CN107109631A - Manufacture method, cylindrical shape sputter target and the firing assisted tool of cylindrical shape target - Google Patents
Manufacture method, cylindrical shape sputter target and the firing assisted tool of cylindrical shape target Download PDFInfo
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- CN107109631A CN107109631A CN201580073047.3A CN201580073047A CN107109631A CN 107109631 A CN107109631 A CN 107109631A CN 201580073047 A CN201580073047 A CN 201580073047A CN 107109631 A CN107109631 A CN 107109631A
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/453—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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Abstract
The manufacture method of the cylindrical shape target of embodiment is included：Forming step and firing step.Body is made for the ceramics that making is configured to tubular in forming step.It is alongst to be supported with the outer peripheral face of formed body by the receiving surface of bracket to fire step, and with respect to the horizontal plane inclined posture fires formed body.
Description
Technical field
The embodiment of announcement is related to the manufacture method of cylindrical shape target, cylindrical shape sputter target and firing assisted tool.
Background technology
It is previously known to have a kind of inner side in columnar target that there is magnetic field generation device, and while from inner side cooled target
Material, while rotating target, carries out magnetron-type rotating cathode sputtering unit (the magnetron type rotary of sputter
cathod sputtering device).In such sputtering unit, the outer surface of target it is comprehensive through corroding, it is and uniform
Prune on ground.Therefore, the service efficiency of target is 20 to 30% in conventional plate-type magnetron sputtering unit, in contrast, magnetic
Keyholed back plate type rotating cathode sputtering unit can then obtain more than 70% very high target service efficiency.
In addition, in magnetron-type rotating cathode sputtering unit, being rotated by columnar target is made while carrying out
Sputter, compared to plate-type magnetron sputtering unit, per unit area can put into larger power (power), therefore can obtain compared with
High film forming speed, and production efficiency when can improve film forming.
In recent years, glass substrate used in flat-panel screens or solar cell is maximized, in order to maximized in this
Substrate on efficiently form film, it is necessary to strip cylindrical shape sputter target for example more than 3m.With this situation, increase and constitute
The demand of the length of the cylindrical shape target of cylindrical shape sputter target also increases.
Increase the method for ceramic rounding tubular target length, it is known to the overlapping method (example using multiple cylindrical shape targets
As with reference to patent document 1).However, in order to prevent target because of the collision cracking caused by thermal expansion between cylindrical shape target, and according to
So there is cutting part, and produce the arc light (arcing) or particulate due to this cutting part.In order to suppress this arc light or particulate
Generation, it is necessary to eliminate cutting part in itself, or increase the overlapping cylindrical shape target used to reduce the quantity of cutting part
Respective length.
On the other hand, if increasing the length of cylindrical shape target, deformation is also easy to produce when the firing of manufacturing process.If be intended to from
The cylindrical shape target with purpose size is made in the fired body significantly deformed, then in advance must be fired into formed body formed thereby
For the size thicker compared with purpose size, then carry out the processing such as cutting, therefore cost is uprised.More and, by the firing obtained by firing
If body is deformed and more than machinable limit, even if using thick formed body, can not still processed completely in later processing procedure
Into purpose size, and it can not utilize and be used as target.That is, especially produced in the manufacture of long size cylindrical shape target during firing
Deformation can cause processing caused by significant loss increase or the making for the fired body for being used as cylindrical shape target can not be used
Deng yield can be greatly reduced.
In patent document 2,3, recite columnar ceramic formation body with the shrinkage factor equal with the formed body
Component on fire and suppress the method for the deformation of section shape.
[prior art literature]
[patent document]
[patent document 1] Japanese Unexamined Patent Publication 2010-100930 publications
[patent document 2] Japanese Unexamined Patent Publication 5-70244 publications
[patent document 3] Japanese Unexamined Patent Publication 6-279092 publications.
The content of the invention
[the invention problem to be solved]
However, in above-mentioned conventional art, length still is being made when 500mm is with first-class oval tubular target
During firing, the generation unavoidably deformed, therefore have more room for improvement.
One specific embodiment of embodiment forms in view of above-mentioned problem, and its object is to provide a kind of suppression to fire
When the generation deformed and the yield of raw material that uses is good and manufacture method, the cylindrical shape of cylindrical shape target that can inexpensively make are splashed
Plate target and firing assisted tool.
[being used to the means to solve the problem]
The manufacture method of the cylindrical shape target of embodiment is comprising forming step and fires step.Made in forming step
It is configured to the formed body of the ceramics system of tubular.Fire step in, with the outer peripheral face of foregoing formed body alongst and by
The receiving surface support of bracket (setter), and with respect to the horizontal plane inclined posture fires foregoing formed body.
[The effect of invention]
If a specific embodiment according to embodiment, it is possible to provide a kind of generation of deformation when suppression is fired and use
Raw material yield it is good, and the manufacture method of the cylindrical shape target that can inexpensively make, cylindrical shape sputter target and firing auxiliary
Tool.
Brief description of the drawings
Figure 1A is the schematic diagram for the composition summary for representing cylindrical shape sputter target.
Figure 1B is Figure 1A A-A ' profiles.
Fig. 2A is the explanation figure of the manufacture method summary for the cylindrical shape target for representing embodiment.
Fig. 2 B are Fig. 2A B-B ' profiles.
Fig. 3 A are the figures for the deformation for illustrating the length direction about a fired body.
Fig. 3 B are the figures of the deformation for the radial direction for illustrating a fired body.
Fig. 4 A are the explanation figures of the manufacture method summary for the cylindrical shape target for representing embodiment.
Fig. 4 B are the explanation figures of the manufacture method summary for the cylindrical shape target for representing embodiment.
Fig. 4 C are Fig. 4 B C-C ' profiles.
Fig. 5 A are the explanation figures of the summary of the variation of the manufacture method for the cylindrical shape target for representing embodiment.
Fig. 5 B are the explanation figures of the summary of the variation of the manufacture method for the cylindrical shape target for representing embodiment.
Fig. 6 is the flow chart of one of the manufacture method for the cylindrical shape target for representing embodiment.
Primary clustering symbol description
1 cylindrical shape sputter target (cylindrical target)
2 cylindrical shape targets
3 support tubes
4 engagement materials
5th, 10,11 bracket
6 bottom plates
7 horizontal planes
8 V word brackets
12 formed bodies
51st, 81,101,111 receiving surface.
Embodiment
Hereinafter, with reference to the accompanying drawing of annex, manufacture method, the cylindrical shape sputter for the cylindrical shape target that this case is disclosed are described in detail
The embodiment of target and firing assisted tool.In addition, embodiment as shown below is not limited to the present invention.
