CN105983511B - Apparatus for coating and coating method - Google Patents
Apparatus for coating and coating method Download PDFInfo
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- CN105983511B CN105983511B CN201610148078.7A CN201610148078A CN105983511B CN 105983511 B CN105983511 B CN 105983511B CN 201610148078 A CN201610148078 A CN 201610148078A CN 105983511 B CN105983511 B CN 105983511B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0291—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work the material being discharged on the work through discrete orifices as discrete droplets, beads or strips that coalesce on the work or are spread on the work so as to form a continuous coating
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- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
The purpose of the present invention is to provide a kind of apparatus for coating and coating methods, even if improving the transporting velocity of substrate, and keep the film thickness of coated film thinning, the apparatus for coating and the coating method can also stably keep liquid pearl, so as to be stably formed uniform coated film.Apparatus for coating of the invention has slit die (10) and decompressing unit (20), slit die (10) has to spray the ejection of coating fluid with slit (13), decompressing unit (20) is located at the upstream side of slit die (10), decompressing unit (20) has decompression slit (21) and pressure-reducing chamber (22), decompression is set with slit (21) with spraying adjacent with slit (13), pressure-reducing chamber (22) is connected with decompression with slit (21), it sprays and is less than 1.0mm with the distance between the downstream side edge part (21b) in opening face (21a) of slit (21) (L) with the upstream side edge part (13a) and decompression in the opening face of slit (13), decompression is less than 1.0mm with the opening width (W) of slit (21).
Description
Technical field
The present invention relates to a kind of apparatus for coating and coating method, which has slit die (slit die), this is narrow
Slit die has ejection slit.
Background technique
In the existing apparatus for coating for having slit die, make to supply the coating fluid to come in manifold towards cross from supply mouth
It to scattering, and sprays the coating fluid being extruded from manifold with slit from ejection, thus forms coating on the surface of the substrate
Film.Here, in order to be stably formed uniform coated film, it is necessary to stably keep and stay between slit die and substrate by from spray
The liquid pearl (bead) formed out with the coating fluid that slit sprays.
But once improve the relative velocity between slit die and substrate, liquid pearl can not be just stably kept, thus nothing
Method is stably formed uniform coated film.Then, as settling mode, it is known that there is method as described below in road: in slit die
Upstream side (direction opposite with the carry direction of substrate) adds pressure-reducing chamber, depressurizes the upstream side of liquid pearl by the pressure-reducing chamber,
Thus liquid pearl (such as patent document 1) is stably kept.
But there are following problems: in order to generate uniform negative pressure in the upstream side of liquid pearl, just must be provided with arriving certain greatly
The pressure-reducing chamber of degree, as a result, causing whole apparatus for coating enlargement.
Then, Patent Document 2 discloses a kind of apparatus for coating, in the apparatus for coating, by ejection slit
Upstream side form recess, and install adjustment block in the recess, subtract so that a part of region in recess is constituted
Pressure chamber.So, can simply form pressure-reducing chamber, and it is contemplated that coating fluid type, the film thickness of coated film etc.
And the opening width (opening width that slit is used in decompression) in pressure-reducing chamber is set by adjusting the installation position of adjustment block
For optimal value.
Patent document 1: the flat 1-213641 bulletin of Japanese Laid-Open Patent Publication Laid-Open
Patent document 2: Japanese Laid-Open Patent Publication Laid-Open 2008-23405 bulletin
Summary of the invention
Technical problems to be solved by the inivention-
But using the apparatus for coating recorded in patent document 2 come when forming coated film, there are following problems: once it mentions
Relative velocity (coating speed) between high slit die and substrate, and keep the film thickness for the coated film to be formed thinning, even if then adjusting
The whole adjustment installation position of block, can not also stably keep liquid pearl, to be difficult to be stably formed uniform coated film.This
A problem is especially when being formed the relatively thin coated film of film thickness using the coating fluid of low-viscosity (such as 30mPas or less) more
It is significant.
