun gear 300 and external gear 400 respectively, and sun gear 300 drives erratic star wheel around too
The axis revolution of positive wheel 300, meanwhile, erratic star wheel drives workpiece to be moved relative to upper millstone around the axis autobiography of itself, realization pair
The grinding of workpiece.Many all locating slots are provided with the same end face of erratic star wheel, weekly on locating slot along the circumference where it
It is uniformly distributed, the setting of many week locating slots, by increasing capacitance it is possible to increase erratic star wheel positions the quantity of workpiece.
Further, the flatness of top lap 100 and lower abrasive disk 200 is respectively less than 0.05mm.
Specifically, the flatness of top lap 100 and lower abrasive disk 200 can for 0.01mm, 0.02mm, 0.03mm,
0.04mm or 0.05mm etc., by controlling the flatness of top lap 100 and lower abrasive disk 200 to make part in grinding operation
Process reduces bounce amplitude, so as to lift part polishing yield.
Further, in addition to controlling organization, pressure sensitive mechanism 500, pressure sensitive machine are provided with top lap 100
Structure 500 is connected with controlling organization signal, and controlling organization is connected with drive mechanism signal.
Controlling organization is used for the opening and closing for controlling drive mechanism, as shown in figure 1, top lap 100 passes through support frame
It is arranged on twin grinder, pressure sensitive mechanism 500 includes pressure sensor, pressure sensor is arranged at top lap 100
Upside, when top lap 100 is contacted with workpiece, for sensing the pressure between top lap 100 and workpiece.Pressure sensitive
Mechanism 500 is connected with controlling organization signal, for sending the pressure value sensed to controlling organization.
Before grinding work-piece, drive mechanism drives top lap 100 to be moved to close to the direction of workpiece, when workpiece with it is upper
After abrasive disk 100 is contacted, the pressure between pressure sensor sensing top lap 100 and workpiece, and the pressure measured is transmitted
To controlling organization, when the pressure value detected is reached the limit values, controlling organization control drive mechanism stops driving top lap
100 continue to move downward, and prevent that top lap 100 is excessive to the pressure of workpiece and it is broken to produce workpiece.
Preferably, grating scale is provided with external gear 400, grating scale is connected with controlling organization signal.
Specifically, grating scale is vertically provided for measuring the thickness for being ground workpiece, grating scale and controlling organization
Signal is connected, and the thickness of workpiece measured is sent into controlling organization.
During grinding work-piece, grating scale detection in real time is ground the residual thickness of workpiece, and by the numerical value of detection
Controlling organization is sent to, when the residual thickness for the workpiece that grating scale is detected, which reaches, to be pre-seted, controlling organization control driving machine
Structure stops the driving to sun gear 300, completes the grinding to workpiece.The setting of grating scale, realizes the residue to grinding work-piece
The real-time detection of thickness.
As another embodiment, in addition to for counting the counter of the rotation number of turns of sun gear 300, counter and control
Mechanism signal connection processed.
Counter is connected with sun gear 300, for detecting that the number of turns that the rotation number of turns and part of sun gear 300 are detected is sent to
Controlling organization.
After startup sun gear 300 during grinding work-piece, counter detects the number of turns that sun gear 300 is rotated in real time,
And the number of turns value of detection is sent to controlling organization, and when the rotation number of turns of sun gear 300 reaches preset value, controlling organization control
Drive mechanism stops the driving to sun gear 300, completes the grinding to workpiece, and the cooperation of counter and controlling organization is realized
Automation mechanized operation to grinding operation.
As another embodiment, in addition to the time relay, the time relay respectively with drive mechanism and control machine
Structure signal is connected.
The time relay is connected with drive mechanism signal, the opening time for counting drive mechanism, the time relay with
Controlling organization signal is connected, for the opening time of the drive mechanism of counting to be sent into controlling organization.
During grinding work-piece, the time relay counts the opening time of drive mechanism, and during by the unlatching of statistics
Between be sent to controlling organization, when the time relay count opening time reach preset value when, controlling organization control drive mechanism
Driving to sun gear 300, completes the grinding to workpiece.The setting of the time relay, when realizing the unlatching to drive mechanism
Between statistics.
