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CA2233374A1 - Monolithic accelerometric transducer - Google Patents

Monolithic accelerometric transducer

Info

Publication number
CA2233374A1
CA2233374A1 CA002233374A CA2233374A CA2233374A1 CA 2233374 A1 CA2233374 A1 CA 2233374A1 CA 002233374 A CA002233374 A CA 002233374A CA 2233374 A CA2233374 A CA 2233374A CA 2233374 A1 CA2233374 A1 CA 2233374A1
Authority
CA
Canada
Prior art keywords
resonator
transducer
movable
portions
fixed portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002233374A
Other languages
French (fr)
Other versions
CA2233374C (en
Inventor
Olivier Le Traon
Denis Janiaud
Serge Muller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Office National dEtudes et de Recherches Aerospatiales ONERA
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2233374A1 publication Critical patent/CA2233374A1/en
Application granted granted Critical
Publication of CA2233374C publication Critical patent/CA2233374C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Measuring Fluid Pressure (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

A monolithic transducer including a fixed portion (1e1), two movable massive portions (2e1, 4e1) and a resonator (3e1) having ends secured to the movable portions, a flexible frame (5e1) surrounding the two movable portions, and two linking members (6e1, 7e1) connecting the frame (5e1) to the second movable portion (4e1) and the fixed portion (1e1). The frame forms a mechanical filter between the resonator and the fixed portion that is not exposed to resonator vibration. The overvoltage ratio of the resonator is not affected and the accuracy of the measurement provided by the transducer is increased. In a differential-output accelerometer, the position of the transducer (TAe1) is deduced from that of another identical transducer (TAe2) by 180~ rotation about an axis parallel to the resonator (3e2), with the fixed portions (1e1, 1e2) being rigidly interconnected.
CA002233374A 1995-09-26 1996-09-23 Monolithic accelerometric transducer Expired - Lifetime CA2233374C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR9511365A FR2739190B1 (en) 1995-09-26 1995-09-26 MONOLITHIC ACCELERATION TRANSDUCER
FR95/11365 1995-09-26
PCT/FR1996/001481 WO1997012249A1 (en) 1995-09-26 1996-09-23 Monolithic acceleration transducer

Publications (2)

Publication Number Publication Date
CA2233374A1 true CA2233374A1 (en) 1997-04-03
CA2233374C CA2233374C (en) 2002-04-23

Family

ID=9482994

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002233374A Expired - Lifetime CA2233374C (en) 1995-09-26 1996-09-23 Monolithic accelerometric transducer

Country Status (14)

