CN105675545A - High-sensitivity intensity detection method based on self-interference type micro resonator cavity light sensor - Google Patents
High-sensitivity intensity detection method based on self-interference type micro resonator cavity light sensor Download PDFInfo
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Abstract
一种基于自干涉型微谐振腔光传感器的高灵敏度强度探测方法，出射频谱拥有与单波导耦合到微环谐振腔类似的频谱，该传输谱是传输谷值具有周期性分布的频谱；将被测物质覆盖在光探测臂波导的上表面，光从输入波导的一端入射，与微环谐振腔发生耦合，则一部分耦合进入微环谐振腔；另一部分从输入波导的另一端出射并经过光探测臂进入输出波导，这部分中一部分光由于输出波导与微谐振腔之间的耦合作用，再次耦合进入微谐振腔，而这部分中一部分光与微环谐振腔中耦合出的一部分光相干涉后从输出波导另一端出射；通过测试谐振波长处传输强度的变化即可实现高灵敏度传感。本发明在保持极高灵敏度的前提下避免要求很高精度的频率定位、降低测试系统成本。
A high-sensitivity intensity detection method based on a self-interference micro-resonator optical sensor, the output spectrum has a spectrum similar to that of a single waveguide coupled to a micro-ring resonator, and the transmission spectrum is a spectrum with a periodic distribution of transmission valleys; it will be The measured substance is covered on the upper surface of the waveguide of the optical detection arm. The light is incident from one end of the input waveguide and coupled with the microring resonant cavity, and a part of it is coupled into the microring resonant cavity; the other part is emitted from the other end of the input waveguide and passed through the optical detection. Arm enters the output waveguide, part of the light in this part is coupled into the micro resonator again due to the coupling effect between the output waveguide and the micro resonator, and part of the light in this part interferes with part of the light coupled out of the micro ring resonator Emitted from the other end of the output waveguide; high-sensitivity sensing can be achieved by testing the change in transmission intensity at the resonant wavelength. On the premise of maintaining extremely high sensitivity, the invention avoids frequency positioning requiring very high precision and reduces the cost of the testing system.
Description
技术领域technical field
本发明涉及光传感技术领域，尤其是一种基于自干涉型微谐振腔光传感器的高灵敏度强度探测方法。The invention relates to the technical field of light sensing, in particular to a high-sensitivity intensity detection method based on a self-interference micro-resonance cavity light sensor.
背景技术Background technique
近年来，低成本、高灵敏度的超小型传感器的需求不断增长，尤其是在生化制剂和有毒气体等物质检测方面。针对这种需求，工业界和学术界已经提出和制作了许多类型的传感器，其中光学传感器以其极小的尺寸和极高的灵敏度在众多类型传感器中备受关注。许多光学现象如，吸收、荧光、辐射和折射等，以及许多光学介质结构，如光纤、光子晶体、微环谐振腔，表面等离子体和光栅等，都被应用来开拓新型传感机制以获得较好的传感效果。基于微环谐振腔的光学传感器具有尺寸小，灵敏度高以及与CMOS工艺兼容易于集成等优点，被广泛应用于光学传感领域，当光波导有效折射率随着目标物质而变化时，微谐振腔的谐振波长发生漂移，因此通过测试此波长漂移即可测得目标物质的浓度变化(文献1，Mario,La.Notte,BenedettoTroia,TommasoMuciaccia,CaloEdoardoCampanella,FrancescoDeLeonardisandVittoroM.N.Passaro,“Recentadvancesingasandchemicaldetectionbyverniereffect-basedphotonicsensors”,Sensors,V.14(3),4831-4855(2014)，即Mario,La.Notte,BenedettoTroia,TommasoMuciaccia,CaloEdoardoCampanella,FrancescoDeLeonardisandVittoroM.N.Passaro,“基于游标效应的光传感器在气体和化学探测中的研究进展”，传感器,V.14(3),4831-4855(2014))。然而，基于微环谐振腔的光学传感器仍然存在着一些限制其进一步发展应用的缺点。对于基于微环谐振腔的光学传感器，高的灵敏度需要一个尖锐的谐振谱，其探测极限取决于微环谐振腔的Q因子。这就要求器件的传输损耗低，从而提高了对器件制作工艺的要求。随后科研人员提出了基于游标效应的光学传感器，以期获得高的灵敏度和低的探测极限。事实上，基于游标效应灵敏度的提高仅仅来源于游标刻度的读出方法，其物理本征灵敏度并未得到丝毫的提高。Dai等提出了一种基于马赫-增德干涉耦合的微环谐振腔，通过测量共振波长的移动，能够以较高灵敏度探测到大约10-6～10-5有效折射率变化。但是在测量折射率变化值为10-6时，波长移动量仅仅为0.35pm,需要代价高昂的探测系统(专利1，ZL200810060460.8)。在专利(专利1，ZL200810060460.8)中，也提出了在某一固定波长测量传输功率的办法来测量折射率的变化，但实际上由于法诺(Fano)效应产生的频谱过宽，在实际中存在诸多问题，比如其测量范围有限，测量线性度很差。因此，在保持高探测精度的前提下，必须探索新的传感机制以有效降低系统的探测代价，例如用强度探测代替原来的波长测量。