CN106323259B - Discrete upper and lower two-electrode distributed micro-gyroscope and preparation method thereof - Google Patents

Abstract

The invention provides a double-electrode distributed micro gyroscope with discrete upper and lower parts and a preparation method thereof, wherein the preparation method comprises the following steps: the device comprises a monocrystalline silicon substrate, a center fixing support column, a miniature harmonic oscillator, an upper electrode, a lower electrode and a glass substrate. The number of the upper electrodes is multiple, and the multiple upper electrodes are uniformly distributed on the upper side of the miniature harmonic oscillator to form uniformly distributed upper electrodes; the number of the lower electrodes is multiple, and the multiple lower electrodes are uniformly distributed on the lower side of the miniature harmonic oscillator to form uniformly distributed lower electrodes; the invention combines MEMS bulk silicon processing technology and surface silicon processing technology to manufacture; the invention can provide different driving and detecting modes and different working modes, and can work in a system needing complex control; the invention can respectively drive and detect by utilizing the lower electrode and the upper electrode, thereby reducing the parasitic capacitance between the drive electrode and the detection electrode and improving the detection precision.

Description

Discrete upper and lower two-electrode distributed micro-gyroscope and preparation method thereof

technical field

The invention relates to a micro-gyroscope in the field of micro-electromechanical technology, in particular, to a two-electrode distributed micro-gyroscope with upper and lower separation and a preparation method thereof.

Background technique

The gyroscope is an inertial device that can detect the angle or angular velocity of the carrier, and plays a very important role in the fields of attitude control and navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. Therefore, the importance of MEMS micro gyroscope is self-evident. In particular, the micro-disc resonant gyroscope, as an important research direction of MEMS micro-gyroscope, has become a research hotspot in this field.

For miniature gyroscopes, the use of full-angle control technology has the advantages of high stability, strong shock resistance, high precision, and small errors. It has a wide range of application prospects in aerospace, inertial navigation, and civil consumer electronics. The number of electrodes of the currently designed gyroscope is small, which limits its application in complex control systems; and the general gyroscope has only one set of electrodes on one surface, and there is a certain parasitic capacitance between the driving, detection and control electrodes. Signal interference, which limits its detection accuracy.

Based on this, there is an urgent need to propose a new gyroscope structure, which can avoid or reduce the above-mentioned influencing factors, and at the same time expand its application range.

After searching, the Chinese invention patent application with the publication number of CN104165623A and the application number of 201410389616.2, the invention provides an inner and outer double-electrode miniature hemispherical resonant gyroscope and a preparation method thereof, including: a single crystal silicon substrate, a central fixed support column, Micro hemispherical resonator, external electrode, external electrode metal bonding plate, glass substrate, metal lead wire, circular bonding wire pad, external electrode metal connecting column, inner electrode and seed layer. The invention can use the inner electrode and the outer electrode to drive and detect respectively, reduce the parasitic capacitance between the driving electrode and the detection electrode, and improve the detection accuracy; metal leads and circular bonding pads are provided for the inner electrode and the outer electrode, which is convenient for Signal application and signal extraction.

However, the above-mentioned patent only provides a structural scheme of a micro-hemispherical gyroscope with an inner divided electrode and an outer divided electrode, and cannot provide different electrode distribution schemes for a variety of miniature gyroscopes.

SUMMARY OF THE INVENTION

In view of the defects in the prior art, the purpose of the present invention is to provide a dual-electrode distributed micro-gyroscope with upper and lower separation and a preparation method thereof. A novel processing technology; it can provide different drive, detection methods and different working modes, and can work in systems that require complex control.

