CN105675545A - High-sensitivity intensity detection method based on self-interference type micro resonator cavity light sensor - Google Patents
High-sensitivity intensity detection method based on self-interference type micro resonator cavity light sensor Download PDFInfo
- Publication number
- CN105675545A CN105675545A CN201610026981.6A CN201610026981A CN105675545A CN 105675545 A CN105675545 A CN 105675545A CN 201610026981 A CN201610026981 A CN 201610026981A CN 105675545 A CN105675545 A CN 105675545A
- Authority
- CN
- China
- Prior art keywords
- micro
- waveguide
- resonant cavity
- light
- coupled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
- G01N2021/458—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods using interferential sensor, e.g. sensor fibre, possibly on optical waveguide
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention provides a high-sensitivity intensity detection method based on a self-interference type micro resonator cavity light sensor. An emergent frequency spectrum is similar to the frequency spectrum of a single waveguide which is coupled to the micro-ring resonator cavity, and transmission spectrum is the frequency spectrum whose transmission valley value is periodically distributed; a substance to be detected covers the upper surface of an optical detection arm waveguide, light enters from one end of an input waveguide, coupling is carried out between the light and the micro-ring resonator cavity, and one part of light is coupled into the micro-ring resonator cavity; the other part of light emits from the other end of the input waveguide and enters the output waveguide through the optical detection arm, a part of the other part of light is coupled into the micro-ring resonator cavity again due to a coupling effect between the output waveguide and the micro-ring resonator cavity, and the part of the other part of light is interfered with the part of light which is coupled by the micro-ring resonator cavity and emits from the other end of the output waveguide; change of transmission intensity at the resonance wavelength position is tested, in order to realize high sensitivity sensing. In the prerequisite that extremely high sensitivity is maintained, requirements of high-precision frequency positioning is avoided, and cost of the test system is reduced.
Description
Technical field
The present invention relates to optical sensing field, especially a kind of highly sensitive intensity detection method based on self-interference type micro-resonant cavity photo-sensor.
Background technology
In recent years, the demand of the miniature transducer of low cost, highly sensitive constantly increases, especially in the material context of detection such as biochemical preparation and toxic gas. addressing that need, industry member and academia have proposed and have made the sensor of many types, and wherein optical sensing device receives much concern in numerous type sensor with its minimum size and extremely high sensitivity. many optical phenomenas as, absorption, fluorescence, radiation and refraction etc., and many optical medium structures, such as optical fiber, photonic crystal, micro-ring resonant cavity, surface plasma and grating etc., all be used to developing novel sensing mechanism to obtain good sensing effect. optical sensing utensil based on micro-ring resonant cavity has size little, highly sensitive and be easy to the advantage such as integrated with CMOS technology compatibility, it is widely used in optical sensing field, when optical waveguides effective refractive index changes along with target substance, the raw drift of the synchronous wave long hair of micro-resonant cavity, therefore change in concentration (the document 1 of target substance can be recorded by testing this wave length shift, Mario, La.Notte, BenedettoTroia, TommasoMuciaccia, CaloEdoardoCampanella, FrancescoDeLeonardisandVittoroM.N.Passaro, " Recentadvancesingasandchemicaldetectionbyverniereffect-b asedphotonicsensors ", Sensors, V.14 (3), 4831-4855 (2014), i.e. Mario, La.Notte, BenedettoTroia, TommasoMuciaccia, CaloEdoardoCampanella, FrancescoDeLeonardisandVittoroM.N.Passaro, " based on research progress in gas and chemical probing of the optical sensor of cursor effect ", sensor, V.14 (3), 4831-4855 (2014)).But, the optical sensing device based on micro-ring resonant cavity still also exists some shortcomings limiting it and further developing application. For the optical sensing device based on micro-ring resonant cavity, high sensitivity needs a sharp-pointed resonance spectrum, and its detection limit depends on the Q factor of micro-ring resonant cavity. This just requires that the transmission loss of device is low, thus improves the requirement to device making technics. Scientific research personnel proposes the optical sensing device based on cursor effect subsequently, to obtaining high sensitivity and low detection limit. In fact, only deriving from the reading method of vernier scale based on the raising of cursor effect sensitivity, its physics intrinsic sensitivity does not obtain a bit raising. Dai etc. propose a kind of micro-ring resonant cavity interfering coupling based on Mach-increasing moral, by measuring the movement of resonant wavelength, it is possible to detect about 10 with higher sensitivity-6～10-5Effective refractive index changes. But it is 10 in measurement variations in refractive index value-6Time, the wavelength amount of movement is only 0.35pm, it is necessary to detection system (patent 1, ZL200810060460.8) of a high price. In patent (patent 1, ZL200810060460.8) in, it is also proposed a certain fixed wave length measure through-put power way to measure the change of specific refractory power, but in fact due to method promise (Fano) effect produce frequency spectrum wide, there are problems in practice, such as its useful range is limited, and measure linear degree is very poor. Therefore, such as, under the prerequisite keeping high detection accuracy, it is necessary to explore new sensing mechanism effectively to reduce the detection cost of system, replace original wavelength measurement with intensity detection.