First, by about that can apply by the cylindrical shape target made by the manufacture method of the cylindrical shape target of embodiment
Cylindrical shape sputter target, use Figure 1A, Figure 1B explanation.
Figure 1A is the schematic diagram of the summary of the composition for the cylindrical shape sputter target for representing embodiment, and Figure 1B is Figure 1A A-A '
Profile.In addition, in order that explanation is readily understood by, Figure 1A and Figure 1B are the vertical coordinate system of 3-dimensional, and expression is included will vertically upward
Positive direction is set to, the Z axis of negative direction will be set to vertically downward.Such vertical coordinate system is also used in explanation described later sometimes
Other accompanying drawings represent.
As illustrated in figures 1A and ib, cylindrical shape sputter target (hereinafter referred to as " cylindrical target ") 1 possesses：Cylindrical shape target 2 and
Support tube (backing tube) 3.Cylindrical shape target 2 and support tube 3 are engaged with engaging material 4.
Herein, cylindrical shape target 2 is made up of the ceramic prepared material for being processed to slightly drum.Illustrate cylindrical target below
One of the manufacture method of material 2.
The manufacture method of cylindrical shape target 2 is makes via following step：Make containing ceramic material powder and organic add
Plus cream slurry (slurry) granulation of thing, make the granulation step of granule；And, make this granule shape, and make tubular into
The forming step of body.In addition, the preparation method of formed body is not limited to above-mentioned person, and it can be any method.
Again and, the manufacture method of the cylindrical shape target 2 of embodiment is also comprising the firing step for firing formed body.Firing
In step, alongst supported with the outer peripheral face of formed body by the receiving surface of bracket, and it is with respect to the horizontal plane inclined
Posture fire formed body, whereby, the deformation produced when the firing of formed body can be reduced.Hereinafter, so fired relevant
One of step, uses Fig. 2A, Fig. 2 B explanations.
During Fig. 2A is the manufacture method of cylindrical shape target 2 of embodiment, the explanation for the summary for firing step is particularly shown
Figure, Fig. 2 B are Fig. 2A B-B ' profiles.
As shown in Figure 2 A, the slightly flat bracket 5 of firing assisted tool with the side of receiving surface 51 upward, with respect to the horizontal plane
7 configure in an inclined manner.Also, formed body 12 is slightly matched somebody with somebody with receiving surface 51 with the length direction of formed body 12 into parallel mode
Put.Whereby, length direction of the formed body 12 with outer peripheral face 121 along formed body 12 is supported by receiving surface 51, and relative to level
The posture that face 7 tilts only angle, θ 1 is fired.About angle, θ 1 detailed content in being described hereinafter.
The density ratio of above-mentioned formed body 12 is low by obtained fired body is fired.Therefore, formed body 12 is fabricated to compared with quilt
It is preprogrammed to the thick size of the size of cylindrical shape target 2.The size of length direction will also be grown compared with the total length of cylindrical shape target 2.
Moreover, the density of formed body 12 is about 60 to 70% or so of the density of cylindrical shape target 2 obtained by processing fired body, during firing
20% or so contraction, i.e. linear shrinkage occur for size.
Generally it is fired firing step with the state for holding up formed body 12.But, now, such as except in baking furnace
The shaping density often located of formed body 12 it is poor or fire when baking furnace in the temperature difference often located outside, also have due in order to
Inclination of formed body 12 of the inclination for firing assisted tool or bracket and siege of formed body 12 etc. etc. is fired and loads, so that in
Fired body is also easy to produce the deformation of length direction.
If moreover, making formed body 12 couch and fire as slightly horizontal mode with the length direction of formed body 12, such as
Above-mentioned formed body 12 can be reduced in the deformation of length direction, but be also easy to produce radially because of the softened weight of formed body 12 itself
Deformation.Therefore, the external diameter at every place and/or the chi of internal diameter are also easy to produce by the fired body for making formed body 12 couch and firing gained
Very little different wait deforms.Herein, " deformation of length direction " and " deformation of radial direction " of a fired body is distinguished using Fig. 3 A, Fig. 3 B
Explanation.
First, " deformation of length direction " of a relevant fired body is illustrated.Fig. 3 A are illustrated about once firing
The figure of the deformation of the length direction of body.As shown in Figure 3A, the preferable shape without deformation of drum will be assumed to be once
The vertical coordinate that fired body is configured at 3-dimensional in the way of making the parallel XZ planes of both ends of the surface, the parallel Y-axis of length direction is fastened.Now,
From X-direction watches the rectangular appearance shape L of an imaginary fired body, by face shaping L with fired body in length
Spend direction extension long side at least a portion from the state of parallel Y-axis towards X-axis side and/or Z axis side warpage or bending mode
Deformation is referred to as " twisted in length direction ", and the degree deformed claims to turn into " deformation of length direction ".In addition, face shaping Ld
The length direction of a fired body is illustrated towards the twisted appearance of Z-direction.
Secondly, " deformation of radial direction " of a relevant fired body is illustrated.Fig. 3 B are the radial directions for illustrating a fired body
Deformation figure.As shown in Figure 3 B, the fired body and Fig. 3 A of the desirability shape without deformation of drum will be assumed to be
The vertical coordinate for being similarly configured at 3-dimensional is fastened.Now, the ring like appearance shape of an imaginary fired body is watched from Y direction
In shape R, at least a portion in external diameter and/or internal diameter is deformed in X-axis side and/or Z axis side by external force referred to as " radially askew
Turn round ", the degree deformed is referred to as " deformation of radial direction ".In addition, in " deformation of radial direction ", external diameter is defined as in radially twisted
" external diameter deformation ", internal diameter is set to " ID distortion " and distinguished in radially twisted.In addition, face shaping Rd represents external diameter and internal diameter
By the appearance that the end face or section shape of a fired body are twisted in the way of Z-direction is compressed.
In contrast, in the manufacture method of the cylindrical shape target 2 of embodiment, formed body 12 is in with respect to the horizontal plane 7
Inclined state is fired.By making formed body 12 with respect to the horizontal plane 7 inclined, and the width in vertical direction of formed body 12
Degree, i.e. shown in Fig. 2A in Z-direction extension formed body 12 size, be larger during compared to making formed body 12 couch.Cause
This, if the manufacture method of the cylindrical shape target 2 according to embodiment, the deformation that the vertical direction of formed body 12 can be made is suppressed
Fired body.