The present invention was completed to solve the above problem, main to be designed to provide a kind of apparatus for coating and painting
Cloth method even if improving the relative velocity (coating speed) between slit die and substrate, and makes the film thickness of coated film to be formed
Thinning, the apparatus for coating and the coating method can also stably keep liquid pearl, so as to be stably formed uniform coating
Film.
To solve the technical solution-of technical problem
Apparatus for coating according to the present invention is characterized in that: apparatus for coating has slit die and decompressing unit, slit die
With the ejection slit for being used to spray coating fluid, decompressing unit is located at the upstream side of slit die, and decompressing unit has decompression and uses
Slit and pressure-reducing chamber, decompression slit is adjacent with ejection slit and sets, and pressure-reducing chamber and decompression are connected with slit, sprays with narrow
The distance between the downstream side edge part in the opening face of the upstream side edge part and decompression slit in the opening face of seam is less than 1.0mm, subtracts
The opening width of pressure slit is less than 1.0mm.
Coating method according to the present invention is to utilize above-mentioned apparatus for coating, sprays coating fluid from ejection slit, thus
The method of coated film is formed on substrate, it is characterised in that: the upstream side of the liquid pearl of the coating fluid sprayed from ejection slit
Portion's (upstream side meniscus) is controlled as the downstream side edge part positioned at the opening face of decompression slit.
The effect of invention-
In accordance with the invention it is possible to a kind of apparatus for coating and coating method be provided, even if improving between slit die and substrate
Relative velocity (coating speed), and keep the film thickness for the coated film to be formed thinning, the apparatus for coating and the coating method also can
Liquid pearl is stably kept, so as to be stably formed uniform coated film.
Detailed description of the invention
Fig. 1 is the cross-sectional view for schematically illustrating the structure of the apparatus for coating in one embodiment of the present invention；
Fig. 2 is in Fig. 1 with the enlarged cross-sectional view of the part shown in A.
Symbol description-
10- slit die；The downstream side 11- lip；The upstream side 12- lip；12a- labial surface；Slit is used in 13- ejection；The upstream 13a-
Side edge part；14- manifold；15- exhaust flow path；The downstream side 16- block；The upstream side 17- block；20- decompressing unit；21- decompression is used
Slit；21a- opening face；The downstream 21b- side edge part；The pressure-reducing chamber 22-；Block is used in 23- decompression；24- aspirating hole；30- substrate；40-
Liquid pearl；The upstream side 40a- meniscus；50- coated film.
Specific embodiment
In the following, embodiments of the present invention are described in detail with reference to the accompanying drawings.It should be noted that, the present invention it is unlimited
In the following embodiments and the accompanying drawings.In addition, can do and suitably become in the range of not departing from has the effect of range of the invention
More.
Fig. 1 is the cross-sectional view for schematically illustrating the structure of the apparatus for coating in one embodiment of the present invention, and Fig. 2 is to scheme
With the enlarged cross-sectional view of the part shown in A in 1.It should be noted that the arrow X shown in fig. 1 and 2 indicates substrate 30
Carry direction.In addition, in the following description, the direction opposite with the carry direction X of substrate 30 is known as " upstream side ", and
Direction identical with carry direction X is known as " downstream side ".In addition, in fig. 1 and 2, exaggerating and showing the knot of apparatus for coating
A part of structure does not show the structure of the apparatus for coating according to actual size.
Apparatus for coating in present embodiment on the surface for the substrate 30 carried towards X-direction for forming coated film, such as
Shown in Fig. 1, apparatus for coating has slit die 10 and decompressing unit 20, which there is the ejection for spraying coating fluid to use
Slit 13, the decompressing unit 20 are located at the upstream side of slit die 10.