In recent years, there has been a growing demand for low-cost, high-sensitivity ultra-small sensors, especially in the detection of substances such as biochemical agents and toxic gases. In response to this demand, many types of sensors have been proposed and produced in industry and academia, among which optical sensors have attracted much attention among many types of sensors due to their extremely small size and high sensitivity. Many optical phenomena, such as absorption, fluorescence, radiation, and refraction, as well as many optical media structures, such as optical fibers, photonic crystals, microring resonators, surface plasmons, and gratings, have been applied to develop new sensing mechanisms for better sensing. Good sensing effect. The optical sensor based on the micro-ring resonator has the advantages of small size, high sensitivity, compatibility with CMOS process and easy integration, and is widely used in the field of optical sensing. When the effective refractive index of the optical waveguide changes with the target material, the micro-resonator Therefore, by testing this wavelength shift, the concentration change of the target substance can be measured (literature 1, Mario, La.Notte, Benedetto Troia, Tommaso Muciaccia, Calo Edoardo Campanella, Francesco DeLeonardis and Vittoro M.N. Passaro, "Recent advances in as and chemical detection by vernie effect-based photonic sensors", Sensors , V.14(3), 4831-4855(2014), namely Mario, La.Notte, BenedettoTroia, TommasoMuciaccia, CaloEdoardoCampanella, FrancescoDeLeonardis and VittoroM.N.Passaro, "Research progress of optical sensors based on vernier effect in gas and chemical detection ", Sensors, V.14(3), 4831-4855(2014)). However, optical sensors based on microring resonators still have some shortcomings that limit their further development and application. For optical sensors based on microring resonators, high sensitivity requires a sharp resonance spectrum whose detection limit depends on the Q factor of the microring resonator. This requires the transmission loss of the device to be low, thereby increasing the requirements for the manufacturing process of the device. Subsequently, researchers proposed an optical sensor based on the vernier effect in order to obtain high sensitivity and low detection limit. In fact, the improvement of sensitivity based on the vernier effect is only derived from the readout method of the vernier scale, and its physical intrinsic sensitivity has not been improved at all. Dai et al. proposed a microring resonator based on Mach-Zehnder interference coupling. By measuring the shift of the resonant wavelength, the effective refractive index change of about 10 -6 to 10 -5 can be detected with high sensitivity. However, when the measured refractive index change value is 10 -6 , the wavelength shift is only 0.35pm, which requires an expensive detection system (patent 1, ZL200810060460.8). In the patent (patent 1, ZL200810060460.8), a method of measuring the transmission power at a certain fixed wavelength is also proposed to measure the change of the refractive index, but in fact, the frequency spectrum generated by the Fano effect is too wide. There are many problems in it, such as its limited measurement range and poor measurement linearity. Therefore, under the premise of maintaining high detection accuracy, new sensing mechanisms must be explored to effectively reduce the detection cost of the system, such as replacing the original wavelength measurement with intensity detection.