Summary of the invention
In order to require the frequency localization of very high precision, deficiency that cost of testing system is higher when overcoming the maintenance highly sensitive of existing self-interference type micro-resonant cavity photo-sensor detection method, the present invention avoids under providing a kind of prerequisite keeping pole highly sensitive requiring the frequency localization of very high precision, reducing the highly sensitive intensity detection method based on self-interference type micro-resonant cavity photo-sensor of cost of testing system.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of highly sensitive intensity detection method based on self-interference type micro-resonant cavity photo-sensor, the micro-resonant cavity photo-sensor realizing this detection comprises an input waveguide, a micro-ring resonant cavity, an output waveguide and an optical detection arm waveguide, input waveguide and output waveguide are coupled with micro-ring resonant cavity respectively, the both sides being placed in micro-ring resonant cavity, one end of input waveguide is the light source access end of whole optical sensor; It is connected with the input terminus of optical detection arm waveguide with the other end of the coupling place input waveguide of micro-ring resonant cavity at input waveguide; Being connected with one end of output waveguide at the output terminal of output waveguide with the coupling place optical detection arm waveguide of micro-ring resonant cavity, the other end of output waveguide is sensing signal outgoing end; Going out radio-frequency spectrum to have with single waveguide-coupled to the similar frequency spectrum of micro-ring resonant cavity, this transmission spectrum transmits the frequency spectrum that paddy value has periodic distribution;
Detection method is: the upper surface that measured matter covers optical detection arm waveguide, and light is incident from one end of input waveguide, is coupled with micro-ring resonant cavity, then a part is coupled into micro-ring resonant cavity; Another part is from the other end outgoing of input waveguide and enters output waveguide through optical detection arm, in this part, part light is due to the coupling between output waveguide and micro-resonant cavity, again be coupled into micro-resonant cavity, and in this part a part light interference with a part of light being coupled out in micro-ring resonant cavity after from output waveguide the other end outgoing;Highly sensitive sensing can be realized by testing the change of synchronous wave strong point intensity transmission.
Further, when measured matter specific refractory power changes, the path length of optical detection arm waveguide changes, and not only transmits the raw drift of synchronous wave long hair at paddy value place, and the intensity transmitting paddy value changes.
The technical conceive of the present invention is: when optical detection arm waveguide length meets 0.75 times that equals micro-ring resonator length, the radio-frequency spectrum that goes out of this self-interference type micro-ring resonant cavity has with single waveguide-coupled to the similar frequency spectrum of micro-ring resonant cavity, and this transmission spectrum transmits the frequency spectrum that paddy value has periodic distribution. At transmission resonance wavelength corresponding to paddy value, not only relevant with the physical length of this micro-ring resonant cavity, and relevant with input and output waveguide and the percentage coupling of micro-ring resonant cavity and the physical length of optical detection arm. Equally, the size of its transmission paddy value is also relevant with input and output waveguide and the percentage coupling of micro-ring resonant cavity and the physical length of optical detection arm. Therefore, when measured matter specific refractory power changes, the path length of optical detection arm waveguide changes, and not only transmits the raw drift of synchronous wave long hair at paddy value place, and the intensity transmitting paddy value changes. Highly sensitive sensing can be realized by testing the change of synchronous wave strong point intensity transmission.