Slit die 10 is made of upstream side block 17 and downstream side block 16, by upstream side block 17 and downstream lateral mass
Positioned spacers (shim plate) (not being shown in figure) between body 16, or by upstream side block and/or downstream lateral mass
Scale is set on body, to form ejection slit 13.Upstream side block 17 has the upstream side lip 12 positioned at front end, under
Swimming lateral mass body 16 has the downstream side lip 11 for being located at front end.
In addition, being formed with manifold 14 in slit die 10, which is supplied for making from supply mouth (not being shown in figure)
The coating fluid given scatters in the width direction (direction orthogonal with the carry direction X of substrate 30) of coated film.Moreover, from
The coating fluid that manifold 14 is extruded is sprayed from ejection slit 13, to form coated film 50 on the surface of substrate 30.
As shown in Figure 1, the decompressing unit 20 for being located at the upstream side of slit die 10 has decompression slit 21 and pressure-reducing chamber 22,
The decompression slit 21 is adjacent with ejection slit 13 and sets, and the pressure-reducing chamber 22 and decompression slit 21 are connected.Here, decompression
It with slit 21 and pressure-reducing chamber 22 is constituted and arranging decompression block 23 in 30 side of substrate of upstream side block 17.This
Outside, multiple aspirating holes 24, exhaust flow path 15 of the pressure-reducing chamber 22 in upstream side block 17 are equipped in pressure-reducing chamber 22
It is connected with vacuum pump (not being shown in figure).
As shown in Fig. 2, the coating fluid sprayed from ejection with slit 13 forms liquid between slit die 10 and substrate 30 on one side
Pearl 40 is applied on one side on the surface of substrate 30, to form coated film 50.At this point, being made using vacuum pump via pressure-reducing chamber 22
Decompression slit 21 depressurizes, so that the upstream side of liquid pearl 40 be made to depressurize.
However, it may occur that following problems: once improving the transporting velocity (coating speed) of substrate 30, and make the painting to be formed
The film thickness of cloth film 50 is thinning, even if then depressurizing the upstream side of liquid pearl 40 with slit 21 using decompression, also can not steadily protect
Liquid pearl 40 is held, as a result, being difficult to be stably formed uniform coated film.In particular, once the viscosity of coating fluid reduces, liquid pearl
40 hold mode just becomes unstable, to be difficult to be stably formed uniform coated film.
Present inventor is inquired into the reason of the above problem occurs, to obtain discovery as described below.
That is, as shown in Fig. 2, air is from decompression between block 23 and substrate 30 in the upstream side of liquid pearl 40
Act the sequential flowing for pressing decompression slit 21, pressure-reducing chamber 22, exhaust flow path 15 in gap.At this point, transporting velocity (the coating of substrate 30
Speed) it is faster, it is bigger in order to stably keep decompressed pressure required for liquid pearl 40.Therefore, in this case, if do not made
Decompression the distance between block 23 and substrate 30 D1Narrow fully to cause stress loss, make liquid pearl 40 with being just unable to fully
Upstream side decompression, to be difficult to stably keep liquid pearl 40.
Further, since the decompression of the upstream side of liquid pearl 40 is to be carried out by decompression with slit 21, therefore liquid pearl 40 is upper
Swim the decompressed pressure of side largely by air from gap of the decompression between block 23 and substrate 30 by decompression with narrow
Seam 21, pressure-reducing chamber 22, exhaust flow path 15 sequential flowing when dynamic pressure size (speed of air-flow) control.On the other hand,
The upstream side of liquid pearl 40 be equipped with pressure-reducing chamber in that case of, the decompressed pressure of the upstream side of liquid pearl 40 largely by
Depressurize the control of indoor static pressure size.Therefore, the feelings depressurized in the setting decompression of the upstream side of liquid pearl 40 with slit 21
Under condition, once when air flows to decompression slit 21 with the gap between block 23 and substrate 30 from decompression generate air-flow it is disorderly
Disorderly, the size of dynamic pressure will change.As described above, in the case where promoting transporting velocity (coating speed) of substrate 30,
It will be got higher to stably keep decompressed pressure required for liquid pearl 40.It is therefore preferable that making decompression block 23 and substrate 30
The distance between D1It reduces to cause sufficient pressure loss.However, between once making between decompression block 23 and substrate 30
Gap (distance D1) reduce, the faster air of flow velocity will be from lesser gap (the distance D1) flow to the biggish decompression of opening width
With slit 21, so that air-flow is easy to produce disorder, it becomes difficult to control dynamic pressure.As a result, the decompression of the upstream side of liquid pearl 40
Pressure becomes unstable, to be difficult to stably keep liquid pearl 40.Moreover, the phenomenon has the viscosity of coating fluid more low more significant
Tendency.