In process of lapping, the diverse location of top lap 100 or lower abrasive disk 200 can by different degrees of abrasion,
So as to influence the depth of parallelism between top lap 100 and lower abrasive disk 200, and then the grinding quality to workpiece is influenceed, to reduce
Influence of the depth of parallelism to workpiece grinding quality between top lap 100 and lower abrasive disk 200, in the present embodiment, in addition to
Amendment wheel 600, amendment takes turns 600 in cylinder, and the periphery of amendment wheel 600 is provided with to be engaged with sun gear 300 and external gear 400
The gear teeth.
As shown in Fig. 2 amendment wheel 600 is in a ring, the gear teeth with sun gear 300 are provided with the periphery of amendment wheel 600
The gear teeth coordinated with the rotation on external gear 400, the upper surface and lower surface of amendment wheel 600 are provided with abrasive, for repairing
Change the end face of top lap 100 and lower abrasive disk 200.
In process of lapping, amendment wheel 600 is put between sun gear 300 and external gear 400, the upper surface of amendment wheel 600
Contacted with the lower surface of top lap 100, the lower surface of amendment wheel 600 is contacted with the upper surface of lower abrasive disk 200, amendment wheel
The gear teeth on 600 respectively with the gear teeth meshing on the gear teeth and external gear 400 of sun gear 300, under the drive of sun gear 300,
Amendment wheel 600 revolves round the sun around the axis of sun gear 300, and around the axis autobiography of itself, end face distribution and the upper grinding of amendment wheel 600
The end-face friction of disk 100 and lower abrasive disk 200, is repaired to the end face of top lap 100 and lower abrasive disk 200, in raising
The flatness of the end face of abrasive disk 100 and the lower end face of abrasive disk 200, so as to improve between top lap 100 and lower abrasive disk 200
The depth of parallelism, prevents the depth of parallelism between top lap 100 and lower abrasive disk 200 from reducing and influenceing grinding precision.
Further, drive mechanism includes motor and linear drives part, and motor is connected with sun gear 300, linear drives part
It is connected with top lap 100.
Specifically, motor is connected with sun gear 300, for driving sun gear 300 to be rotated around the axis of sun gear 300, is entered
One step, motor is servomotor, and servomotor can realize the rotation of square both direction, so as to realize driving sun gear 300
Around sun gear 300 axis both clockwise and rotate counterclockwise；Linear drives part is arranged on support frame, the driving of linear drives part
End is connected with top lap 100, for driving top lap 100 to be moved along setting direction.
During grinding work-piece, when the erratic star wheel that clamping has workpiece is positioned between sun gear 300 and external gear 400, straight line
Actuator drives top lap 100 to be moved to the direction close to lower abrasive disk 200, after top lap 100 is contacted with workpiece, motor
The sun is driven to rotate, sun gear 300 drives erratic star wheel revolution and rotation, workpiece is done with respect to top lap 100 and lower abrasive disk 200
Plane motion, can make each point on workpiece have same or like grinding stroke, motor drives the forward or reverse of sun gear 300,
Make erratic star wheel drive workpiece along positive and negative both direction rotation and revolution, make any point on workpiece, motion rail is avoided the occurrence of as far as possible
Being repeated cyclically for mark, so as to ensure that workpiece goes over the surface of whole top lap 100 and lower abrasive disk 200, makes top lap
100 and lower abrasive disk 200 obtain uniform wear, it is ensured that the flatness of workpiece surface.
Further, drive mechanism includes multiple motors, and top lap 100, lower abrasive disk 200 and sun gear 300 lead to
Crossing a motor drives it to be rotated around the axis of itself.
Linear drives part may include cylinder 700 or hydraulic cylinder etc., in the present embodiment, and linear drives part includes cylinder 700,
The piston rod of cylinder 700 is connected with top lap 100.
As shown in figure 1, cylinder 700 is vertically set, the cylinder body of cylinder 700 is connected with support frame, the work of cylinder 700
Stopper rod is connected with the upper surface of top lap 100.In process of lapping, the driving top lap 100 of cylinder 700 is vertically transported
It is dynamic, realize being contacting and separating for top lap 100 and workpiece.
Twin grinder provided in an embodiment of the present invention includes：Drive mechanism, top lap 100, lower abrasive disk 200, too
Sun wheel 300, external gear 400 and the erratic star wheel for clamping workpiece, top lap 100 and sun gear 300 connect with drive mechanism
Connect；Sun gear 300 and external gear 400 are respectively positioned between top lap 100 and lower abrasive disk 200, the periphery of sun gear 300 and trip
The periphery of star-wheel is equipped with the gear teeth, and external gear 400 is in a ring and inwall is toothed around, and sun gear 300 is located at the interior of external gear 400
In portion region, process of lapping, erratic star wheel be located between sun gear 300 and external gear 400, and respectively with sun gear 300 and external tooth
Wheel 400 is engaged, and many all locating slots are provided with the end face of erratic star wheel.