The useful effect of the present invention is mainly manifested in: make this sensor under the prerequisite keeping extremely high detectivity, only need one the laser apparatus of frequency sweep can realize the ionization meter of high precision, avoid the frequency localization that this type of sensor needs very high precision when survey frequency moves, greatly reduce the cost of test macro.
Accompanying drawing explanation
Fig. 1 is self-interference type micro-ring resonant cavity optical sensor structural representation.
Fig. 2 be self-interference type micro-ring resonant cavity go out radio-frequency spectrum.
The transmission paddy of Fig. 3 at wavelength X=1552nm place is with the change of input and output waveguide and micro-ring resonant cavity percentage coupling size.
The transmission paddy of Fig. 4 at wavelength X=1552nm place with during the path length subtle change of optical detection arm waveguide and the change produced.
Fig. 5 transmits the curve of normalization method intensity transmission value with optical detection arm waveguide path length subtle change of paddy at wavelength X=1552nm place.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
With reference to Fig. 1～Fig. 5, a kind of highly sensitive intensity detection method based on self-interference type micro-resonant cavity photo-sensor, the micro-resonant cavity photo-sensor realizing this detection comprises an input waveguide 1, a micro-ring resonant cavity 2, an output waveguide 3 and an optical detection arm waveguide 4, input waveguide 1 and output waveguide 3 are coupled with micro-ring resonant cavity 2 respectively, it is placed in the both sides of micro-ring resonant cavity 2, one end of input waveguide 1 is the light source access end of whole optical sensor, at the place that is coupled of input waveguide 1 with micro-ring resonant cavity 2, the other end of input waveguide 1 is connected with the input terminus of optical detection arm waveguide 4, at the place that is coupled of output waveguide 3 with micro-ring resonant cavity 2, one end of output waveguide 3 is connected with the output terminal of optical detection arm waveguide 4, the other end of output waveguide 3 is sensing signal outgoing end: goes out radio-frequency spectrum and has with single waveguide-coupled to the similar frequency spectrum of micro-ring resonant cavity, this transmission spectrum is the frequency spectrum that transmission paddy value has periodic distribution,
Detection method is: the upper surface that measured matter covers optical detection arm waveguide, and light is incident from one end of input waveguide, is coupled with micro-ring resonant cavity, then a part is coupled into micro-ring resonant cavity;Another part is from the other end outgoing of input waveguide and enters output waveguide through optical detection arm, in this part, part light is due to the coupling between output waveguide and micro-resonant cavity, again be coupled into micro-resonant cavity, and in this part a part light interference with a part of light being coupled out in micro-ring resonant cavity after from output waveguide the other end outgoing; Highly sensitive sensing can be realized by testing the change of synchronous wave strong point intensity transmission.
Further, when measured matter specific refractory power changes, the path length of optical detection arm waveguide changes, and not only transmits the raw drift of synchronous wave long hair at paddy value place, and the intensity transmitting paddy value changes.