In order to lower the disorder of air-flow as described above, as shown in Fig. 2, it is preferred that making the opening width W of decompression slit 21
It reduces.So, it will be able to lower when air from decompression between block 23 and substrate 30 gap (decompression with block 23 with
The distance between substrate 30 D1) disorder of air-flow that generates when flowing to decompression slit 21.
It is preferred that the optimal range of the opening width W of decompression slit 21 is set as to be less than 1.0mm.If opening is wide
Degree W is 1.0mm or more, then from decompression, with the gap between block 23 and substrate 30, (decompression is between block 23 and substrate 30
Distance D1) flow into the decompression air of slit 21 mainstream (air-flow of central part) and liquid pearl 40 upstream side meniscus 40a it
Between distance will become larger, that is to say, that decompression position leaves liquid pearl 40.As a result, the upstream side meniscus 40a of liquid pearl 40
Become unstable, upstream side meniscus 40a can vibrate or toward downstream side retreat (at the labial surface 12a of upstream side, upstream side meniscus
The locking position (pinning) of 40a is retreated toward downstream side (direction of arrow X meaning)).
In addition, as described above, it is preferred to depressurizing with the distance between block 23 and substrate 30 D1For lesser value, and if opened
Mouth width degree W is 1.0mm or more, then distance D1Difference between opening width W just becomes larger, to be easy in decompression slit 21
Generate the disorder of air-flow.As a result, the decompressed pressure of the upstream side of liquid pearl 40 becomes unstable, to be difficult to stably keep
Liquid pearl 40.
Moreover, the phenomenon has the more low more significant tendency of the viscosity of coating fluid.Therefore, by making decompression slit 21
Opening width W be less than 1.0mm, even if the viscosity of coating fluid be 30mPas hereinafter, can stably keep liquid pearl 40.
On the other hand, using slit die come when being coated with coated film, as shown in Fig. 2, it is preferred that set to application conditions etc.,
The upstream side meniscus 40a of liquid pearl 40 is set to be located at the downstream side edge part 21b of the opening face 21a of (being locked in) decompression slit 21
(the upstream side edge part of the labial surface 12a of upstream side lip 12).That is, according to the wet-film thickness of coated film, the object of coating fluid
Rationality matter (surface tension, viscosity) to application conditions (such as interval (the distance between slit die 10 and substrate 30 D2), coating speed
Degree) it is set, so that the latched position of the upstream side meniscus 40a of liquid pearl 40 is located at downstream side edge part 21b.
Moreover, controlling under the application conditions decompressed pressure, so that the upstream side meniscus 40a energy of liquid pearl 40
The downstream side edge part 21b of enough opening face 21a positioned at (being locked in) decompression slit 21.
If the upstream side meniscus 40a of liquid pearl 40 is not made to be located at (being locked in) downstream side edge part 21b, liquid pearl 40 will become
Must be unstable, it is easy to happen bad order (crawling, film thickness are abnormal) this phenomenon of coated film.
Spray the downstream side of the opening face 21a of the upstream side edge part 13a and decompression slit 21 with the opening face of slit 13
The optimal range of the distance between edge 21b L preferably designs as described above are as follows: the upstream side meniscus 40a of liquid pearl 40
Positioned at the downstream side edge part 21b of the opening face 21a of (being locked in) decompression slit 21.From the angle, such as when being applied
When the wet-film thickness of coated film when cloth is 20 μm or less, preferably distance L is set as to be less than 1.0mm.
