CN105866548B - A kind of sheet resistance test probe and its test device and sheet resistance test method - Google Patents
A kind of sheet resistance test probe and its test device and sheet resistance test method Download PDFInfo
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- CN105866548B CN105866548B CN201610228925.0A CN201610228925A CN105866548B CN 105866548 B CN105866548 B CN 105866548B CN 201610228925 A CN201610228925 A CN 201610228925A CN 105866548 B CN105866548 B CN 105866548B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/08—Measuring resistance by measuring both voltage and current
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Abstract
The invention discloses a kind of sheet resistance test probe and its test devices and sheet resistance test method, it is used as the mechanical probes that test probe replaces four probe method measurement surface resistance by the mercury of liquid, mechanical probe can be effectively overcome to damage coating, film and the defect for substantially changeing detected materials stress, obtain more accurate measurement result, and it designs invented the corresponding resistance testing device using mercury as test probe simultaneously, mercury probe test sample surface resistance can easily be used, and mercury can be injected and withdrawn easily and fast, device design is succinct, it is easy to use, test effect accurately repeats, it works well.Lesioned sample surface is can effectively prevent using the mercury probe test method of the present invention and the sample of test device test surfaces easy damaged and reduces interference of the excessive test pressure to the sheet resistance of sample to be tested especially coating sample.
Description
Technical field
The present invention relates to a kind of survey sheet resistance test probes, and the invention further relates to use the sheet resistance test probe
Device；Further relate to the sheet resistance test method using the device.
Background technology
The method of the sheet resistance of existing testing coating, film sample is mechanical four probe method, and basic test principle is
Resistance instrument connects one or four probes, and there are four equidistant arrangement, telescopic probes on probe plane, and probe is pressed in and waits measuring and monitoring the growth of standing timber
Expect that surface, resistance instrument can show that the sheet resistance of material, concrete principle are that two probes of outer end generate current field, inner end
The potential that upper two probe test current fields are formed on the two spy points, because material resistance is bigger, the potential of generation is also bigger,
Thus the sheet resistance of material is measured.And for coating, thin-film material, there are two factors to test result for mechanical four probe method
It is affected, first, probe is hard metal, and the mechanical pressure depressed is larger, is easily made to coating to be measured, film-like materials
At with mechanical damage, and there is larger puncture risk；Second is that probe is depressed into coating to be measured, thin in larger mechanical pressure
Membrane material surface, mechanical pressure can be transmitted to the coating of lower contact, on thin-film material by probe, can make coating, film material
The inside of material forms pressured state, coating under this pressured state, thin-film material resistance characteristic often with resistive under normality
Can be different, make to measure resistance deviation room temperature resistance.
Invention content
First technical problem to be solved by this invention, which is to provide one kind, will not damage coating, film surface and obviously change
Become detected materials stress and measures sheet resistance test probe high several times.
Second technical problem to be solved by this invention is to provide a kind of test using the sheet resistance test probe
Device.
Third technical problem to be solved by this invention is to provide a kind of surface using the sheet resistance test probe
Method for testing resistance.
In order to solve first technical problem, sheet resistance test probe provided by the invention, including a plane uniform thickness
Insulation module, set on the insulation module there are four equidistant line arrangement, the identical through-hole up and down of aperture shape,
The same position in through-hole described in four is respectively provided with a plain conductor being connect with resistance test external circuit, described in four
The mercury that equivalent is injected in through-hole forms mercury and the plain conductor in the through-hole and the through-hole
Lower section sample to be tested surface connection.
The length shapes that the plain conductor extend into the part in the through-hole are identical.
The plain conductor enters the through-hole in the insulation module internal punches, or from the through-hole
Top enters in the through-hole.
The insulation module is poly (methyl methacrylate) plate, ceramic wafer or polyaniline plate.
In order to solve second technical problem, the test device provided by the invention with sheet resistance test probe, packet
Include the i.e. described sheet resistance test probe of a four-terminal resistance test external circuit and a four end measuring heads, surface electricity
Resistance test probe includes the insulation module of a plane uniform thickness, sets that there are four equidistant line arrangement, holes on the insulation module
The identical through-hole up and down of diameter shape, the same position in through-hole described in four are respectively provided with one and the four ends electricity
The plain conductor of resistance test external circuit connection, be injected in the through-hole described in four equivalent mercury formed mercury with it is described
Through-hole in the plain conductor be connected to the sample to be tested surface of the lower section of the through-hole, formed " four-terminal resistance survey
Try external circuit-plain conductor-mercury-sample to be tested " test access.
