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AU2001275795A1 - Electrochemical treating method such as electroplating and electrochemical reaction device therefor - Google Patents

Electrochemical treating method such as electroplating and electrochemical reaction device therefor

Info

Publication number
AU2001275795A1
AU2001275795A1 AU2001275795A AU7579501A AU2001275795A1 AU 2001275795 A1 AU2001275795 A1 AU 2001275795A1 AU 2001275795 A AU2001275795 A AU 2001275795A AU 7579501 A AU7579501 A AU 7579501A AU 2001275795 A1 AU2001275795 A1 AU 2001275795A1
Authority
AU
Australia
Prior art keywords
electrochemical
electroplating
reaction device
treating method
device therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001275795A
Inventor
Hiroe Asai
Yoshihiro Asai
Humiko Iwao
Seizo Miyata
Masato Sone
Hideo Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2000253572A external-priority patent/JP3571627B2/en
Priority claimed from JP2000401301A external-priority patent/JP3703132B2/en
Priority claimed from JP2001137191A external-priority patent/JP3613335B2/en
Application filed by Individual filed Critical Individual
Publication of AU2001275795A1 publication Critical patent/AU2001275795A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H3/00Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
    • B23H3/08Working media
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1633Process of electroless plating
    • C23C18/1675Process conditions
    • C23C18/1685Process conditions with supercritical condition, e.g. chemical fluid deposition
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C22/00Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C22/73Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals characterised by the process
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/005Apparatus specially adapted for electrolytic conversion coating
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D13/00Electrophoretic coating characterised by the process
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/02Tanks; Installations therefor
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/003Electroplating using gases, e.g. pressure influence
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/34Pretreatment of metallic surfaces to be electroplated
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/48After-treatment of electroplated surfaces
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00Electrolytic etching or polishing
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C22/00Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C22/05Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions
    • C23C22/06Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6
    • C23C22/07Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6 containing phosphates
    • C23C22/08Orthophosphates
    • C23C22/18Orthophosphates containing manganese cations
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C22/00Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C22/05Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions
    • C23C22/06Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6
    • C23C22/24Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6 containing hexavalent chromium compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Electroplating Methods And Accessories (AREA)
AU2001275795A 2000-08-24 2001-07-30 Electrochemical treating method such as electroplating and electrochemical reaction device therefor Abandoned AU2001275795A1 (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP2000253572A JP3571627B2 (en) 2000-08-24 2000-08-24 Electrochemical reaction method
JP2000-253572 2000-08-24
JP2000401301A JP3703132B2 (en) 2000-12-28 2000-12-28 Electrochemical treatment method such as electroplating and electrochemical reaction apparatus thereof
JP2000-401301 2000-12-28
JP2001-137191 2001-05-08
JP2001137191A JP3613335B2 (en) 2001-05-08 2001-05-08 Electrochemical treatment method such as electroplating and electrochemical reaction apparatus thereof
PCT/JP2001/006525 WO2002016673A1 (en) 2000-08-24 2001-07-30 Electrochemical treating method such as electroplating and electrochemical reaction device therefor

Publications (1)

Publication Number Publication Date
AU2001275795A1 true AU2001275795A1 (en) 2002-03-04

Family

ID=27344419

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001275795A Abandoned AU2001275795A1 (en) 2000-08-24 2001-07-30 Electrochemical treating method such as electroplating and electrochemical reaction device therefor

Country Status (5)

Country Link
US (1) US6793793B2 (en)
EP (1) EP1314799B1 (en)
AU (1) AU2001275795A1 (en)
TW (1) TW588119B (en)
WO (1) WO2002016673A1 (en)