If distance L is 1.0mm or more, the upstream side meniscus 40a of liquid pearl 40 is not at and (is locked in) decompression
With the downstream side edge part 21b of the opening face 21a of slit 21, but can be toward behind the downstream side (direction of arrow X meaning) of labial surface 12a
It moves back.Such liquid pearl is easy by external factor (such as minor change, the minor change of decompressed pressure of substrate surface state
Deng) influence, to cannot be stably formed liquid pearl, as a result, coated film can not be formed uniformly.
As described above, the apparatus for coating in the present invention has slit die 10 and decompressing unit 20, the slit die
10 have the ejection slit 13 for being used to spray coating fluid, which is located at the upstream side of slit die 10, and this subtracts
Pressure unit 20 has and the decompression slit 21 that sets and the decompression that with decompression slit 21 is connected adjacent with ejection slit 13
Room 22.Here, it is preferred that: by the opening face 21a of the upstream side edge part 13a in the opening face of ejection slit 13 and decompression slit 21
The distance between downstream side edge part 21b L be set as being less than 1.0mm, and the opening width W of decompression slit 21 is set as
Less than 1.0mm.According to this structure, even if improving the transporting velocity (coating speed) of substrate 30, and make the coating to be formed
The film thickness of film is thinning, can also stably keep liquid pearl 40, so, it will be able to be stably formed uniform coated film.
In the present embodiment, lower decompression slit by making the opening width W of decompression slit 21 be less than 1.0mm
The disorder of air-flow in 21, but can also be as shown in Figure 2, roll decompression slit 21 towards pressure-reducing chamber 22 towards upstream
Tiltedly.So, flowing into decompression can rapidly be spread with the air in slit 21 in decompression slit 21.Its result
It is that can lower the disorder of the air-flow in decompression slit 21, thereby, it is possible to stably keep liquid pearl 40.
The inclination of decompression slit 21 can be suitably determined according to size of opening width W of decompression slit 21 etc.
Angle θ, preferably by decompression with the tiltangleθ of slit 21 be set as falling in the opening face 21a relative to decompression slit 21 at 30~
In the range of 60 °.In the case that inclination angle is fallen in the range, it can effectively make Diffusion of gas stream.
In the present embodiment, due to can by 30 side of substrate of upstream side block 17 arrange decompression with block 23 come
Decompression slit 21 and pressure-reducing chamber 22 are constituted, therefore decompressing unit 20 can be made to minimize, so just it is possible to realize coatings
The miniaturization of device.
It should be noted that the volume in pressure-reducing chamber 22 is not particularly limited, but for the miniaturization of apparatus for coating,
It is preferred that pressure-reducing chamber corresponding with every 1m length in the width direction (with the orthogonal direction carry direction X) of decompression slit 21
22 volume is less than 0.002m3.Moreover, from above-mentioned angle, preferably smaller than 0.001m3.On the other hand, if pressure-reducing chamber 22
Volume become too small, be easy in decompressing unit 20 occur air-flow disorder, therefore preferably pressure-reducing chamber 22 volume under
It is limited to: decompression corresponding with every 1m length in the width direction (with the orthogonal direction carry direction X) of decompression slit 21
The volume of room 22 is 0.0001m3More than.