发明内容Contents of the invention
为了克服已有自干涉型微谐振腔光传感器探测方法的保持高灵敏度时要求很高精度的频率定位、测试系统成本较高的不足，本发明提供一种在保持极高灵敏度的前提下避免要求很高精度的频率定位、降低测试系统成本的基于自干涉型微谐振腔光传感器的高灵敏度强度探测方法。In order to overcome the shortcomings of the existing self-interference type micro-resonator optical sensor detection method that requires high-precision frequency positioning and high cost of the test system when maintaining high sensitivity, the present invention provides a method that avoids the requirement of high sensitivity while maintaining high sensitivity. A high-sensitivity intensity detection method based on a self-interference micro-resonator optical sensor with very high-precision frequency positioning and reduced test system cost.
本发明解决其技术问题所采用的技术方案是：The technical solution adopted by the present invention to solve its technical problems is:
一种基于自干涉型微谐振腔光传感器的高灵敏度强度探测方法，实现该探测的微谐振腔光传感器包括一根输入波导、一个微环谐振腔、一根输出波导和一根光探测臂波导，输入波导和输出波导分别与微环谐振腔耦合，置于微环谐振腔的两侧，输入波导的一端为整个光传感器的光源接入端；在输入波导与微环谐振腔的耦合处输入波导的另一端与光探测臂波导的输入端相连；在输出波导与微环谐振腔的耦合处光探测臂波导的输出端与输出波导的一端相连，输出波导的另一端为传感信号出射端；出射频谱拥有与单波导耦合到微环谐振腔类似的频谱，该传输谱是传输谷值具有周期性分布的频谱；A high-sensitivity intensity detection method based on a self-interference microresonator optical sensor. The microresonator optical sensor for this detection includes an input waveguide, a microring resonator, an output waveguide, and an optical detection arm waveguide , the input waveguide and the output waveguide are respectively coupled with the microring resonator and placed on both sides of the microring resonator. One end of the input waveguide is the light source access end of the entire optical sensor; The other end of the waveguide is connected to the input end of the waveguide of the optical detection arm; the output end of the waveguide of the optical detection arm is connected to one end of the output waveguide at the coupling between the output waveguide and the microring resonator, and the other end of the output waveguide is the output end of the sensing signal ; The exit spectrum has a spectrum similar to that of a single waveguide coupled to a microring resonator, and the transmission spectrum is a spectrum with periodic distribution of transmission valleys;
探测方法为：将被测物质覆盖在光探测臂波导的上表面，光从输入波导的一端入射，与微环谐振腔发生耦合，则一部分耦合进入微环谐振腔；另一部分从输入波导的另一端出射并经过光探测臂进入输出波导，这部分中一部分光由于输出波导与微谐振腔之间的耦合作用，再次耦合进入微谐振腔，而这部分中一部分光与微环谐振腔中耦合出的一部分光相干涉后从输出波导另一端出射；通过测试谐振波长处传输强度的变化即可实现高灵敏度传感。The detection method is as follows: the measured substance is covered on the upper surface of the waveguide of the optical detection arm, the light is incident from one end of the input waveguide, and is coupled with the micro-ring resonator, and a part of it is coupled into the micro-ring resonator; the other part is from the other end of the input waveguide. One end exits and enters the output waveguide through the optical detection arm. Part of the light in this part is coupled into the micro-resonator due to the coupling between the output waveguide and the micro-resonator, and part of the light in this part is coupled with the micro-ring resonator. Part of the light interferes and exits from the other end of the output waveguide; high-sensitivity sensing can be achieved by testing the change in transmission intensity at the resonant wavelength.