Example: self-interference type micro-ring resonant transducer in this example, micro-ring radius R=30 μm, the then physical length L of micro-ring circumferenceR=2 π R, the physical length of optical detection arm waveguide is LW=0.75LR+ d. Fig. 2 be self-interference type micro-ring resonant cavity go out radio-frequency spectrum, now d=0.004 μm, effective refractive index neff=2.85, input waveguide and output waveguide are equal with the percentage coupling of micro-ring resonant cavity, are 0.5, the loss factor α=0.01dB/cm of optical mode formula unit length in all optical waveguides in this sensor. As can be seen from Figure 2, the radio-frequency spectrum that goes out of this self-interference type micro-ring resonant cavity has with single waveguide-coupled to the similar frequency spectrum of micro-ring resonant cavity, and this transmission spectrum transmits the frequency spectrum that paddy value has periodic distribution. Fig. 3 shows the transmission paddy at wavelength X=1552nm place with the change of input and output waveguide and micro-ring resonant cavity percentage coupling size. Fig. 4 show the transmission paddy at wavelength X=1552nm place with during the path length subtle change of optical detection arm waveguide and the change produced. This shows at transmission resonance wavelength corresponding to paddy value, not only relevant with the physical length of this micro-ring resonant cavity, and relevant with input and output waveguide and the percentage coupling of micro-ring resonant cavity and the physical length of optical detection arm. Equally, the size of its transmission paddy value is also relevant with input and output waveguide and the percentage coupling of micro-ring resonant cavity and the physical length of optical detection arm. Fig. 5 shows the curve of normalization method intensity transmission value with path length subtle change d transmitting paddy at wavelength X=1552nm place. Can obtaining the good linear lag when k=0.5,1nm < d < 2.5nm as can be seen from Figure, now measuring accuracy is about 0.1nm, and corresponding variations in refractive index is about 10-6. As k=0.15,0.85, corresponding useful range expands, but measuring accuracy decline. At k=0.9985, useful range can expand 25nm to, and measuring accuracy drops to 1nm, and corresponding variations in refractive index is about 10-5。
Above-described embodiment is used for explaining explanation the present invention, instead of limits the invention, and in the spirit of the present invention and the protection domain of claim, any amendment the present invention made and change, all fall into protection scope of the present invention.
Claims (2)
1. the highly sensitive intensity detection method based on self-interference type micro-resonant cavity photo-sensor, the micro-resonant cavity photo-sensor realizing this detection comprises an input waveguide, a micro-ring resonant cavity, an output waveguide and an optical detection arm waveguide, input waveguide and output waveguide are coupled with micro-ring resonant cavity respectively, the both sides being placed in micro-ring resonant cavity, one end of input waveguide is the light source access end of whole optical sensor; It is connected with the input terminus of optical detection arm waveguide with the other end of the coupling place input waveguide of micro-ring resonant cavity at input waveguide;Being connected with one end of output waveguide at the output terminal of output waveguide with the coupling place optical detection arm waveguide of micro-ring resonant cavity, the other end of output waveguide is sensing signal outgoing end; It is characterized in that: going out radio-frequency spectrum and have with single waveguide-coupled to the similar frequency spectrum of micro-ring resonant cavity, this transmission spectrum transmits the frequency spectrum that paddy value has periodic distribution;
Detection method is: the upper surface that measured matter covers optical detection arm waveguide, and light is incident from one end of input waveguide, is coupled with micro-ring resonant cavity, then a part is coupled into micro-ring resonant cavity; Another part is from the other end outgoing of input waveguide and enters output waveguide through optical detection arm, in this part, part light is due to the coupling between output waveguide and micro-resonant cavity, again be coupled into micro-resonant cavity, and in this part a part light interference with a part of light being coupled out in micro-ring resonant cavity after from output waveguide the other end outgoing; Highly sensitive sensing can be realized by testing the change of synchronous wave strong point intensity transmission.
