CN104090331A - Efficient compact rectangular ring resonant cavity waveguide type optical filter - Google Patents
Efficient compact rectangular ring resonant cavity waveguide type optical filter Download PDFInfo
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Abstract
The invention provides an efficient compact rectangular ring resonant cavity waveguide type optical filter, and belongs to the field of integrated optics. Each closed long rectangle is formed by single mode optical waveguides, and two parallel straight bar single mode optical waveguides penetrate through two long sides of each rectangular waveguide vertically and intersect with the rectangular waveguide; the portions, between an intersection, at the ends of each rectangular waveguide are phase shift arms; the portions, divided by each rectangular waveguide, between two straight bar waveguides are reference arms, and the portions, divided by every two parallel waveguides, of the long sides of each rectangle are connecting waveguides; the portion between the end of each straight bar waveguide and the corresponding intersection is an input waveguide, the portion between the other end of each straight bar waveguide and the adjacent intersection is an output waveguide I, and the portion between the end of the other straight bar waveguide adjacent to each input waveguide and the adjacent intersection is an output waveguide II. A rectangular ring resonant cavity is adopted to replace a traditional micro-ring resonant cavity, the limit to the radius of curvature due to poor refringence of a material of a micro-ring structure is overcome, and bending losses of a waveguide structure in a circular ring shape are further reduced.
Description
Technical field
The present invention relates to optical filter device, particularly relate to a kind of high-efficiency compact straight-flanked ring resonator cavity waveguide type optical filter structure, belong to integrated optics field.
Background technology
Optical filter is the important devices that realizes wavelength-division multiplex technique, is widely used in optical interconnection system on optical communication field and sheet.For example can be applied in the Optical Add Drop Multiplexer node in optical wavelength-division multiplex network, its function is upper and lower local reception and some wavelength channel of transmission selectively from transmission light path.The core devices of add drop multiplex node is optical filter part, is selected to want the wavelength on up/down road by filtering device, realizes wavelength route.Novel optical filter feature is based on optical waveguide structure, utilizes semiconductive thin film manufacturing technology, obtains good light territory performance and the characteristic such as highly integrated.At present on the substrates such as Si, GaAs, InP by methods such as chemical vapor deposition or molecular beam epitaxys, in conjunction with lithographic technique, realize integrated two-dimensional planar light transmission system, make the application in optical interconnection system on sheet of novel optical filter also become possibility.The fields such as simultaneously integrated optical filter, sheet glazing exchange multiplexing at light top and bottom path and photometry calculation also all have broad application prospects.
Common optical filter has the wave filter based on principle of interference, as melting cone fiber wave filter, Fabry POLO wave filter, multilayer thin-film-filter, the conspicuous ?Zeng Deer wave filter of horse etc.; And the wave filter based on grating principle, as body grating wave filter, array waveguide grating wave filter (AWG), fiber grating filter etc.The size of above-mentioned wave filter is larger, and often the form with discrete device is applied in system, is difficult to realize large-scale integrated.In the time of in addition in the on-chip integration system that is applied to light interconnection and photometry calculation, these fluid filters cannot meet highly integrated demand.Waveguide type optical filter just arises at the historic moment, optical filter based on micro-ring resonant cavity, although can solve to a certain extent integration problem, exist that micro-ring radius-of-curvature is subject to that Refractive Index of Material is poor, the restriction of bending radius of waveguide, to responsive to temperature and the problem such as bandwidth is narrower.The conspicuous ?Zeng Deer wave filter of waveguide type horse is owing to adopting conventional Y branch, directional coupler or multi-mode interference coupler etc. in structure, also there is the large or one-dimensional square of the monolithic size occupy the still longer problem of yardstick that makes progress, be unfavorable for improving the integrated quantity of photon integrated circuit discrete component.Therefore technically need to realize a kind of waveguide type optical filter device that footprint area is less on two-dimensional directional, structure is compacter and power consumption is lower.
Summary of the invention
The present invention is directed to current integrated optical filter and occupy the defects such as monolithic size is large, cannot two-dimensional directional integrated, a kind of novel straight-flanked ring resonator cavity waveguide type optical filter structure based on groove is proposed, can be integrated at two-dimensional directional height, and obtain lower insertion loss, improve quality factor.