进一步，当被测物质折射率发生变化时，光探测臂波导的光程长度发生变化，不仅传输谷值处的谐振波长发生漂移，而且传输谷值的强度发生变化。Furthermore, when the refractive index of the measured substance changes, the optical path length of the waveguide of the optical detection arm changes, not only the resonant wavelength at the transmission valley shifts, but also the intensity of the transmission valley changes.
本发明的技术构思为：当光探测臂波导长度满足等于微环谐振器长度的0.75倍时，该自干涉型微环谐振腔的出射频谱拥有与单波导耦合到微环谐振腔类似的频谱，该传输谱是传输谷值具有周期性分布的频谱。在传输谷值对应的谐振波长，不仅与该微环谐振腔的物理长度有关，而且与输入输出波导与微环谐振腔的耦合系数以及光探测臂的物理长度有关。同样，其传输谷值的大小也与输入输出波导与微环谐振腔的耦合系数以及光探测臂的物理长度有关。因此，当被测物质折射率发生变化时，光探测臂波导的光程长度发生变化，不仅传输谷值处的谐振波长发生漂移，而且传输谷值的强度发生变化。通过测试谐振波长处传输强度的变化即可实现高灵敏度传感。The technical idea of the present invention is: when the waveguide length of the optical detection arm is equal to 0.75 times the length of the microring resonator, the outgoing spectrum of the self-interference microring resonator has a spectrum similar to that of a single waveguide coupled to the microring resonator, This transmission spectrum is a spectrum in which transmission valleys have a periodic distribution. The resonance wavelength corresponding to the transmission valley is not only related to the physical length of the microring resonator, but also related to the coupling coefficient between the input and output waveguide and the microring resonator and the physical length of the optical detection arm. Similarly, the size of its transmission valley is also related to the coupling coefficient between the input and output waveguide and the microring resonator and the physical length of the optical detection arm. Therefore, when the refractive index of the measured substance changes, the optical path length of the waveguide of the optical detection arm changes, not only the resonance wavelength at the transmission valley shifts, but also the intensity of the transmission valley changes. High-sensitivity sensing can be achieved by measuring the change in transmission intensity at the resonant wavelength.
本发明的有益效果主要表现在：使得该传感器在保持极高探测灵敏度的前提下，仅仅需要一个可以扫频的激光器即可实现高精度的强度测量，避免了此类传感器在测量频率移动时需要很高精度的频率定位，极大降低了测试系统的造价。The beneficial effects of the present invention are mainly manifested in that: under the premise of maintaining extremely high detection sensitivity, the sensor only needs a frequency-sweeping laser to achieve high-precision intensity measurement, which avoids the need for this type of sensor when the measurement frequency moves. Very high-precision frequency positioning greatly reduces the cost of the test system.
附图说明Description of drawings
图1为自干涉型微环谐振腔光传感器结构示意图。Figure 1 is a schematic diagram of the structure of a self-interference micro-ring resonator optical sensor.
图2为自干涉型微环谐振腔的出射频谱。Figure 2 is the emission spectrum of the self-interference microring resonator.
图3在波长λ＝1552nm处的传输谷随输入输出波导与微环谐振腔耦合系数大小的变化。Figure 3. The transmission valley at the wavelength λ=1552nm varies with the coupling coefficient between the input and output waveguide and the microring resonator.
图4在波长λ＝1552nm处的传输谷随光探测臂波导的光程长度微小变化时而产生的变化。Fig. 4 The variation of the transmission valley at the wavelength λ=1552nm with the slight variation of the optical path length of the waveguide of the optical detection arm.
图5在波长λ＝1552nm处传输谷的归一化传输强度值随光探测臂波导光程长度微小变化的曲线。Fig. 5 is a curve of the normalized transmission intensity value of the transmission valley at the wavelength λ=1552nm as a function of the slight variation of the optical path length of the waveguide of the optical detection arm.