According to one aspect of the present invention, a dual-electrode distributed micro-gyroscope with upper and lower separation is provided, comprising: a single crystal silicon substrate, a central fixed support column, a micro-resonator, an upper electrode, a lower electrode, and a glass substrate; wherein:

There are a plurality of the upper electrodes, and the plurality of upper electrodes are evenly distributed on the upper side of the micro-resonator to form a uniformly distributed upper electrode, and at the same time, the upper electrodes are arranged on the surface of the single crystal silicon substrate or the surface of the glass substrate;

There are a plurality of the lower electrodes, and the plurality of lower electrodes are evenly distributed on the lower side of the micro-resonator to form a uniformly distributed lower electrode, and at the same time, the lower electrodes are arranged on the surface of the single crystal silicon substrate or the surface of the glass substrate;

One end of the central fixed support column is connected to the single crystal silicon substrate, and the other end of the central fixed support column is connected to the micro resonator; the single crystal silicon substrate is bonded to the glass substrate;

The micro-resonator is used as the vibrating body of the micro-gyroscope, and the upper electrode and the lower electrode are used for the driving, detection and control of the micro-gyroscope.

When the micro-gyroscope of the present invention works in the angular rate mode, an AC drive signal is applied, a DC bias signal is applied to the micro-resonator, and the uniformly distributed upper electrodes make the micro-resonator work at all locations through electrostatic force. In the required driving mode, the vibration amplitude and frequency of the driving mode remain unchanged; when there is an applied angular velocity perpendicular to the direction of the monocrystalline silicon substrate, the vibration amplitude of the detection mode will change, and the magnitude of the vibration amplitude will change. It is proportional to the magnitude of the applied angular velocity, and at the same time causes the capacitance between the uniformly distributed upper electrode and the micro-resonator to change; the modal vibration amplitude is calculated and detected by collecting the signal changes on the uniformly distributed upper electrode , and then calculate the magnitude of the applied angular velocity.

Further, the micro-gyroscope of the present invention collects the signal changes on the uniformly distributed lower electrodes to calculate and detect the magnitude of the modal vibration amplitude, and then calculates the magnitude of the applied angular velocity, thereby reducing the distance between the uniformly distributed upper electrodes. The parasitic capacitance improves the detection accuracy.

Further, the micro-gyroscope of the present invention applies an AC drive signal on the uniformly distributed lower electrode, and collects detection signals on the uniformly distributed upper electrode or the uniformly distributed lower electrode to provide different driving signals. , detection and control methods.

Further, the micro-gyroscope of the present invention judges the working state of the micro-gyroscope through the signal change on the uniformly distributed lower electrode, and in an abnormal working state, the uniformly distributed lower electrode is controlled by a control algorithm. By applying a control signal on the micro-gyroscope, the working state of the micro-gyroscope can be adjusted, so that the micro-gyroscope can work normally.

Further, the micro gyroscope of the present invention can work in a force balance mode and an all-angle mode, the force balance mode directly detects the magnitude of the applied angular velocity, and the all-angle mode directly detects the magnitude of the applied rotation angle.

Preferably, the material of the upper electrode and the lower electrode is boron ion or phosphorus ion doped silicon or metal nickel; when the upper electrode or the lower electrode is located on a single crystal silicon substrate, the material is boron ion or phosphorus ion doped Miscellaneous silicon; when the upper electrode or the lower electrode is on a glass substrate, the material is metallic nickel.

Preferably, the micro-gyroscope is a ring resonant gyroscope, a disk resonant gyroscope, a multi-ring resonant gyroscope, or a cup-shaped resonant gyroscope.

More preferably, the material of the micro resonator is doped diamond or doped polysilicon, which is the main vibrating body of the micro gyroscope.

Preferably, the materials of the single crystal silicon substrate and the glass substrate are high-resistance silicon or silicon dioxide high-resistance materials, respectively, and the high-resistance silicon material is used to reduce signal interference between the upper electrode and the lower electrode.

Preferably, the material of the central fixed support column is silicon dioxide or high-resistance silicon.

In the present invention, the distribution of the upper electrode and the lower electrode can be used in a complex control system to realize full-angle control.

