Sassen et al., 2008 - Google Patents
An improved in-plane thermal folded V-beam actuator for optical fibre alignmentSassen et al., 2008
View PDF- Document ID
- 17437608372569854859
- Author
- Sassen W
- Henneken V
- Tichem M
- Sarro P
- Publication year
- Publication venue
- Journal of Micromechanics and Microengineering
External Links
Snippet
This paper presents an improved thermal actuator design, providing high work per unit of chip area. The actuator was developed for high accuracy fibre alignment. This application requires that the fibre tip is moved by pushing close to its end, posing geometric design …
- 239000003365 glass fiber 0 title abstract description 12
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Luo et al. | Comparison of microtweezers based on three lateral thermal actuator configurations | |
| Yan et al. | Modeling of two-hot-arm horizontal thermal actuator | |
| Nguyen et al. | A polymeric microgripper with integrated thermal actuators | |
| Huang et al. | Analysis and design of polysilicon thermal flexure actuator | |
| US7372348B2 (en) | Stressed material and shape memory material MEMS devices and methods for manufacturing | |
| Chu et al. | A novel SU-8 electrothermal microgripper based on the type synthesis of the kinematic chain method and the stiffness matrix method | |
| Yang et al. | A large-displacement thermal actuator designed for MEMS pitch-tunable grating | |
| Gilgunn et al. | CMOS–MEMS lateral electrothermal actuators | |
| Todd et al. | A multi-degree-of-freedom micromirror utilizing inverted-series-connected bimorph actuators | |
| Feng et al. | Fabrication of an electro-thermal micro-gripper with elliptical cross-sections using silver-nickel composite ink | |
| Sassen et al. | An improved in-plane thermal folded V-beam actuator for optical fibre alignment | |
| Judy et al. | Surface micromachined linear thermal microactuator | |
| Luo et al. | Three types of planar structure microspring electro-thermal actuators with insulating beam constraints | |
| Zhang et al. | Macro-modeling for polysilicon cascaded bent beam electrothermal microactuators | |
| Maloney et al. | Analysis and design of electrothermal actuators fabricated from single crystal silicon | |
| Dow et al. | Development and modeling of an electrothermally MEMS microactuator with an integrated microgripper | |
| Al Zandi et al. | Testing and characterisation of electrothermal microgrippers with embedded microheaters | |
| Elbuken et al. | Modeling and analysis of a 2-DOF bidirectional electro-thermal microactuator | |
| So et al. | Electrothermal modeling, fabrication and analysis of low-power consumption thermal actuator with buckling arm | |
| Babaei et al. | Increasing the energy efficiency of niti unimorph actuators with a 3d-printed passive layer | |
| Sassen et al. | Contoured thermal V-beam actuator with improved temperature uniformity | |
| Phu et al. | Simulation and optimization of a silicon-polymer bimorph microgripper | |
| Wang et al. | Genetic algorithm for the design of freeform geometries in a large-range rotary microgripper | |
| Voicu et al. | Design, simulation and testing of polymeric microgrippers with V-shaped electrothermal actuators and encapsulated heaters | |
| Maharshi et al. | Design and fabrication of electro-thermal 1-D micro-mirror |