具体实施方式detailed description
下面结合附图对本发明作进一步描述。The present invention will be further described below in conjunction with the accompanying drawings.
参照图1～图5，一种基于自干涉型微谐振腔光传感器的高灵敏度强度探测方法，实现该探测的微谐振腔光传感器包括一根输入波导1、一个微环谐振腔2、一根输出波导3和一根光探测臂波导4，输入波导1和输出波导3分别与微环谐振腔2耦合，置于微环谐振腔2的两侧，输入波导1的一端为整个光传感器的光源接入端，在输入波导1与微环谐振腔2的耦合处，输入波导1的另一端与光探测臂波导4的输入端相连，在输出波导3与微环谐振腔2的耦合处，输出波导3的一端与光探测臂波导4的输出端相连，输出波导3的另一端为传感信号出射端：出射频谱拥有与单波导耦合到微环谐振腔类似的频谱，该传输谱是传输谷值具有周期性分布的频谱；Referring to Figures 1 to 5, a high-sensitivity intensity detection method based on a self-interference micro-resonator optical sensor, the micro-resonator optical sensor for this detection includes an input waveguide 1, a micro-ring resonator 2, a The output waveguide 3 and an optical detection arm waveguide 4, the input waveguide 1 and the output waveguide 3 are respectively coupled with the microring resonant cavity 2, placed on both sides of the microring resonant cavity 2, and one end of the input waveguide 1 is the light source of the entire optical sensor The access end is at the coupling place between the input waveguide 1 and the microring resonator 2, the other end of the input waveguide 1 is connected to the input end of the optical detection arm waveguide 4, and at the coupling place between the output waveguide 3 and the microring resonator 2, the output One end of the waveguide 3 is connected to the output end of the waveguide 4 of the optical detection arm, and the other end of the output waveguide 3 is the output end of the sensing signal: the output spectrum has a spectrum similar to that of a single waveguide coupled to a microring resonator, and the transmission spectrum is the transmission valley a spectrum whose values have a periodic distribution;
探测方法为：将被测物质覆盖在光探测臂波导的上表面，光从输入波导的一端入射，与微环谐振腔发生耦合，则一部分耦合进入微环谐振腔；另一部分从输入波导的另一端出射并经过光探测臂进入输出波导，这部分中一部分光由于输出波导与微谐振腔之间的耦合作用，再次耦合进入微谐振腔，而这部分中一部分光与微环谐振腔中耦合出的一部分光相干涉后从输出波导另一端出射；通过测试谐振波长处传输强度的变化即可实现高灵敏度传感。The detection method is as follows: the measured substance is covered on the upper surface of the waveguide of the optical detection arm, the light is incident from one end of the input waveguide, and is coupled with the micro-ring resonator, and a part of it is coupled into the micro-ring resonator; the other part is from the other end of the input waveguide. One end exits and enters the output waveguide through the optical detection arm. Part of the light in this part is coupled into the micro-resonator due to the coupling between the output waveguide and the micro-resonator, and part of the light in this part is coupled with the micro-ring resonator. Part of the light interferes and exits from the other end of the output waveguide; high-sensitivity sensing can be achieved by testing the change in transmission intensity at the resonant wavelength.
进一步，当被测物质折射率发生变化时，光探测臂波导的光程长度发生变化，不仅传输谷值处的谐振波长发生漂移，而且传输谷值的强度发生变化。Furthermore, when the refractive index of the measured substance changes, the optical path length of the waveguide of the optical detection arm changes, not only the resonant wavelength at the transmission valley shifts, but also the intensity of the transmission valley changes.
