CN105307371A - Device for generating liquid drop target and plasma through rotating disc - Google Patents
Device for generating liquid drop target and plasma through rotating disc Download PDFInfo
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- CN105307371A CN105307371A CN201510751105.5A CN201510751105A CN105307371A CN 105307371 A CN105307371 A CN 105307371A CN 201510751105 A CN201510751105 A CN 201510751105A CN 105307371 A CN105307371 A CN 105307371A
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Abstract
The invention provides a tin liquid drop target generation device used for laser action. The device is combined with the technical characteristics of tin liquid drops and a rotating disc, the centrifugal force of the rotating disc is utilized for generating the tin liquid drops, so that continuous supply of tin liquid targets under high repetition frequency is realized. Through the technical scheme, on one hand, higher requirement of an existing nozzle vibration method for device performance is overcome, and on the other hand, the limitation of a traditional rotating disc electrode method for disc rotating speed and hidden dangers caused by the laser action on the disc are avoided. The tin liquid target generation device can be applied to laser plasma (LPP) devices, and can also be used for laser-induced discharge plasma devices. Based on the tin liquid drop targets, the invention also provides a device for generating plasma.
Description
Technical field
The invention belongs to extreme ultraviolet (EUV) source domain, more specifically, relate to the drop tin target generation device for laser action in a kind of extreme ultra violet lithography light source.The present invention utilizes the centrifugal action of rotating circular disk to realize without interruption under high repetition frequency of liquid tin target.
Background technology
Along with the development of semi-conductor industry, the requirement of large scale integrated circuit to photoetching is more and more higher.Therefore, the wavelength of the light source requirements that integrated circuit technology is used reduces gradually, is transitioned into ultraviolet, far ultraviolet from visible ray the earliest, until the extreme UV of Next Generation Lithographies, i.e. and extreme ultraviolet (EUV).
The EUV light source that present stage is used for the 13.5nm wave band of photoetching has three kinds, electronic synchronizer radiating light source (ECR), laser plasma light source (LPP) and discharge plasma light source (DPP).The laser induced discharge plasma (LDP) that laser plasma (LPP) and discharge plasma (DPP) develop all needs laser and metal targets effect to produce plasma.
In target after deliberation, tin target becomes the emphasis of research now with comparatively efficient conversion efficiency, solid tin target with the process of laser action in can form depression, cause the change of target surface shape, thus cause the instability of the generation efficiency of extreme ultraviolet and the restriction in target useful life.Contacting of liquid target and laser is more abundant, and the energy that laser bombardment goes out needed for equivalent plasma is less, target supplementary convenient, improves the conversion efficiency of extreme ultraviolet, improves the sustainability of target utilization, extend the useful life of target.
The generation device of liquid tin target has a lot: as the nozzle vibration method of extensive use in LPP, namely be vertically connected with nozzle between placement Molten Tin chamber and vacuum chamber, the gas of discord tin reaction is added in Molten Tin chamber, by the effect of pressure differential and gravity, tin liquor is sprayed, then add extraneous uniform vibration and make tin be fractured into drop; The rotating disk electrode (r.d.e) method and for example extensively used in LDP, puts into Xi Chizhong by disk, utilize surface tension and frictional force to make the liquid tin of its surface attachment thin layer, and laser just acts on this layer of liquid tin film.
The former mechanical structure is comparatively complicated, and the cleanliness factor of the air-tightness of device, the purity of liquid tin and nozzle all greatly affects the stability and uniformity that produce drop; Although the latter's structure is simple, under the high speed conditions that high operate frequency requires, liquid tin can depart from disc surfaces and pollute, and the thickness how controlling disc surfaces liquid tin evenly ensures that the stability of work is a key.In order to improve the adhesive force of tin to rotating circular disk, the mechanisms such as Xtreme company propose and carry out the methods such as micro-process, change disc surfaces material, introducing tin brush control tin film thickness to the surface of disk, but turn increase the complexity of device like this, and tin film is attached to disc surfaces, the long-time direct effect of laser it also can affect the surface nature of disk.
Summary of the invention
The object of the present invention is to provide a kind of method that drop tin target produces, solve the problem that in traditional rotating electric-discharging disk electrode liquid tin target feeding mechanism, rotating circular disk speed is not high, and can the size of dynamic adjustments borne tin droplets and position, guarantee size and the drop coupling of Laser Focusing hot spot, the position of Laser Focusing and the intersection of locus of drop, make drop fully be formed a certain amount of tin steam by after laser bombardment.