In addition, as shown in Figure 1, being equipped with multiple aspirating holes 24, in pressure-reducing chamber 22 in order to along the width side in pressure-reducing chamber 22
To equably depressurizing pressure-reducing chamber 22, set aspirating hole 24 in every 1m length preferably in the width direction of decompression slit 21
Quantity be four or more.So, it will be able to make the width direction (side orthogonal with carry direction X of decompression slit 21
To) on decompressed pressure homogenization.The upper limit of the quantity of aspirating hole 24 is not particularly limited, but from the miniaturization of apparatus for coating
Angle set out, preferably are as follows: every 1m length in the decompression width direction of slit 21 is equipped with 12 aspirating holes below
24。
Coating method in other embodiments of the present invention is characterized in that: being used above-mentioned apparatus for coating, is used from spraying
Slit 13 sprays coating fluid, to form coated film 50 on the substrate 30.Here, it is preferred that the painting that will be sprayed from ejection slit 13
The upstream side meniscus 40a control of the liquid pearl 40 of cloth liquid is positioned at the downstream of the opening face 21a of (being locked in) decompression slit 21
Side edge part 21b.
It should be noted that coating method in present embodiment is suitable for following situations, it may be assumed that the viscosity of coating fluid is
30mPas is hereinafter, and the wet-film thickness of coated film when being coated is 20 μm or less.Moreover, the painting in present embodiment
Cloth method is suitable for following situations, it may be assumed that the viscosity of coating fluid is 20mPas or less；The wet coating thickness of coated film when being coated
Degree is 10 μm or less.
Above by preferred embodiment, the present invention is described, but such description is not to limit of the invention
It is fixed, it is of course possible to which that the present invention is made various changes.
For example, in the above-described embodiment. on one side supporting substrate 30 while preferably by backing roll (not being shown in figure)
Substrate 30 is carried towards X-direction, but also can use without using the mode of backing roll and carry substrate 30.
In addition, in the above-described embodiment, aspirating hole 24 and exhaust flow path 15 are formed in upstream side block 17, but it is evacuated
Hole 24 and exhaust flow path 15 can also be located at the bottom of decompression block 23.
In addition, the viscosity of the coating fluid in present embodiment is using Type B viscosmeter (Brookfield viscometer) in coating fluid temperature
The viscosity measured at 23 DEG C of degree.
In addition, in Fig. 2, from the angle of film coated (being to be coated in a manner of 20 μm below by wet-film thickness), under
Swim the distance between labial surface 11a and the substrate 30 in lateral lip portion 11 D2Preferably 200 μm hereinafter, more preferably 100 μm hereinafter, especially
Preferably 50 μm or less.The distance between the labial surface 11a and substrate 30 of downstream side lip 11 D2Lower limit be preferably 15 μm or more,
Particularly preferably 20 μm or more.
As described above, it is preferred to depressurize with the distance between the labial surface 23a of block 23 and substrate 30 D1For lesser value, specifically
For, preferably 200 μm hereinafter, more preferably 100 μm hereinafter, particularly preferably 50 μm or less.The decompression labial surface of block 23
The distance between 23a and substrate 30 D1Lower limit be preferably 15 μm or more, particularly preferably 20 μm or more.
In addition, the distance between the labial surface 11a of downstream side lip 11 and substrate 30 D2With the labial surface 23a of decompression block 23
The distance between substrate 30 D1It can be equal distance, distance D can also be made1Greater than distance D2.From the structure of apparatus for coating
For upper (in design), preferred distance D2With distance D1For equal distance.
In addition, the decompression block 23 for being arranged in 30 side of substrate of upstream side block 17 can also be with 17 shape of upstream side block
It is integrally formed.
Claims (6)
1. a kind of apparatus for coating, has slit die and decompressing unit,
The slit die has the ejection slit for spraying coating fluid,
The decompressing unit is located at the upstream side of the slit die,
The apparatus for coating is characterized in that:
The decompressing unit has decompression slit and pressure-reducing chamber,
The decompression slit is adjacent with the ejection slit and sets,
The pressure-reducing chamber is connected with the decompression with slit,
It is described spray with slit opening face upstream side edge part and it is described decompression with slit opening face downstream side edge part it
Between distance be less than 1.0mm,
The opening width of the decompression slit is less than 1.0mm,
The pressure-reducing chamber has multiple aspirating holes for depressurizing the pressure-reducing chamber,
The quantity of the set aspirating hole is four or more in every 1m length in the width direction of the decompression slit.