实例：此例中自干涉型微环谐振传感器，微环半径R＝30μm，则微环圆周的物理长度LR＝2πR，光探测臂波导的物理长度为LW＝0.75LR+d。图2为自干涉型微环谐振腔的出射频谱，此时d＝0.004μm,有效折射率neff＝2.85，输入波导和输出波导与微环谐振腔的耦合系数相等，均为0.5，该传感器中所有光学波导中光模式单位长度的损耗系数α＝0.01dB/cm。从图2中可以看出，该自干涉型微环谐振腔的出射频谱拥有与单波导耦合到微环谐振腔类似的频谱，该传输谱是传输谷值具有周期性分布的频谱。图3显示了在波长λ＝1552nm处的传输谷随输入输出波导与微环谐振腔耦合系数大小的变化。图4显示了在波长λ＝1552nm处的传输谷随光探测臂波导的光程长度微小变化时而产生的变化。这表明在传输谷值对应的谐振波长，不仅与该微环谐振腔的物理长度有关，而且与输入输出波导与微环谐振腔的耦合系数以及光探测臂的物理长度有关。同样，其传输谷值的大小也与输入输出波导与微环谐振腔的耦合系数以及光探测臂的物理长度有关。图5显示了在波长λ＝1552nm处传输谷的归一化传输强度值随光程长度微小变化d的曲线。由图中可以看出在k＝0.5，1nm＜d＜2.5nm时可以取得很好的线性度，此时测量精度约为0.1nm，对应的折射率变化约为10-6。当k＝0.15,0.85时，相应的测量范围扩大，但测量精度下降。在k＝0.9985,测量范围可以扩大到25nm,测量精度下降为1nm,对应的折射率变化约为10-5。Example: In this example, the self-interference type micro-ring resonant sensor, the micro-ring radius R=30μm, then the physical length of the micro-ring circumference L R =2πR, and the physical length of the optical detection arm waveguide is L W =0.75L R +d. Figure 2 shows the emission spectrum of the self-interference microring resonator. At this time, d = 0.004 μm, the effective refractive index n eff = 2.85, and the coupling coefficients of the input waveguide and output waveguide and the microring resonator are equal to 0.5. The sensor The loss coefficient α=0.01dB/cm per unit length of the light mode in all optical waveguides in . It can be seen from Fig. 2 that the emission spectrum of the self-interference microring resonator has a frequency spectrum similar to that of a single waveguide coupled to the microring resonator, and the transmission spectrum is a frequency spectrum in which transmission valleys have a periodic distribution. Figure 3 shows the variation of the transmission valley at the wavelength λ=1552nm with the coupling coefficient between the input and output waveguide and the microring resonator. Fig. 4 shows the variation of the transmission valley at the wavelength λ=1552nm with the slight variation of the optical path length of the waveguide of the optical detection arm. This shows that the resonant wavelength corresponding to the transmission valley is not only related to the physical length of the microring resonator, but also related to the coupling coefficient between the input and output waveguide and the microring resonator and the physical length of the optical detection arm. Similarly, the size of its transmission valley is also related to the coupling coefficient between the input and output waveguide and the microring resonator and the physical length of the optical detection arm. Fig. 5 shows the curve of the normalized transmission intensity value of the transmission valley at the wavelength λ=1552nm as a function of the small change d of the optical path length. It can be seen from the figure that good linearity can be obtained when k=0.5, 1nm<d<2.5nm, the measurement accuracy is about 0.1nm, and the corresponding refractive index change is about 10 -6 . When k = 0.15, 0.85, the corresponding measurement range expands, but the measurement accuracy decreases. When k=0.9985, the measurement range can be expanded to 25nm, and the measurement accuracy is reduced to 1nm, corresponding to a change in the refractive index of about 10 -5 .
上述实施例用来解释说明本发明，而不是对本发明进行限制，在本发明的精神和权利要求的保护范围内，对本发明作出的任何修改和改变，都落入本发明的保护范围。The above-mentioned embodiments are used to illustrate the present invention, rather than to limit the present invention. Within the spirit of the present invention and the protection scope of the claims, any modification and change made to the present invention will fall into the protection scope of the present invention.
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