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JP3695703B2 (en) * 2001-10-25 2005-09-14 株式会社日立製作所 Electroplating method, electroplating apparatus and semiconductor device manufacturing method and manufacturing apparatus
WO2003042434A1 (en) * 2001-11-14 2003-05-22 Asahi Engineering Co.,Ltd Method and device for surface treatment of treated object
JP3830386B2 (en) * 2001-12-20 2006-10-04 英夫 吉田 Anodizing method and processing equipment therefor
JP2004225152A (en) * 2003-01-27 2004-08-12 Tokyo Electron Ltd Method for treating substrate and method for manufacturing semiconductor device
JP4673612B2 (en) * 2004-02-12 2011-04-20 ダイキン工業株式会社 Electroplating in the presence of CO2
JP4557570B2 (en) * 2004-03-01 2010-10-06 成之 上宮 Method for producing thin film for hydrogen separation
CN100395544C (en) * 2004-08-02 2008-06-18 大金工业株式会社 Oxygen electrodes
US7906210B2 (en) * 2004-10-27 2011-03-15 Nissei Plastic Industrial Co., Ltd. Fibrous nanocarbon and metal composite and a method of manufacturing the same
SE0403042D0 (en) * 2004-12-14 2004-12-14 Polymer Kompositer I Goeteborg Improved stabilization and performance of autocatalytic electroless process
WO2006090775A1 (en) * 2005-02-23 2006-08-31 Daikin Industries, Ltd. Coating film, article covered with coating film, and method for corrosion-resistant coating
WO2006090785A1 (en) * 2005-02-23 2006-08-31 Daikin Industries, Ltd. Plated member for fuel cell, and method and apparatus for manufacturing same
JP2006265729A (en) * 2005-02-23 2006-10-05 Daikin Ind Ltd Production method of multilayer film structure, multilayer film structure and plating equipment
WO2007007617A1 (en) * 2005-07-08 2007-01-18 Daikin Industries, Ltd. Surface treatment in presence of organic solvent
US7579117B1 (en) * 2005-08-25 2009-08-25 Kirby Beard Electrochemical cell energy device based on novel electrolyte
FR2898138B1 (en) * 2006-03-03 2008-05-16 Commissariat Energie Atomique METHOD FOR ELECTROCHEMICAL STRUCTURING OF A CONDUCTIVE OR SEMICONDUCTOR MATERIAL, AND DEVICE FOR CARRYING OUT SAID METHOD
US20070264451A1 (en) * 2006-05-11 2007-11-15 Hitachi Maxell, Ltd. Method of manufacturing polymer member and polymer member
JP4919262B2 (en) 2006-06-02 2012-04-18 日立マクセル株式会社 Storage container, resin molding method and plating film forming method
JP4163728B2 (en) * 2006-10-02 2008-10-08 エス・イー・エス株式会社 Electroplating method
JP4177400B2 (en) * 2006-11-10 2008-11-05 エス・イー・エス株式会社 Electroless plating method
JP5398175B2 (en) * 2008-06-03 2014-01-29 富士フイルム株式会社 Method for manufacturing ink jet recording head
EP2143828B1 (en) * 2008-07-08 2016-12-28 Enthone, Inc. Electrolyte and method for the deposition of a matt metal layer
TWI404826B (en) * 2009-02-27 2013-08-11 Univ Fooyin Stainless steel golf head supercritical fluid polishing method and stainless steel golf head
US8673445B2 (en) * 2009-07-17 2014-03-18 Nissei Plastic Industrial Co. Ltd. Composite-plated article and method for producing same
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JP5267526B2 (en) 2010-09-24 2013-08-21 株式会社デンソー Plating apparatus and plating method
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KR101318197B1 (en) * 2011-07-01 2013-10-17 주승기 Electroplating system and electroplating method
CN103173795B (en) * 2012-03-27 2016-08-03 上海域高环境技术有限公司 A kind of electric plating method
EP3069401B1 (en) * 2013-11-15 2018-11-07 The Regents of the University of California Electrochemical devices comprising compressed gas solvent electrolytes
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US10011918B2 (en) * 2014-12-23 2018-07-03 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus and process of electro-chemical plating
JP6400512B2 (en) * 2015-03-18 2018-10-03 株式会社東芝 Electroplating method and electroplating apparatus
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CN108754479B (en) * 2018-07-02 2020-04-21 杨景峰 Zero-emission phosphating and saponification method based on high-pressure closed circulation system

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Also Published As

Publication number Publication date
US6793793B2 (en) 2004-09-21
EP1314799B1 (en) 2013-10-16
EP1314799A4 (en) 2007-03-07
WO2002016673A1 (en) 2002-02-28
TW588119B (en) 2004-05-21
EP1314799A1 (en) 2003-05-28
US20030019756A1 (en) 2003-01-30

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