The present invention emphasizes a variety of micro-gyroscope structures with uniformly distributed upper electrodes and uniformly distributed lower electrodes, which can be applied to special circuit driving and detection schemes (as described in the embodiment), and the micro-resonator is not limited to micro-hemispherical resonance. The gyroscope can also provide different electrode distribution schemes for a variety of micro gyroscopes.

The upper and lower discrete double electrode distribution according to the present invention, its electrodes are distributed up and down in structure, rather than adjacent distribution or inner and outer distribution, and it is upper and lower double discrete electrodes. Compared with only one surface as discrete electrodes, it can realize More complex circuit control.

According to another aspect of the present invention, there is provided a preparation method of a two-electrode distributed micro-gyroscope with upper and lower separation, comprising the following steps:

The first step is to perform cleaning, coating, photolithography, development, boron ion implantation, sputtering, and debonding processes on the single crystal silicon substrate and the glass substrate to obtain boron ion or phosphorus ion doped silicon material on the single crystal silicon substrate the upper electrode or lower electrode;

The second step is to apply glue, photolithography, development, silicon isotropic etching, and debonding on the monocrystalline silicon substrate to obtain grooves corresponding to the shape of the micro-resonator on the monocrystalline silicon substrate;

The third step is to deposit silicon dioxide on the single crystal silicon substrate to provide a sacrificial layer for making micro-resonators and the gap between the upper or lower electrodes;

The fourth step, depositing doped diamond or doped polysilicon on the single crystal silicon substrate, and carrying out chemical mechanical polishing to make micro-resonators;

The fifth step is to use the BOE solution to etch the silicon dioxide sacrificial layer on the basis of the fourth step and control the etching time to release the micro-resonator, and use the residual part as the center to fix the support column;

The sixth step is to apply glue, photolithography, development, nickel electroplating, and glue removal on the glass substrate to make the upper electrode or the lower electrode of the metal nickel material;

The seventh step is to invert the glass substrate and bond it with the single crystal silicon substrate, so that the center part of the glass substrate is aligned with the center of the center fixed support column of the single crystal silicon substrate, so that the two substrates are fixed, so as to obtain the upper and lower discrete Two-electrode distributed microgyroscope.

Compared with the prior art, the present invention has the following beneficial effects:

(1) The micro-gyroscope is made by combining MEMS bulk silicon processing technology and surface silicon processing technology, and is a novel processing technology;

(2) The micro gyroscope can provide different driving, detection methods and different working modes. The number of electrodes is increased without reducing the electrode area, so that the micro gyroscope can work in complex control conditions. in the system;

(3) The micro gyroscope can be driven and detected by the lower electrode and the upper electrode respectively, so as to reduce the parasitic capacitance between the driving electrode and the detection electrode and improve the detection accuracy; it can be used in a complex control system to realize full-angle control .

Description of drawings

Other features, objects and advantages of the present invention will become more apparent by reading the detailed description of non-limiting embodiments with reference to the following drawings:

1(a)-FIG. 1(c) are schematic structural diagrams of a two-electrode distributed micro-disc resonant gyroscope with upper and lower separation according to an embodiment of the present invention;

2( a )- FIG. 2( c ) are schematic structural diagrams of a two-electrode distributed miniature ring resonant gyroscope that are separated up and down according to an embodiment of the present invention;

3(a)-FIG. 3(c) are schematic structural diagrams of a two-electrode distributed miniature multi-ring resonant gyroscope that are separated up and down according to an embodiment of the present invention;

4(a)-FIG. 4(c) are schematic structural diagrams of a two-electrode distributed miniature cup-shaped resonant gyroscope that is separated up and down according to an embodiment of the present invention;

5(a)-FIG. 5(g) are flowcharts of a method for preparing a two-electrode distributed micro-disc resonant gyroscope that is separated up and down according to an embodiment of the present invention;

In the figure: 1 is a micro resonator, 2 is a uniformly distributed upper electrode, 3 is a uniformly distributed lower electrode, 4 is a monocrystalline silicon substrate, 5 is a glass substrate, and 6 is a central fixed support column.

