AR095295A1 - Dispositivo de sistema electromecánico (ems) y método para la elaboración de dicho dispositivo - Google Patents
Dispositivo de sistema electromecánico (ems) y método para la elaboración de dicho dispositivoInfo
- Publication number
- AR095295A1 AR095295A1 ARP140100089A ARP140100089A AR095295A1 AR 095295 A1 AR095295 A1 AR 095295A1 AR P140100089 A ARP140100089 A AR P140100089A AR P140100089 A ARP140100089 A AR P140100089A AR 095295 A1 AR095295 A1 AR 095295A1
- Authority
- AR
- Argentina
- Prior art keywords
- wall
- electrode
- walls
- transport
- define
- Prior art date
Links
Classifications
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T1/00—General purpose image data processing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/0015—Cantilevers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/00166—Electrodes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0235—Accelerometers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0118—Cantilevers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2207/00—Microstructural systems or auxiliary parts thereof
- B81B2207/01—Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS
- B81B2207/015—Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS the micromechanical device and the control or processing electronics being integrated on the same substrate
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Theoretical Computer Science (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Semiconductor Integrated Circuits (AREA)
- Micromachines (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Dispositivo y método para sistemas electromecánicos que tienen vigas de las paredes laterales. En un aspecto, un dispositivo incluye un sustrato que tiene un primer electrodo y un segundo electrodo, y un transporte móvil integrado en forma monolítica con el sustrato, y que tiene una primera pared, una segunda pared, y una base. Cada una de la primera y la segunda pared tiene una primera dimensión por lo menos cuatro veces más grande que una segunda dimensión. La primera y la segunda pared definen sustancialmente lados verticales paralelos del transporte, y la base está posicionada en forma ortogonal a la primera y la segunda pared y forma un fondo horizontal del transporte, lo que proporciona un soporte estructural a la primera y la segunda pared. La primera pared y el primer electrodo definen un primer condensador, y la segunda pared y el segundo electrodo definen un segundo condensador.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/737,439 US20140192061A1 (en) | 2013-01-09 | 2013-01-09 | Electromechanical systems having sidewall beams |
Publications (1)
Publication Number | Publication Date |
---|---|
AR095295A1 true AR095295A1 (es) | 2015-10-07 |
Family
ID=50002879
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ARP140100089A AR095295A1 (es) | 2013-01-09 | 2014-01-09 | Dispositivo de sistema electromecánico (ems) y método para la elaboración de dicho dispositivo |
Country Status (7)
Country | Link |
---|---|
US (1) | US20140192061A1 (es) |
JP (1) | JP2016511838A (es) |
KR (1) | KR20150106427A (es) |
CN (1) | CN105051548A (es) |
AR (1) | AR095295A1 (es) |
TW (1) | TW201439641A (es) |
WO (1) | WO2014109984A1 (es) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9332368B1 (en) * | 2013-07-08 | 2016-05-03 | Google Inc. | Accelerometer or transducer on a device |
US10833225B2 (en) | 2014-06-18 | 2020-11-10 | X Display Company Technology Limited | Micro assembled LED displays and lighting elements |
EP2966454B1 (fr) * | 2014-07-07 | 2017-08-30 | EM Microelectronic-Marin SA | Procédé de mesure d'un paramètre physique, et circuit électronique pour sa mise en oeuvre |
US10230048B2 (en) | 2015-09-29 | 2019-03-12 | X-Celeprint Limited | OLEDs for micro transfer printing |
JP6741933B2 (ja) * | 2015-10-02 | 2020-08-19 | ミツミ電機株式会社 | 光走査モジュール、光走査制御装置 |
US10199546B2 (en) | 2016-04-05 | 2019-02-05 | X-Celeprint Limited | Color-filter device |
US10867538B1 (en) * | 2019-03-05 | 2020-12-15 | Facebook Technologies, Llc | Systems and methods for transferring an image to an array of emissive sub pixels |
US11408911B2 (en) * | 2019-07-17 | 2022-08-09 | Honeywell International Inc. | Optomechanical structure with corrugated edge |
US11696252B2 (en) * | 2019-09-13 | 2023-07-04 | Hunter Douglas Inc. | Systems and methods for determining proximity of architectural structure coverings |
US11076225B2 (en) * | 2019-12-28 | 2021-07-27 | Intel Corporation | Haptics and microphone display integration |
WO2021252364A1 (en) | 2020-06-08 | 2021-12-16 | Analog Devices, Inc. | Stress-relief mems gyroscope |
US11692825B2 (en) | 2020-06-08 | 2023-07-04 | Analog Devices, Inc. | Drive and sense stress relief apparatus |
US11698257B2 (en) | 2020-08-24 | 2023-07-11 | Analog Devices, Inc. | Isotropic attenuated motion gyroscope |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6149190A (en) * | 1993-05-26 | 2000-11-21 | Kionix, Inc. | Micromechanical accelerometer for automotive applications |
US7405852B2 (en) * | 2005-02-23 | 2008-07-29 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
US8413509B2 (en) * | 2008-04-14 | 2013-04-09 | Freescale Semiconductor, Inc. | Spring member for use in a microelectromechanical systems sensor |
US8169679B2 (en) * | 2008-10-27 | 2012-05-01 | Pixtronix, Inc. | MEMS anchors |
JP5649810B2 (ja) * | 2009-10-29 | 2015-01-07 | 日立オートモティブシステムズ株式会社 | 静電容量式センサ |
JP5676645B2 (ja) * | 2009-12-29 | 2015-02-25 | クォルコム・メムズ・テクノロジーズ・インコーポレーテッド | 補助電極構造を有するコーティングされた光方向転換照明デバイス |
-
2013
- 2013-01-09 US US13/737,439 patent/US20140192061A1/en not_active Abandoned
-
2014
- 2014-01-06 WO PCT/US2014/010333 patent/WO2014109984A1/en active Application Filing
- 2014-01-06 JP JP2015552721A patent/JP2016511838A/ja active Pending
- 2014-01-06 CN CN201480004161.6A patent/CN105051548A/zh active Pending
- 2014-01-06 KR KR1020157021407A patent/KR20150106427A/ko not_active Application Discontinuation
- 2014-01-09 TW TW103100847A patent/TW201439641A/zh unknown
- 2014-01-09 AR ARP140100089A patent/AR095295A1/es unknown
Also Published As
Publication number | Publication date |
---|---|
WO2014109984A1 (en) | 2014-07-17 |
CN105051548A (zh) | 2015-11-11 |
TW201439641A (zh) | 2014-10-16 |
US20140192061A1 (en) | 2014-07-10 |
JP2016511838A (ja) | 2016-04-21 |
KR20150106427A (ko) | 2015-09-21 |
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