Panchawagh et al., 2009 - Google Patents
A model for electrostatic actuation in conducting liquidsPanchawagh et al., 2009
- Document ID
- 5769192589162918694
- Author
- Panchawagh H
- Sounart T
- Mahajan R
- Publication year
- Publication venue
- Journal of microelectromechanical systems
External Links
Snippet
This paper presents a generalized model that describes the behavior of micromachined electrostatic actuators in conducting liquids and provides a guideline for designing electrostatic actuators to operate in aqueous electrolytes such as biological media. The …
- 239000007788 liquid 0 title abstract description 79
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
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