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CN105300300A - Coated film thickness device for simultaneously measuring single-sided coated lens at multiple points and method thereof - Google Patents

Coated film thickness device for simultaneously measuring single-sided coated lens at multiple points and method thereof Download PDF

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Publication number
CN105300300A
CN105300300A CN201510828905.2A CN201510828905A CN105300300A CN 105300300 A CN105300300 A CN 105300300A CN 201510828905 A CN201510828905 A CN 201510828905A CN 105300300 A CN105300300 A CN 105300300A
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China
Prior art keywords
semi
lens
light
reflecting lens
transparent semi
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CN201510828905.2A
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Chinese (zh)
Inventor
姚红兵
范宁
丁勇
王成
张瑞军
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Jiangsu University
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Jiangsu University
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Priority to CN201510828905.2A priority Critical patent/CN105300300A/en
Publication of CN105300300A publication Critical patent/CN105300300A/en
Pending legal-status Critical Current

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Abstract

The invention provides a coated film thickness device for simultaneously measuring a single-sided coated lens at multiple points and a method thereof. The device comprises a light source, a light splitting device, a lens, a photoelectric displacement sensor, a signal amplifier, an optical signal processor and a computer. The light source, the light splitting device, the lens, and the center of the light receiving surface of the photoelectric displacement sensor are successively arranged on the same optical path. The photoelectric displacement sensor, the signal amplifier, the optical signal processor, and the computer are successively and electrically connected. Light from the light source is divided into multiple light beams by the light splitting device. The light beams are projected onto the photoelectric displacement sensor by the lens. The photoelectric displacement sensor amplifies an optical signal by using the signal amplifier and then transmits the amplified optical signal to the optical signal processor. The optical signal processor converts the optical signal into an electric signal and then inputs the electric signal into the computer. The computer computes film thickness. The coated film thickness device may simultaneously measure the coated film thickness at multiple points and analyzes the uniformity of the coated film by coated film thickness comparison.

Description

A kind of multiple spot measures the coating film thickness devices and methods therefor of coating single side lens simultaneously
Technical field
The invention belongs to optical lens production field, be especially directed to production in enormous quantities, the coating film thickness of the convex lens of coating single side and concavees lens measures, and is specifically related to the coating film thickness devices and methods therefor that a kind of multiple spot measures coating single side lens simultaneously.
Background technology
No matter be in life or in military affairs, optical lens is essential.But no matter be resin lens or glass lens, the transmittance of itself all only has about 91%, have some light and return at two surface reflections.The reflection of eyeglass can make light penetration reduce and forms interference at retina and affect image quality.And coating technique utilizes optical technology, make eyeglass obtain some new original not available optical properties by plating certain thickness individual layer or multilayer optical film at lens surface, play with the ability improving lens reflecting light and strengthen or reduce light penetration and making the transmittance of eyeglass be increased to 98%.
After plated film, lens surface reflection ray transmitance reduces, and solves the problem that eyeglass is difficult to imaging under high light, prevents ultraviolet, infrared ray, x line to the damage of eyesight.
Glasses lens platedly at present mainly contain two kinds of films: one is anti-reflective film.Another kind adds dura mater.For lens, coating film thickness is an important parameter, and whether the homogeneity of plated film decides lens and can use, and therefore measured film thickness that lens plate becomes a requisite link in production.
Summary of the invention
The object of this invention is to provide the coating film thickness devices and methods therefor that a kind of multiple spot measures coating single side lens simultaneously, the light exported by laser instrument is divided into multi-beam through light-dividing device, the coating film thickness of the coating single side of multimetering simultaneously lens can be realized, analyzed the homogeneity of plated film by contrast coating film thickness.