Detailed ways

The present invention will be described in detail below with reference to specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that, for those skilled in the art, several modifications and improvements can be made without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

Example 1

As shown in FIG. 1(a)-FIG. 1(c), the present embodiment provides a two-electrode distributed micro-disc resonant gyroscope with upper and lower separation, including:

A disc-shaped micro-resonator 1;

Sixteen evenly distributed upper electrodes 2;

Sixteen evenly distributed lower electrodes 3;

a single crystal silicon substrate 4;

a glass substrate 5;

A central fixed support column 6; of which:

One end of the central fixed support column 6 is connected to the single crystal silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in FIG. 1(a) );

Sixteen uniformly distributed upper electrodes 2 are arranged on the surface of the glass substrate 5 (as shown in FIG. 1(b) ), and are uniformly distributed on the upper side of the micro-resonator 1 (as shown in FIG. 1 ( c)); sixteen said uniformly distributed lower electrodes 3 are arranged on the surface of said single crystal silicon substrate 4 and evenly distributed on the lower side of said micro-resonator 1 (as shown in FIG. 1(a) ) , shown in FIG. 1( c )); the single crystal silicon substrate 4 is bonded to the glass substrate 5 .

In this embodiment, the material of the micro resonator 1 is doped diamond or doped polysilicon, which is the main vibrating body of the micro disc resonant gyroscope.

In this embodiment, the material of the uniformly distributed upper electrode 2 is boron ion doped silicon, or phosphorus ion doped silicon, which is used for driving, detecting and controlling the miniature disc resonant gyroscope.

In this embodiment, the material of the uniformly distributed lower electrode 3 is boron ion or phosphorus ion doped silicon, which is used for the driving, detection and control of the miniature disc resonant gyroscope.

In this embodiment, the materials of the single crystal silicon substrate 4 and the glass substrate 5 are high-resistance materials such as high-resistance silicon and silicon dioxide, respectively. Signal interference between sixteen uniformly distributed lower electrodes 3 .

In this embodiment, the material of the central fixed support column 6 is silicon dioxide, and may also be high-resistance silicon.

In this embodiment, the micro-disc resonant gyroscope can work in the angular rate mode, applying an AC drive signal, applying a DC bias signal to the micro-resonator 1, and the uniformly distributed upper electrode 2 through static The electric power makes the micro-resonator 1 work in the required driving mode, and the vibration amplitude and frequency of the driving mode remain unchanged; when there is an applied angular velocity in the direction perpendicular to the single crystal silicon substrate 4, the vibration of the detection mode is detected. The amplitude will change, the magnitude of the vibration amplitude is proportional to the magnitude of the applied angular velocity, and at the same time, the capacitance between the uniformly distributed upper electrode 2 and the micro resonator 1 will change; by collecting the uniform distribution The signal change on the electrode 2 can calculate the magnitude of the detected modal vibration amplitude, and then calculate the magnitude of the applied angular velocity.

In this embodiment, the micro-disc resonant gyroscope can also collect the signal changes on the uniformly distributed lower electrode 3 to calculate and detect the magnitude of the modal vibration amplitude, and then calculate the magnitude of the applied angular velocity, thereby reducing the The parasitic capacitance between the upper electrodes 2 is evenly distributed to improve the detection accuracy.

In this embodiment, the micro-disc resonant gyroscope can apply an AC drive signal on the uniformly distributed lower electrode 3 and collect the signal on the uniformly distributed upper electrode 2 or the uniformly distributed lower electrode 3 Detection signal, providing different driving, detection and control methods.

In this embodiment, the micro-disc resonant gyroscope can judge the working state of the micro-disc resonant gyroscope through the signal change on the uniformly distributed lower electrode 3. Applying a control signal to the uniformly distributed lower electrode 3 can adjust the working state of the micro-disc resonant gyroscope, so that the micro-disc resonant gyroscope can work normally.

