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ATE469126T1 - Fluorarylsulfonium fotosäure erzeugende verbindungen - Google Patents

Fluorarylsulfonium fotosäure erzeugende verbindungen

Info

Publication number
ATE469126T1
ATE469126T1 AT03814368T AT03814368T ATE469126T1 AT E469126 T1 ATE469126 T1 AT E469126T1 AT 03814368 T AT03814368 T AT 03814368T AT 03814368 T AT03814368 T AT 03814368T AT E469126 T1 ATE469126 T1 AT E469126T1
Authority
AT
Austria
Prior art keywords
pags
sulfonium
present
sulfonium pags
monomers
Prior art date
Application number
AT03814368T
Other languages
English (en)
Inventor
Eric Kolb
Erdem Cetin
Kirk Hutchinson
Richard Minns
Original Assignee
Stx Aprilis Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stx Aprilis Inc filed Critical Stx Aprilis Inc
Application granted granted Critical
Publication of ATE469126T1 publication Critical patent/ATE469126T1/de

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/02Details of features involved during the holographic process; Replication of holograms without interference recording
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C381/00Compounds containing carbon and sulfur and having functional groups not covered by groups C07C301/00 - C07C337/00
    • C07C381/12Sulfonium compounds
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F5/00Compounds containing elements of Groups 3 or 13 of the Periodic Table
    • C07F5/02Boron compounds
    • C07F5/027Organoboranes and organoborohydrides
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/029Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/075Silicon-containing compounds
    • G03F7/0755Non-macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2260/00Recording materials or recording processes
    • G03H2260/12Photopolymer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Polymerisation Methods In General (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Holo Graphy (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
AT03814368T 2002-12-23 2003-12-22 Fluorarylsulfonium fotosäure erzeugende verbindungen ATE469126T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US43652102P 2002-12-23 2002-12-23
PCT/US2003/041175 WO2004058699A2 (en) 2002-12-23 2003-12-22 Fluoroarylsulfonium photoacid generators

Publications (1)

Publication Number Publication Date
ATE469126T1 true ATE469126T1 (de) 2010-06-15

Family

ID=32682402

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03814368T ATE469126T1 (de) 2002-12-23 2003-12-22 Fluorarylsulfonium fotosäure erzeugende verbindungen

Country Status (6)

Country Link
US (2) US20050059543A1 (de)
EP (1) EP1583740B1 (de)
AT (1) ATE469126T1 (de)
AU (1) AU2003303482A1 (de)
DE (1) DE60332768D1 (de)
WO (1) WO2004058699A2 (de)

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DE102006005103A1 (de) * 2006-02-04 2007-08-09 Merck Patent Gmbh Oxonium- und Sulfoniumsalze
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US9354518B2 (en) 2011-05-25 2016-05-31 Dow Corning Corporation Epoxy-functional radiation-curable composition containing an epoxy-functional siloxane oligomer for enhanced film retention and adhesion during solvent development
US8728715B2 (en) * 2012-01-13 2014-05-20 Funai Electric Co., Ltd. Non-photosensitive siloxane coating for processing hydrophobic photoimageable nozzle plate
JP6240409B2 (ja) * 2013-05-31 2017-11-29 サンアプロ株式会社 スルホニウム塩および光酸発生剤
JP6244109B2 (ja) * 2013-05-31 2017-12-06 東京応化工業株式会社 レジスト組成物、化合物、高分子化合物及びレジストパターン形成方法
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EP2868692B1 (de) 2013-11-05 2017-10-25 DSM IP Assets B.V. Stabilisierte matrixgefüllte flüssige strahlungshärtbare Harzzusammensetzungen zur Additivherstellung
CN104238268B (zh) * 2014-08-15 2017-12-26 同济大学 以三苯乙烯为主体的硫鎓盐类光生酸剂、制备方法及其应用
KR102698770B1 (ko) 2015-06-08 2024-08-23 스트래터시스,인코포레이티드 부가적 제조용 액체 하이브리드 자외선/가시광선 복사선-경화성 수지 조성물
US9708442B1 (en) 2015-10-01 2017-07-18 Dsm Ip Assets, B.V. Liquid, hybrid UV/vis radiation curable resin compositions for additive fabrication
EP3377291B1 (de) 2015-11-17 2021-11-03 Covestro (Netherlands) B.V. Verbesserte antimonfreie strahlungshärtbare zusammensetzungen zur generativen fertigung und anwendungen davon in feingiessverfahren
CN108778688B (zh) 2016-03-14 2022-05-13 科思创(荷兰)有限公司 具有改善韧性耐高温性的加成法制造用可辐射固化组合物
JP7215654B2 (ja) 2017-12-15 2023-01-31 コベストロ (ネザーランズ) ビー.ブイ. 粘性熱硬化性樹脂を高温噴射して、積層造形を介して固体物品を作製するための組成物及び方法
CN111526977B (zh) 2017-12-29 2022-07-01 科思创(荷兰)有限公司 用于加成制造的组合物和制品及其使用方法
CN114341732A (zh) 2019-08-30 2022-04-12 科思创(荷兰)有限公司 用于增材制造的液体混合紫外/可见光辐射可固化树脂组合物

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Also Published As

Publication number Publication date
US20090182172A1 (en) 2009-07-16
DE60332768D1 (de) 2010-07-08
US20050059543A1 (en) 2005-03-17
WO2004058699A2 (en) 2004-07-15
AU2003303482A1 (en) 2004-07-22
WO2004058699A3 (en) 2004-09-10
EP1583740A2 (de) 2005-10-12
AU2003303482A8 (en) 2004-07-22
EP1583740B1 (de) 2010-05-26

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