When using twin grinder provided in an embodiment of the present invention, workpiece is set to be positioned at by the locating slot on erratic star wheel
On erratic star wheel, erratic star wheel can increase the quantity of the workpiece of erratic star wheel positioning, the trip of workpiece will be located provided with many all locating slots
Star-wheel is put between sun gear 300 and external gear 400, and is engaged respectively with sun gear 300 and external gear 400, sun gear 300 with
Multiple erratic star wheels can be placed between external gear 400, drive mechanism drives top lap 100 to the direction close to lower abrasive disk 200
Motion, makes top lap 100 be contacted with the upper surface of workpiece, and drive mechanism drives sun gear 300 to be rotated around the axis of itself, too
Sun wheel 300 engage with erratic star wheel make sun gear 300 around the axis autobiography of itself and around sun gear 300 axis revolution, instrument and
Top lap 100 produces relative motion, top lap 100 is ground operation to workpiece.
Compared with existing single-sided lapping machine, the erratic star wheel in twin grinder provided in an embodiment of the present invention is orientable
Piece count increase, meanwhile, multiple erratic star wheels can be placed between sun gear 300 and external gear 400, make top lap 100 simultaneously
The quantity increase of the workpiece of grinding, so as to improve grinding efficiency.
Embodiment two
The purpose of the present embodiment two is to provide the twin grinder grinding work-piece one side that a kind of utilization embodiment one is provided
Grinding technics, to alleviate the low technical problem of single-sided lapping machine efficiency in the prior art.
The grinding system that the present embodiment two is provided includes：By clamping workpiece on the erratic star wheel in twin grinder；Will trip
Star-wheel is positioned between the sun gear 300 in twin grinder and external gear 400；Start the drive mechanism in twin grinder,
Workpiece is ground.
Specifically, clamping has many all workpiece on erratic star wheel, and multiple dresses are placed between sun gear 300 and external gear 400
The erratic star wheel of workpiece is accompanied, to improve grinding efficiency, further, 5-7 can be placed between sun gear 300 and external gear 400
Individual clamping has the erratic star wheel of workpiece；In process of lapping, the one side of workpiece is ground using top lap 100.
Further, the grinding steps of workpiece are included：Top lap 100 in twin grinder is pasted oilstone disk and done
Operation is roughly ground, the particle size range of oilstone disk is 6um-8um；Polyurethane skin is pasted on top lap 100 and aluminum oxide is utilized
Middle throwing liquid does middle polishing working, and the size range of middle throwing liquid is 2um-3um；Damping cloth and dioxy are pasted on top lap 100
SiClx, and polishing operation is done using fine polishing liquid, the size range of fine polishing liquid is 80nm-100nm.
Specifically, the grinding operation to workpiece is completed using three twin grinders, wherein, First twin grinder
In top lap 100 on be pasted with oilstone disk, the granularity of oilstone disk can be 6um, 7um or 8um etc., and second two-sided to grind
Resistance is pasted with the top lap 100 being pasted with top lap 100 in grinding machine in polyurethane skin, the 3rd twin grinder
Ni Bu and silica.Corase grind operation is carried out to workpiece using First twin grinder, using the second twin grinder to work
Part is ground, and throws liquid in addition aluminum oxide in process of lapping, realizes the middle polishing working to workpiece, the granularity of middle throwing liquid
Workpiece can be ground using the 3rd grinder for 2um, 2.5um or 3um etc., and adds in process of lapping fine polishing liquid,
The polishing operation to workpiece is realized, the granularity of fine polishing liquid can be 80nm, 85nm, 90nm, 95nm or 100nm etc..
Further, in corase grind operation, the range of speeds of top lap 100 is 8-15r/min, lower abrasive disk 200
The range of speeds is 10-20r/min, and process time is 390s, and tonnage scope is 25-65KG.
Specifically, corase grind operation be divided into five stages, in five stages, the rotating speed of top lap 100 be followed successively by 8r/min,
12r/min, 15r/min, 12r/min and 8r/min, the rotating speed of lower abrasive disk 200 are followed successively by 10r/min, 15r/min, 20r/
Min, 15r/min and 10r/min, process time are followed successively by 30s, 30s, 300s, 20s and 10s, to the tonnage of workpiece successively
For 25KG, 45KG, 65KG, 45KG and 15KG.