In addition, in the manufacture method of the cylindrical shape target 2 of embodiment, the outer peripheral face 121 of formed body 12 is along length
Direction is supported and fired by the receiving surface 51 of bracket 5.Formed body 12 alongst and by receiving surface 51 is supported, therefore formed body
12 loading covers length direction and is almost equably entrusted to bracket 5.Therefore, if cylindrical shape target 2 according to embodiment
Manufacture method, formed body 12 turns into the shape along bracket 5 during firing, can be made and erect formed body 12 and fire phase
The repressed fired body of deformation than length direction.Moreover, may be because of such as formed body. with regard to columnar formed body in nature
12 end turns into convex etc., and the situation that the mode described above of formed body 12 is loaded can not be made by producing.In this respect, for general
Formed body 12 is loaded and fired in the way of shown in Fig. 2A, also can carry out cutting into the processing of the end of body 12 etc. in advance.
Here, angle, θ 1 represents the inclined degree of with respect to the horizontal plane 7 formed body 12, and take 0 ° to 90 ° of value.So
Angle, θ 1 (hereinafter referred to as " tiltangleθ 1 ") preferably less than more than 30 ° 85 °, more preferably less than more than 40 ° 85 °, even more preferably
Less than more than 60 ° 75 °.When tiltangleθ 1 is not up to 30 °, have the deformation of such as vertical direction according to the length of formed body 12 not by
The situation fully suppressed.In addition, if tiltangleθ 1 is more than 85 °, having can not for example be such that formed body 12 is fully propped up by receiving surface 51
The situation of support.
In addition, by standing in the both ends of the surface of formed body 12 of bracket 5, can configure in end face (bottom surface) side for being configured at downside
The bottom plate 6 for loading the bottom surface of formed body 12.As shown in Figure 2 A, configured in the way of the angle relative to bracket 5 to be in 90 °
During the mounting formed body 12 of mounting surface 61 of bottom plate 6, formed body 12 can be supported by the bottom surface 123 of formed body 12.Thus, for example shaping
In the side of bottom surface 123 of body 12, only a part is contacted with siege etc., and the loading of formed body 12 concentrates on the pole of formed body 12
A small part, can prevent suppress to be cracked or deform produce improper situation.
Herein, the preferred tabular of bracket 5, but as long as the shape at least in the way of the receiving surface 51 of formed body 12 turns into slightly plane
Into the shape of bracket 5 is unrestricted.In addition, the material of bracket 5 is with the high pottery of the heat resistances such as aluminum oxide, magnesia, zirconium oxide
Porcelain is preferred.In addition, in the receiving surface 51 of bracket 5, the powder of high-purity mangesium oxide aluminum can be also adhered at the abutting of formed body 12.
In addition, in order to suitably keep the tiltangleθ 1 of with respect to the horizontal plane 7 formed body 12 and maintain bracket 5 and/or
The inclined method of bottom plate 6 is not particularly limited.It can lift for example, making bracket 5 and/or bottom plate 6 by standing in as specific height
The refractory brick blocks come of mode heap on method etc., but not limited to this.In addition, the tiltangleθ 1 of formed body 12 is with firing
Front and rear unchanged or after firing cooling terminate untill to maintain above-mentioned set scope interior be preferred.
Herein, the total length that the manufacture method of the cylindrical shape target 2 of embodiment is applied to formed body 12 be preferably 500mm with
Upper, more preferably more than 600mm, even more preferably more than 750mm, most preferably more than 1000mm situation.The total length of formed body 12 is not
During up to 500mm, even if not applying this manufacture method, the deformation produced by the firing of formed body 12 is also small.But, even if for total length
Do not reach 500mm formed body 12, also mitigate warpage or deformation, thus this manufacture method for the formed body 12 with any total length all
It can apply.In addition, the higher limit person of being not particularly limited of the total length of formed body 12, but fire the cylindrical shape target of the gained of formed body 12
2 are arranged at the inside of sputtering unit, therefore usually below 4000mm.
In addition, by the cylindrical shape target 2 obtained by the processing of fired body can illustrate such as containing In, Zn, Al, Ga, Zr, Ti,
At least one kind of oxide in Sn, Mg and Si etc..The content with Sn can particularly be illustrated with SnO2It is scaled 1 to 10 matter
Measure % ITO (In2O3-SnO2)；Al content is with Al2O3It is scaled 0.1 to 5 quality % AZO (Al2O3-ZnO)；In's contains
Amount is with In2O3The content of 10 to 60 quality %, Ga is scaled with Ga2O3The content for being scaled 10 to 60 quality %, Zn is changed with ZnO
Calculate as 10 to 60 quality % IGZO (In2O3-Ga2O3-ZnO)；And Zn content is scaled 1 to 15 quality % IZO with ZnO
(In2O3- ZnO) etc. composition, but be not limited to this.In addition, being machined in for relevant fired body is hereinafter described.
In addition, when made cylindrical shape target 2 is ITO, preferably 1500 DEG C to 1700 DEG C of the firing temperature of formed body 12,
More preferably 1500 DEG C to 1650 DEG C, even more preferably 1500 DEG C to 1600 DEG C.In addition, when made cylindrical shape target 2 is AZO,
Preferably 1300 DEG C to 1500 DEG C of the firing temperature of formed body 12, more preferably 1300 DEG C to 1450 DEG C, even more preferably 1350 DEG C extremely
1450℃.In addition, when made cylindrical shape target 2 is IGZO, preferably 1350 DEG C to 1550 DEG C of the firing temperature of formed body 12,
More preferably 1400 DEG C to 1500 DEG C, even more preferably 1400 DEG C to 1450 DEG C.Then, when made ceramics target 2 processed is IZO,
Preferably 1350 DEG C to 1550 DEG C of the firing temperature of formed body 12, more preferably 1400 DEG C to 1500 DEG C, even more preferably 1400 DEG C extremely
1450℃.If firing temperature is too low, the density of fired body can not be fully improved sometimes.On the other hand, if firing temperature is too high, into
The sintering structure hypertrophyization of body 12 and be easily cracked.
In addition, the programming rate of formed body 12 preferably 50 DEG C/h to 500 DEG C/h.When warming temperature is not up to 50 DEG C/h, reach
Time untill firing temperature is elongated, and the activity duration is elongated.If in addition, warming temperature is more than 500 DEG C/h, every portion of formed body 12
The temperature difference divided becomes big, is also easy to produce cracking.
Further, preferably 3 to the 30 hours retention time of the firing temperature in step is fired, more preferably 5 to 20 hours,
Even more preferably 8 to 16 hours.Firing time is longer, the easier densification of target, if but it is oversize, the sintering structure of fired body is loose
Change and be easily cracked.
