He et al., 2024 - Google Patents
Design of a Contactless Force Actuator via Active Air-Bearing for Substrate HandlingHe et al., 2024
- Document ID
- 3110764199118483457
- Author
- He S
- van Ostayen R
- HosseinNia S
- Publication year
- Publication venue
- IEEE/ASME Transactions on Mechatronics
External Links
Snippet
Contactless handling systems for substrates hold significant potential in enhancing chip manufacturing yields by allowing the use of thinner and larger substrates, eliminating the risks associated with physical contact. This article introduces a novel contactless force …
- 239000000758 substrate 0 title abstract description 40
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