The four-terminal resistance test external circuit is resistance test circuit or collection containing two current terminals and two voltage ends
At resistance test equipment.
Described in outermost two of through-hole described in two current terminals of the described four-terminal resistance test external circuit and four
The plain conductor in through-hole is connected, in the through-hole described in the centre two of the through-hole described in two voltage ends and four
The plain conductor is connected.
Further include one to inject described in the mercury, after the completion suck-back recycling to the through-hole 3 when testing beginning
Mercury mercury store injection device.
In order to solve third technical problem, the sheet resistance provided by the invention using sheet resistance test probe is tested
Method, the mercury using four equidistant line arrangements, the identical liquid of shape height contact sample as test probe
Surface is simultaneously connect with four electric current of resistance test external circuit, voltage ports respectively, forms " resistance test external circuit-mercury
Column-sample to be tested surface " access measures sample to be tested resistance by four end measuring resistance principles.
Mercury is moved by the insulation module on mobile sample to be tested surface, to obtain sample to be tested different zones
Resistance.
Using the sheet resistance test probe and its test device and sheet resistance test method of above-mentioned technical proposal, existing
There are four probes to survey in sheet resistance technical foundation, is arranged using four equidistant lines, the identical liquid mercury of shape height is made
Replace mechanical probes to contact sample surface for test probe, respectively with four electric currents, voltage ends of resistance test external circuit
After mouth connection, " resistance test external circuit-mercury-sample to be tested surface " access is formed, equidistant four probes measuring resistance is passed through
Principle measure sample to be tested sheet resistance.Since mercury is in liquid, mercury is fixed to by hollowed mould, is had
It is to be obtained by the way that mercury to be injected to the upper and lower perforative through-hole of an insulation module for body, specifically four equidistant lines
The consistent through-hole of arrangement, shape height.Mercury density itself is higher, and surface tension is larger, thus the mercury below through-hole with
It will not be flowed outwardly from the gap of through-hole and sample to be tested under the maintenance of its surface tension after sample to be tested contact.Mercury is popped one's head in
For soft liquid, the contact with sample to be tested is liquid/solid interface, and contact effect is much better than mechanical probes and sample to be tested
Gu/liquid/solid interface, and using the mercury of certain altitude as probe, it, can further due to the hydraulic pressure that mercury gravity itself generates
Ensure that mercury is contacted with the good of sample to be tested, obtains preferably test effect.The liquid test probe of this original creation can be complete
The superficial injury that beautiful solution mechanical test probe is generated in the sample of testing coating, film and other surfaces easy damaged is asked
Topic, at the same by adjusting mercury pressure can obtain one not only can guarantee contact with sample to be tested well but also be avoided that excessive influence
The good result of sample to be tested internal stress state；Water can also be moved by the insulation module on mobile sample to be tested surface simultaneously
Silver-colored column, to obtain the resistance of sample to be tested different zones.
Mercury is connect with resistance test external circuit by plain conductor, the connection of four plain conductors and corresponding mercury
Position, connection type need to ensure identical so that " resistance test external circuit-mercury-sample to be tested surface " test circuit itself
Resistance can controllably calculate.Plain conductor need to ensure to contact with the good of mercury, be preferably positioned at mercury middle part or lower part
Position to ensure the good contact effect of plain conductor and mercury by mercury hydraulic pressure, while can be reduced in test circuit
The length of the relatively large mercury of resistivity reduces test circuit resistance.
The specific connection type of connection of mercury and resistance test external circuit is outermost two mercury of four mercury
It is connected with two current terminals of resistance test external circuit, intermediate two mercury and two voltage end phases of resistance test external circuit
Even, specific currents are applied by current terminal, the voltage signal acquired by voltage end.
