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ATE541307T1 - Befestigungsträger, herstellungsverfahren für einen befestigungsträger, verwendungsverfahren für einen befestigungsträger und substrataufnahmebehälter - Google Patents

Befestigungsträger, herstellungsverfahren für einen befestigungsträger, verwendungsverfahren für einen befestigungsträger und substrataufnahmebehälter

Info

Publication number
ATE541307T1
ATE541307T1 AT06712518T AT06712518T ATE541307T1 AT E541307 T1 ATE541307 T1 AT E541307T1 AT 06712518 T AT06712518 T AT 06712518T AT 06712518 T AT06712518 T AT 06712518T AT E541307 T1 ATE541307 T1 AT E541307T1
Authority
AT
Austria
Prior art keywords
mounting bracket
supporting layer
fixing carrier
container
receiving container
Prior art date
Application number
AT06712518T
Other languages
English (en)
Inventor
Satoshi Odashima
Noriyoshi Hosono
Original Assignee
Shinetsu Polymer Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2005027910A external-priority patent/JP4587828B2/ja
Priority claimed from JP2005132385A external-priority patent/JP4671751B2/ja
Priority claimed from JP2005137537A external-priority patent/JP4688567B2/ja
Application filed by Shinetsu Polymer Co filed Critical Shinetsu Polymer Co
Application granted granted Critical
Publication of ATE541307T1 publication Critical patent/ATE541307T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Slide Fasteners, Snap Fasteners, And Hook Fasteners (AREA)
AT06712518T 2005-02-03 2006-01-27 Befestigungsträger, herstellungsverfahren für einen befestigungsträger, verwendungsverfahren für einen befestigungsträger und substrataufnahmebehälter ATE541307T1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2005027910A JP4587828B2 (ja) 2005-02-03 2005-02-03 精密基板用の固定治具
JP2005132385A JP4671751B2 (ja) 2005-04-28 2005-04-28 固定キャリアの製造方法
JP2005137537A JP4688567B2 (ja) 2005-05-10 2005-05-10 固定キャリア
JP2006001352 2006-01-27

Publications (1)

Publication Number Publication Date
ATE541307T1 true ATE541307T1 (de) 2012-01-15

Family

ID=36916305

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06712518T ATE541307T1 (de) 2005-02-03 2006-01-27 Befestigungsträger, herstellungsverfahren für einen befestigungsträger, verwendungsverfahren für einen befestigungsträger und substrataufnahmebehälter

Country Status (7)

Country Link
US (1) US20060243620A1 (de)
EP (1) EP1858058B1 (de)
KR (1) KR100929471B1 (de)
CN (1) CN101116180B (de)
AT (1) ATE541307T1 (de)
TW (1) TW200631123A (de)
WO (1) WO2006087894A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4667769B2 (ja) * 2004-06-11 2011-04-13 信越ポリマー株式会社 基板収納容器
US20100310351A1 (en) * 2006-03-30 2010-12-09 Tokyo Electron Limited Method for handling and transferring a wafer case, and holding part used therefor
JP4681485B2 (ja) * 2006-03-30 2011-05-11 東京エレクトロン株式会社 ウエハケースの運用方法、ウエハケースの搬送方法及びウエハケース搬送用保持部品
US8088670B2 (en) * 2007-04-18 2012-01-03 Shin-Etsu Chemical Co., Ltd. Method for manufacturing bonded substrate with sandblast treatment
US20110005967A1 (en) 2008-01-13 2011-01-13 Entegris, Inc. Methods and apparatuses for large diameter wafer handling
JP5147592B2 (ja) * 2008-08-07 2013-02-20 信越ポリマー株式会社 保持治具の搬送容器
TW201422501A (zh) * 2012-12-04 2014-06-16 Tian-Sing Huang 晶圓承載裝置及其應用
US9349643B2 (en) 2013-04-01 2016-05-24 Brewer Science Inc. Apparatus and method for thin wafer transfer
KR102098722B1 (ko) * 2013-05-29 2020-04-09 미라이얼 가부시키가이샤 기판수납용기
US9195929B2 (en) * 2013-08-05 2015-11-24 A-Men Technology Corporation Chip card assembling structure and method thereof
JP6198622B2 (ja) * 2014-02-04 2017-09-20 クアーズテック株式会社 シリカ通気体
CN107924858B (zh) * 2015-07-13 2023-05-30 恩特格里斯公司 具有增强型容纳的衬底容器
JP6772498B2 (ja) 2016-03-18 2020-10-21 株式会社Sumco 基板収納容器
CN109256353B (zh) * 2017-07-12 2021-10-22 家登精密工业股份有限公司 定位底座
CN112687600A (zh) * 2021-01-06 2021-04-20 天津中环领先材料技术有限公司 一种晶圆片承载装置
DE102022201365A1 (de) 2022-02-10 2023-08-10 Robert Bosch Gesellschaft mit beschränkter Haftung Wafer-Vereinzelungsfolie