We are in conjunction with the thinking of borne tin droplets and rotating circular disk, a kind of scheme utilizing rotating circular disk centrifugal force to produce borne tin droplets is proposed, namely this overcome the high requirement of nozzle vibration method to device performance, it also avoid the hidden danger that traditional rotating disk electrode (r.d.e) method is brought on disk the restriction of disc rotation speed and laser action.And this drop tin target generation device both can be applied to laser plasma (LPP) device, also may be used for the device of laser induced discharge plasma (LDP).Technical solution of the present invention is as follows:
Rotating circular disk produces a device for droplet target, comprises rotating circular disk (1), Chu Xichi (2), tin liquor (3), axle (5), motor (6), lifting platform (7), it is characterized in that,
Described rotating circular disk (1) is arranged on the one end of the Chu Xichi (2) filling tin liquor (3), and part immerses in tin liquor (3); Rotating circular disk (1) circular shaft center is fixedly connected with by the rotating shaft of axle (5) with motor (6);
Described motor (6) is arranged on lifting platform (7), rotating circular disk (1) can be regulated to immerse the degree of depth of tin liquor (3) by lifting platform (7); The direction of rotation of axle (5) points to the other end of Chu Xichi (2) under Chu Xichi (2) liquid level, comes back in Chu Xichi (2) so that rotate the liquid tin taken out of.
Further, the device that described rotating circular disk produces droplet target is in vacuum chamber (8), guarantees that the tin liquor of high temperature can not be oxidized.
Further, the rotating circular disk (1) that described rotating circular disk produces in the device of droplet target is stainless steel or aluminium alloy making, and the thickness of the marginal portion contacted with tin liquor (3) is even, and edge thickness is 1 to 5mm.
Further, described rotating circular disk produces in the device of droplet target, and described Chu Xichi (2) is rectangular-shaped.
Further, described rotating circular disk produces in the device of droplet target, and Chu Xichi (2) is equipped with temperature controller (4), makes tin liquor (3) be in the liquid state of temperature constant, is unlikely to solidify.
Further, described rotating circular disk produces in the device of droplet target, in Chu Xichi (2), tin liquor changes ashbury metal liquid into, can reduce the required temperature range controlled of temperature controller, even not need temperature controller just can ensure the Liquidity of material and mobility.
Further, described rotating circular disk produces in the device of droplet target, and (7) are added with tin liquid detection device to lifting platform, ensures that the spacing of tin liquor face and axle is a constant value.
Further, described rotating circular disk produces in the device of droplet target, and the rotating speed of motor (6) can change, and the rotating speed of motor (6) reaches certain condition and just has drop formation, and rotating speed is higher, and the liquid-drop diameter of generation is less.
Further, based on the droplet target device that the present invention proposes, the present invention proposes a kind of plasma generating device, in this device, laser (9) produces high intensity pulses laser, focus on rotating circular disk (1) by condenser lens (10) to rotate in the borne tin droplets of taking out of, make its combustion produce plasma.
Traditional high pressure vibrating nozzle borne tin droplets generation device needs to produce draught head to produce the tin stream of injection, makes tin stream be fractured into uniform borne tin droplets by vibration uniformly.Therefore need the air-tightness that device is good, Chu Xichi closes and does not also utilize supplementing in time of target, and the equal errors such as the compacting of nozzle and air-tightness are easy to the beat causing borne tin droplets, rotating circular disk part immerses in liquid tin by the present invention, but do not utilize the tin film being attached to disc surfaces but the liquid tin of escaping under make use of centrifugal action, therefore device is without the need to being designed to totally enclosed type, simplify the design accuracy of device, facilitate supplementing of target, the diameter of borne tin droplets, cycle and heading can be controlled by the degree of depth of the rotating speed and immersion tin liquor (3) that control rotating circular disk (1), the coupling of more convenient borne tin droplets and laser, add the matching times of tin target and laser in the unit interval, improve the generation frequency of plasma.
Accompanying drawing explanation
Fig. 1 is rotating circular disk dropproducing devices end view;
Fig. 2 is rotating circular disk dropproducing devices vertical view;
Fig. 3 is rotating circular disk dropproducing devices rearview.