Technical scheme of the present invention is: a kind of multiple spot measures the coating film thickness device of coating single side lens simultaneously, comprises light source, light-dividing device, lens, photoelectric displacement sensor, signal amplifier, optical signal processor and computing machine;
Described light-dividing device comprises at least 1 semi-transparent semi-reflecting lens and 1 total reflective mirror; Described total reflective mirror is positioned on the reflected light path of described semi-transparent semi-reflecting lens, the angle of the input path of described semi-transparent semi-reflecting lens and the reflected light path of described semi-transparent semi-reflecting lens is an angle of 90 degrees, the reflected light path of described semi-transparent semi-reflecting lens is the input path of described total reflective mirror, the input path of described total reflective mirror and the reflected light path angle of described total reflective mirror are an angle of 90 degrees, and the transmitted light path of described semi-transparent semi-reflecting lens parallels with the reflected light path of described total reflective mirror;
Being centrally located in same light path and being arranged in order of the light receiving surface of described light source, light-dividing device, lens and described photoelectric displacement sensor; Described photoelectric displacement sensor, signal amplifier, optical signal processor and computing machine are electrically connected successively;
Described photoelectric displacement sensor is used for receiving optical signals, and light signal is sent to described signal amplifier; Described signal amplifier is input to described computing machine after being used for that light signal is converted to electric signal; Described computing machine is for calculating the coating film thickness of lens.
In such scheme, described light-dividing device comprises 6 semi-transparent semi-reflecting lens and 3 total reflective mirrors; 6 described semi-transparent semi-reflecting lens are respectively the first semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens, the 3rd semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens, the 5th semi-transparent semi-reflecting lens and the 6th semi-transparent semi-reflecting lens; 3 described total reflective mirrors are respectively the first total reflective mirror, the second total reflective mirror and the 3rd total reflective mirror;
Described first semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens and the 3rd semi-transparent semi-reflecting lens are positioned in same light path successively;
Described 5th semi-transparent semi-reflecting lens, the 6th semi-transparent semi-reflecting lens and the 3rd total reflective mirror are positioned on the reflected light path of described first semi-transparent semi-reflecting lens successively;
Described 4th semi-transparent semi-reflecting lens and the second total reflective mirror are positioned on the reflected light path of described second semi-transparent semi-reflecting lens successively;
Described first total reflective mirror is positioned on the reflected light path of described 3rd semi-transparent semi-reflecting lens.
In such scheme, described semi-transparent semi-reflecting lens and total reflective mirror are in same level.
In such scheme, the high-energy light source that described light source provides for laser instrument.
Measure a detection method for the coating film thickness device of coating single side lens according to described multiple spot simultaneously, comprise the following steps:
Described light source is divided into through described light-dividing device the light beam that some roads are parallel to each other, for a wherein road light beam, light beam projects on non-coated lens to be measured at the height of distance optical axis h, light beam first reflects again through air refraction through non-coated lens, final beam projects the H position on described photoelectric displacement sensor, and described lens are g to the distance of described photoelectric displacement sensor;
Change non-coated lens into coating single side lens, light through coating single side lens reflection again through air refraction, final beam projects the H' position on described photoelectric displacement sensor, the signal of H and H' is sent to described optical signal processor by described photoelectric displacement sensor after described signal amplifying apparatus amplifies, described optical signal processor is input to described computing machine after light signal is converted to electric signal, and described computing machine carries out the calculating of coating film thickness; The computing formula of described film thickness is:
d = - n 0 r 2 Δ s - g h + ghn 0 + r Δ s
Wherein, d is the coating film thickness of lens, and the one side radius of Δ s to be the displacement s=OH-OH' of light beam, r be lens, h are the height of beam distance optical axis, g is distance, the ns of lens to be measured to photoelectric displacement sensor light receiving surface 0for film refractive index, air refraction is 1.
The invention has the beneficial effects as follows: the light that the present invention is exported by laser instrument is divided into multi-beam through described light-dividing device, through lens projects on described photoelectric displacement sensor, light signal is sent to described optical signal processor by described photoelectric displacement sensor after described signal amplifying apparatus amplifies, described optical signal processor is input to described computing machine after light signal is converted to electric signal, described computing machine carries out the calculating of film thickness, the coating film thickness of the coating single side of multimetering simultaneously lens can be realized, analyzed the homogeneity of plated film by contrast coating film thickness.Need cause certain method of testing destroyed by specific apparatus to sample lens compared to traditional, the present invention directly need not contact sample, can not cause damage to sample, measures complete can directly use; Compared to other non-contact measurement methods present, method of the present invention is more simple, handled easily, and manpower of saving time, has higher high financial profit; The present invention, mainly for the detection of the lens in batch production, can measure convex lens and the concavees lens of various coating single side, use same set of equipment.
Accompanying drawing explanation
Fig. 1 is the concrete enforcement structural representation of one embodiment of the invention;
Fig. 2 is the light-dividing device detailed schematic of one embodiment of the invention;
Fig. 3 is that after the convex lens plated film of invention one embodiment, skew schematic diagram occurs refracted ray;
Fig. 4 is that after the concavees lens plated film of invention one embodiment, skew schematic diagram occurs refracted ray.
In figure: 1, light source; 2, light-dividing device; 3, lens; 4, photoelectric displacement sensor; 5, signal amplifier; 6, optical signal processor; 7 and computing machine; 8, optical axis.
Embodiment
Below in conjunction with accompanying drawing embodiment, the present invention is described in further detail, but protection scope of the present invention is not limited to this.
Figure 1 shows that multiple spot of the present invention measures a kind of embodiment of the coating film thickness device of coating single side lens simultaneously, the coating film thickness device that described multiple spot measures coating single side lens simultaneously comprises light source 1, light-dividing device 2, lens 3, photoelectric displacement sensor 4, signal amplifier 5, optical signal processor 6 and computing machine 7.
Being centrally located in same light path and being arranged in order of the light receiving surface of described light source 1, light-dividing device 2, lens 3 and described photoelectric displacement sensor 4; Described photoelectric displacement sensor 4, signal amplifier 5, optical signal processor 6 and computing machine 7 are electrically connected successively;
Light signal for receiving optical signals, and is sent to described signal amplifier 5 by described photoelectric displacement sensor 4; Described signal amplifier 5 is input to described computing machine 7 after light signal is converted to electric signal; Described computing machine 7 is for calculating the coating film thickness of lens.
Described lens 3 comprise coating single side lens and non-coated lens, and the lens of described coating single side are identical with uncoated lens prescriptions.
Described light-dividing device 2 comprises at least individual semi-transparent semi-reflecting lens and total reflective mirror, described semi-transparent semi-reflecting lens and a total reflective mirror are in same level, described total reflective mirror is positioned on the reflected light path of described semi-transparent semi-reflecting lens, the angle of the input path of described semi-transparent semi-reflecting lens and the reflected light path of described semi-transparent semi-reflecting lens is an angle of 90 degrees, the reflected light path of described semi-transparent semi-reflecting lens is the input path of described total reflective mirror, the input path of described total reflective mirror and the reflected light path angle of described total reflective mirror are an angle of 90 degrees, and the transmitted light path of described semi-transparent semi-reflecting lens parallels with the reflected light path of described total reflective mirror.Preferably, described light-dividing device 2 comprises 6 semi-transparent semi-reflecting lens and 3 total reflective mirrors, as shown in Figure 2,6 described semi-transparent semi-reflecting lens are respectively the first semi-transparent semi-reflecting lens 201, second semi-transparent semi-reflecting lens 202, the 3rd semi-transparent semi-reflecting lens 203, the 4th semi-transparent semi-reflecting lens 204, the 5th semi-transparent semi-reflecting lens 205 and the 6th semi-transparent semi-reflecting lens 206; 3 described total reflective mirrors are respectively the first total reflective mirror 207, second total reflective mirror 208 and the 3rd total reflective mirror 209.Described first semi-transparent semi-reflecting lens 201, second semi-transparent semi-reflecting lens 202 and the 3rd semi-transparent semi-reflecting lens 203 are positioned in same light path successively; Described 5th semi-transparent semi-reflecting lens 205, the 6th semi-transparent semi-reflecting lens 206 and the 3rd total reflective mirror 209 are positioned on the reflected light path of described first semi-transparent semi-reflecting lens 201 successively; Described 4th semi-transparent semi-reflecting lens 204 and the second total reflective mirror 208 are positioned on the reflected light path of described second semi-transparent semi-reflecting lens 202 successively; Described first total reflective mirror 207 is positioned on the reflected light path of described 3rd semi-transparent semi-reflecting lens 203.
Preferably, the high-energy light source that provides for laser instrument of described light source 1.
Described light source 1 projects described second half-reflecting half mirror 202 through the transmitted light of described first half-reflecting half mirror 201, and the reflected light projects of described first semi-transparent semi-reflecting lens 201 is to the 5th semi-transparent semi-reflecting lens 205; The transmitted light of described second semi-transparent semi-reflecting lens 202 projects described 3rd semi-transparent semi-reflecting lens 203, and the reflected light projects of described second semi-transparent semi-reflecting lens 202 is to described 4th semi-transparent semi-reflecting lens 204; Transmitted light through described 3rd semi-transparent semi-reflecting lens 203 forms first via incident beam, and through the reflected light projects of described 3rd semi-transparent semi-reflecting lens 203 to described first total reflective mirror 207, the reflected light through described first total reflective mirror 207 forms the second road incident beam; Reflected light through described 4th semi-transparent semi-reflecting lens 204 forms three beams incident beam, and the transmitted light through described 4th semi-transparent semi-reflecting lens 204 projects described second total reflective mirror 208, and the reflected light of described second total reflective mirror 208 forms the 4th road incident beam; Transmitted light through described 5th semi-transparent semi-reflecting lens 205 projects described 6th semi-transparent semi-reflecting lens 206, and the reflected light of described 5th semi-transparent semi-reflecting lens 205 forms the 5th road incident beam; Transmitted light through described 6th semi-transparent semi-reflecting lens 206 projects described 3rd total reflective mirror 209, and the reflected light of described 6th semi-transparent semi-reflecting lens 206 forms the 6th road incident beam; Reflected light through described 3rd total reflective mirror 209 forms the 7th road incident beam, seven road incident beams are parallel to each other, and described semi-transparent semi-reflecting lens and a total reflective mirror are in same level, make seven road incident beams project on non-coated lens to be measured with the height h that distance optical axis 8 is identical, the H position on described photoelectric displacement sensor 4 on the same line.
Measure a detection method for the coating film thickness device of coating single side lens according to described multiple spot simultaneously, comprise the following steps:
In the one side radius r of known described lens 3, radius or rear radius namely, the refractive index n of membraneous material 0condition under, described light source 1 is divided into seven tunnels incident beam parallel to each other through described light-dividing device 2, for wherein first via incident beam, light beam projects on non-coated lens to be measured at the height of distance optical axis 8h, light beam first reflects again through air refraction through non-coated lens, final beam projects the H position on described photoelectric displacement sensor 4, and described lens are that g, g can according to circumstances be arranged voluntarily to the distance of described photoelectric displacement sensor 4;
Change non-coated lens into coating single side lens, light through coating single side lens reflection again through air refraction, final beam projects the H' position on described photoelectric displacement sensor 4, the incident point of seven road incident beams on described photoelectric displacement sensor 4 in the same horizontal line, the signal of H and H' is sent to described optical signal processor 6 by described photoelectric displacement sensor 4 after described signal amplifying apparatus 5 amplifies, be input to described computing machine 7 after light signal is converted to electric signal by described optical signal processor 6, described computing machine 7 carries out the calculating of coating film thickness.
Described computing machine 7 calculates the coating film thickness at seven road incident beam incident point places on lens 3 according to said method simultaneously, is analyzed the homogeneity of plated film by contrast coating film thickness.
The computing formula of described film thickness is:
d = - n 0 r 2 Δ s - g h + ghn 0 + r Δ s
Wherein, d is the coating film thickness of lens, and the one side radius of Δ s to be the displacement s=OH-OH' of light beam, r be lens, h is the height of beam distance optical axis, and g is the distances of lens to be measured to photoelectric displacement sensor light receiving surface, n 0for film refractive index, air refraction is the center of 1, O photoelectric displacement sensor light receiving surface.
Modal in current production and processing is convex lens and concavees lens, utilizes the present invention to measure convex lens and concavees lens respectively, and respectively as shown in Figure 3 and Figure 4, the principle of measurement is identical with method.
The light that compared with prior art the present invention is exported by laser instrument is divided into multi-beam through described light-dividing device, through lens projects on described photoelectric displacement sensor, light signal is sent to described optical signal processor by described photoelectric displacement sensor after described signal amplifying apparatus amplifies, described optical signal processor is input to described computing machine after light signal is converted to electric signal, described computing machine carries out the calculating of film thickness, the coating film thickness of the coating single side of multimetering simultaneously lens can be realized, analyzed the homogeneity of plated film by contrast coating film thickness.
Described embodiment is preferred embodiment of the present invention; but the present invention is not limited to above-mentioned embodiment; when not deviating from flesh and blood of the present invention, any apparent improvement that those skilled in the art can make, replacement or modification all belong to protection scope of the present invention.

Claims (5)

1. a multiple spot measures the coating film thickness device of coating single side lens simultaneously, it is characterized in that, comprise light source (1), light-dividing device (2), lens (3), photoelectric displacement sensor (4), signal amplifier (5), optical signal processor (6) and computing machine (7);
Described light-dividing device (2) comprises at least 1 semi-transparent semi-reflecting lens and 1 total reflective mirror; Described total reflective mirror is positioned on the reflected light path of described semi-transparent semi-reflecting lens, the angle of the input path of described semi-transparent semi-reflecting lens and the reflected light path of described semi-transparent semi-reflecting lens is an angle of 90 degrees, the reflected light path of described semi-transparent semi-reflecting lens is the input path of described total reflective mirror, the input path of described total reflective mirror and the reflected light path angle of described total reflective mirror are an angle of 90 degrees, and the transmitted light path of described semi-transparent semi-reflecting lens parallels with the reflected light path of described total reflective mirror;
Being centrally located in same light path and being arranged in order of the light receiving surface of described light source (1), light-dividing device (2), lens (3) and described photoelectric displacement sensor (4); Described photoelectric displacement sensor (4), signal amplifier (5), optical signal processor (6) and computing machine (7) are electrically connected successively;
Light signal for receiving optical signals, and is sent to described signal amplifier (5) by described photoelectric displacement sensor (4); Described signal amplifier (5) is input to described computing machine (7) after light signal is converted to electric signal; Described computing machine (7) is for calculating the coating film thickness of lens.
2. multiple spot according to claim 1 measures the coating film thickness device of coating single side lens simultaneously, it is characterized in that, described light-dividing device (2) comprises 6 semi-transparent semi-reflecting lens and 3 total reflective mirrors; 6 described semi-transparent semi-reflecting lens are respectively the first semi-transparent semi-reflecting lens (201), the second semi-transparent semi-reflecting lens (202), the 3rd semi-transparent semi-reflecting lens (203), the 4th semi-transparent semi-reflecting lens (204), the 5th semi-transparent semi-reflecting lens (205) and the 6th semi-transparent semi-reflecting lens (206); 3 described total reflective mirrors are respectively the first total reflective mirror (207), the second total reflective mirror (208) and the 3rd total reflective mirror (209);
Described first semi-transparent semi-reflecting lens (201), the second semi-transparent semi-reflecting lens (202) and the 3rd semi-transparent semi-reflecting lens (203) are positioned in same light path successively;
Described 5th semi-transparent semi-reflecting lens (205), the 6th semi-transparent semi-reflecting lens (206) and the 3rd total reflective mirror (209) are positioned on the reflected light path of described first semi-transparent semi-reflecting lens (201) successively;
Described 4th semi-transparent semi-reflecting lens (204) and the second total reflective mirror (208) are positioned on the reflected light path of described second semi-transparent semi-reflecting lens (202) successively;
Described first total reflective mirror (207) is positioned on the reflected light path of described 3rd semi-transparent semi-reflecting lens (203).
3. multiple spot according to claim 1 and 2 measures the coating film thickness device of coating single side lens simultaneously, it is characterized in that, described semi-transparent semi-reflecting lens and total reflective mirror are in same level.
4. multiple spot according to claim 1 measures the coating film thickness device of coating single side lens simultaneously, it is characterized in that, the high-energy light source that described light source (1) provides for laser instrument.
5. multiple spot measures a detection method for the coating film thickness device of coating single side lens simultaneously according to claim 1, it is characterized in that, comprises the following steps:
Described light source (1) is divided into through described light-dividing device (2) light beam that some roads are parallel to each other, for a wherein road light beam, light beam projects on non-coated lens to be measured at the height of distance optical axis (8) h, light beam first reflects again through air refraction through non-coated lens, final beam projects the H position on described photoelectric displacement sensor (4), and described lens are g to the distance of described photoelectric displacement sensor (4);
Change non-coated lens into coating single side lens, light through coating single side lens reflection again through air refraction, final beam projects the H' position on described photoelectric displacement sensor (4), the signal of H and H' is sent to described optical signal processor (6) by described photoelectric displacement sensor (4) after described signal amplifying apparatus (5) amplifies, be input to described computing machine (7) after light signal is converted to electric signal by described optical signal processor (6), described computing machine (7) carries out the calculating of coating film thickness;
The computing formula of described film thickness is:
d = - n 0 r 2 Δ s - g h + ghn 0 + r Δ s
Wherein, d is the coating film thickness of lens, and the one side radius of Δ s to be the displacement s=OH-OH' of light beam, r be lens, h are the height of beam distance optical axis, g is distance, the ns of lens to be measured to photoelectric displacement sensor light receiving surface 0for film refractive index, air refraction is 1.
CN201510828905.2A 2015-11-25 2015-11-25 Coated film thickness device for simultaneously measuring single-sided coated lens at multiple points and method thereof Pending CN105300300A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116180033A (en) * 2023-01-31 2023-05-30 厦门海辰储能科技股份有限公司 Online detection system and method for coating film

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6128085A (en) * 1997-12-09 2000-10-03 N & K Technology, Inc. Reflectance spectroscopic apparatus with toroidal mirrors
CN104048612A (en) * 2014-06-24 2014-09-17 江苏大学 Method and device used for detecting thicknesses of coated films of lenses simultaneously in multi-point mode
CN205262410U (en) * 2015-11-25 2016-05-25 江苏大学 Multiple spot simultaneous measurement single face coated lens's coating film thickness device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6128085A (en) * 1997-12-09 2000-10-03 N & K Technology, Inc. Reflectance spectroscopic apparatus with toroidal mirrors
CN104048612A (en) * 2014-06-24 2014-09-17 江苏大学 Method and device used for detecting thicknesses of coated films of lenses simultaneously in multi-point mode
CN205262410U (en) * 2015-11-25 2016-05-25 江苏大学 Multiple spot simultaneous measurement single face coated lens's coating film thickness device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116180033A (en) * 2023-01-31 2023-05-30 厦门海辰储能科技股份有限公司 Online detection system and method for coating film

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Application publication date: 20160203