In this embodiment, the miniature disc resonant gyroscope can also work in the force balance mode and the full angle mode. The force balance mode can directly detect the magnitude of the applied angular velocity, and the full angle mode can directly detect the magnitude of the applied rotation angle.

Example 2

As shown in Fig. 2(a)-Fig. 2(c), the present embodiment provides a two-electrode distributed micro-ring resonant gyroscope with upper and lower separation, including:

A ring-shaped micro-resonator 1;

Sixteen evenly distributed upper electrodes 2;

Sixteen evenly distributed lower electrodes 3;

a single crystal silicon substrate 4;

a glass substrate 5;

A central fixed support column 6; of which:

One end of the central fixed support column 6 is connected to the single crystal silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in FIG. 2(a)); 16 The uniformly distributed upper electrodes 2 are arranged on the surface of the glass substrate 5 (as shown in FIG. 2(b) ), and are uniformly distributed on the upper side of the micro-resonator 1 (as shown in FIG. 2(c) ) The sixteen uniformly distributed lower electrodes 3 are arranged on the surface of the single crystal silicon substrate 4, and are uniformly distributed on the lower side of the micro-resonator 1 (as shown in FIG. 2(a), FIG. 2(c)); the single crystal silicon substrate 4 is bonded to the glass substrate 5 .

In this embodiment, the material of the micro resonator 1 is doped diamond or doped polysilicon, which is the main vibrating body of the micro ring resonant gyroscope.

In this embodiment, the material of the uniformly distributed upper electrode 2 is boron ion doped silicon, or phosphorus ion doped silicon, which is used for driving, detecting and controlling the miniature disc resonant gyroscope.

In this embodiment, the material of the uniformly distributed lower electrode 3 is boron ion or phosphorus ion doped silicon, which is used for the driving, detection and control of the miniature disc resonant gyroscope.

In this embodiment, the materials of the single crystal silicon substrate 4 and the glass substrate 5 are high-resistance materials such as high-resistance silicon and silicon dioxide, respectively. Signal interference between sixteen uniformly distributed lower electrodes 3 .

In this embodiment, the material of the central fixed support column 6 is silicon dioxide, and may also be high-resistance silicon.

In this embodiment, the micro ring resonant gyroscope can also work in the force balance mode and the full angle mode. The force balance mode can directly detect the magnitude of the applied angular velocity, and the full angle mode can directly detect the magnitude of the applied rotation angle.

Example 3

As shown in Fig. 3(a)-Fig. 3(c), this embodiment provides a two-electrode distributed micro-multi-ring resonant gyroscope with upper and lower separation, including:

A multi-ring miniature resonator 1;

Sixteen evenly distributed upper electrodes 2;

Sixteen evenly distributed lower electrodes 3;

a single crystal silicon substrate 4;

a glass substrate 5;

A central fixed support column 6; of which:

One end of the central fixed support column 6 is connected to the single crystal silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro resonator 1 (as shown in FIG. 3(a)); 16 The uniformly distributed upper electrodes 2 are arranged on the surface of the glass substrate 5 (as shown in FIG. 3(b) ), and are uniformly distributed on the upper side of the micro-resonator 1 (as shown in FIG. 3(c) ) shown); sixteen said uniformly distributed lower electrodes 3 are arranged on the upper surface of said single crystal silicon substrate 4 and evenly distributed on the lower side of said micro-resonator 1 (as shown in Figure 3(a), 3 (c)); the single crystal silicon substrate 4 and the glass substrate 5 are bonded.

In this embodiment, the material of the micro resonator 1 is doped diamond or doped polysilicon, which is the main vibrating body of the micro multi-ring resonant gyroscope.

In this embodiment, the material of the uniformly distributed upper electrode 2 is boron ion doped silicon, or phosphorus ion doped silicon, which is used for driving, detecting and controlling the miniature disc resonant gyroscope.

