Guo et al., 2011 - Google Patents
Development of a hybrid atomic force microscopic measurement system combined with white light scanning interferometryGuo et al., 2011
View HTML- Document ID
- 7467056212163297156
- Author
- Guo T
- Wang S
- Dorantes-Gonzalez D
- Chen J
- Fu X
- Hu X
- Publication year
- Publication venue
- Sensors
External Links
Snippet
A hybrid atomic force microscopic (AFM) measurement system combined with white light scanning interferometry for micro/nanometer dimensional measurement is developed. The system is based on a high precision large-range positioning platform with nanometer …
- 238000005259 measurement 0 title abstract description 62
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
- G01N2021/653—Coherent methods [CARS]
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