Stauffenberg et al., 2022 - Google Patents
Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mmStauffenberg et al., 2022
View HTML- Document ID
- 288596373534628261
- Author
- Stauffenberg J
- Ortlepp I
- Belkner J
- Dontsov D
- Langlotz E
- Hesse S
- Rangelow I
- Manske E
- Publication year
- Publication venue
- Applied Sciences
External Links
Snippet
This work deals with various investigations into the accuracy of a newly developed planar nanopositioning machine. This machine, called Nanofabrication Machine 100 (NFM-100), has a positioning range of 100 mm in diameter. To determine the precision, various …
- 238000005259 measurement 0 title description 38
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Thalmann et al. | State of the art of tactile micro coordinate metrology | |
| Zhou et al. | Design and experimental research of a novel stick-slip type piezoelectric actuator | |
| Stauffenberg et al. | Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm | |
| Huang et al. | Development of an abbe error free micro coordinate measuring machine | |
| Torralba et al. | Design optimization for the measurement accuracy improvement of a large range nanopositioning stage | |
| Michihata | Surface-sensing principle of microprobe system for micro-scale coordinate metrology: a review | |
| Huang et al. | A three-dimensional resonant triggering probe for micro-CMM | |
| Ortlepp et al. | Processing and analysis of long-range scans with an atomic force microscope (AFM) in combination with nanopositioning and nanomeasuring technology for defect detection and quality control | |
| Song et al. | Accurate calibration and uncertainty estimation of the normal spring constant of various AFM cantilevers | |
| Dzedzickis et al. | Modification of the AFM sensor by a precisely regulated air stream to increase imaging speed and accuracy in the contact mode | |
| Lai et al. | Modeling and analysis of a compliance model and rotational precision for a class of remote center compliance mechanisms | |
| Ito et al. | A micro-coordinate measurement machine (CMM) for large-scale dimensional measurement of micro-slits | |
| Li et al. | Piezoelectric actuated phase shifter based on external laser interferometer: Design, control and experimental validation | |
| Guo et al. | Development of a hybrid atomic force microscopic measurement system combined with white light scanning interferometry | |
| Xie et al. | Development of a 3-PRR precision tracking system with full closed-loop measurement and control | |
| Hong et al. | A new optical configuration for the surface encoder with an expanded Z-directional measuring range | |
| Lin et al. | Design and performance testing of a novel three-dimensional elliptical vibration turning device | |
| Thiesler et al. | True 3D nanometrology: 3D-probing with a cantilever-based sensor | |
| Shewale et al. | Design, development and implementation of the position estimator algorithm for harmonic motion on the XY flexural mechanism for high precision positioning | |
| Wedrich et al. | Stiffness Considerations for a MEMS-Based Weighing Cell | |
| Fang et al. | A measurement method of microsphere with dual scanning probes | |
| Murakami et al. | Reduction of liquid bridge force for 3D microstructure measurements | |
| Wu et al. | A measurement system with high precision and large range for structured surface metrology based on atomic force microscope | |
| Zhao et al. | Squeeze film air damping in tapping mode atomic force microscopy | |
| Altaher et al. | Enhanced positioning bandwidth in nanopositioners via strategic pole placement of the tracking controller |