The technical solution used in the present invention is: a kind of high-efficiency compact straight-flanked ring resonator cavity waveguide type optical filter, it is characterized in that: the long rectangle that is formed sealing by monomode optical waveguide, article two, the vertical bar monomode optical waveguide being parallel to each other vertically, through two long limits of rectangular waveguide, intersects with rectangular waveguide respectively; Rectangular waveguide end part between cross intersection is phase shift arm 4; Article two, the part of being cut apart by rectangular waveguide in the middle of vertical bar waveguide is reference arm 5, and the part that the long limit of rectangle is cut apart by two parallel waveguides is for connecting waveguide 6; Part between arbitrary vertical bar waveguide end and cross intersection is input waveguide 1, and the part between its other end in same vertical bar waveguide and adjacent cross intersection is output waveguide I 8, the part between another straight wave guide end adjacent with input waveguide and adjacent cross intersection is output waveguide II 9; Between the vertical bar waveguide other end at output waveguide II 9 places and adjacent cross intersection, part is multiplexing waveguide 10.In outside, rectangular waveguide right angle, ducting direction angular direction at 45 ° etching tangent plane, forms completely reflecting mirror 7; Rectangular waveguide and vertical bar waveguide infall, respectively along adjacent completely reflecting mirror 7 parallel direction etching micro-nano grooves 2.
The interior filling groove dielectric material 3 of groove 2, described trench dielectric material 3 comprise air, polymethylmethacrylate (PMMA), SU ?8 polymkeric substance, alundum (Al2O3), zirconium dioxide; For same backing material, while filling the merit proportions by subtraction such as different channel medium causes, the A/F of micro-nano groove 2 is different.Fill the larger dielectric material of refractive index, the A/F of groove 2 is wider, thereby slows down the difficulty of device etching technics; But described groove and each waveguide angle should be greater than the angle of total reflection of the medium interface that waveguide material and trench fill material form.
The coupling end face 1a that described waveguide input end is input waveguide I 1; Output terminal is respectively the coupling end face 8a of output waveguide I 8 and the coupling end face 9a of output waveguide II 9.Input waveguide 1, output waveguide I 8, output waveguide II 9, multiplexing waveguide 10 equivalents, can, respectively as input/output port, realize intersection multiplexing.
This element manufacturing is on a kind of base material of silicon or silicon-on-insulator (Silicon on insulator, SOI) or GeSi/Si or GaAs or GaAs/AlGaAs and InP/InGaAsP semiconductor substrate materials.
Positive progressive effect of the present invention is: one, the present invention adopts the groove-shaped micro-nano photon coupler based on frustrated total internal reflection principle to substitute the optical splitting/combining apparatus in conventional filter structure, as conventional Y branch, directional coupler or multi-mode interference coupler etc., broken the restriction of conventional coupler to device architecture one dimension length, make device high-efficiency compact, can meet device miniaturization, two dimension is integrated and multi-stage cascade footprint area is less application demand.Two, adopt straight-flanked ring resonator cavity to substitute traditional micro-ring resonant cavity, overcome the poor restriction to radius-of-curvature of Refractive Index of Material of micro-ring structure, further reduce the bending loss of annular waveguiding structure.
Accompanying drawing explanation
Fig. 1 is a kind of high-efficiency compact straight-flanked ring resonator cavity waveguide type optical filter structural representation proposed by the invention.
Fig. 2 be shown in Fig. 1 along A ?the longitudinal profile schematic diagram of A ' direction.
Fig. 3 is the mode of architecture signals shown in Fig. 1 figure.
While Figure 4 shows that minute backscatter extinction logarithmic ratio, the frequency response curve of system.
While Figure 5 shows that minute backscatter extinction logarithmic ratio, the frequency response curve of system.
While Figure 6 shows that minute backscatter extinction logarithmic ratio, the frequency response curve of system.
In figure: 1 input waveguide, 1a input waveguide port, 2 micro-nano grooves, 3 trench fill dielectric materials, 4 phase shift arms, 5 reference arms, 6 connect waveguide, 7 completely reflecting mirrors, 8 output waveguide I, 8a output waveguide I port, 9 output waveguide II, 9a output waveguide II port, 10 multiplexing waveguides, 11 silicon-on-insulators (SOI) etching ridge waveguide, 12 ridge waveguide under-clad layer silicon dioxide layers, 13 silicon substrates.
Embodiment
By reference to the accompanying drawings and specific embodiment, the invention will be further described, but should not limit the scope of the invention with this.
A kind of high-efficiency compact straight-flanked ring resonator cavity waveguide type optical filter structure of the present invention can be produced on a kind of base material of silicon, silicon-on-insulator (Silicon on insulator, SOI), GeSi/Si, GaAs, GaAs/AlGaAs and InP/InGaAsP semiconductor substrate materials.As an example of concrete enforcement, it is example that the wave filter that the bar ridge waveguide of preparation on SOI backing material form is take in the present invention.Light signal enters device from input port 1a, and due to the effect of Mach increasing Dare interference structure and ring resonator, disresonance frequence light signal is from output port 8a output, and resonance frequency light, from output port 9a output, is realized filter function.