In addition, in above-mentioned embodiment, illustrating and being related in the mounting surface 61 of bottom plate 6 the directly bottom of mounting formed body 12
The example in face 123, but can also have and cobasis bottom of the formed body 12 with the shrinkage factor of degree in configuration on bottom plate 6.By configuration such as
This cobasis bottom, can more suppress the deformation of the shape of the side of bottom surface 123 of such as formed body 12.In addition, so cobasis bottom is preferred
Using with the identical of formed body 12 constitute, and it is formed be unfired sheet or tabular person.Whereby, formed body 12 and
The adjoint contraction of the temperature change at cobasis bottom and same degree is expanded to, the deformation of formed body 12 can be suppressed.But, as long as temperature becomes
Change adjoint contraction and expansion and the same degree of formed body 12, then the composition at cobasis bottom is not limited to above-mentioned person.
Secondly, the manufacture method of the cylindrical shape target 2 of embodiment is further illustrated.The cylindrical shape target 2 of embodiment
Manufacture method further comprising the finishing step that finishes fired body.The processing method of this step is for example first in cylinder
Abrasive disk disposes fired body, carries out the processing of periphery surface side.Then, using the outer peripheral face of fired body as benchmark, inner peripheral surface is carried out
The processing of side.The processing of the last periphery surface side for being fired body once again, grinds to form the size of target.In addition, length direction
Processing can be carried out by cutting and/or grinding.By finishing so, the cylindrical target with desired size is made
Material 2.As long as in addition, the cylindrical shape target 2 with same machining accuracy can be manufactured, being then not limited to above-mentioned processing method.
Furthermore, further illustrate by the cylindrical shape target 2 obtained by the manufacture method of the cylindrical shape target 2 of embodiment.
The relative density of cylindrical shape target 2 preferably more than 95%, more preferably more than 98%, even more preferably more than 99%.If cylindrical target
The relative density of material 2 is more than 95%, the cylindrical shape target 2 thermal expansion such as when can prevent or suppress due to sputter
Cracking.In addition, it is possible to decrease the particulate or agglomerate (nodule) and arc light produced by sputter, and obtain with good film quality
Film.Here, the assay method of the relative density for cylindrical shape target 2, is illustrated in down.
The relative density of cylindrical shape target 2 is determined according to Archimedian method.Particularly by the aerial weight of cylindrical shape target 2
Amount divided by volume (the water proportion of weight/measurement temperature in the water of=cylindrical shape target 2), by relative to according to following formula (X)s
Solid density ρ (g/cm3) the value of percentage be set to relative density (unit：%).
In above-mentioned formula (X), C1To CiThe content (quality %) of the composition material of composition cylindrical shape target 2, ρ are represented respectively1Extremely
ρiRepresent to correspond to C1To CiEach composition material density (g/cm3)。
Then, Figure 1A and Fig. 2 B are returned, are further illustrated about the manufacture using the cylindrical shape target 2 by embodiment
The cylindrical target 1 of cylindrical shape target 2 obtained by method.Support tube 3 can suitably select and use conventional institute user.So prop up
Stay tube 3 can be applied such as stainless steel, titanium, titanium alloy, but is not limited to this.
In addition, engagement material 4 can suitably select conventional institute user, by method engagement cylinder shape target same
2 and support tube 3.So engagement material 4 can illustrate such as indium or indium-tin alloy, but be not limited to this.
In addition, Figure 1A represents that cylindrical target 1 is bonded to the example of 1 cylindrical shape target 2 in the outside of 1 support tube 3, but not
It is defined in this.For example, the cylindrical shape target 2 of more than 2 can will be made in the outside of the support tube 3 of more than 1 or 2 in same axis
Simultaneously bonder uses as cylindrical target 1 for upper arrangement.When multiple cylindrical shape targets 2 is arranged and is engaged, adjacent cylindrical shape
The length in the gap between target 2, i.e. cutting part preferably 0.05 to 0.5mm.The length of cutting part is shorter, is cured during sputter and is difficult to produce
Arc light, but cutting part length do not reach 0.05mm when, make cylindrical target because of the thermal expansion in engagement step or sputter sometimes
Material 2 is impinging one another, cracking.
Illustrate in above-mentioned embodiment about making formed body 12 by standing on connecing for flat bracket 5 in step is fired
The example fired by portion 51, but as long as the producer of deformation during firing can be suppressed, being not limited to above-mentioned example.Join below
Illustrate the variation for firing step according to Fig. 4 A to Fig. 4 C.
Fig. 4 A are represented in the manufacture method of the cylindrical shape target 2 of embodiment, may replace the V words of bracket 5 and application
The explanation figure of the composition summary of bracket 8.In addition, during Fig. 4 B are the manufacture method of cylindrical shape target 2 for represent embodiment, especially
It is the explanation figure for firing step summary, Fig. 4 C are Fig. 4 B C-C ' profiles.
As shown in Fig. 4 A to Fig. 4 C, in addition to substitution bracket 5 is fired using V words bracket 8, firing condition is included
It is same Deng the embodiment with being illustrated using Fig. 2A, Fig. 2 B.In addition, for being assigned with above-mentioned embodiment identical component
Identical symbol, while the description thereof will be omitted, or only terminates in simple declaration.
The V words bracket 8 of one of firing assisted tool includes the receiving surface 81 for having been formed as section V shape.Receiving surface 81
By being constituted with the opposite receiving surface 81a of set angle, 81b.In addition, V words bracket 8 is included：Along receiving surface 81a, 81b's
Valley 83 that intersecting lens is formed, the mountain portion 82 formed with set interval and the opposite mode of valley 83, to cover entirety
Mode with almost identical thickness is formed.
As shown in Fig. 4 B, Fig. 4 C, V words bracket 8 is using the side of mountain portion 82 under, i.e., the side of receiving surface 81 is upper, mountain portion 82 and valley
83 with respect to the horizontal plane 7 inclination only tiltangleθs 1 modes configure.In addition, formed body 12 is with receiving surface 81a, 81b inclination side
Configured to the length direction of formed body 12 as slightly vertical mode.Whereby, formed body 12 with outer peripheral face 121 along formed body
12 length direction is supported by receiving surface 81a, 81b, and with respect to the horizontal plane 7 postures for tilting only tiltangleθ 1 are fired.
Herein, compare in Fig. 2 B and Fig. 4 C, Fig. 2 B, the outer peripheral face 121 of formed body 12 for bracket 5 receiving surface 51 in 1
Place is abutted.In contrast, in Fig. 4 C, the outer peripheral face 121 of formed body 12 is for the receiving surface 81a of V words bracket 8, and 81b is respectively at 1
Place is abutted, i.e., abutted at 2 for the entirety of receiving surface 81.Therefore, if being used as firing assisted tool according to application V words bracket 8
Present embodiment, with application bracket 5 when compared, the loading that formed body 12 is given to V words bracket 8 is disperseed, during firing into
The generation of the cracking of body 12 is further reduced.In addition, by with the place of abutting of formed body 12 be 2 at, even if formed body 12 in
Shunk during firing, the length direction of formed body 12 usually can keep almost parallel state to tie up with along the direction of valley 83
Hold, therefore the generation of the deformation of the fired body of gained is further reduced.