Further, in middle polishing working, the range of speeds of top lap 100 is 10-20r/min, lower abrasive disk 200
The range of speeds be 12-25r/min, process time is 690s, and tonnage scope is 35-80KG.
Specifically, middle polishing working is divided into five stages, in five stages, and the rotating speed of top lap 100 is followed successively by 10r/
Min, 12r/min, 20r/min, 12r/min and 10r/min, the rotating speed of lower abrasive disk 200 be followed successively by 12r/min, 15r/min,
25r/min, 15r/min and 12r/min, process time are followed successively by 30s, 30s, 600s, 20s and 10s, to the tonnage of workpiece
It is followed successively by 35KG, 45KG, 80KG, 45KG and 35KG.
Further, in polishing operation, the range of speeds of top lap 100 is 8-12r/min, lower abrasive disk 200
The range of speeds is 10-15r/min, and process time is 450s, and tonnage scope is 25-45KG.
Specifically, middle polishing working is divided into five stages, in five stages, the rotating speed of top lap 100 be followed successively by 8r/min,
10r/min, 12r/min, 10r/min and 8r/min, the rotating speed of lower abrasive disk 200 are followed successively by 10r/min, 12r/min, 15r/
Min, 12r/min and 10r/min, process time are followed successively by 30s, 30s, 360s, 20s and 10s, to the tonnage of workpiece successively
For 25KG, 30KG, 45KG, 30KG and 25KG.
The twin grinder provided using embodiment one carries out one side grinding operation to workpiece, when the work of clamping on erratic star wheel
Part amount and the quantity for the erratic star wheel that can be placed simultaneously increase, and improve grinding efficiency.
Finally it should be noted that：Various embodiments above is merely illustrative of the technical solution of the present invention, rather than its limitations；To the greatest extent
The present invention is described in detail with reference to foregoing embodiments for pipe, it will be understood by those within the art that：Its according to
The technical scheme described in foregoing embodiments can so be modified, or which part or all technical characteristic are entered
Row equivalent substitution；And these modifications or replacement, the essence of appropriate technical solution is departed from various embodiments of the present invention technology
The scope of scheme.
Claims (10)
1. a kind of twin grinder, it is characterised in that including：Drive mechanism, top lap, lower abrasive disk, sun gear, external gear
With the erratic star wheel for clamping workpiece, the top lap, the lower abrasive disk and the sun gear with the drive mechanism
Connection；
The sun gear and the external gear are respectively positioned between the top lap and the lower abrasive disk, outside the sun gear
The periphery of all and described erratic star wheel is equipped with the gear teeth, and the external gear is in a ring and inwall is toothed around, and the sun gear is located at
In the interior zone of the external gear, process of lapping, the erratic star wheel is located between the sun gear and the external gear, and point
Do not engaged with the sun gear and the external gear, many all locating slots are provided with the end face of the erratic star wheel.
2. twin grinder according to claim 1, it is characterised in that the top lap and the lower abrasive disk it is flat
Face degree is respectively less than 0.05mm.
3. on twin grinder according to claim 1, it is characterised in that also including controlling organization, the top lap
Be provided with pressure sensitive mechanism, the pressure sensitive mechanism is connected with the controlling organization signal, the controlling organization with it is described
Drive mechanism signal is connected.
4. twin grinder according to claim 3, it is characterised in that also including the time relay, the time relay
Device is connected with the drive mechanism and the controlling organization signal respectively.
5. twin grinder according to claim 1, it is characterised in that also including amendment wheel, the amendment wheel is in cylinder
Shape, the periphery of the amendment wheel is provided with the gear teeth engaged with the sun gear and the external gear.
6. a kind of grinding technics of the twin grinder grinding work-piece one side described in utilization claim any one of 1-5, its feature
It is, including：
By clamping workpiece on the erratic star wheel in the twin grinder；
Between sun gear and external gear that erratic star wheel is positioned in the twin grinder；
Start the drive mechanism in the twin grinder, the workpiece is ground.