Consult Fig. 1, a kind of high-efficiency compact straight-flanked ring of the present invention resonator cavity waveguide type optical filter structure, comprising input waveguide 1, micro-nano groove 2, trench fill dielectric material 3, phase shift arm 4, reference arm 5, connects waveguide 6, completely reflecting mirror 7, output waveguide I 8, output waveguide II 9, multiplexing waveguide 10.Wherein the principle of work of institute's etching micro-nano groove is all the frustrated total internal reflection phenomenons that adopt light wave, from input waveguide, enter the light evanescent wave of groove and the width of groove when comparable, a part of evanescent wave forms and penetrates light wave through groove arrives the medium interface on opposite; Another part evanescent wave by Gu Si ?the glad offset phenomena of the Chinese form reflecting light.By changing groove width or regulating the refractive index of trench fill dielectric material, the adjustable power ratio that penetrates light wave and reflecting light, thus regulate the frequency response curve of wave filter, improve the quality factor of wave filter.
Light signal enters respectively phase shift arm 4 and reference arm 5 after groove 2 light splitting, and at groove, light is closed at 2 places, forms Mach and increases Dare interferometer structure, and through this structure division light signal, from output port I 8a output, part enters and connects waveguide 6 annular resonant cavities.Reference arm 5, the common formation straight-flanked ring of connection waveguide 6 resonator cavity, through groove 2 light splitting make disresonance frequence light signal reenter Ma He that phase shift arm 4 and reference arm 5 form ?increase in Dare structure, through output port I 8a output, its result makes output port I transmission spectrum more smooth except resonance frequency; And resonance frequency light signal resonance strengthens, through output port II 9a output, make output port I 8a and output port II 9a form complementation.For resonant ring other end reference arm 5 and phase shift arm 4 form another Ma He ?increase Dare structure, strengthen the signal resonance of annular resonant cavity resonance center frequeH, make output port I transmission spectrum more sharp-pointed, improved the quality factor of wave filter.
Consult Fig. 2, in Fig. 1 A ?the longitudinal profile schematic diagram of A ' direction, the present invention be take soi structure single mode waveguide as example, but scope is not limited to this.Wherein single mode SOI base ridge optical waveguide 11 can obtain by the reactive ion etching method in semiconductor devices treatment process, and the under-clad layer 12 of ridge optical waveguide is to adopt earth silicon material, is deposited in silicon-based substrate 13.
Consult Fig. 3, for the working effect of this high-efficiency compact straight-flanked ring resonator cavity optical filter structure is described, the signal flow graph based on Fig. 1 structure, has shown the transmission situation of light signal in Fig. 1 Structure Filter.Consider that in structure of the present invention, each section of waveguide length, refractive index equate that respectively therefore the equivalent optical path passing through through each Waveguide signal adopts transform signal processing method.Its middle term represents to postpone item, and signal is by single waveguide signal time delay, and wherein n represents waveguide index, and d represents single waveguide length, and c represents the light velocity in vacuum.By the dichroism of micro-nano groove, light signal is divided into and penetrates light wave and reflecting light when by groove.If penetrating light wave electric field amplitude coefficient is t, reflecting light electric field amplitude coefficient r.Suppose that input light-wave electric field amplitude coefficient is 1, by conservation of energy principle,
In device, because signal has directivity, when light signal passes through groove, introduce vector penetrating coefficient τ.Introduce reflection coefficient α and to the right reflection coefficient β left, simultaneously.As shown in Figure 3, the signal in 4 broken circle frames points to, the light splitting situation while representing respectively signal through each groove.
Transport function during for solving system stable state, introduces State space representation.If each output state postponing is respectively～, wherein k is discrete-time variable, by signal transitive graph, can obtain state equation,
Wherein represent input state, the state equation of output port I and output port II is respectively,
Adopt matrix and vector approach to be expressed as,
Wherein x (k+1), x (k), y (k) are respectively 13 rank vectors.A is 13 * 13 rank matrixes, and B, D are 13 * 1 rank matrixes, and C is 1 * 13 rank matrix.
Transition function can be expressed as
Bringing the transition function that corresponding matrix of coefficients obtains output port I and output port II into is
Consult Fig. 4, Fig. 5, Fig. 6, exemplified in the difference of groove coupling mechanism and divided under backscatter extinction logarithmic ratio, the transfer curve of this wave filter, in actual applications can be according to different demands, the refractive index that changes groove width or adjusting filling groove dielectric material, obtains desirable filtering characteristic and quality factor.
Fig. 4 condition under the transfer curve of this wave filter.Center filtered amplitude Da Dao ?64.7dB.Be symmetrical pectination, and the calculating of filter curve quality factor is.
Fig. 5 condition under the transfer curve of this wave filter.Center filtered amplitude reaches ?90dB, and the calculating of filtering quality factor is.
Fig. 6 condition under the transfer curve of this wave filter.Center filtered amplitude reaches ?74.3dB, and the calculating of filter curve quality factor is.
