Becker et al., 1987 - Google Patents
Translation stage for a scanning x‐ray optical interferometerBecker et al., 1987
- Document ID
- 13718619242813452760
- Author
- Becker P
- Seyfried P
- Siegert H
- Publication year
- Publication venue
- Review of scientific instruments
External Links
Snippet
A translation stage is described which allows rectilinear displacements of up to 200 μm with a load of 20 N. Lateral deviations from the rectilinear movement do not exceed a few nanometers. Tilts are reduced to a few nanoradians. By means of a piezoelectric drive, slow …
- 230000003287 optical 0 title description 6
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