7. grinding technics according to claim 6, it is characterised in that the grinding steps of the workpiece are included：
Top lap in the twin grinder pastes oilstone disk and cooks corase grind operation, and the particle size range of the oilstone disk is
6um-8um；
On the top lap paste polyurethane skin and using aluminum oxide in throw liquid do in polishing working, it is described it is middle throw liquid particle
Degree scope is 2um-3um；
Damping cloth and silica are pasted on the top lap, and polishing operation is done using fine polishing liquid, the fine polishing liquid
Size range is 80nm-100nm.
8. grinding technics according to claim 7, it is characterised in that in the corase grind operation, the top lap
The range of speeds is 8-15r/min, and the range of speeds of the lower abrasive disk is 10-20r/min, and process time is 390S, processing
Pressure limit is 25-65KG.
9. grinding technics according to claim 7, it is characterised in that in the middle polishing working, the top lap
The range of speeds is 10-20r/min, and the range of speeds of the lower abrasive disk is 12-25r/min, and process time is 690S, processing
Pressure limit is 35-80KG.
10. grinding technics according to claim 7, it is characterised in that in the polishing operation, the top lap
The range of speeds is 8-12r/min, and the range of speeds of the lower abrasive disk is 10-15r/min, and process time is 450S, processing
Pressure limit is 25-45KG.
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| CN201710535090.8A CN107263278A (en) | 2017-07-03 | 2017-07-03 | Twin grinder and grinding technics |
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| CN201710535090.8A CN107263278A (en) | 2017-07-03 | 2017-07-03 | Twin grinder and grinding technics |
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| CN108312002A (en) * | 2018-01-30 | 2018-07-24 | 海宁杰盛新材料有限公司 | One kind being used for advertising lamp box board processing device |
| CN109015338A (en) * | 2018-08-17 | 2018-12-18 | 铜陵晶越电子有限公司 | A kind of lapping machine for two-side of wafer for modifying amendment wheel with flatness |
| CN110871385A (en) * | 2018-08-29 | 2020-03-10 | 东泰高科装备科技（北京）有限公司 | Double-side polishing machine and polishing method |
| CN111230728A (en) * | 2019-12-18 | 2020-06-05 | 昆山益延精密五金有限公司 | Double-side grinding device |
| CN113183028A (en) * | 2021-04-08 | 2021-07-30 | 江西钨业控股集团有限公司 | Planet disc clamp, process for machining diamond-shaped blade by using planet disc clamp and diamond-shaped blade |
| CN113246000A (en) * | 2021-05-21 | 2021-08-13 | 深圳西可实业有限公司 | Intelligent sweeping machine |
| CN114310654A (en) * | 2021-12-28 | 2022-04-12 | 海南钇坤智能科技有限公司 | Thickness adjusting process for fluorescent ceramic wafer |
| CN117086774A (en) * | 2023-10-19 | 2023-11-21 | 新乡市斯凯夫机械有限公司 | Special grinding machine and grinding process for ceramic parts |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108312002A (en) * | 2018-01-30 | 2018-07-24 | 海宁杰盛新材料有限公司 | One kind being used for advertising lamp box board processing device |
| CN109015338A (en) * | 2018-08-17 | 2018-12-18 | 铜陵晶越电子有限公司 | A kind of lapping machine for two-side of wafer for modifying amendment wheel with flatness |
| CN110871385A (en) * | 2018-08-29 | 2020-03-10 | 东泰高科装备科技（北京）有限公司 | Double-side polishing machine and polishing method |
| CN111230728A (en) * | 2019-12-18 | 2020-06-05 | 昆山益延精密五金有限公司 | Double-side grinding device |
| CN113183028A (en) * | 2021-04-08 | 2021-07-30 | 江西钨业控股集团有限公司 | Planet disc clamp, process for machining diamond-shaped blade by using planet disc clamp and diamond-shaped blade |
| CN113246000A (en) * | 2021-05-21 | 2021-08-13 | 深圳西可实业有限公司 | Intelligent sweeping machine |
| CN114310654A (en) * | 2021-12-28 | 2022-04-12 | 海南钇坤智能科技有限公司 | Thickness adjusting process for fluorescent ceramic wafer |
| CN117086774A (en) * | 2023-10-19 | 2023-11-21 | 新乡市斯凯夫机械有限公司 | Special grinding machine and grinding process for ceramic parts |
| CN117086774B (en) * | 2023-10-19 | 2024-01-05 | 新乡市斯凯夫机械有限公司 | Special grinding machine and grinding process for ceramic parts |
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Application publication date: 20171020 |