NL150226B - Interferometer. - Google Patents

Interferometer.

Info

Publication number: NL150226B
Authority: NL; Netherlands
Prior art keywords: interferometer
Prior art date: 1966-12-30

Application number

NL676717713A

Other languages

English (en)

Dutch (nl)

Other versions

NL6717713A (de

Original Assignee

Keuffel & Esser Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1966-12-30

Filing date

1967-12-28

Publication date

1976-07-15

1967-12-28 Application filed by Keuffel & Esser Co filed Critical Keuffel & Esser Co

1968-07-01 Publication of NL6717713A publication Critical patent/NL6717713A/xx

1976-07-15 Publication of NL150226B publication Critical patent/NL150226B/xx

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02018—Multipass interferometers, e.g. double-pass
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/15—Cat eye, i.e. reflection always parallel to incoming beam
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Instruments For Measurement Of Length By Optical Means (AREA)
Length Measuring Devices By Optical Means (AREA)

NL676717713A 1966-12-30 1967-12-28 Interferometer. NL150226B (nl)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US60636466A	1966-12-30	1966-12-30

Publications (2)

Publication Number	Publication Date
NL6717713A NL6717713A (de)	1968-07-01
NL150226B true NL150226B (nl)	1976-07-15

Family

ID=24427670

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NL676717713A NL150226B (nl)	1966-12-30	1967-12-28	Interferometer.

Country Status (7)

Country	Link
US (1)	US3601490A (de)
CH (1)	CH486003A (de)
DE (1)	DE1572713B2 (de)
FR (1)	FR1549111A (de)
GB (1)	GB1210930A (de)
NL (1)	NL150226B (de)
SE (1)	SE330446B (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2127483A1 (de) *	1971-06-03	1972-12-14	Leitz Ernst Gmbh	Verfahren zur interferentiellen Messung von Langen, Winkeln, Gangunter schieden oder Geschwindigkeiten
US3771875A (en) *	1971-11-15	1973-11-13	Perkin Elmer Corp	Interferometer having d.c. level compensation
US3976379A (en) *	1972-12-28	1976-08-24	Olympus Optical Co., Ltd.	Interferometers
US4105336A (en) *	1976-05-25	1978-08-08	Pond Charles Ray	Electro-optical device for use in improved interferometers
DE2963043D1 (en) *	1978-01-13	1982-07-29	Nat Res Dev	Interferometer systems
US4213697A (en) *	1978-11-06	1980-07-22	The United States Of America As Represented By The Secretary Of The Army	Phase measuring device
GB2070276B (en) *	1980-02-21	1983-10-12	Rank Organisation Ltd	Polarising optical system
DD201191B1 (de) *	1981-09-24	1987-07-15	Ilmenau Tech Hochschule	Kippinvariantes interferometer mit ebenen spiegeln
JPS58210548A (ja) *	1982-05-18	1983-12-07	ブリティッシュ・テクノロジー・グループ・リミテッド	干渉屈折計
GB2127960B (en) *	1982-09-29	1985-12-11	British Aerospace	Ring laser gyroscope readout arrangements
JPH0621801B2 (ja) *	1985-07-03	1994-03-23	キヤノン株式会社	ロ−タリ−エンコ−ダ−
US4702603A (en) *	1985-07-23	1987-10-27	Cmx Systems, Inc.	Optical phase decoder for interferometers
US4844593A (en) *	1988-05-16	1989-07-04	Hewlett-Packard Company	Optical feedback isolator
US6094268A (en) *	1989-04-21	2000-07-25	Hitachi, Ltd.	Projection exposure apparatus and projection exposure method
EP0426866B1 (de) *	1989-04-21	1996-07-10	Hitachi, Ltd.	Projektions- und wiedergabeschaltung sowie projektions- und wiedergabeverfahren
US5286313A (en) *	1991-10-31	1994-02-15	Surface Combustion, Inc.	Process control system using polarizing interferometer
US5430537A (en) *	1993-09-03	1995-07-04	Dynamics Research Corporation	Light beam distance encoder
US5638396A (en)	1994-09-19	1997-06-10	Textron Systems Corporation	Laser ultrasonics-based material analysis system and method
US5724138A (en) *	1996-04-18	1998-03-03	Textron Systems Corporation	Wavelet analysis for laser ultrasonic measurement of material properties
US7110121B2 (en) *	1997-03-04	2006-09-19	Excel Precision, Inc.	Rotation and translation measurement
US7414785B2 (en) *	2000-02-24	2008-08-19	Asml Holding N.V.	Ultraviolet polarization beam splitter with minimum apodization
US6480330B1 (en) *	2000-02-24	2002-11-12	Silicon Valley Group, Inc.	Ultraviolet polarization beam splitter for microlithography
US6729530B2 (en)	2001-07-24	2004-05-04	Kulicke & Soffa Investments, Inc.	Fiber alignment apparatus and process using cornercube offset tool
US7523848B2 (en) *	2001-07-24	2009-04-28	Kulicke And Soffa Industries, Inc.	Method and apparatus for measuring the size of free air balls on a wire bonder
US6412683B1 (en)	2001-07-24	2002-07-02	Kulicke & Soffa Investments, Inc.	Cornercube offset tool
US6705507B2 (en)	2001-07-24	2004-03-16	Kulicke & Soffa Investments, Inc.	Die attach system and process using cornercube offset tool
US7527186B2 (en) *	2001-07-24	2009-05-05	Kulicke And Soffa Industries, Inc.	Method and apparatus for mapping a position of a capillary tool tip using a prism
US20030202186A1 (en) *	2002-04-24	2003-10-30	Hong Kong Baptist University	Method and apparatus for ultra high-resolution interferometry
WO2003102495A2 (en)	2002-06-04	2003-12-11	Zygo Corporation	Metrology system for precision 3d motion
US7130057B2 (en) *	2002-12-20	2006-10-31	International Business Machines Corporation	Method and apparatus for controlling the position of a probe location relative to a fixed reference point of a probe processing equipment
US20050259270A1 (en) *	2004-05-21	2005-11-24	The Regents Of The University Of California	Fiberoptic fabry-perot optical processor
US9551569B2 (en) *	2014-10-13	2017-01-24	Hermes-Epitek Corporation	Apparatus and method for curvature and thin film stress measurement
US10288482B2 (en) *	2015-03-10	2019-05-14	National Technology & Engineering Solutions Of Sandia, Llc	Extended cavity laser absorption spectroscopy
DE102019002278B4 (de)	2019-03-29	2023-01-19	OndoSense GmbH	Radareinheit zur Vermessung eines Abstands zu einer reflektierenden Oberfläche