2. apparatus for coating according to claim 1, it is characterised in that:
The decompression slit rolls oblique towards the pressure-reducing chamber towards upstream.
3. apparatus for coating according to claim 2, it is characterised in that:
The inclination angle of decompression slit falls in the opening face relative to the decompression slit in the range of 30~60 °.
4. according to claim 1 to apparatus for coating described in any one of 3, it is characterised in that:
The volume in the pressure-reducing chamber corresponding with every 1m length in the width direction of the decompression slit is less than 0.002m3。
5. a kind of coating method utilizes apparatus for coating, coating fluid is sprayed from ejection slit, to form coating on substrate
Film, wherein the apparatus for coating has slit die and decompressing unit, the slit die has the spray for spraying coating fluid
Slit is used out, and the decompressing unit is located at the upstream side of the slit die, and the decompressing unit has decompression slit and decompression
Room, the decompression slit is adjacent with the ejection slit and sets, and the pressure-reducing chamber is connected with the decompression with slit, institute
State ejection slit opening face upstream side edge part and the decompression slit opening face downstream side edge part between away from
From 1.0mm is less than, the opening width of the decompression slit is less than 1.0mm, which is characterized in that:
The upstream side meniscus of the liquid pearl of the coating fluid sprayed from the ejection with slit is controlled as being located at the decompression
With the downstream side edge part in the opening face of slit.
6. coating method according to claim 5, it is characterised in that:
The viscosity of the coating fluid be 30mPas hereinafter,
The wet-film thickness of coated film when being coated is 20 μm or less.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015055950A JP6450618B2 (en) | 2015-03-19 | 2015-03-19 | Coating apparatus and coating method |
| JP2015-055950 | 2015-03-19 |
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| Publication Number | Publication Date |
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| CN105983511A CN105983511A (en) | 2016-10-05 |
| CN105983511B true CN105983511B (en) | 2019-07-23 |
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| CN201610148078.7A Active CN105983511B (en) | 2015-03-19 | 2016-03-15 | Apparatus for coating and coating method |
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|---|---|---|---|---|
| JP6450618B2 (en) * | 2015-03-19 | 2019-01-09 | 東レフィルム加工株式会社 | Coating apparatus and coating method |
| CN112770846B (en) * | 2018-09-27 | 2022-11-11 | 富士胶片株式会社 | Film manufacturing method and film roll |
| JP6722834B1 (en) * | 2020-03-19 | 2020-07-15 | 日東電工株式会社 | Extrusion method |
| CN112474191B (en) * | 2020-11-16 | 2021-11-09 | 深圳市曼恩斯特科技股份有限公司 | Slit coating die head |
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| US5741549A (en) * | 1994-04-29 | 1998-04-21 | Maier; Gary W. | Slide die coating method and apparatus with improved die lip |
| EP0757596B1 (en) * | 1994-04-29 | 2008-05-14 | Minnesota Mining And Manufacturing Company | Multiple layer and slide die coating method and apparatus |
| KR101199099B1 (en) * | 2010-08-03 | 2012-11-08 | 삼성에스디아이 주식회사 | Vacuum chamber system of coating apparatus and coating method using the same |
| JP2012187545A (en) * | 2011-03-11 | 2012-10-04 | Toyota Motor Corp | Coating apparatus, coating method, and method for manufacturing electrode |
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| JPH05345161A (en) * | 1992-06-11 | 1993-12-27 | Konica Corp | Apparatus for applying photosensitive material |
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| CN105983511A (en) * | 2015-03-19 | 2016-10-05 | 东丽薄膜先端加工有限公司 | A coating device and a coating method |
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| Publication number | Publication date |
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| CN105983511A (en) | 2016-10-05 |
| JP2016175007A (en) | 2016-10-06 |
| JP6450618B2 (en) | 2019-01-09 |
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