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Judy et al., 1990 - Google Patents

Surface micromachined linear thermal microactuator

Judy et al., 1990

Document ID
4491424584290767099
Author
Judy J
Tamagawa T
Polla D
Publication year
Publication venue
International Technical Digest on Electron Devices

External Links

Snippet

A linear thermal actuator based on controlled resistive heating of a suspended, micromachined, polysilicon (and silicon carbide) serpentine has been demonstrated. Maximum linear displacements of 1.5 mu m were measured for a polysilicon serpentine …
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