Preston et al., 2017 - Google Patents
Electrowetting-on-dielectric actuation of a spatial and angular manipulation MEMS stagePreston et al., 2017
View PDF- Document ID
- 17892123947127514629
- Author
- Preston D
- Anders A
- Barabadi B
- Tio E
- Zhu Y
- Dai D
- Wang E
- Publication year
- Publication venue
- 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)
External Links
Snippet
We demonstrate a MEMS translational stage that uses electrowetting-on-dielectric (EWOD) as the actuating mechanism. Our EWOD stage is capable of linear translation with resolution of 10 μm over a maximum range of 130 μm and angular deflection of approximately±1° …
- 239000007787 solid 0 abstract description 11
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