In this embodiment, the material of the uniformly distributed lower electrode 3 is boron ion or phosphorus ion doped silicon, which is used for the driving, detection and control of the miniature disc resonant gyroscope.

In this embodiment, the materials of the single crystal silicon substrate 4 and the glass substrate 5 are high-resistance materials such as high-resistance silicon and silicon dioxide, respectively. Signal interference between sixteen uniformly distributed lower electrodes 3 .

In this embodiment, the material of the central fixed support column 6 is silicon dioxide, and may also be high-resistance silicon.

In this embodiment, the micro multi-ring resonant gyroscope can also work in the force balance mode and the full angle mode. The force balance mode can directly detect the magnitude of the applied angular velocity, and the full angle mode can directly detect the magnitude of the applied rotation angle.

Example 4

As shown in FIG. 4( a )- FIG. 4( c ), this embodiment provides a two-electrode distributed micro-cup resonant gyroscope with upper and lower separation, including:

A cup-shaped micro-resonator 1;

Sixteen evenly distributed upper electrodes 2;

Sixteen evenly distributed lower electrodes 3;

a single crystal silicon substrate 4;

a glass substrate 5;

A central fixed support column 6; of which:

One end of the central fixed support column 6 is connected to the single crystal silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in FIG. 4(a)); 16 The uniformly distributed upper electrodes 2 are arranged on the surface of the glass substrate 5 (as shown in FIG. 4(b) ), and are evenly distributed on the upper side of the micro-resonator 1 (as shown in FIG. 4(c) ) shown); sixteen said uniformly distributed lower electrodes 3 are arranged on the upper surface of said single crystal silicon substrate 4 and evenly distributed on the lower side of said micro-resonator 1 (as shown in Figure 4(a), 4 (c)); the single crystal silicon substrate 4 and the glass substrate 5 are bonded.

In this embodiment, the material of the micro resonator 1 is doped diamond or doped polysilicon, which is the main vibrating body of the micro cup-shaped resonant gyroscope.

In this embodiment, the material of the uniformly distributed upper electrode 2 is boron ion doped silicon, or phosphorus ion doped silicon, which is used for driving, detecting and controlling the miniature disc resonant gyroscope.

In this embodiment, the material of the uniformly distributed lower electrode 3 is boron ion or phosphorus ion doped silicon, which is used for the driving, detection and control of the miniature disc resonant gyroscope.

Further, the gyroscope can be provided with a metal lead, one end of the metal lead is connected to the upper electrode and the lower electrode, the other end of the metal lead serves as an external interface, and the metal lead is used for signal application and signal extraction.

In this embodiment, the materials of the single crystal silicon substrate 4 and the glass substrate 5 are high-resistance materials such as high-resistance silicon and silicon dioxide, respectively. Signal interference between sixteen uniformly distributed lower electrodes 3 .

In this embodiment, the material of the central fixed support column 6 is silicon dioxide, and may also be high-resistance silicon.

In this embodiment, the micro-cup resonant gyroscope can also work in the force balance mode and the full angle mode. The force balance mode can directly detect the magnitude of the applied angular velocity, and the full angle mode can directly detect the magnitude of the applied rotation angle.

The invention combines the MEMS bulk silicon processing technology and the surface silicon processing technology for production, and is a novel processing technology; the micro gyroscope in the invention can provide different driving, detection methods and different working modes, and can work when required In a complex control system; the micro-gyroscope in the present invention can use the lower electrode and the upper electrode to drive and detect respectively, reduce the parasitic capacitance between the driving electrode and the detection electrode, and improve the detection accuracy.