2. as claimed in claim 1 based on the highly sensitive intensity detection method of self-interference type micro-resonant cavity photo-sensor, it is characterized in that: when measured matter specific refractory power changes, the path length of optical detection arm waveguide changes, not only transmit the raw drift of synchronous wave long hair at paddy value place, and the intensity transmitting paddy value changes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610026981.6A CN105675545B (en) | 2016-01-15 | 2016-01-15 | Highly sensitive strength investigation method based on self-interference type micro-resonant cavity photo-sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610026981.6A CN105675545B (en) | 2016-01-15 | 2016-01-15 | Highly sensitive strength investigation method based on self-interference type micro-resonant cavity photo-sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105675545A true CN105675545A (en) | 2016-06-15 |
| CN105675545B CN105675545B (en) | 2019-03-12 |
Family
ID=56300910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610026981.6A Active CN105675545B (en) | 2016-01-15 | 2016-01-15 | Highly sensitive strength investigation method based on self-interference type micro-resonant cavity photo-sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105675545B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110554006A (en) * | 2019-09-04 | 2019-12-10 | 中国科学技术大学 | Multi-mode measurement method based on self-interference micro-ring resonant cavity sensor |
| CN110726689A (en) * | 2019-09-26 | 2020-01-24 | 宁波大学 | Micro-miniature spectral absorption type optical waveguide type mid-infrared gas sensor and application thereof |
| CN110849843A (en) * | 2019-11-06 | 2020-02-28 | 东南大学 | Silicon-based refractive index sensor based on cascading U-shaped waveguide nested micro-ring |
| CN111721336A (en) * | 2020-03-09 | 2020-09-29 | 浙江工业大学 | Self-interference micro-ring resonant cavity sensing classification identification method based on supervised learning |
| CN113358589A (en) * | 2021-06-04 | 2021-09-07 | 中国人民解放军国防科技大学 | Atomic gas chamber probe device with micro-ring resonant cavity |
| CN113686367A (en) * | 2021-03-17 | 2021-11-23 | 广东工业大学 | Sensing structure based on optical fiber coupling induced transparency, manufacturing process and sensing device |
| US11448085B2 (en) * | 2019-11-11 | 2022-09-20 | Raytheon Technologies Corporation | Remote temperature measurement system for gas turbine engine |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3627876A1 (en) * | 1986-08-16 | 1988-02-25 | Felten & Guilleaume Energie | METHOD AND DEVICE FOR MEASURING THE GAS CONCENTRATION IN A GAS MIXTURE |
| US5455178A (en) * | 1990-05-03 | 1995-10-03 | Hoffmann-La Roche Inc. | Microoptical sensor and method |
| CN101214145A (en) * | 2008-01-03 | 2008-07-09 | 中国科学院上海光学精密机械研究所 | Frequency domain optical coherence tomography method and system with large detection depth |
| CN101261222A (en) * | 2008-04-11 | 2008-09-10 | 浙江大学 | High-sensitivity micro- resonant cavity photo-sensor |
| CN103308480A (en) * | 2013-05-16 | 2013-09-18 | 成都谱视科技有限公司 | Grating FP (Fabry-Perot) cavity and micro-ring resonator cascade-form optical biochemical sensing chip |
| CN103487406A (en) * | 2013-09-24 | 2014-01-01 | 电子科技大学 | Vertical coupling Mach-Zehnder interference type microring resonant cavity optical biochemical sensing chip |
| EP2952942A1 (en) * | 2014-06-04 | 2015-12-09 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Photonic integrated circuit |
-
2016
- 2016-01-15 CN CN201610026981.6A patent/CN105675545B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3627876A1 (en) * | 1986-08-16 | 1988-02-25 | Felten & Guilleaume Energie | METHOD AND DEVICE FOR MEASURING THE GAS CONCENTRATION IN A GAS MIXTURE |
| US5455178A (en) * | 1990-05-03 | 1995-10-03 | Hoffmann-La Roche Inc. | Microoptical sensor and method |
| CN101214145A (en) * | 2008-01-03 | 2008-07-09 | 中国科学院上海光学精密机械研究所 | Frequency domain optical coherence tomography method and system with large detection depth |
| CN101261222A (en) * | 2008-04-11 | 2008-09-10 | 浙江大学 | High-sensitivity micro- resonant cavity photo-sensor |
| CN103308480A (en) * | 2013-05-16 | 2013-09-18 | 成都谱视科技有限公司 | Grating FP (Fabry-Perot) cavity and micro-ring resonator cascade-form optical biochemical sensing chip |
| CN103487406A (en) * | 2013-09-24 | 2014-01-01 | 电子科技大学 | Vertical coupling Mach-Zehnder interference type microring resonant cavity optical biochemical sensing chip |