In all of the figs, identical Reference numeral is used for representing identical element or structure, and wherein: 1-rotating circular disk, 2-stores up Xi Chi, 3-tin liquor, 4-temperature controller, 5-axle, 6-motor, 7-lifting platform, 8-vacuum chamber, 9-laser, 10-condenser lens.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described further.It should be noted that at this, these execution modes must illustrate and contribute to understanding the present invention, but do not form restriction of the present invention.
In the present embodiment, as depicted in figs. 1 and 2, storage fills tin liquor 3 in tin pond 2, and ensure that the temperature of tin liquor 3 is about 300 DEG C by temperature controller 4, store up in tin pond in addition and also can change liquid tin alloy into, reduce the required temperature conditions controlled of temperature controller even without the need to temperature controller, all illustrate for liquid tin with lower device.As shown in Figure 3, whole device is in vacuum chamber 8, prevents liquid tin to be oxidized.
To tin wettability, the poor and resistant to elevated temperatures material diameter as stainless steel or aluminium alloy make can be that the rotating circular disk 1 of 50mm to 200mm immerses 1mm to 2mm in tin liquor 3, evenly, thickness is 1mm to 5mm for the edge of rotating circular disk 1 and the thickness of tin liquor 3 contact portion.In the present embodiment, rotating circular disk 1 radius 100mm, thickness 1mm, is made up of stainless steel, immerses 1mm in tin liquor 3.
As shown in Figure 1, rotating circular disk 1 needs the side being placed on storage tin pond 2, and rotating circular disk 1 liquid level points to storage tin pond 2 opposite side with the direction of rotation of lower part, ensures to rotate to cause the liquid tin of splashing major part to come back in storage tin pond 2.
As shown in Figures 2 and 3, motor 6 makes rotating circular disk 1 rotate by axle 5, and the tin liquor 3 in storage tin pond 2 is attached to rotating circular disk 1 circumferential surface under the effect of frictional force and tension force.But under the centrifugal action of High Rotation Speed, overflow in the same way, along the tangent line of rotating circular disk 1 in the direction that the liquid tin of major part attachment can rotate with rotating circular disk 1.
As shown in Figures 2 and 3, motor 6 is fixed on lifting platform 7, lifting platform 7 adds tin liquid detection device, ensure that the liquid level of tin liquor 3 and the spacing of axle 5 are a stationary value, so just can guarantee that rotating circular disk 1 immerses the degree of depth maintenance of tin liquor 3 necessarily, need to add liquid tin or ashbury metal termly after work certain hour.
Can at 10 revolutions per seconds to 20 revolutions per seconds by the rotating speed controlling motor 6, in the present embodiment, the rotating speed of electrode controls at 15 revolutions per seconds.Change the rotating speed of rotating circular disk 1, under the condition that rotating circular disk 1 thickness is certain with the degree of depth immersing tin liquor 3, the rotating speed changing rotating circular disk 1 just can change the size of the borne tin droplets of generation.
As shown in Figure 2, laser 9 produces the pulse laser of higher power density, by condenser lens 10 by Laser Focusing on the path that borne tin droplets is flown, the spot diameter at focus place is slightly larger than the diameter of drop, the triggering signal controlling laser ensures that the generation of laser pulse and drop is synchronous in time, during guarantee borne tin droplets arrival focus, laser pulse arrives simultaneously, and laser evaporation borne tin droplets produces plasma.
The above is preferred embodiment of the present invention, but the present invention is not limited to the content disclosed in embodiment and accompanying drawing.Every do not depart from spirit disclosed in this invention under the equivalence that completes or amendment, all fall into the scope of protection of the invention.
Claims (9)
1. rotating circular disk produces a device for droplet target, comprises rotating circular disk (1), Chu Xichi (2), tin liquor (3), axle (5), motor (6), lifting platform (7), it is characterized in that,
Described rotating circular disk (1) is arranged on the one end of the Chu Xichi (2) filling tin liquor (3), and part immerses in tin liquor (3); Rotating circular disk (1) circular shaft center is fixedly connected with by the rotating shaft of axle (5) with motor (6);
Described motor (6) is arranged on lifting platform (7), rotating circular disk (1) can be regulated to immerse the degree of depth of tin liquor (3) by lifting platform (7); The direction of rotation of axle (5) points to the other end of Chu Xichi (2) under Chu Xichi (2) liquid level, comes back in Chu Xichi (2) so that rotate the liquid tin taken out of.