Herein, identical with bracket 5, the material of V words bracket 8 is with the high ceramics of the heat resistances such as aluminum oxide, magnesia, zirconium oxide
To be preferred.In addition, in V words bracket 8, the powder of high-purity mangesium oxide aluminum can be adhered at the abutting of formed body 12.In addition, receiving surface
The angle, θ 2 that 81a, 81b are constituted can be according to the outside dimension or quality and then firing temperature of formed body 12 or firing time etc.
And change.Preferably less than more than 25 ° 80 °, more preferably less than more than 45 ° 70 ° of this angle, θ 2.θ 2 is not up to 25 ° or more than 80 °
When, it is also easy to produce the deformation of radial direction in formed body 12.In addition, in the embodiment illustrated using Fig. 4 A to Fig. 4 C, with V words bracket 8
Thickness cover all almost identical and illustrate, but as long as the abutting of formed body 12 receiving surface 81 be shaped as it is almost identical i.e.
Can, the mountain portion 82 and the shape of valley 83 that formed body 12 is not abutted are not limited to above-mentioned person.
For example, as shown in Figure 5A, but though will have by receiving surface 10a, receiving surface 101 that 10b is constituted and with containing connecing
By face 10a, the valley 103 that the mode of 10b intersecting lens is formed, but the bracket 10 of the shape without suitable Yushan Hill portion 82,
Using the firing assisted tool as substitution V words bracket 8.
In addition, as shown in Figure 5 B, with by receiving surface 11a, the receiving surface 111 that 11b is constituted, but valley 113 is section
The bracket 11 of arcuation, can also apply the firing assisted tool as substitution V words bracket 8.
Secondly, about the manufacture method of the cylindrical shape target 2 of embodiment, illustrated using Fig. 6.Fig. 6 is to represent to make real
Apply the flow chart of one of the processing sequence of the cylindrical shape target 2 of mode.
As shown in fig. 6, first, making the formed formed body 12 (step S11) for tubular.Then, with formed body 12
Outer peripheral face 121 alongst and by the receiving surface 51 or 81 of bracket 5 or V words bracket 8 supports, and with respect to the horizontal plane 7 is in
Inclined posture fires formed body 12, the fired body (step S12) of generation reduction deformation.
Then, the outer peripheral face and inner peripheral surface and cutting simultaneously and/or grinding both ends of the surface (step S13) of grinding fired body.Borrow
Each step more than, makes the cylindrical shape target 2 with desired size.
[embodiment]
[embodiment 1]
Allocating the specific surface area (BET specific surface area) determined according to BET (Brunauer-Emmett-Teller) method is
5m2/ g SnO2The mass % of powder 10, BET specific surface area are 5m2/ g In2O3The mass % of powder 90, by oxygen in alms bowl (pot)
Change zirconium ball and carry out ball mill mixing, brewable material powder.In addition, above-mentioned BET specific surface area uses Yuasa-ionics (stock)
The Monosorb (trade name) of system, according to BET1 point methods (He/N2Mixed gas) and determine.In the present embodiment, mesh will be determined
The amount of target powder is set to 0.3g, is measured after implementing preparation degassing under atmospheric pressure, with 105 DEG C 10 minutes.
In this alms bowl, it is separately added into relative to the polyvinyl alcohol, 0.2 matter that the mass % of material powder 100 is 0.3 mass %
The water of % polycarboxylic acids ammonium, 0.5 mass % polyethylene glycol and 50 mass % is measured, ball mill mixing is carried out and modulates cream slurry.Its
It is secondary, by the slurry supply of this cream to spray-drying installation, with sprayer (atomizer) rotation number 14,000rpm, inlet temperature 200
DEG C, the condition of 80 DEG C of outlet temperature be spray-dried, particle modulator body.
This granule is flowed out into (tapping) while being filled in the columned neutron (core with external diameter 157mm
Rod) internal diameter 220mm (thickness 10mm), in the amido formate rubber mold of length 630mm drum, closed rubber pattern
After tool, with 800kgf/cm2The pressure of (about 78.5MPa) carries out CIP (Cold Isostatic Pressing) shapings, makes and omits
Columnar formed body 12.By this formed body 12 so that 600 DEG C are heated 10 hours and remove organic principle.Programming rate is set to 50
℃/h。
Further, the formed body 12 through removing organic principle is fired, fired body is made.Firing be in oxygen environment, with into
Supported for length direction of the outer peripheral face 121 along formed body 12 of formed body 12 by receiving surface 81a, 81b, and relative to level
The mode of the inclined posture in face 7 configures the V words bracket 8 (θ 2=60 °) of oxidation aluminum to carry out.In addition, with relative to V word supports
Frame 8 turns into the mode of 90 ° of angle, sets the bottom plate 6 for having been formed as flat oxidation aluminum, and 61 carry above bottom plate 6
It is set to the bottom surface 123 of body 12.In addition, in receiving surface 81 and above 61, adhering to high-purity in advance with the contact position of formed body 12
Aoxidize the powder of aluminum.With respect to the horizontal plane the tiltangleθ 1 of 7 formed body 12 is 75 °.In addition, by from the programming rate of normal temperature
300 DEG C/h is set to, 1550 DEG C of firing temperature is heated to, is kept for 12 hours, meanwhile, cooling rate will be from 1550 DEG C to 800 DEG C
50 DEG C/h is only set to, from 800 DEG C of firing conditions for being set to 30 DEG C/h untill normal temperature.
[embodiment 2]
Allotment BET specific surface area is 4m2/ g mass the % of ZnO powder 25.9, BET specific surface area are 7m2/ g In2O3Powder
44.2 mass % of end and BET specific surface area are 10m2/ g Ga2O3The mass % of powder 29.9, is carried out in alms bowl by zirconia ball
Ball mill is mixed, and modulates material powder.
In this alms bowl, add respectively relative to the polyvinyl alcohol that the mass % of above-mentioned raw materials powder 100 is 0.3 mass %, 0.4
The water of quality % polycarboxylic acids ammonium, 1.0 mass % polyethylene glycol and 50 mass %, carries out ball mill mixing and modulates cream slurry.
Then, with the modulation of method progress granule similarly to Example 1, the making of formed body 12 and from formed body
The removing of 12 organic principle.