Mercury, which stores injection device, suck-back recycling to test mercury used after the completion of test, prevent mercury from leaking and cause dirt
Dye.The plain conductor of connection external circuit is located in through-hole, is well connected with ensureing that through-hole injects after mercury to be formed with plain conductor
Connect, and plain conductor reach through-hole partial-length shape it is identical, with guarantee " test circuit-plain conductor-mercury
The resistance of four probe circuits of column-sample to be tested " test circuit is identical and controllable.Wherein plain conductor can be in insulation module
Punching enters through-hole, can also enter above through-hole.The four-terminal resistance test external circuit is containing two current terminals and two electricity
The resistance test circuit or integrated resistor test equipment of pressure side.It is two that four-terminal resistance, which tests external circuit and the connection type of through-hole,
A current terminal is connected with the plain conductor in outermost two through-holes of four through-holes, in two voltage ends and four through-holes
Between plain conductor in two through-holes be connected.
It will not damage coating, film surface in conclusion the present invention is one kind and substantially change detected materials stress
And measure high several times sheet resistance test probe and its test device and sheet resistance test method.
Description of the drawings
Fig. 1 is principle schematic when not adding mercury of the present invention.
Fig. 2 is principle schematic after the addition mercury of the present invention.
Fig. 3 enters a kind of signal of mode of through-hole for plain conductor in a kind of device of measurement surface resistance of the present invention
Figure.
Fig. 4 enters showing for the another way of through-hole for plain conductor in a kind of device of measurement surface resistance of the present invention
It is intended to.
Fig. 5 is that the pressing plate of the present invention lifts, a kind of structure of specific implementation mode of the state of the unimplanted through-hole of mercury is shown
It is intended to.
Fig. 6 fills a kind of structural representation of specific implementation mode of the state of through-hole for the pressing plate pressure of the present invention, mercury
Figure.
Fig. 7 is that the side of the present invention dissects the sectional side view of through-hole, mercury injection device and plain conductor mode of entrance.
The mode that Fig. 8 enters through-hole for the signal plain conductor of the present invention (only illustrates through-hole and conducting wire, is free of other portions
Part) vertical view.
In figure：1- test samples；2- insulation modules；3- through-holes；4- mercury injection devices；5- plain conductors；6- mercurys；7-
Plain conductor leading-in end；8- pressing plates；9- springs.
Specific implementation mode
To make technical scheme of the present invention and advantage become apparent from, the embodiment of the present invention is said below in conjunction with the accompanying drawings
It is bright.
Referring to Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5, Fig. 6, Fig. 7 and Fig. 8, a kind of sheet resistance test probe, including one flat
The insulation module 2 of face uniform thickness, sets that there are four identical up and down logical of equidistant line arrangement, aperture shape on insulation module 2
Hole 3, the same position in four through-holes 3 are respectively provided with a plain conductor being connect with resistance test external circuit 5, four through-holes 3
The mercury 6 for being inside injected with equivalent forms the sample to be tested table of mercury and the lower section of plain conductor 5 and through-hole 3 in through-hole 3
Face is connected to.
Specifically, plain conductor 5 extend into the part in the through-hole 3 length shapes it is identical.
Specifically, plain conductor 5 enters through-hole 3 in 2 internal punches of insulation module, or enters institute from the top of through-hole 3
In the through-hole 3 stated.
Specifically, insulation module 2 is poly (methyl methacrylate) plate, ceramic wafer or polyaniline plate.
Referring to Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5, Fig. 6, Fig. 7 and Fig. 8, the test device with sheet resistance test probe,
Including a four-terminal resistance test external circuit and a four end measuring heads, that is, sheet resistance test probe, sheet resistance test probe
Insulation module 2 including a plane uniform thickness, set on insulation module 2 there are four equidistant line arrangement, aperture shape it is identical on
The through-hole 3 of lower perforation, the same position in four through-holes 3 are respectively provided with the metal that one connect with four-terminal resistance test external circuit and lead
Line 5, the mercury 6 that equivalent is injected in four through-holes 3 form the lower section of mercury and plain conductor 5 and through-hole 3 in through-hole 3
The connection of sample to be tested surface, it is logical to form " four-terminal resistance test external circuit-plain conductor-mercury-sample to be tested " test
Road.
It is resistance test circuit or integrated resistor containing two current terminals and two voltage ends that four-terminal resistance, which tests external circuit,
Test equipment.
Four-terminal resistance tests the plain conductor 5 in two current terminals of external circuit and outermost two through-holes 3 of four through-holes 3
It is connected, the plain conductor in the through-hole 3 of centre two of two voltage ends and four through-holes 3 is connected.
