Yunas et al., 2010 - Google Patents
Design and fabrication of MEMS micropumps using double sided etchingYunas et al., 2010
View PDF- Document ID
- 14506517997516628170
- Author
- Yunas J
- Johari J
- Hamzah A
- Gebeshuber I
- Majlis B
- Publication year
- Publication venue
- Journal of Microelectronics and Electronic Packaging
External Links
Snippet
In this paper, we report a simple technique for the fabrication of planar valveless micropumps. The technique utilizes MEMS fabrication methods by using a double sided etch technique. Instead of using several masks and process steps, an anisotropic wet etch …
- 238000005530 etching 0 title abstract description 19
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
- F04—POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micro pumps
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