| EP2952942A1 (en) * | 2014-06-04 | 2015-12-09 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Photonic integrated circuit |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110554006A (en) * | 2019-09-04 | 2019-12-10 | 中国科学技术大学 | Multi-mode measurement method based on self-interference micro-ring resonant cavity sensor |
| CN110554006B (en) * | 2019-09-04 | 2021-10-19 | 中国科学技术大学 | Multi-mode measurement method based on self-interference micro-ring resonant cavity optical sensor |
| CN110726689A (en) * | 2019-09-26 | 2020-01-24 | 宁波大学 | Micro-miniature spectral absorption type optical waveguide type mid-infrared gas sensor and application thereof |
| CN110849843A (en) * | 2019-11-06 | 2020-02-28 | 东南大学 | Silicon-based refractive index sensor based on cascading U-shaped waveguide nested micro-ring |
| US11448085B2 (en) * | 2019-11-11 | 2022-09-20 | Raytheon Technologies Corporation | Remote temperature measurement system for gas turbine engine |
| US11859501B2 (en) | 2019-11-11 | 2024-01-02 | Rtx Corporation | Remote temperature measurement system for gas turbine engine |
| CN111721336A (en) * | 2020-03-09 | 2020-09-29 | 浙江工业大学 | Self-interference micro-ring resonant cavity sensing classification identification method based on supervised learning |
| CN113686367A (en) * | 2021-03-17 | 2021-11-23 | 广东工业大学 | Sensing structure based on optical fiber coupling induced transparency, manufacturing process and sensing device |
| CN113686367B (en) * | 2021-03-17 | 2023-12-29 | 广东工业大学 | Sensing structure based on optical fiber coupling induction transparency, manufacturing process and sensing device |
| CN113358589A (en) * | 2021-06-04 | 2021-09-07 | 中国人民解放军国防科技大学 | Atomic gas chamber probe device with micro-ring resonant cavity |
| CN113358589B (en) * | 2021-06-04 | 2022-06-28 | 中国人民解放军国防科技大学 | Atomic air chamber probe device with micro-ring resonant cavity |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105675545B (en) | 2019-03-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105675545A (en) | High-sensitivity intensity detection method based on self-interference type micro resonator cavity light sensor | |
| Lu et al. | A review of methods for fibre-optic distributed chemical sensing | |
| CN103267743B (en) | A kind of apparatus for measuring refractive index and method | |
| CN101825480B (en) | Broadband light source and cascaded optical waveguide filter-based optical sensor | |
| CN102323239B (en) | Refractive index sensor based on asymmetric double-core optical fiber | |
| Patil et al. | Comprehensive and analytical review on optical fiber refractive index sensor | |
| CN101592757A (en) | Cascade long-period fiber grating device and manufacture method thereof and humidity sensing system | |
| WO2011091735A1 (en) | Optical sensor based on broadband light source and cascaded optical waveguide filter | |
| CN106802190A (en) | A kind of highly sensitive optic fibre turning sensor without Temperature cross-over interference | |
| CN103759855A (en) | Temperature sensing system with FBG | |
| CN104316445A (en) | Optical fiber DNA molecule sensor based on inclined raster and manufacturing method and application thereof | |
| Vallan et al. | Assessment of a dual-wavelength compensation technique for displacement sensors using plastic optical fibers | |
| CN104155246A (en) | Detection device and detection method of sea water salinity | |
| CN204556023U (en) | Based on two parameteric light fiber sensors of polarization maintaining optical fibre | |
| CN101290248A (en) | Single-mode infra-red wavemeter based on Mach-Zehnder Interferometer filtering principle | |
| CN103389172B (en) | Based on the temperature sensing method of long-period gratings demodulation ordinary optic fibre grating | |
| CN203259473U (en) | Refractivity measuring device | |
| Krishnan et al. | Liquid refractometer based mirrorless fiber optic displacement sensor | |
| CN208238740U (en) | The tapered optical fibre bending sensor of dual hump | |
| CN203811538U (en) | Mach-Zehnder interferometer and microcavity cascaded intensity detection type sensor | |
| Hung et al. | A portable array-type optical fiber sensing instrument for real-time gas detection | |
| CN108981955B (en) | A kind of optical fibre temperature survey apparatus | |
| Jafari et al. | Fibre position effects on the operation of opto-pair fibre displacement sensors | |
| CN103134775A (en) | Optical fiber liquid refractive index and temperature sensor | |
| RU2457453C1 (en) | Fibre-optic pressure transducer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |