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Zhu et al., 2005 - Google Patents

Evolution of silicon surface microstructures by picosecond and femtosecond laser irradiations

Zhu et al., 2005

Document ID
2009655775368079184
Author
Zhu J
Yin G
Zhao M
Chen D
Zhao L
Publication year
Publication venue
Applied surface science

External Links

Snippet

We report the evolution of sharp conical spike array formed on the silicon surface under the cumulative picosecond (ps) and femtosecond (fs) laser pulse irradiations in SF6 ambient. The experimental results suggest that the physical mechanisms of conical spike evolutions …
Continue reading at www.sciencedirect.com (other versions)

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0626—Energy control of the laser beam

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