[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

Friedrich et al., 1995 - Google Patents

The micromilling process for high aspect ratio microstructures

Friedrich et al., 1995

Document ID
2657521052987168264
Author
Friedrich C
Vasile M
Publication year
Publication venue
Microsystem Technologies

External Links

Snippet

High aspect ratio microstructures are currently created by several processes which include lithography (X-ray, deep ultraviolet, etc.) and mechanical machining (diamond machining, microdrilling, etc.) The lithographic processes require more extensive processing equipment …
Continue reading at link.springer.com (other versions)

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
    • B23H9/10—Working turbine blades or nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
    • B23H7/26—Apparatus for moving or positioning electrode relatively to workpiece; Mounting of electrode
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H2400/00—Moving mechanisms for tool electrodes
    • B23H2400/10—Moving mechanisms for tool electrodes for rotating the electrode
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2270/00—Details of turning, boring or drilling machines, processes or tools not otherwise provided for

Similar Documents

Publication Publication Date Title
Friedrich et al. Development of the micromilling process for high-aspect-ratio microstructures
Vasile et al. Micrometer-scale machining: tool fabrication and initial results
Friedrich et al. The micromilling process for high aspect ratio microstructures
Adams et al. Micromilling of metal alloys with focused ion beam–fabricated tools
Egashira et al. Micro-drilling of monocrystalline silicon using a cutting tool
Fang et al. Tool-based micro machining and applications in MEMS
Kim et al. Experimental analysis of chip formation in micro-milling
Friedrich et al. Micromilling development and applications for microfabrication
Aurich et al. Manufacture and application of ultra-small micro end mills
Weck et al. Fabrication of microcomponents using ultraprecision machine tools
Zhan et al. Precision milling of tungsten carbide with micro PCD milling tool
Egashira et al. Ultrasonic vibration drilling of microholes in glass
KR20120106989A (en) Mill and method of use
Sun et al. A comprehensive review on fabrication of ultra small micro tools via electrical discharge machining-based methods
Friedrich et al. Rapid fabrication of molds by mechanical micromilling: process development
Csala et al. Application benchmark of three micro hole machining processes for manufacturing the nozzle of a medical water jet machine
Zhong et al. Fabrication of PCD micro cutting tool and experimental investigation on machining of copper grating
Benavides et al. Meso-machining capabilities
Wada et al. Development of micro grinding process using micro EDM trued diamond tools
Gao et al. Experimental study of metal ceramic (WC-Co) micro-tool fabrication by controlled inclined grinding (CIG)
Sawada et al. Development of ultraprecision micro grooving: manufacture of V-shaped groove
Yan et al. Machining slight burr formed micro-channels with different moving trajectories of a pyramidal diamond tip
Hu et al. State-of-the-art review of micro ultrasonic machining
Egashira et al. Performance improvement of ultrasonic-assisted grinding using PCD micropin tools
Hsue et al. Milling tool of micro-EDM by ultrasonic assisted multi-axial wire electrical discharge grinding processes