Country Link
EP (1) EP0852726B1 (en)
JP (1) JP3982564B2 (en)
KR (1) KR100432190B1 (en)
CN (1) CN1075891C (en)
AU (1) AU7134296A (en)
CA (1) CA2233374C (en)
DE (1) DE69605680T2 (en)
EA (1) EA000375B1 (en)
ES (1) ES2140134T3 (en)
FR (1) FR2739190B1 (en)
GR (1) GR3032773T3 (en)
IL (1) IL123418A (en)
UA (1) UA42849C2 (en)
WO (1) WO1997012249A1 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6389877B1 (en) 1997-12-26 2002-05-21 Ngk Insulators, Ltd. Double-headed mass sensor and mass detection method
JP3545269B2 (en) * 1998-09-04 2004-07-21 日本碍子株式会社 Mass sensor and mass detection method
JP2000180250A (en) 1998-10-09 2000-06-30 Ngk Insulators Ltd Mass sensor and mass detection method
FR2789171B1 (en) 1999-02-01 2001-03-02 Onera (Off Nat Aerospatiale) MONOLITHIC STRUCTURE OF A VIBRATING GYROMETER
FR2805344B1 (en) 2000-02-22 2002-04-05 Onera (Off Nat Aerospatiale) BENDING VIBRATION FORCE TRANSDUCER
FR2869998B1 (en) * 2004-05-05 2006-07-07 Onera (Off Nat Aerospatiale) MECHANICAL DECOUPLING DEVICE FOR MONOLITHIC DIFFERENTIAL VIBRANT SENSOR
FR2880987B1 (en) * 2005-01-18 2007-04-06 Sagem PROCESS FOR ETCHING A CRYSTALLINE MATERIAL
DE102008017156A1 (en) * 2008-04-03 2009-10-08 Continental Teves Ag & Co. Ohg Micromechanical acceleration sensor
EP2315039A4 (en) * 2008-07-04 2012-10-10 Alps Electric Co Ltd Capacitance detection type movable sensor
JP5282715B2 (en) * 2009-10-13 2013-09-04 セイコーエプソン株式会社 Force detection unit and force detection device
JP2013050321A (en) * 2011-08-30 2013-03-14 Seiko Epson Corp Physical quantity detector and electronic apparatus
EP2762893B1 (en) * 2011-09-30 2016-06-15 Microinfinity, Inc. Mems resonant accelerometer
CN103245798B (en) * 2013-04-26 2014-08-20 中北大学 Mechanical filtering method of high-range acceleration sensor
CN108459173B (en) * 2018-04-13 2023-08-11 北京强度环境研究所 Mechanical filter applied to high-G-value impact acceleration sensor
CN112379125B (en) * 2020-10-31 2022-08-12 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） Manufacturing and packaging method of split type differential quartz vibrating beam accelerometer
FR3120700B1 (en) 2021-03-10 2023-02-10 Office National Detudes Rech Aerospatiales HIGH QUALITY BENDING VIBRATION RESONATOR FOR THE REALIZATION OF TIME REFERENCES, FORCE SENSORS OR GYROMETERS

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2528183A1 (en) * 1982-06-08 1983-12-09 Thomson Csf ELASTIC SURFACE WAVE ACCELEROMETER
FR2650895B1 (en) * 1989-08-08 1991-10-11 Onera (Off Nat Aerospatiale) ACCELEROMETRIC SENSOR WITH BENDING VIBRATORS
US5186053A (en) * 1990-12-19 1993-02-16 New Sd, Inc. Temperature compensated proofmass assembly for accelerometers
US5396797A (en) * 1991-02-08 1995-03-14 Alliedsignal Inc. Triaxial angular rate and acceleration sensor
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
EP0572657B1 (en) * 1991-12-23 1998-08-05 Elf Atochem North America, Inc. Multi-mode accelerometer
DE69423667T2 (en) * 1993-03-01 2000-11-23 Murata Mfg. Co., Ltd. Piezoelectric vibrator and acceleration sensor using this
JP3123301B2 (en) * 1993-04-16 2001-01-09 株式会社村田製作所 Angular velocity sensor
US5456110A (en) * 1993-11-12 1995-10-10 Alliedsignal Inc. Dual pendulum vibrating beam accelerometer
JP2939922B2 (en) * 1993-12-21 1999-08-25 株式会社共和電業 Acceleration transducer

Also Published As

Publication number Publication date
DE69605680T2 (en) 2000-07-27
FR2739190B1 (en) 1997-11-28
UA42849C2 (en) 2001-11-15
ES2140134T3 (en) 2000-02-16
KR100432190B1 (en) 2004-08-18
KR19990044408A (en) 1999-06-25
CN1075891C (en) 2001-12-05
JP3982564B2 (en) 2007-09-26
CA2233374C (en) 2002-04-23
IL123418A0 (en) 1998-09-24
IL123418A (en) 2000-07-26
GR3032773T3 (en) 2000-06-30
EA199800338A1 (en) 1998-10-29
AU7134296A (en) 1997-04-17
EP0852726B1 (en) 1999-12-15
FR2739190A1 (en) 1997-03-28
DE69605680D1 (en) 2000-01-20
EP0852726A1 (en) 1998-07-15
EA000375B1 (en) 1999-06-24
JPH11512816A (en) 1999-11-02
WO1997012249A1 (en) 1997-04-03
CN1197513A (en) 1998-10-28

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Legal Events

Date Code Title Description
EEER Examination request
MKEX Expiry

Effective date: 20160923