JPS575519Y2 - - Google Patents
Info
- Publication number
- JPS575519Y2 JPS575519Y2 JP1976174306U JP17430676U JPS575519Y2 JP S575519 Y2 JPS575519 Y2 JP S575519Y2 JP 1976174306 U JP1976174306 U JP 1976174306U JP 17430676 U JP17430676 U JP 17430676U JP S575519 Y2 JPS575519 Y2 JP S575519Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Furnace Charging Or Discharging (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976174306U JPS575519Y2 (en) | 1976-12-25 | 1976-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976174306U JPS575519Y2 (en) | 1976-12-25 | 1976-12-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5390052U JPS5390052U (en) | 1978-07-24 |
| JPS575519Y2 true JPS575519Y2 (en) | 1982-02-02 |
Family
ID=28781772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976174306U Expired JPS575519Y2 (en) | 1976-12-25 | 1976-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS575519Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016136088A1 (en) * | 2015-02-25 | 2016-09-01 | 三井金属鉱業株式会社 | Cylindrical target material manufacturing method, cylindrical sputtering target, and baking jig |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5810959Y2 (en) * | 1979-08-31 | 1983-02-28 | 株式会社イナックス | Sagger pot for vertical tile firing |
| JP6412439B2 (en) * | 2015-02-17 | 2018-10-24 | 三井金属鉱業株式会社 | Method for manufacturing ceramic target material and method for manufacturing cylindrical sputtering target |
-
1976
- 1976-12-25 JP JP1976174306U patent/JPS575519Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016136088A1 (en) * | 2015-02-25 | 2016-09-01 | 三井金属鉱業株式会社 | Cylindrical target material manufacturing method, cylindrical sputtering target, and baking jig |
| JPWO2016136088A1 (en) * | 2015-02-25 | 2017-12-07 | 三井金属鉱業株式会社 | Manufacturing method of cylindrical target material, cylindrical sputtering target and firing jig |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5390052U (en) | 1978-07-24 |