Further include one test start when to through-hole 3 inject mercury, after the completion suck-back recycle mercury mercury store note
Enter device 4.
Referring to Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5, Fig. 6, Fig. 7 and Fig. 8, surveyed using the sheet resistance of sheet resistance test probe
Method for testing, the mercury using four equidistant line arrangements, the identical liquid of shape height contact detected sample as test probe
Product surface is simultaneously connect with four electric current of resistance test external circuit, voltage ports respectively, forms " resistance test external circuit-mercury
Column-sample to be tested surface " access measures sample to be tested resistance by four end measuring resistance principles.
Mercury is moved by the insulation module on mobile sample to be tested surface, to obtain sample to be tested different zones
Resistance.
Embodiment 1：The poly (methyl methacrylate) plate of one block length 5cm × wide 3cm × thickness 1cm is placed on test specimens as insulation module 2
1 surface of product, the centre of the poly (methyl methacrylate) plate there are four Φ 5mm, centre-to-centre spacing 10mm, the through-hole 3 up and down being arranged in a linear,
Four copper conductor, that is, plain conductors 5 are put into above through-hole 3 in through-hole 3, the copper conductor length goed deep into through-hole 3 is 8mm, will
This four copper conductors are connected on a resistance meter, and connection type is：It is connect with four 3 two through-holes 3 in outside of through-hole
Plain conductor 5 connects the current terminal of resistance meter, and the plain conductor 5 being connect with two through-holes 3 among four through-holes 3 connects resistance and surveys
Try the voltage end of instrument.Open resistance meter, in four through-holes 3 injection mercury 6 to 6 liquid level of mercury and organic glass upper table
Face is concordant, the record reading R after resistance meter stable reading1, resistance meter is closed after measurement, from 3 interior suction of through-hole
Go out mercury 6 and seal up for safekeeping, arranges cleaning utensil used.
Embodiment 2：The ceramic wafer of one block length 6cm × wide 4cm × thickness 2cm is placed on 1 table of test sample as insulation module 2
Face, there are four Φ 3mm, centre-to-centre spacing 5mm, the through-holes 3 up and down being arranged in a linear for the centre of the ceramic wafer, and four copper are led
Line, that is, plain conductor 5 is put into above through-hole 3 in through-hole 3, and the copper conductor length goed deep into through-hole 3 is 15mm, by this four copper
Conducting wire is connected on a resistance meter, and connection type is：The plain conductor 5 being connect with four 3 two through-holes 3 in outside of through-hole
The even current terminal of resistance meter, the plain conductor 5 being connect with two through-holes among four through-holes 3 connect the voltage of resistance meter
End.Resistance meter is opened, injection mercury 6 waits for electricity to concordant with ceramic wafer upper surface with 6 liquid level of mercury in four through-holes 3
Record reads R after hindering tester stable reading1, ceramic wafer is slowly translated to another test position on 1 surface of sample to be tested, is stopped
Stable reading is waited for after only moving, and records another reading R2, the different zones of sample to be tested 1 are measured successively.It is closed after measurement
Resistance meter goes out mercury 6 from 3 interior suction of through-hole and seals up for safekeeping, arranges cleaning utensil used.
Embodiment 3：The polyaniline plate of one block length 5cm × wide 2cm × thickness 1.5cm is placed on test specimens as insulation module 2
1 surface of product, the centre of the polyaniline plate there are four length of side 4mm, centre-to-centre spacing 6mm, the through-hole 3 up and down being arranged in a linear,
It punches from the back side of polyaniline plate and is put into four aluminum conductor, that is, plain conductors 5 in through-hole 3 from 3 side of through-hole after perforation is led to, it is deep
The aluminum conductor length entered in through-hole 3 is 3mm, this four aluminum conductors is connected on a resistance meter, connection type is：With
The plain conductor 5 of four 3 outsides of through-hole, two through-holes 3 connections connects the current terminal of resistance meter, with two among four through-holes 3
The plain conductor 5 that through-hole 3 connects connects the voltage end of resistance meter.Resistance meter is opened, mercury is injected in four through-holes 3
6 to, after resistance meter stable reading after record reading R concordant with polyaniline plate upper surface with 6 liquid level of mercury1, in test specimens
1 surface of product slowly translates polyaniline plate to another test position, waits for stable reading after stopping movement, records another reading R2,
The different zones of test sample 1 are measured successively.Resistance meter is closed after measurement, goes out mercury 6 from 3 interior suction of through-hole and is sealed
It deposits, arranges cleaning utensil used.