Example 5

As shown in Fig. 5(a)-Fig. 5(g), the present embodiment provides a preparation method of a two-electrode distributed micro-disc resonant gyroscope with upper and lower separation, including the following steps:

The first step, as shown in Figure 5(a), is to carry out glue coating, photolithography, development, silicon isotropic etching, and debonding on the single crystal silicon substrate to obtain a radius of 300μm-700μm cylindrical groove;

In the second step, as shown in FIG. 5( b ), the single crystal silicon substrate 4 is subjected to cleaning, gluing, photolithography, development, boron ion implantation, sputtering, and degumming processes to obtain a The bottom electrode 3 of boron ion-doped silicon material with a thickness of 10 μm-50 μm;

The third step, as shown in Figure 5(c), is to deposit silicon dioxide with a thickness of 1 μm-6 μm on the monocrystalline silicon substrate to provide a sacrificial layer for making the miniature disc resonator 1 and the electrode gap;

The fourth step, as shown in Figure 5(d), is to deposit doped diamond or doped polysilicon on the basis of the third step, and perform chemical mechanical polishing to manufacture a miniature disc resonator 1 with a thickness of 10 μm-30 μm;

The fifth step, as shown in Figure 5(e), on the basis of the fourth step, the silicon dioxide sacrificial layer is etched with BOE solution and the etching time is controlled to release the micro-disc resonator 1, and the residual part is used as the radius Fix the support column 6 for the center of 15μm-35μm;

The sixth step, as shown in FIG. 5( f ), applies glue, photolithography, development, nickel electroplating, and glue removal on the glass substrate 5 to make the upper electrode 2 of metal nickel material with a height of 20 μm-70 μm;

In the seventh step, as shown in FIG. 5(g), the glass substrate 5 is inverted and bonded with the single crystal silicon substrate 4, so that the center part of the glass substrate 5 is aligned with the center of the fixed support column in the center of the single crystal silicon substrate 4. The two substrates can be fixed, so as to obtain a two-electrode distributed micro-gyroscope that is separated up and down.

Specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the above-mentioned specific embodiments, and those skilled in the art can make various variations or modifications within the scope of the claims, which do not affect the essential content of the present invention.

Claims (9)