And then, the formed body 12 through removing organic principle is fired, fired body is made.Firing be in oxygen environment, with as
Length direction of the outer peripheral face 121 of formed body 12 along formed body 12 and supported by receiving surface 81a, 81b, and with respect to the horizontal plane
The mode of 7 inclined postures configures the V words bracket 8 (θ 2=45 °) of oxidation aluminum to carry out.In addition, with relative to V word brackets
8 turn into the mode of 90 ° of angle, set the bottom plate 6 for having been formed as flat oxidation aluminum, 61 mounting above bottom plate 6
The bottom surface 123 of formed body 12.In addition, in receiving surface 81 and above 61, adhering to high purity oxygen in advance with the contact position of formed body 12
Change the powder of aluminum.With respect to the horizontal plane the tiltangleθ 1 of 7 formed body 12 is 75 °.In addition, will be set from the programming rate of normal temperature
For 300 DEG C/h, 1400 DEG C of firing temperature is heated to, is kept for 10 hours, meanwhile, cooling rate will be from 1400 DEG C untill 800 DEG C
50 DEG C/h is set to, from 800 DEG C of firing conditions for being set to 30 DEG C/h untill normal temperature.
[embodiment 3]
Allotment BET specific surface area is 4m2/ g mass the % of ZnO powder 95 and BET specific surface area is 5m2/ g Al2O3Powder
5 mass % of end, carry out ball mill mixing by zirconia ball in alms bowl, modulate material powder.
In this alms bowl, add respectively relative to the polyvinyl alcohol that the mass % of above-mentioned raw materials powder 100 is 0.3 mass %, 0.4
The water of quality % polycarboxylic acids ammonium, 1.0 mass % polyethylene glycol and 50 mass %, carries out ball mill mixing and modulates cream slurry.
Then, with the modulation of method progress granule similarly to Example 1, the making of formed body 12 and from formed body
The removing of 12 organic principle.
And then, the formed body 12 through removing organic principle is fired, fired body is made.Firing be in oxygen environment, with as
Length direction of the outer peripheral face 121 of formed body 12 along formed body 12 and supported by receiving surface 81a, 81b, and with respect to the horizontal plane
The mode of 7 inclined postures configures the V words bracket 8 (θ 2=70 °) of oxidation aluminum to carry out.In addition, with relative to V word brackets
8 turn into the mode of 90 ° of angle, set the bottom plate 6 for having been formed as flat oxidation aluminum, 61 mounting above bottom plate 6
The bottom surface 123 of formed body 12.In addition, in receiving surface 81 and above 61, adhering to high purity oxygen in advance with the contact position of formed body 12
Change the powder of aluminum.With respect to the horizontal plane the tiltangleθ 1 of 7 formed body 12 is 75 °.In addition, will be set from the programming rate of normal temperature
For 300 DEG C/h, 1400 DEG C of firing temperature is heated to, is kept for 10 hours, meanwhile, cooling rate will be from 1400 DEG C untill 800 DEG C
50 DEG C/h is set to, from 800 DEG C of firing conditions for being set to 30 DEG C/h untill normal temperature.
[embodiment 4]
Allotment BET specific surface area is 4m2/ g mass the % of ZnO powder 10.7 and BET specific surface area is 7m2/ g In2O3
The mass % of powder 89.3, carries out ball mill mixing by zirconia ball in alms bowl, modulates material powder.
In this alms bowl, add respectively relative to the polyvinyl alcohol that the mass % of above-mentioned raw materials powder 100 is 0.3 mass %, 0.4
The water of quality % polycarboxylic acids ammonium, 1.0 mass % polyethylene glycol and 50 mass %, carries out ball mill mixing and modulates cream slurry.
Then, with the modulation of method progress granule similarly to Example 1, the making of formed body 12 and from formed body
The removing of 12 organic principle.
And then, the formed body 12 through removing organic principle is fired, fired body is made.Firing be in oxygen environment, with as
Length direction of the outer peripheral face 121 of formed body 12 along formed body 12 and supported by receiving surface 81a, 81b, and with respect to the horizontal plane
The mode of 7 inclined postures configures the V words bracket 8 (θ 2=80 °) of oxidation aluminum to carry out.In addition, with relative to V word brackets
8 turn into the mode of 90 ° of angle, set the bottom plate 6 for having been formed as flat oxidation aluminum, 61 mounting above bottom plate 6
The bottom surface 123 of formed body 12.In addition, in receiving surface 81 and above 61, adhering to high purity oxygen in advance with the contact position of formed body 12
Change the powder of aluminum.With respect to the horizontal plane the tiltangleθ 1 of 7 formed body 12 is 75 °.In addition, will be set from the programming rate of normal temperature
For 300 DEG C/h, 1400 DEG C of firing temperature is heated to, is kept for 10 hours, meanwhile, cooling rate will be from 1400 DEG C untill 800 DEG C
50 DEG C/h is set to, from 800 DEG C of firing conditions for being set to 30 DEG C/h untill normal temperature.
[embodiment 5]
In addition to the configuration of V words bracket 8 is changed in the way of as θ 1=60 °, similarly to Example 1 way and fire
Formed body 12.
[embodiment 6]
In addition to the configuration of V words bracket 8 is changed in the way of as θ 1=60 °, similarly to Example 2 way and fire
Formed body 12.
[embodiment 7]
In addition to the configuration of V words bracket 8 is changed in the way of as θ 1=60 °, similarly to Example 3 way and fire
Formed body 12.
[embodiment 8]
In addition to the configuration of V words bracket 8 is changed in the way of as θ 1=60 °, similarly to Example 4 way and fire
Formed body 12.
[embodiment 9]
In addition to the configuration of V words bracket 8 is changed in the way of as θ 1=85 °, similarly to Example 1 way and fire
Formed body 12.
[embodiment 10]
In addition to the configuration of V words bracket 8 is changed in the way of as θ 1=85 °, similarly to Example 2 way and fire
Formed body 12.
[embodiment 11]
In addition to the configuration of V words bracket 8 is changed in the way of as θ 1=85 °, similarly to Example 3 way and fire
Formed body 12.
[embodiment 12]
In addition to the configuration of V words bracket 8 is changed in the way of as θ 1=85 °, similarly to Example 4 way and fire
Formed body 12.
[embodiment 13]
In addition to being not provided with flat bottom plate 6, remaining similarly to Example 1 way and fire formed body 12.
[embodiment 13]
In addition to being not provided with flat bottom plate 6, remaining similarly to Example 2 way and fire formed body 12.
[embodiment 15]
In addition to being not provided with flat bottom plate 6, remaining similarly to Example 3 way and fire formed body 12.
[embodiment 16]
In addition to being not provided with flat bottom plate 6, remaining similarly to Example 4 way and fire formed body 12.
[embodiment 17]
In addition to the configuration of V words bracket 8 is changed in the way of as θ 1=40 °, similarly to Example 1 way and fire
Formed body 12.
[embodiment 18]
In addition to the configuration of V words bracket 8 is changed in the way of as θ 1=40 °, similarly to Example 2 way and fire
Formed body 12.