Embodiment 4：A kind of surface resistance testing instrument contains two parts, resistance test circuit part and test probe portion
Point.Resistance test circuit part is containing a Constant current output module, a voltage signal acquisition module and one by voltage and electricity
Flow data is converted into the conversion display module of resistance.Test probe part contains organic glass of a block length 5cm × wide 3cm × thickness 1cm
Glass plate is as insulation module 2, and there are four Φ 5mm, centre-to-centre spacing 10mm, upper and lower passing through of being arranged in a linear for the centre of the poly (methyl methacrylate) plate
Logical through-hole 3, poly (methyl methacrylate) plate are connect by four copper conductor, that is, plain conductors 5 with resistance test circuit part, and copper conductor is solid
It is scheduled on organic glass upper surface, completely and is put into through-hole 3 above through-hole 3, it is 8mm to go deep into copper conductor length in through-hole 3,
The connection type of this four copper conductors and resistance test circuit part is：The metal being connect with four 3 two through-holes 3 in outside of through-hole
Conducting wire 5 connects electric current and exports both ends, and the plain conductor 5 being connect with two through-holes 3 among four through-holes 3 connects voltage acquisition both ends.It is logical
Mercury flow in pipes (as shown in Fig. 1-Fig. 4) is fixed in hole 3, mercury flow in pipes is 1mm with a distance from 3 lower surface of through-hole.
When using device to test 1 sheet resistance of test sample, poly (methyl methacrylate) plate is placed on 1 top of test sample, power supply is opened and connects
Resistance test circuit part, injected into four through-holes 3 by mercury flow in pipes mercury 6 to 6 liquid level of mercury and organic glass
Glass upper surface is concordant, the record reading R after the stable reading of the conversion display module of resistance test circuit1, in 1 table of test sample
Face slowly translates poly (methyl methacrylate) plate to another test position, waits for stable reading after stopping movement, records another reading R2, successively
Measure the different zones of test sample 1.After measurement close resistance test circuit part power supply, by mercury flow in pipes from
3 interior suction of through-hole goes out mercury 6 and seals up for safekeeping, arranges cleaning utensil used.
Embodiment 5：A kind of surface resistance testing instrument contains two parts, automatic resistance tester and test probe part.
Automatic resistance tester can measure resistance data by two current output terminals and two voltage acquisition ends and show that resistance is read automatically
Number.Polyaniline plate of the test probe part containing a block length 5cm × wide 2cm × thickness 1.5cm is as insulation module 2, the polyaniline plate
Centre there are four Φ 4mm, centre-to-centre spacing 6mm, the through-hole 3 up and down being arranged in a linear, punched from the back side of polyaniline plate
Four aluminum conductor, that is, plain conductors 5 are put into from 3 side of through-hole in through-hole 3 after perforation is logical, go deep into the aluminum conductor length in through-hole 3
Connection type for 3mm, this four aluminum conductors and automatic resistance tester is：It is connect with four 3 two through-holes 3 in outside of through-hole
Plain conductor 5 connects electric current and exports both ends end, and the plain conductor 5 being connect with two through-holes 3 among four through-holes 3 connects voltage acquisition two
End.There are one the mercury injection device 4 (as shown in Figure 5) being made of deformable round end and injection-tube, deformable round end stores
It, is put into through-hole 3 by the mercury 6 that can just fill through-hole 3 above through-hole 3, and injection-tube enters through-hole 3 and deformable round end
The top of through-hole 3 is rested on, injection nozzle maintains an equal level with 3 lower surface of through-hole, and four through-holes 3 or so are supported on spring 9 there are two spring 9
One pressing plate 8.When using the device to test sample surfaces resistance, there will be polyaniline plate to be placed on 1 top of test sample, open automatic electric
Tester power supply is hindered, pressing plate 8 is depressed and fixed (such as Fig. 6), institute's water silver 6 fills four through-holes 3 in round end, and automatic resistance is surveyed
Record reads R after trying the stable reading of instrument1, polyaniline plate is slowly translated to another test position on 1 surface of test sample, is stopped
Stable reading is waited for after only moving, and records another reading R2, the different zones of test sample 1 are measured successively.Make pressure after measurement
Plate 8 bounces, and round end reinstatement generates suction and sucks back the mercury 6 in through-hole 3, closes automatic resistance tester, arranges cleaning
Utensil used.
