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ATE185429T1 - Beleuchtungsvorrichtung für einen projektionsbelichtungsapparat - Google Patents

Beleuchtungsvorrichtung für einen projektionsbelichtungsapparat

Info

Publication number
ATE185429T1
ATE185429T1 AT93302508T AT93302508T ATE185429T1 AT E185429 T1 ATE185429 T1 AT E185429T1 AT 93302508 T AT93302508 T AT 93302508T AT 93302508 T AT93302508 T AT 93302508T AT E185429 T1 ATE185429 T1 AT E185429T1
Authority
AT
Austria
Prior art keywords
light source
secondary light
ring
lighting device
exposure apparatus
Prior art date
Application number
AT93302508T
Other languages
English (en)
Inventor
Takahisa Shiozawa
Masato Muraki
Hiroyuki Ishii
Shigeru Hayata
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE185429T1 publication Critical patent/ATE185429T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
    • G03F7/70108—Off-axis setting using a light-guiding element, e.g. diffractive optical elements [DOEs] or light guides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70241—Optical aspects of refractive lens systems, i.e. comprising only refractive elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Photographic Developing Apparatuses (AREA)
  • Eye Examination Apparatus (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
AT93302508T 1992-03-31 1993-03-31 Beleuchtungsvorrichtung für einen projektionsbelichtungsapparat ATE185429T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10863292A JP3278896B2 (ja) 1992-03-31 1992-03-31 照明装置及びそれを用いた投影露光装置

Publications (1)

Publication Number Publication Date
ATE185429T1 true ATE185429T1 (de) 1999-10-15

Family

ID=14489725

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93302508T ATE185429T1 (de) 1992-03-31 1993-03-31 Beleuchtungsvorrichtung für einen projektionsbelichtungsapparat

Country Status (5)

Country Link
US (2) US5345292A (de)
EP (1) EP0564264B1 (de)
JP (1) JP3278896B2 (de)
AT (1) ATE185429T1 (de)
DE (1) DE69326630T2 (de)

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Also Published As

Publication number Publication date
DE69326630T2 (de) 2000-04-06
EP0564264A1 (de) 1993-10-06
JPH05283317A (ja) 1993-10-29
EP0564264B1 (de) 1999-10-06
US5345292A (en) 1994-09-06
JP3278896B2 (ja) 2002-04-30
DE69326630D1 (de) 1999-11-11
US5726740A (en) 1998-03-10

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