Greene, 2010 - Google Patents
Thin film nucleation, growth, and microstructural evolution: an atomic scale viewGreene, 2010
- Document ID
- 17972306213775864882
- Author
- Greene J
- Publication year
- Publication venue
- Handbook of deposition technologies for films and coatings
External Links
Snippet
Publisher Summary Atomic scale understanding of microstructural evolution, necessary for the controlled manipulation of the properties of thin film systems, is increasing rapidly. The increasingly stringent requirements of sophisticated thin film applications, processing …
- 238000010899 nucleation 0 title abstract description 92
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
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