This device invention compact conformation, is easy to integrated on two-dimensional directional and expansion.Prepare applied widelyly, be the micro-nano structure waveguide type optical filter device that can prepare on different backing materials simultaneously.
Claims (4)
1. a high-efficiency compact straight-flanked ring resonator cavity waveguide type optical filter, is characterized in that: monomode optical waveguide, consist of the long rectangle of sealing, two vertical bar monomode optical waveguides that are parallel to each other, vertically through two long limits of rectangular waveguide, intersect with rectangular waveguide respectively; Rectangular waveguide end part between cross intersection is phase shift arm (4); Article two, the part of being cut apart by rectangular waveguide in the middle of vertical bar waveguide is reference arm (5), and the part that the long limit of rectangle is cut apart by two parallel waveguides is for connecting waveguide (6); Part between arbitrary vertical bar waveguide end and cross intersection is input waveguide (1), and the part between its other end in same vertical bar waveguide and adjacent cross intersection is output waveguide I (8), the part between another straight wave guide end adjacent with input waveguide and adjacent cross intersection is output waveguide II (9); Between the vertical bar waveguide other end at output waveguide II (9) place and adjacent cross intersection, part is multiplexing waveguide (10).In outside, rectangular waveguide right angle, ducting direction angular direction at 45 ° etching tangent plane, forms completely reflecting mirror (7); Rectangular waveguide and vertical bar waveguide infall, respectively along adjacent completely reflecting mirror (7) parallel direction etching micro-nano groove (2).
2. according to a kind of high-efficiency compact straight-flanked ring resonator cavity waveguide type optical filter claim (1) Suo Shu, it is characterized in that: the interior filling groove dielectric material of groove (2) (3), described trench dielectric material (3) comprise air, polymethylmethacrylate (PMMA), SU ?8 polymkeric substance, alundum (Al2O3), zirconium dioxide; Described groove and each waveguide angle are greater than the angle of total reflection of the medium interface that waveguide material and trench fill material form.
3. a kind of high-efficiency compact straight-flanked ring resonator cavity waveguide type optical filter according to claim 1, is characterized in that: described waveguide input end is the coupling end face (1a) of input waveguide (1); Output terminal is respectively the coupling end face (8a) of output waveguide I (8) and the coupling end face (9a) of output waveguide II (9); Input waveguide, output waveguide I (8), output waveguide II (9), multiplexing waveguide (10) equivalent, can, respectively as input/output port, realize intersection multiplexing.
4. according to the high-efficiency compact straight-flanked ring resonator cavity waveguide type optical filter described in claim 1,2,3, it is characterized in that: be produced on a kind of base material of silicon or silicon-on-insulator (Silicon on insulator, SOI) or GeSi/Si or GaAs or GaAs/AlGaAs and InP/InGaAsP semiconductor substrate materials.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105022177A (en) * | 2015-06-16 | 2015-11-04 | 北京工业大学 | High-speed optoelectronic modulator for rectangular-ring resonant cavity based on coupling modulation |
| CN109343174A (en) * | 2018-10-24 | 2019-02-15 | 中南民族大学 | A kind of multiplexing waveguide of multi-channel multi-mode intersects and preparation method thereof |
| CN110764284A (en) * | 2019-10-18 | 2020-02-07 | 中国地质大学（武汉） | Large-range bandwidth-adjustable microwave photon filter based on silicon-based micro-ring |
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| DE69714014T2 (en) * | 1996-01-26 | 2003-01-30 | Qinetiq Ltd., London | RADIATION FIELD ANALYSIS DEVICE |
| CN1188361C (en) * | 2003-09-19 | 2005-02-09 | 烽火通信科技股份有限公司 | Fibre-optical prefabricated bar processing apparatus by plasma technology |
| CN100489580C (en) * | 2007-01-12 | 2009-05-20 | 东南大学 | Rectangular, micro annular resonant cavity type light filter |
| CN103513333B (en) * | 2013-10-25 | 2016-01-13 | 东南大学 | A kind of silica-based nanowire mixing right-angled intersection device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105022177A (en) * | 2015-06-16 | 2015-11-04 | 北京工业大学 | High-speed optoelectronic modulator for rectangular-ring resonant cavity based on coupling modulation |
| CN105022177B (en) * | 2015-06-16 | 2017-11-17 | 北京工业大学 | A kind of rectangle annular resonant cavity high-speed electro-optic modulator based on coupling modulation |
| CN109343174A (en) * | 2018-10-24 | 2019-02-15 | 中南民族大学 | A kind of multiplexing waveguide of multi-channel multi-mode intersects and preparation method thereof |
| CN110764284A (en) * | 2019-10-18 | 2020-02-07 | 中国地质大学（武汉） | Large-range bandwidth-adjustable microwave photon filter based on silicon-based micro-ring |
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