[embodiment 19]
In addition to the configuration of V words bracket 8 is changed in the way of as θ 1=40 °, similarly to Example 3 way and fire
Formed body 12.
[embodiment 20]
In addition to the configuration of V words bracket 8 is changed in the way of as θ 1=40 °, similarly to Example 4 way and fire
Formed body 12.
[embodiment 21]
Going for the making of body 12 and organic principle from formed body 12 is formed by method similarly to Example 1
Remove.And then, the formed body 12 through removing organic principle is fired, fired body is made.Firing is in oxygen environment, with formed body 12
Length direction of the outer peripheral face 121 along formed body 12 and supported by receiving surface 51, and with respect to the horizontal plane 7 formed body 12 inclines
Bevel angle θ 1 turns into 75 ° of mode, sets the bracket 5 of oxidation aluminum and carries out.In addition, to turn into 90 ° of angle relative to bracket 5
Mode, set have been formed as it is flat oxidation aluminum bottom plate 6, above bottom plate 6 61 mounting formed bodies 12 bottom surface
123.In addition, in receiving surface 51 and above 61, adhering to the powder of high-purity mangesium oxide aluminum in advance with the contact position of formed body 12.Burn
Condition processed way similarly to Example 1.
[embodiment 22]
Going for the making of body 12 and organic principle from formed body 12 is formed by method similarly to Example 2
Remove.Further, the formed body 12 through removing organic principle is fired, fired body is made.Firing is in oxygen environment, with formed body 12
Length direction of the outer peripheral face 121 along formed body 12 and supported by receiving surface 51, and with respect to the horizontal plane 7 formed body 12
Tiltangleθ 1 turns into 75 ° of mode, sets the bracket 5 of oxidation aluminum and carries out.In addition, to turn into 90 ° of angle relative to bracket 5
The mode of degree, sets the bottom plate 6 for having been formed as flat oxidation aluminum, the bottom of 61 mounting formed bodies 12 above bottom plate 6
Face 123.In addition, in receiving surface 51 and above 61, adhering to the powder of high-purity mangesium oxide aluminum in advance with the contact position of formed body 12.
Firing condition way similarly to Example 2.
[embodiment 23]
Going for the making of body 12 and organic principle from formed body 12 is formed by method similarly to Example 3
Remove.Further, the formed body 12 through removing organic principle is fired, fired body is made.Firing is in oxygen environment, with formed body 12
Length direction of the outer peripheral face 121 along formed body 12 and supported by receiving surface 51, and with respect to the horizontal plane 7 formed body 12
Tiltangleθ 1 turns into 75 ° of mode, sets the bracket 5 of oxidation aluminum and carries out, in addition, to turn into 90 ° of angle relative to bracket 5
The mode of degree, sets the bottom plate 6 for having been formed as flat oxidation aluminum, the bottom of 61 mounting formed bodies 12 above bottom plate 6
Face 123.In addition, in receiving surface 51 and above 61, adhering to the powder of high-purity mangesium oxide aluminum in advance with the contact position of formed body 12.
Firing condition way similarly to Example 3.
[embodiment 24]
Going for the making of body 12 and organic principle from formed body 12 is formed by method similarly to Example 4
Remove.Further, the formed body 12 through removing organic principle is fired, fired body is made.Firing is in oxygen environment, with formed body 12
Length direction of the outer peripheral face 121 along formed body 12 and supported by receiving surface 51, and with respect to the horizontal plane 7 formed body 12
Tiltangleθ 1 turns into 75 ° of mode, sets the bracket 5 of oxidation aluminum and carries out, in addition, to turn into 90 ° of angle relative to bracket 5
The mode of degree, sets the bottom plate 6 for having been formed as flat oxidation aluminum, the bottom of 61 mounting formed bodies 12 above bottom plate 6
Face 123.In addition, in receiving surface 51 and above 61, adhering to the powder of high-purity mangesium oxide aluminum in advance with the contact position of formed body 12.
Firing condition way similarly to Example 4.
[comparative example 1]
Except without using V words bracket 8, and erect formed body 12 in the way of as θ 1=90 ° and beyond firing, with implementation
Example 1 is similarly carried out, and makes fired body.
[comparative example 2]
Except without using V words bracket 8, and erect formed body 12 in the way of as θ 1=90 ° and beyond firing, with implementation
Example 2 is similarly carried out, and makes fired body.
[comparative example 3]
Except without using V words bracket 8, and erect formed body 12 in the way of as θ 1=90 ° and beyond firing, with implementation
Example 3 is similarly carried out, and makes fired body.
[comparative example 4]
Except without using V words bracket 8, and erect formed body 12 in the way of as θ 1=90 ° and beyond firing, with implementation
Example 4 is similarly carried out, and makes fired body.
[comparative example 5]
In addition to the configuration of V words bracket 8 is changed in the way of as θ 1=0 °, carry out, make similarly to Example 1
Fired body.
[comparative example 6]
In addition to the configuration of V words bracket 8 is changed in the way of as θ 1=0 °, carry out, make similarly to Example 2
Fired body.
[comparative example 7]
In addition to the configuration of V words bracket 8 is changed in the way of as θ 1=0 °, carry out, make similarly to Example 3
Fired body.
[comparative example 8]
In addition to the configuration of V words bracket 8 is changed in the way of as θ 1=0 °, carry out, make similarly to Example 4
Fired body.
In each embodiment and comparative example, what is made for same way adds up to 10 fired bodies, and what is deformed comments
Valency.It is particularly to prop up ruler (straight edge) in mode of the outer peripheral face along the length direction of fired body of fired body,
Determine fired body outer peripheral face and ruler gap between be worth in, using maximum as the length direction of fired body deformation.In addition, will
The internal diameter of the both ends of the surface of fired body is respectively relative to circumferencial direction to be determined at equal intervals using optical scale at 8, obtains in each end face
The difference of the maxima and minima of determined internal diameter.The maxima and minima of internal diameter calculated by both ends of the surface in fired body it
In difference, larger value is defined as ID distortion, the index of the deformation of the radial direction of fired body is used as.
In addition, made total 10 fired bodies in each embodiment and comparative example are finished, external diameter is manufactured
153mm, internal diameter 135mm, length 500mm cylindrical shape target 2.Average value for the relative density of the fired body of gained and
The bar number (machinable number) of cylindrical shape target 2 can be manufactured from the fired body of gained, table is shown in together with the evaluation of deformation
1.In addition, in the evaluation of the deformation shown in table 1 is the value determined respectively in the fired body of made 10, with maximum
It is used as typical value.