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE1085350B (de) *	1957-07-02	1960-07-14	Leitz Ernst Gmbh	Interferometer
GB1076835A (en) *	1964-07-01	1967-07-26	Nat Res Dev	Interferometers and apparatus for use therewith
US3409375A (en) *	1964-10-21	1968-11-05	Cutler Hammer Inc	Gauging interferometer systems
US3420600A (en) *	1964-10-26	1969-01-07	North American Rockwell	Interferometric optical modulator

1966
- 1966-12-30 US US606364A patent/US3601490A/en not_active Expired - Lifetime
1967
- 1967-12-22 GB GB58514/67A patent/GB1210930A/en not_active Expired
- 1967-12-28 FR FR1549111D patent/FR1549111A/fr not_active Expired
- 1967-12-28 CH CH1823767A patent/CH486003A/fr not_active IP Right Cessation
- 1967-12-28 NL NL676717713A patent/NL150226B/xx unknown
- 1967-12-28 DE DE19671572713 patent/DE1572713B2/de not_active Withdrawn
- 1967-12-28 SE SE17942/67A patent/SE330446B/xx unknown

Also Published As

Publication number	Publication date
US3601490A (en)	1971-08-24
SE330446B (de)	1970-11-16
DE1572713B2 (de)	1971-12-02
NL6717713A (de)	1968-07-01
DE1572713A1 (de)	1970-06-25
FR1549111A (de)	1968-12-06
CH486003A (fr)	1970-02-15
GB1210930A (en)	1970-11-04

Publication	Publication Date	Title
NL150226B (nl)	1976-07-15	Interferometer.
NL152759B (nl)	1977-04-15	Tracheaaltube.
DK123139B (da)	1972-05-23	Blebukser.
NL151172B (nl)	1976-10-15	Drijfwerk.
DK123626B (da)	1972-07-17	Sæbestift.
DK130890B (da)	1975-04-28	Lineholder.
DK118979B (da)	1970-10-26	Mideovicid.
DK111200B (da)	1968-06-24	Lastpalle.
CH469245A (fr)	1969-02-28	Interféromètre
FI46832C (fi)	1973-07-10	Kahmari.
DK111990B (da)	1968-10-28	Tachistoskop.
DK118511B (da)	1970-08-31	Elektrostencil.
ES122200Y (es)	1967-04-01	Banderilla.
NL145623B (nl)	1975-04-15	Taludbak.
FR1471100A (fr)	1967-02-24	Interféromètre
ES123934Y (es)	1967-05-01	Alcancia.
ES125914Y (es)	1967-12-01	Auto-remache.
ES119731Y (es)	1966-11-16	Baston-sillin.
ES125174Y (es)	1967-07-16	Frasco-sorpresa.
ES124773Y (es)	1967-10-16	Cuello-capucha.
ES123691Y (es)	1967-04-01	Camilla-trineo.
ES122829Y (es)	1967-07-01	Remolque-vivienda.
ES122822Y (es)	1967-03-01	Hebilla-pasador.
ES122735Y (es)	1967-02-16	Bolsa-quitasol.
ES122687Y (es)	1967-02-16	Somier.