1. a two-electrode distributed micro-gyroscope that is separated up and down, is characterized in that, comprises: monocrystalline silicon substrate, center fixed support column, miniature resonator, upper electrode, lower electrode and glass substrate; Wherein: There are a plurality of the upper electrodes, and the plurality of upper electrodes are evenly distributed on the upper side of the micro-resonator to form a uniformly distributed upper electrode, and at the same time, the upper electrodes are arranged on the surface of the single crystal silicon substrate or the surface of the glass substrate; There are a plurality of the lower electrodes, and the plurality of lower electrodes are evenly distributed on the lower side of the micro-resonator to form a uniformly distributed lower electrode, and at the same time, the lower electrodes are arranged on the surface of the single crystal silicon substrate or the surface of the glass substrate; One end of the central fixed support column is connected to the single crystal silicon substrate, and the other end of the central fixed support column is connected to the micro resonator; the single crystal silicon substrate is bonded to the glass substrate; The micro-resonator is used as the vibrating body of the micro-gyroscope, and the upper electrode and the lower electrode are used for driving, detection and control of various micro-gyroscope structures; When the micro-gyroscope works in the angular rate mode, an AC drive signal is applied, a DC bias signal is applied to the micro-resonator, and the uniformly distributed upper electrodes make the micro-resonator work at the required level through electrostatic force. In the driving mode, the vibration amplitude and frequency of the driving mode remain unchanged; when there is an applied angular velocity perpendicular to the direction of the single crystal silicon substrate, the vibration amplitude of the detection mode will change, and the magnitude of the vibration amplitude is related to the applied angular velocity. The magnitude of the angular velocity is proportional to the size, and at the same time, the capacitance between the uniformly distributed upper electrode and the micro-resonator changes; the magnitude of the modal vibration amplitude is calculated and detected by collecting the signal changes on the uniformly distributed upper electrode , and then calculate the magnitude of the applied angular velocity. 2. a kind of upper and lower discrete two-electrode distributed micro-gyroscope according to claim 1, is characterized in that, described micro-gyroscope collects the signal change on described uniformly distributed lower electrode to calculate and detect modal vibration amplitude. The magnitude of the applied angular velocity is then calculated, thereby reducing the parasitic capacitance between the uniformly distributed upper electrodes and improving the detection accuracy. 3. The upper and lower discrete two-electrode distributed micro-gyroscope according to claim 1, wherein the micro-gyroscope applies an AC drive signal on the uniformly distributed lower electrode, and the uniformly distributed The detection signal is collected on the upper electrode or the uniformly distributed lower electrode, and different driving, detection and control modes are provided. 4. a kind of upper and lower discrete two-electrode distributed micro-gyroscope according to claim 1, is characterized in that, described micro-gyroscope judges the work of described micro-gyroscope by the signal change on described uniformly distributed lower electrode In an abnormal working state, a control signal is applied to the uniformly distributed lower electrode through a control algorithm, so that the working state of the micro-gyroscope can be adjusted, so that the micro-gyroscope can work normally. 5. a kind of upper and lower discrete two-electrode distributed micro-gyroscope according to claim 1, is characterized in that, described micro-gyroscope can work under force balance mode and full angle mode, and force balance mode directly detects the value of the applied angular velocity. Size, full angle mode directly detects the size of the added rotation angle. 6. The upper and lower discrete dual-electrode distributed micro-gyroscope according to any one of claims 1-5, wherein the material of the upper electrode and the lower electrode is boron ion or phosphorus ion doped silicon Or it is metal nickel; when the upper electrode or the lower electrode is located on a single crystal silicon substrate, the material is boron ion or phosphorus ion doped silicon; when the upper electrode or the lower electrode is located on a glass substrate, the material is metal nickel. 7. A kind of upper and lower discrete dual-electrode distributed micro-gyroscope according to any one of claims 1-5, wherein the materials of the single-crystal silicon substrate and the glass substrate are high-resistance silicon and silicon dioxide, respectively The high resistance material is used to reduce the signal interference between the upper electrode and the lower electrode. 8. The upper and lower discrete dual-electrode distributed micro-gyroscope according to any one of claims 1-5, wherein the material of the central fixed support column is high-resistance silicon or silicon dioxide; The material of the micro-resonator is doped diamond or doped polysilicon. 9. a preparation method of the upper and lower discrete dual-electrode distributed micro-gyroscope according to any one of claims 1-8, is characterized in that, comprises the steps: The first step is to perform cleaning, coating, photolithography, development, boron ion implantation, sputtering, and debonding processes on the single crystal silicon substrate and the glass substrate to obtain boron ion or phosphorus ion doped silicon material on the single crystal silicon substrate the upper electrode or lower electrode; The second step is to apply glue, photolithography, development, silicon isotropic etching, and debonding on the monocrystalline silicon substrate to obtain grooves corresponding to the shape of the micro-resonator on the monocrystalline silicon substrate; The third step is to deposit silicon dioxide on the single crystal silicon substrate to provide a sacrificial layer for making micro-resonators and the gap between the upper or lower electrodes; The fourth step, depositing doped diamond or doped polysilicon on the single crystal silicon substrate, and carrying out chemical mechanical polishing to make micro-resonators; The fifth step is to use the BOE solution to etch the silicon dioxide sacrificial layer on the basis of the fourth step and control the etching time to release the micro-resonator, and use the residual part as the center to fix the support column; The sixth step is to apply glue, photolithography, development, nickel electroplating, and glue removal on the glass substrate to make the upper electrode or the lower electrode of the metal nickel material; The seventh step is to invert the glass substrate and bond it with the single crystal silicon substrate, so that the center part of the glass substrate is aligned with the center of the center fixed support column of the single crystal silicon substrate, so that the two substrates are fixed, so as to obtain the upper and lower discrete Two-electrode distributed microgyroscope.

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