2. device according to claim 1, is characterized in that, whole device is in vacuum chamber (8).
3. device according to claim 1 and 2, is characterized in that, rotating circular disk (1) is stainless steel or aluminium alloy making, and the thickness of the marginal portion contacted with tin liquor (3) is even, brim-portion thickness 1mm to 5mm.
4. device according to claim 1 and 2, is characterized in that, described Chu Xichi (2) is rectangular-shaped.
5. device according to claim 1 and 2, is characterized in that, Chu Xichi (2) is equipped with temperature controller (4), makes tin liquor (3) be in the liquid state of temperature constant, is unlikely to solidify.
6. device according to claim 1 and 2, is characterized in that, in Chu Xichi (2), tin liquor changes ashbury metal liquid into.
7. device according to claim 1 and 2, is characterized in that, (7) are added with tin liquid detection device to lifting platform, ensures that the spacing of tin liquor face and axle is a constant value.
8. device according to claim 1 and 2, is characterized in that, the rotating speed of motor (6) can change.
9. the plasma generating device based on device described in claim 1 or 2, it is characterized in that, laser (9) produces high intensity pulses laser, focus on rotating circular disk (1) by condenser lens (10) to rotate in the borne tin droplets of taking out of, make its combustion produce plasma.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201510751105.5A CN105307371A (en) | 2015-11-06 | 2015-11-06 | Device for generating liquid drop target and plasma through rotating disc |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510751105.5A CN105307371A (en) | 2015-11-06 | 2015-11-06 | Device for generating liquid drop target and plasma through rotating disc |
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| CN105307371A true CN105307371A (en) | 2016-02-03 |
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| CN201510751105.5A Pending CN105307371A (en) | 2015-11-06 | 2015-11-06 | Device for generating liquid drop target and plasma through rotating disc |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106370645A (en) * | 2016-08-17 | 2017-02-01 | 华中科技大学 | Plasma apparatus for laser-induced discharge of liquid tin target |
| CN112947014A (en) * | 2021-01-29 | 2021-06-11 | 广东省智能机器人研究院 | Extreme ultraviolet light generating method and device |
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| US20040010843A1 (en) * | 1999-06-24 | 2004-01-22 | Wolfgang Erdmann | Waterless vacuum toilet system for aircraft |
| CN103281855A (en) * | 2013-05-16 | 2013-09-04 | 中国科学院光电研究院 | Liquid metal target generating device for laser source |
| CN204522621U (en) * | 2015-04-15 | 2015-08-05 | 陶永才 | Coating cloud collection and purification device |
| CN104865171A (en) * | 2015-06-04 | 2015-08-26 | 南京林业大学 | System for dynamically testing nozzle-atomized three-dimensional liquid drop particle size spectra and application method for system |
| CN204710259U (en) * | 2015-06-03 | 2015-10-21 | 常州市益思特干燥设备有限公司 | Prilling spry |
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2015
- 2015-11-06 CN CN201510751105.5A patent/CN105307371A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040010843A1 (en) * | 1999-06-24 | 2004-01-22 | Wolfgang Erdmann | Waterless vacuum toilet system for aircraft |
| CN103281855A (en) * | 2013-05-16 | 2013-09-04 | 中国科学院光电研究院 | Liquid metal target generating device for laser source |
| CN204522621U (en) * | 2015-04-15 | 2015-08-05 | 陶永才 | Coating cloud collection and purification device |
| CN204710259U (en) * | 2015-06-03 | 2015-10-21 | 常州市益思特干燥设备有限公司 | Prilling spry |
| CN104865171A (en) * | 2015-06-04 | 2015-08-26 | 南京林业大学 | System for dynamically testing nozzle-atomized three-dimensional liquid drop particle size spectra and application method for system |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106370645A (en) * | 2016-08-17 | 2017-02-01 | 华中科技大学 | Plasma apparatus for laser-induced discharge of liquid tin target |
| CN112947014A (en) * | 2021-01-29 | 2021-06-11 | 广东省智能机器人研究院 | Extreme ultraviolet light generating method and device |
| CN112947014B (en) * | 2021-01-29 | 2024-02-06 | 广东省智能机器人研究院 | Extreme ultraviolet light generating method and device |
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Application publication date: 20160203 |
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