Kimura, 2000 - Google Patents

Evaluation of magnesium oxide films by spectroscopic ellipsometry

Kimura, 2000

Document ID: 2309040051561842432
Author: Kimura H
Publication year: 2000
Publication venue: MRS Online Proceedings Library

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Spectroscopic ellipsometry was used to evaluate the density and surface roughness of MgO films. The density of a film affects the dispersion of the film's refractive index, and the refractive index can be evaluated by spectroscopic ellipsometry. Among the various fitting …

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CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide 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[Mg]=O 0 title abstract description 60

Classifications

- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

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