Embodiment 6：A kind of surface resistance testing instrument contains two parts, automatic resistance tester and test probe part.
Automatic resistance tester can measure resistance data by two current output terminals and two voltage acquisition ends and show that resistance is read automatically
Number.Polyaniline plate of the test probe part containing a block length 5cm × wide 2cm × thickness 1.5cm is as insulation module 2, the polyaniline plate
Centre there are four Φ 4mm, centre-to-centre spacing 6mm, the through-hole 3 up and down being arranged in a linear, punched from the back side of polyaniline plate
Four aluminum conductor, that is, plain conductors 5 are put into from 3 side of through-hole in through-hole 3 after perforation is logical, go deep into the aluminum conductor length in through-hole 3
Connection type for 3mm, this four aluminum conductors and automatic resistance tester is：It is connect with four 3 two through-holes 3 in outside of through-hole
Plain conductor 5 connects electric current and exports both ends, and the plain conductor 5 being connect with two through-holes 3 among four through-holes 3 connects voltage acquisition two
End.There are one the mercury injection device 4 (as shown in Figure 5) being made of deformable round end and injection-tube, deformable round end stores
It, is put into through-hole 3 by the mercury 6 that can just fill through-hole 3 above through-hole 3, and injection-tube enters through-hole 3 and deformable round end
The top of through-hole 3 is rested on, injection nozzle maintains an equal level with 3 lower surface of through-hole, and four through-holes 3 or so are supported on spring 9 there are two spring 9
One pressing plate 8.When using device to test 1 sheet resistance of test sample, there will be polyaniline plate to be placed on 1 top of test sample, open
Pressing plate 8 is depressed and is fixed (such as Fig. 6) by automatic resistance tester power supply, and institute's water silver 6 fills four through-holes 3 in round end, automatically
Record reading R after the stable reading of resistance meter1, decontrol pressing plate 8 and be allowed to bounce Fig. 5 states that are restored to, round end generates suction
Mercury 6 in through-hole 3 is sucked back, polyaniline plate is moved in another region of test sample 1, pressing plate 8 is depressed, records another
Read R2, decontrol pressing plate 8 and suck back mercury 6, measure the different zones of test sample 1 successively by the method.Make after measurement
Pressing plate 8, which bounces, sucks back mercury 6, closes automatic resistance tester, arranges cleaning utensil used.
It can effectively prevent using the mercury probe test method of the present invention and the sample of test device test surfaces easy damaged
Interference of the lesioned sample surface test pressure excessive with reduction to the sheet resistance of sample to be tested especially coating sample.
Claims (9)
1. a kind of sheet resistance test probe, it is characterised in that：Insulation module (2) including a plane uniform thickness, described is exhausted
Equidistant line arrangement, the identical through-hole (3) up and down of aperture shape there are four being set in edge module (2) are logical described in four
Same position in hole (3) is respectively provided with a plain conductor being connect with resistance test external circuit (5), the through-hole described in four
(3) mercury (6) that equivalent is injected in forms mercury and the plain conductor (5) and institute in the through-hole (3)
The sample to be tested surface of the lower section for the through-hole (3) stated is connected to；The mercury stores note by being located at the mercury above through-hole (3)
Enter device (4) injection and recycling；The mercury storage injection device (4) is made of variable forming head and injection-tube, mercury storage note
Entering above device has a pressing plate (9), and before test, pressing plate (9) pressure can be changed the mercury stored in forming head and fill through-hole formation test
Mercury is completed, and pressing plate (9) resets, and be can be changed forming head and is generated suction, mercury is retracted.
2. sheet resistance test probe according to claim 1, it is characterised in that：The plain conductor (5) is extend into
The length shapes of part in the through-hole (3) are identical.
3. sheet resistance test probe according to claim 1 or 2, it is characterised in that：The plain conductor (5) is in institute
Insulation module (2) internal punches stated enter the through-hole (3), or enter above the through-hole (3) described
In through-hole (3).