(table 1)
Person skilled in the art of the present invention can easily export further effect or variation.Therefore, it is of the invention
Wider scope specific embodiment it is as indicated above and be not limited to certain content and the representative embodiments recorded.Cause
This, without departing from the spirit or scope for the concept all invented as defined in claims and its equipollent, and can do various
Change.
Claims (10)
1. a kind of manufacture method of cylindrical shape target, comprising：
Make and be configured to the ceramics of tubular the forming step of body is made；And
Alongst supported with the outer peripheral face of the formed body by the receiving surface of bracket, and it is with respect to the horizontal plane inclined
Posture fires the firing step of the formed body.
2. the manufacture method of cylindrical shape target according to claim 1, wherein, relative to the shaping of the horizontal plane
The inclination angle of body is less than more than 30 ° 85 °.
3. the manufacture method of cylindrical shape target according to claim 1 or 2, wherein, the bracket is tabular bracket.
4. the manufacture method of cylindrical shape target according to claim 1 or 2, wherein, the bracket is V word brackets.
5. the manufacture method of the cylindrical shape target according to any one of Claims 1-4, wherein, in the firing step, match somebody with somebody
Put and fire the formed body for the bottom plate that the end face of the formed body is loaded.
6. the manufacture method of cylindrical shape target according to claim 5, wherein, in the firing step, in the bottom plate
Above configuration cobasis bottom and be fired.
7. the manufacture method of cylindrical shape target according to claim 4, wherein, the material of the V words bracket be aluminum oxide,
Any of magnesia and zirconium oxide,
The receiving surface of the V words bracket is opposite with less than more than 25 ° 80 ° of angle.
8. a kind of cylindrical shape sputter target, it includes the manufacture method by the cylindrical shape target described in any one of claim 1 to 7
Manufactured cylindrical shape target, and the formed body is to contain one or more of In, Zn, Al, Ga, Zr, Ti, Sn, Mg and Si
Oxide.
9. cylindrical shape sputter target according to claim 8, wherein, the length of the cylindrical shape target is more than 500mm.
10. a kind of firing assisted tool of cylindrical shape target, its material is any of aluminum oxide, magnesia and zirconium oxide,
The firing of the cylindrical shape target possesses with assisted tool：It is opposite with less than more than 25 ° 80 ° of angle, and support and formed be
The receiving surface of body is made in the ceramics of tubular.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015035839 | 2015-02-25 | ||
| JP2015-035839 | 2015-02-25 | ||
| PCT/JP2015/084567 WO2016136088A1 (en) | 2015-02-25 | 2015-12-09 | Cylindrical target material manufacturing method, cylindrical sputtering target, and baking jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107109631A true CN107109631A (en) | 2017-08-29 |
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| CN201580073047.3A Pending CN107109631A (en) | 2015-02-25 | 2015-12-09 | Manufacture method, cylindrical shape sputter target and the firing assisted tool of cylindrical shape target |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6678157B2 (en) |
| CN (1) | CN107109631A (en) |
| TW (1) | TWI723974B (en) |
| WO (1) | WO2016136088A1 (en) |
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| JPWO2021106258A1 (en) * | 2019-11-29 | 2021-06-03 | ||
| CN113277835B (en) * | 2020-02-20 | 2022-10-11 | 广州市尤特新材料有限公司 | Positioning tool and sintering method of planar target |
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|---|---|---|---|---|
| JPH10114567A (en) * | 1996-10-04 | 1998-05-06 | Ngk Insulators Ltd | Supporting base for firing |
| JP2001348264A (en) * | 2000-06-06 | 2001-12-18 | Takahama Industry Co Ltd | Method and device for reversing supporting plate of firing tool |
| JP2004250241A (en) * | 2003-02-18 | 2004-09-09 | Nec Tokin Corp | Setter for firing and method for firing |
| JP2005281862A (en) * | 2004-03-05 | 2005-10-13 | Tosoh Corp | Cylindrical sputtering target, ceramic sintered compact and production method therefor |
| CN102165092A (en) * | 2008-09-25 | 2011-08-24 | 东曹株式会社 | Cylindrical sputtering target, and method for manufacturing same |
| JP2013147368A (en) * | 2012-01-18 | 2013-08-01 | Mitsui Mining & Smelting Co Ltd | Ceramic cylindrical sputtering target material, and method for manufacturing the same |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS575519Y2 (en) * | 1976-12-25 | 1982-02-02 | ||
| JPS59107953A (en) * | 1982-12-08 | 1984-06-22 | 東洋ゴム工業株式会社 | Method of baking porous ceramic sylindrical body |
| JPH03103363A (en) * | 1989-09-14 | 1991-04-30 | Showa Denko Kk | Method for sintering ceramic compact and sintering jig |
| JP2828750B2 (en) * | 1990-08-21 | 1998-11-25 | 日本碍子株式会社 | Method for firing filter medium for molten metal and firing jig used therefor |
| JP2000086358A (en) * | 1998-06-04 | 2000-03-28 | Ngk Spark Plug Co Ltd | Production of bottomed cylindrical sintered ceramic material |
| TWI390062B (en) * | 2004-03-05 | 2013-03-21 | Tosoh Corp | Cylindrical sputtering target, ceramic sintered body, and process for producing sintered body |
-
2015
- 2015-12-09 JP JP2017501866A patent/JP6678157B2/en active Active
- 2015-12-09 WO PCT/JP2015/084567 patent/WO2016136088A1/en active Application Filing
- 2015-12-09 CN CN201580073047.3A patent/CN107109631A/en active Pending
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2016
- 2016-01-25 TW TW105102177A patent/TWI723974B/en active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10114567A (en) * | 1996-10-04 | 1998-05-06 | Ngk Insulators Ltd | Supporting base for firing |
| JP2001348264A (en) * | 2000-06-06 | 2001-12-18 | Takahama Industry Co Ltd | Method and device for reversing supporting plate of firing tool |
| JP2004250241A (en) * | 2003-02-18 | 2004-09-09 | Nec Tokin Corp | Setter for firing and method for firing |
| JP2005281862A (en) * | 2004-03-05 | 2005-10-13 | Tosoh Corp | Cylindrical sputtering target, ceramic sintered compact and production method therefor |
| CN102165092A (en) * | 2008-09-25 | 2011-08-24 | 东曹株式会社 | Cylindrical sputtering target, and method for manufacturing same |
| JP2013147368A (en) * | 2012-01-18 | 2013-08-01 | Mitsui Mining & Smelting Co Ltd | Ceramic cylindrical sputtering target material, and method for manufacturing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2016136088A1 (en) | 2016-09-01 |
| TWI723974B (en) | 2021-04-11 |
| JP6678157B2 (en) | 2020-04-08 |
| TW201702411A (en) | 2017-01-16 |
| JPWO2016136088A1 (en) | 2017-12-07 |
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