[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

Fang et al., 2006 - Google Patents

Tool-based micro machining and applications in MEMS

Fang et al., 2006

Document ID
18243311733468365626
Author
Fang F
Liu K
Kurfess T
Lim G
Publication year
Publication venue
MEMS/NEMS: Handbook Techniques and Applications

External Links

Snippet

Advances in product miniaturization leads to size and weight reduction which can substantially increase the convenience and value of many products [1, 2]. Micro-Electro- Mechanical Systems (MEMS) are typical examples of micro products. It is an integration of …
Continue reading at link.springer.com (other versions)

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
    • B23H7/02—Wire-cutting
    • B23H7/08—Wire electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H1/00—Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
    • B23H1/04—Electrodes specially adapted therefor or their manufacture
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
    • B23H9/10—Working turbine blades or nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
    • B23H7/26—Apparatus for moving or positioning electrode relatively to workpiece; Mounting of electrode
    • B23H7/265—Mounting of one or more thin electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
    • B23H3/04—Electrodes specially adapted therefor or their manufacture
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
    • B23H7/12—Rotating-disc electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H2400/00—Moving mechanisms for tool electrodes
    • B23H2400/10—Moving mechanisms for tool electrodes for rotating the electrode
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B29/00—Holders for non-rotary cutting tools; Boring bars or boring heads; Accessories for tool holders
    • B23B29/04—Tool holders for a single cutting tool
    • B23B29/12—Special arrangements on tool holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
    • B23H9/14—Making holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2270/00—Details of turning, boring or drilling machines, processes or tools not otherwise provided for

Similar Documents

Publication Publication Date Title
Fang et al. Tool-based micro machining and applications in MEMS
Gao et al. Recent advances in micro-and nano-machining technologies
Jahan et al. A review on the conventional and micro-electrodischarge machining of tungsten carbide
Oliaei et al. Micro tool design and fabrication: A review
Leo Kumar et al. A review on current research aspects in tool-based micromachining processes
Rahman et al. A multiprocess machine tool for compound micromachining
Chavoshi et al. Current trends and future of sequential micro-machining processes on a single machine tool
Hung et al. Using a helical micro-tool in micro-EDM combined with ultrasonic vibration for micro-hole machining
Kim et al. Micro electrochemical milling
Jahan et al. On-machine fabrication of high-aspect-ratio micro-electrodes and application in vibration-assisted micro-electrodischarge drilling of tungsten carbide
Rahman et al. Tool-based nanofinishing and micromachining
Sharma et al. A review study on miniaturization: A boon or curse
Jahan Micro-electrical discharge machining
Morgan et al. Micro-machining and micro-grinding with tools fabricated by micro electro-discharge machining
Yan et al. Fabricating microgrooves with varied cross-sections by electrodischarge machining
Debnath et al. Non-traditional micromachining processes: opportunities and challenges
Yan et al. Fabrication of micro end mills by wire EDM and some micro cutting tests
Sun et al. A comprehensive review on fabrication of ultra small micro tools via electrical discharge machining-based methods
Paul et al. Non-conventional micro-machining processes
Sidpara et al. Micro Electro Discharge Machining: Principles and Applications
Masaki et al. Study on shaping spherical poly crystalline diamond tool by micro-electro-discharge machining and micro-grinding with the tool
Gowri et al. Micromachining: technology for the future
Wu et al. Micro Milling: The State‐of‐the‐art Approach Towards Applications
Liew et al. Fabrication of Microstructures on RB-SiC by Ultrasonic Cavitation Assisted Micro-Electrical Discharge Machining.
Chen et al. Micro sinking electro-discharge machining of complex 3D micro-cavity using in-situ milled graphite microform electrode