Liu et al., 2016 - Google Patents
A 3-axis precision positioning device using PZT actuators with low interference motionsLiu et al., 2016
- Document ID
- 12894881603008704107
- Author
- Liu Y
- Li B
- Publication year
- Publication venue
- Precision Engineering
External Links
Snippet
For expected applications of fast tool servo (FTS) and vibration machining, a 3-axis positioning device with low interference motions is proposed in this paper. The positioning device was composed of a XY stage and a Z-axis stage, which were actuated by …
- 229910052451 lead zirconate titanate 0 title 1
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