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Newman et al., 2015 - Google Patents

Kinetic Processes in Vapor Phase Epitaxy

Newman et al., 2015

Document ID
16003175861299644878
Author
Newman N
Vahidi M
Publication year
Publication venue
Handbook of Crystal Growth

External Links

Snippet

In this chapter, kinetic processes associated with thin-film growth will be presented and described. The focus will be on the atomistic and molecular processes involved in adsorption, desorption, decomposition, diffusion, nucleation and growth, and formation and …
Continue reading at www.sciencedirect.com (other versions)

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