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4395451A (en) * 1980-07-14 1983-07-26 Althouse Victor E Semiconductor wafer and die handling method and means
US4778326A (en) * 1983-05-24 1988-10-18 Vichem Corporation Method and means for handling semiconductor and similar electronic devices
US4667944A (en) * 1985-08-29 1987-05-26 Vichem Corporation Means for handling semiconductor die and the like
US5448450A (en) * 1991-08-15 1995-09-05 Staktek Corporation Lead-on-chip integrated circuit apparatus
JPH05335405A (ja) * 1992-05-29 1993-12-17 Toshiba Corp ウエハ載置台および半導体装置製造装置
KR970018332A (ko) * 1995-09-22 1997-04-30 김광호 웨이퍼용 캐리어
US6342434B1 (en) * 1995-12-04 2002-01-29 Hitachi, Ltd. Methods of processing semiconductor wafer, and producing IC card, and carrier
US5915562A (en) * 1996-07-12 1999-06-29 Fluoroware, Inc. Transport module with latching door
US6010008A (en) * 1997-07-11 2000-01-04 Fluoroware, Inc. Transport module
US6474474B2 (en) * 1998-02-06 2002-11-05 Sumitomo Metal Industries, Ltd. Sheet support container
DE19842684C1 (de) * 1998-09-17 1999-11-04 Siemens Ag Auf einem Stützgerüst angeordneter Kondensator in einer Halbleiteranordnung und Herstellverfahren
JP3046010B2 (ja) * 1998-11-12 2000-05-29 沖電気工業株式会社 収納容器および収納方法
JP3916342B2 (ja) * 1999-04-20 2007-05-16 信越ポリマー株式会社 基板収納容器
JP2003224180A (ja) * 2002-01-28 2003-08-08 Kyocera Corp ウエハ支持部材
US7030481B2 (en) * 2002-12-09 2006-04-18 Internation Business Machines Corporation High density chip carrier with integrated passive devices
JP2004247387A (ja) * 2003-02-12 2004-09-02 Sumitomo Electric Ind Ltd 半導体製造装置用ウェハ保持体およびそれを搭載した半導体製造装置
SG116533A1 (en) * 2003-03-26 2005-11-28 Toshiba Kk Semiconductor manufacturing apparatus and method of manufacturing semiconductor device.
JP4349952B2 (ja) * 2004-03-24 2009-10-21 京セラ株式会社 ウェハ支持部材とその製造方法
CN100470756C (zh) * 2004-06-28 2009-03-18 京瓷株式会社 静电卡盘

Also Published As

Publication number Publication date
WO2006087894A1 (ja) 2006-08-24
EP1858058B1 (de) 2012-01-11
CN101116180A (zh) 2008-01-30
KR20070091187A (ko) 2007-09-07
EP1858058A4 (de) 2010-09-08
CN101116180B (zh) 2011-08-17
TW200631123A (en) 2006-09-01
KR100929471B1 (ko) 2009-12-02
EP1858058A1 (de) 2007-11-21
TWI301653B (de) 2008-10-01
US20060243620A1 (en) 2006-11-02

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