4. sheet resistance test probe according to claim 1 or 2, it is characterised in that：The insulation module (2) is to have
Machine glass plate, ceramic wafer or polyaniline plate.
5. the test device with sheet resistance test probe described in claim 1, it is characterised in that：Including a four ends electricity
Resistance test external circuit and four end measuring head are the sheet resistance test probe, the sheet resistance test probe packet
Include the insulation module (2) of a plane uniform thickness, set on the insulation module (2) there are four equidistant line arrangement, aperture shape
Identical through-hole (3) up and down, the same position in through-hole (3) described in four are respectively provided with one and the four ends electricity
The plain conductor (5) of resistance test external circuit connection, mercury storage injection device (4) is set above through-hole (3), by variable forming head and
Injection-tube forms, and has a pressing plate (9) above mercury storage injection device, and before test, pressing plate (9) pressure can be changed and be stored in forming head
Mercury fill through-hole formed test mercury, with the through-hole (3) in the plain conductor (5) and the through-hole
(3) the sample to be tested surface of lower section is connected to, and " four-terminal resistance test external circuit-plain conductor-mercury-waits for test sample for formation
Product " test access, is completed, and pressing plate (9) resets, and can be changed forming head and generates suction, mercury is retracted.
6. the test device of sheet resistance test probe according to claim 5, it is characterised in that：The four-terminal resistance
It is resistance test circuit or integrated resistor test equipment containing two current terminals and two voltage ends to test external circuit.
7. the test device of sheet resistance test probe according to claim 6, it is characterised in that：The four-terminal resistance
Test external circuit two current terminals and four described in outermost two of through-hole (3) described in through-hole (3) in the gold
Belong to conducting wire (5) to be connected, it is described in the through-hole (3) described in the centre two of the through-hole (3) described in two voltage ends and four
Plain conductor (5) is connected.
8. using the sheet resistance test method of sheet resistance test probe described in claim 1, it is characterised in that：Use four
The arrangement of a equidistant line, the identical liquid of shape height mercury as test probe contact sample surface and respectively with
Four port connections of electric current, voltage of resistance test external circuit, form " resistance test external circuit-mercury-sample to be tested table
Face " access measures sample to be tested resistance by four end measuring resistance principles.
9. the sheet resistance test method according to claim 8 using sheet resistance test probe, it is characterised in that：It is logical
It crosses and moves the insulation module on sample to be tested surface to move mercury, to obtain the resistance of sample to be tested different zones.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610228925.0A CN105866548B (en) | 2016-04-14 | 2016-04-14 | A kind of sheet resistance test probe and its test device and sheet resistance test method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610228925.0A CN105866548B (en) | 2016-04-14 | 2016-04-14 | A kind of sheet resistance test probe and its test device and sheet resistance test method |
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| CN105866548B true CN105866548B (en) | 2018-11-09 |
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| CN108067099A (en) * | 2016-11-08 | 2018-05-25 | 通用电气公司 | Film device and the method for monitoring film |
| CN108051645B (en) * | 2017-12-26 | 2023-10-27 | 宁夏钜晶源晶体科技有限公司 | Lithium tantalate and lithium niobate wafer resistivity testing device and testing method |
| CN110376439A (en) * | 2019-08-16 | 2019-10-25 | 广州特种机电设备检测研究院 | A kind of non-metal material surface resistance testing device |
| CN111796148A (en) * | 2020-07-31 | 2020-10-20 | 上海华力微电子有限公司 | Resistance test structure |
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| US8633720B2 (en) * | 2011-06-21 | 2014-01-21 | Avalanche Technology Inc. | Method and apparatus for measuring magnetic parameters of magnetic thin film structures |
| CN102508179B (en) * | 2011-11-08 | 2014-02-19 | 清华大学 | Device and method for detecting force electromagnetic coupling behavior of giant magneto resistive film |
| CN102495295B (en) * | 2011-12-26 | 2013-11-06 | 南开大学 | Measuring method of capacitance characteristic of semiconductor film material and apparatus thereof |
| CN103837807B (en) * | 2012-11-23 | 2016-11-09 | 上海华虹宏力半导体制造有限公司 | The method of measurement deep trench carriers concentration distribution |
| CN203705554U (en) * | 2014-02-10 | 2014-07-09 | 北京京东方显示技术有限公司 | Resistance measuring device |
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